JP2006186381A5 - - Google Patents

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Publication number
JP2006186381A5
JP2006186381A5 JP2006000173A JP2006000173A JP2006186381A5 JP 2006186381 A5 JP2006186381 A5 JP 2006186381A5 JP 2006000173 A JP2006000173 A JP 2006000173A JP 2006000173 A JP2006000173 A JP 2006000173A JP 2006186381 A5 JP2006186381 A5 JP 2006186381A5
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JP
Japan
Prior art keywords
alumina
abrasive
cmp
powder
particles
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006000173A
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English (en)
Japanese (ja)
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JP2006186381A (ja
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Publication date
Priority claimed from US09/413,518 external-priority patent/US6258137B1/en
Application filed filed Critical
Publication of JP2006186381A publication Critical patent/JP2006186381A/ja
Publication of JP2006186381A5 publication Critical patent/JP2006186381A5/ja
Withdrawn legal-status Critical Current

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JP2006000173A 1999-10-06 2006-01-04 Ｃｍｐ生成物 Withdrawn JP2006186381A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/413,518 US6258137B1 (en) 1992-02-05 1999-10-06 CMP products

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001528524A Division JP2003511850A (ja) 1999-10-06 2000-08-30 Ｃｍｐ生成物

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011152232A Division JP2011238952A (ja) 1999-10-06 2011-07-08 Ｃｍｐ生成物

Publications (2)

Publication Number Publication Date
JP2006186381A JP2006186381A (ja) 2006-07-13
JP2006186381A5 true JP2006186381A5 (enExample) 2007-09-20

Family

ID=23637528

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2001528524A Withdrawn JP2003511850A (ja) 1999-10-06 2000-08-30 Ｃｍｐ生成物
JP2006000173A Withdrawn JP2006186381A (ja) 1999-10-06 2006-01-04 Ｃｍｐ生成物
JP2011152232A Pending JP2011238952A (ja) 1999-10-06 2011-07-08 Ｃｍｐ生成物

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2001528524A Withdrawn JP2003511850A (ja) 1999-10-06 2000-08-30 Ｃｍｐ生成物

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011152232A Pending JP2011238952A (ja) 1999-10-06 2011-07-08 Ｃｍｐ生成物

Country Status (12)

Country Link
US (1) US6258137B1 (enExample)
EP (1) EP1228161A1 (enExample)
JP (3) JP2003511850A (enExample)
KR (1) KR100485205B1 (enExample)
CN (1) CN100396749C (enExample)
AU (1) AU754060B2 (enExample)
BR (1) BR0014533A (enExample)
CA (1) CA2382724C (enExample)
RU (1) RU2235747C2 (enExample)
TW (1) TWI261068B (enExample)
WO (1) WO2001025366A1 (enExample)
ZA (1) ZA200201091B (enExample)

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