JP2012156978A - Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法 - Google Patents

Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法 Download PDF

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Publication number
JP2012156978A
JP2012156978A JP2011128193A JP2011128193A JP2012156978A JP 2012156978 A JP2012156978 A JP 2012156978A JP 2011128193 A JP2011128193 A JP 2011128193A JP 2011128193 A JP2011128193 A JP 2011128193A JP 2012156978 A JP2012156978 A JP 2012156978A
Authority
JP
Japan
Prior art keywords
crystal vibrating
axis direction
axis
groove
quartz crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011128193A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012156978A5 (enExample
Inventor
Shuichi Mizusawa
周一 水沢
Takehiro Takahashi
岳寛 高橋
Kunio Morita
邦夫 森田
Masakazu Harada
雅和 原田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2011128193A priority Critical patent/JP2012156978A/ja
Priority to CN2011104251679A priority patent/CN102594281A/zh
Priority to US13/334,640 priority patent/US8779652B2/en
Priority to TW100149387A priority patent/TW201230675A/zh
Publication of JP2012156978A publication Critical patent/JP2012156978A/ja
Publication of JP2012156978A5 publication Critical patent/JP2012156978A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2011128193A 2011-01-05 2011-06-08 Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法 Pending JP2012156978A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011128193A JP2012156978A (ja) 2011-01-05 2011-06-08 Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法
CN2011104251679A CN102594281A (zh) 2011-01-05 2011-12-16 At切割的水晶振动片、水晶装置及水晶振动片的制造方法
US13/334,640 US8779652B2 (en) 2011-01-05 2011-12-22 At-cut quartz-crystal vibrating pieces and devices, and methods for manufacturing same
TW100149387A TW201230675A (en) 2011-01-05 2011-12-29 Quartz crystal vibrating piece, quartz crystal device, and manufacturing method of quartz crystal vibrating piece

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011000630 2011-01-05
JP2011000630 2011-01-05
JP2011128193A JP2012156978A (ja) 2011-01-05 2011-06-08 Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法

Publications (2)

Publication Number Publication Date
JP2012156978A true JP2012156978A (ja) 2012-08-16
JP2012156978A5 JP2012156978A5 (enExample) 2014-07-17

Family

ID=46380135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011128193A Pending JP2012156978A (ja) 2011-01-05 2011-06-08 Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法

Country Status (4)

Country Link
US (1) US8779652B2 (enExample)
JP (1) JP2012156978A (enExample)
CN (1) CN102594281A (enExample)
TW (1) TW201230675A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016121182A1 (ja) * 2015-01-29 2016-08-04 株式会社大真空 水晶振動板、及び水晶振動デバイス
WO2025234414A1 (ja) * 2024-05-10 2025-11-13 京セラ株式会社 圧電振動素子及び圧電デバイス
WO2025234415A1 (ja) * 2024-05-10 2025-11-13 京セラ株式会社 圧電振動素子及び圧電デバイス

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5325151B2 (ja) * 2010-03-31 2013-10-23 日本電波工業株式会社 水晶デバイス、及びその製造方法
JP5492697B2 (ja) * 2010-08-04 2014-05-14 日本電波工業株式会社 Ａｔカット水晶デバイス及びａｔカット水晶デバイスの製造方法
JP2012060628A (ja) * 2010-08-07 2012-03-22 Nippon Dempa Kogyo Co Ltd 圧電デバイス及びその製造方法
US20130043770A1 (en) * 2011-08-17 2013-02-21 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating piece and piezoelectric device
CN113472310B (zh) 2015-10-08 2025-03-11 株式会社村田制作所 水晶振动元件、以及具备该水晶振动元件的水晶振子
CN109328432B (zh) * 2016-06-23 2022-04-26 株式会社村田制作所 水晶振动片和水晶振子
CN115051664B (zh) * 2022-07-06 2025-11-28 成都泰美克晶体技术有限公司 一种石英谐振器晶片的制作方法及石英谐振器晶片

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314007A (ja) * 2005-05-09 2006-11-16 Seiko Epson Corp 圧電振動片の製造方法および圧電振動子
JP2007325250A (ja) * 2006-05-01 2007-12-13 Epson Toyocom Corp 圧電振動子およびその製造方法
JP2008067345A (ja) * 2006-08-09 2008-03-21 Epson Toyocom Corp Ａｔカット水晶振動片及びその製造方法
JP2009065522A (ja) * 2007-09-07 2009-03-26 Epson Toyocom Corp 圧電デバイスおよびその製造方法
JP2009260739A (ja) * 2008-04-17 2009-11-05 Nippon Dempa Kogyo Co Ltd 圧電振動子及び圧電素子の製造方法並びに圧電振動子の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4069773B2 (ja) * 2003-03-19 2008-04-02 セイコーエプソン株式会社 圧電振動片、圧電振動子および圧電デバイス
JP2007288331A (ja) 2006-04-13 2007-11-01 Epson Toyocom Corp 圧電振動片の製造方法、及び圧電振動片、並びに圧電振動子
JP4647671B2 (ja) * 2008-01-15 2011-03-09 日本電波工業株式会社 水晶デバイス及び水晶デバイスの製造方法
JP4714770B2 (ja) * 2008-10-06 2011-06-29 日本電波工業株式会社 音叉型圧電振動片及び音叉型圧電振動片の製造方法
JP2010171572A (ja) * 2009-01-21 2010-08-05 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314007A (ja) * 2005-05-09 2006-11-16 Seiko Epson Corp 圧電振動片の製造方法および圧電振動子
JP2007325250A (ja) * 2006-05-01 2007-12-13 Epson Toyocom Corp 圧電振動子およびその製造方法
JP2008067345A (ja) * 2006-08-09 2008-03-21 Epson Toyocom Corp Ａｔカット水晶振動片及びその製造方法
JP2009065522A (ja) * 2007-09-07 2009-03-26 Epson Toyocom Corp 圧電デバイスおよびその製造方法
JP2009260739A (ja) * 2008-04-17 2009-11-05 Nippon Dempa Kogyo Co Ltd 圧電振動子及び圧電素子の製造方法並びに圧電振動子の製造方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016121182A1 (ja) * 2015-01-29 2016-08-04 株式会社大真空 水晶振動板、及び水晶振動デバイス
KR20170108091A (ko) * 2015-01-29 2017-09-26 가부시키가이샤 다이신쿠 수정 진동판, 및 수정 진동 디바이스
JPWO2016121182A1 (ja) * 2015-01-29 2017-11-02 株式会社大真空 水晶振動板、及び水晶振動デバイス
KR101966126B1 (ko) * 2015-01-29 2019-04-05 가부시키가이샤 다이신쿠 수정 진동판, 및 수정 진동 디바이스
US10601393B2 (en) 2015-01-29 2020-03-24 Daishinku Corporation Crystal resonator plate and crystal resonator device
WO2025234414A1 (ja) * 2024-05-10 2025-11-13 京セラ株式会社 圧電振動素子及び圧電デバイス
WO2025234415A1 (ja) * 2024-05-10 2025-11-13 京セラ株式会社 圧電振動素子及び圧電デバイス

Also Published As

Publication number Publication date
TW201230675A (en) 2012-07-16
US8779652B2 (en) 2014-07-15
US20120169182A1 (en) 2012-07-05
CN102594281A (zh) 2012-07-18

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