TW201230675A - Quartz crystal vibrating piece, quartz crystal device, and manufacturing method of quartz crystal vibrating piece - Google Patents
Quartz crystal vibrating piece, quartz crystal device, and manufacturing method of quartz crystal vibrating piece Download PDFInfo
- Publication number
- TW201230675A TW201230675A TW100149387A TW100149387A TW201230675A TW 201230675 A TW201230675 A TW 201230675A TW 100149387 A TW100149387 A TW 100149387A TW 100149387 A TW100149387 A TW 100149387A TW 201230675 A TW201230675 A TW 201230675A
- Authority
- TW
- Taiwan
- Prior art keywords
- quartz crystal
- axis
- quartz
- groove
- vibrating portion
- Prior art date
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 286
- 239000010453 quartz Substances 0.000 title claims abstract description 275
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 275
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 239000004575 stone Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 22
- 238000005520 cutting process Methods 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 10
- 238000002360 preparation method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 80
- 229910052751 metal Inorganic materials 0.000 description 27
- 239000002184 metal Substances 0.000 description 27
- 229920002120 photoresistant polymer Polymers 0.000 description 23
- 230000005284 excitation Effects 0.000 description 15
- 239000000463 material Substances 0.000 description 14
- 238000000605 extraction Methods 0.000 description 7
- 239000011651 chromium Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 102220514331 NADH-ubiquinone oxidoreductase chain 6_W11G_mutation Human genes 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 210000000877 corpus callosum Anatomy 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 241000255925 Diptera Species 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 241001494479 Pecora Species 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009432 framing Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 102200162479 rs139548132 Human genes 0.000 description 1
- 102220280699 rs80359182 Human genes 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011000630 | 2011-01-05 | ||
| JP2011128193A JP2012156978A (ja) | 2011-01-05 | 2011-06-08 | Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201230675A true TW201230675A (en) | 2012-07-16 |
Family
ID=46380135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100149387A TW201230675A (en) | 2011-01-05 | 2011-12-29 | Quartz crystal vibrating piece, quartz crystal device, and manufacturing method of quartz crystal vibrating piece |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8779652B2 (enExample) |
| JP (1) | JP2012156978A (enExample) |
| CN (1) | CN102594281A (enExample) |
| TW (1) | TW201230675A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI878710B (zh) * | 2022-07-06 | 2025-04-01 | 大陸商成都泰美克晶體技術有限公司 | 石英諧振器晶片的制作方法及石英諧振器晶片 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5325151B2 (ja) * | 2010-03-31 | 2013-10-23 | 日本電波工業株式会社 | 水晶デバイス、及びその製造方法 |
| JP5492697B2 (ja) * | 2010-08-04 | 2014-05-14 | 日本電波工業株式会社 | Ａｔカット水晶デバイス及びａｔカット水晶デバイスの製造方法 |
| JP2012060628A (ja) * | 2010-08-07 | 2012-03-22 | Nippon Dempa Kogyo Co Ltd | 圧電デバイス及びその製造方法 |
| US20130043770A1 (en) * | 2011-08-17 | 2013-02-21 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating piece and piezoelectric device |
| WO2016121182A1 (ja) * | 2015-01-29 | 2016-08-04 | 株式会社大真空 | 水晶振動板、及び水晶振動デバイス |
| CN113472310B (zh) | 2015-10-08 | 2025-03-11 | 株式会社村田制作所 | 水晶振动元件、以及具备该水晶振动元件的水晶振子 |
| CN109328432B (zh) * | 2016-06-23 | 2022-04-26 | 株式会社村田制作所 | 水晶振动片和水晶振子 |
| WO2025234414A1 (ja) * | 2024-05-10 | 2025-11-13 | 京セラ株式会社 | 圧電振動素子及び圧電デバイス |
| WO2025234415A1 (ja) * | 2024-05-10 | 2025-11-13 | 京セラ株式会社 | 圧電振動素子及び圧電デバイス |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4069773B2 (ja) * | 2003-03-19 | 2008-04-02 | セイコーエプソン株式会社 | 圧電振動片、圧電振動子および圧電デバイス |
| JP4600140B2 (ja) * | 2005-05-09 | 2010-12-15 | セイコーエプソン株式会社 | 圧電振動片の製造方法 |
| JP2007288331A (ja) | 2006-04-13 | 2007-11-01 | Epson Toyocom Corp | 圧電振動片の製造方法、及び圧電振動片、並びに圧電振動子 |
| JP4967707B2 (ja) * | 2006-05-01 | 2012-07-04 | セイコーエプソン株式会社 | 圧電振動子およびその製造方法 |
| JP4305542B2 (ja) * | 2006-08-09 | 2009-07-29 | エプソントヨコム株式会社 | Ａｔカット水晶振動片及びその製造方法 |
| JP5041145B2 (ja) * | 2007-09-07 | 2012-10-03 | セイコーエプソン株式会社 | 圧電デバイス |
| JP4647671B2 (ja) * | 2008-01-15 | 2011-03-09 | 日本電波工業株式会社 | 水晶デバイス及び水晶デバイスの製造方法 |
| JP5129005B2 (ja) * | 2008-04-17 | 2013-01-23 | 日本電波工業株式会社 | 圧電振動子及び圧電素子の製造方法並びに圧電振動子の製造方法 |
| JP4714770B2 (ja) * | 2008-10-06 | 2011-06-29 | 日本電波工業株式会社 | 音叉型圧電振動片及び音叉型圧電振動片の製造方法 |
| JP2010171572A (ja) * | 2009-01-21 | 2010-08-05 | Nippon Dempa Kogyo Co Ltd | 表面実装用の水晶発振器 |
-
2011
- 2011-06-08 JP JP2011128193A patent/JP2012156978A/ja active Pending
- 2011-12-16 CN CN2011104251679A patent/CN102594281A/zh active Pending
- 2011-12-22 US US13/334,640 patent/US8779652B2/en not_active Expired - Fee Related
- 2011-12-29 TW TW100149387A patent/TW201230675A/zh unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI878710B (zh) * | 2022-07-06 | 2025-04-01 | 大陸商成都泰美克晶體技術有限公司 | 石英諧振器晶片的制作方法及石英諧振器晶片 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012156978A (ja) | 2012-08-16 |
| US8779652B2 (en) | 2014-07-15 |
| US20120169182A1 (en) | 2012-07-05 |
| CN102594281A (zh) | 2012-07-18 |
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