CN102594281A - At切割的水晶振动片、水晶装置及水晶振动片的制造方法 - Google Patents

At切割的水晶振动片、水晶装置及水晶振动片的制造方法 Download PDF

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Publication number
CN102594281A
CN102594281A CN2011104251679A CN201110425167A CN102594281A CN 102594281 A CN102594281 A CN 102594281A CN 2011104251679 A CN2011104251679 A CN 2011104251679A CN 201110425167 A CN201110425167 A CN 201110425167A CN 102594281 A CN102594281 A CN 102594281A
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CN
China
Prior art keywords
mentioned
crystal
slot
groove
axis
Prior art date
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Pending
Application number
CN2011104251679A
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English (en)
Chinese (zh)
Inventor
水泽周一
高桥岳宽
森田邦夫
原田雅和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Publication of CN102594281A publication Critical patent/CN102594281A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN2011104251679A 2011-01-05 2011-12-16 At切割的水晶振动片、水晶装置及水晶振动片的制造方法 Pending CN102594281A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2011000630 2011-01-05
JP2011-000630 2011-01-05
JP2011-128193 2011-06-08
JP2011128193A JP2012156978A (ja) 2011-01-05 2011-06-08 Ａｔカットの水晶振動片、水晶デバイス及び水晶振動片の製造方法

Publications (1)

Publication Number Publication Date
CN102594281A true CN102594281A (zh) 2012-07-18

Family

ID=46380135

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011104251679A Pending CN102594281A (zh) 2011-01-05 2011-12-16 At切割的水晶振动片、水晶装置及水晶振动片的制造方法

Country Status (4)

Country Link
US (1) US8779652B2 (enExample)
JP (1) JP2012156978A (enExample)
CN (1) CN102594281A (enExample)
TW (1) TW201230675A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109328432A (zh) * 2016-06-23 2019-02-12 株式会社村田制作所 水晶振动片和水晶振子

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5325151B2 (ja) * 2010-03-31 2013-10-23 日本電波工業株式会社 水晶デバイス、及びその製造方法
JP5492697B2 (ja) * 2010-08-04 2014-05-14 日本電波工業株式会社 Ａｔカット水晶デバイス及びａｔカット水晶デバイスの製造方法
JP2012060628A (ja) * 2010-08-07 2012-03-22 Nippon Dempa Kogyo Co Ltd 圧電デバイス及びその製造方法
US20130043770A1 (en) * 2011-08-17 2013-02-21 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating piece and piezoelectric device
EP3252950B1 (en) * 2015-01-29 2019-02-20 Daishinku Corporation Crystal oscillation plate, and crystal oscillation device
WO2017061591A1 (ja) 2015-10-08 2017-04-13 株式会社村田製作所 水晶振動素子、及びこの水晶振動素子を備える水晶振動子
CN115051664B (zh) * 2022-07-06 2025-11-28 成都泰美克晶体技术有限公司 一种石英谐振器晶片的制作方法及石英谐振器晶片
WO2025234415A1 (ja) * 2024-05-10 2025-11-13 京セラ株式会社 圧電振動素子及び圧電デバイス
WO2025234414A1 (ja) * 2024-05-10 2025-11-13 京セラ株式会社 圧電振動素子及び圧電デバイス

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1533030A (zh) * 2003-03-19 2004-09-29 ������������ʽ���� 压电振动片、压电振子及压电器件
EP2081293A2 (en) * 2008-01-15 2009-07-22 Nihon Dempa Kogyo Co., Ltd. Crystal devices and methods for manufacturing same
US20090300894A1 (en) * 2006-08-09 2009-12-10 Epson Toyocom Corporation At cut quartz crystal resonator element and method for manufacturing the same
JP2010093408A (ja) * 2008-10-06 2010-04-22 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動片及び音叉型圧電振動片の製造方法
JP2010171572A (ja) * 2009-01-21 2010-08-05 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4600140B2 (ja) * 2005-05-09 2010-12-15 セイコーエプソン株式会社 圧電振動片の製造方法
JP2007288331A (ja) 2006-04-13 2007-11-01 Epson Toyocom Corp 圧電振動片の製造方法、及び圧電振動片、並びに圧電振動子
JP4967707B2 (ja) * 2006-05-01 2012-07-04 セイコーエプソン株式会社 圧電振動子およびその製造方法
JP5041145B2 (ja) * 2007-09-07 2012-10-03 セイコーエプソン株式会社 圧電デバイス
JP5129005B2 (ja) * 2008-04-17 2013-01-23 日本電波工業株式会社 圧電振動子及び圧電素子の製造方法並びに圧電振動子の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1533030A (zh) * 2003-03-19 2004-09-29 ������������ʽ���� 压电振动片、压电振子及压电器件
US20090300894A1 (en) * 2006-08-09 2009-12-10 Epson Toyocom Corporation At cut quartz crystal resonator element and method for manufacturing the same
EP2081293A2 (en) * 2008-01-15 2009-07-22 Nihon Dempa Kogyo Co., Ltd. Crystal devices and methods for manufacturing same
JP2010093408A (ja) * 2008-10-06 2010-04-22 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動片及び音叉型圧電振動片の製造方法
JP2010171572A (ja) * 2009-01-21 2010-08-05 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109328432A (zh) * 2016-06-23 2019-02-12 株式会社村田制作所 水晶振动片和水晶振子
CN109328432B (zh) * 2016-06-23 2022-04-26 株式会社村田制作所 水晶振动片和水晶振子

Also Published As

Publication number Publication date
TW201230675A (en) 2012-07-16
JP2012156978A (ja) 2012-08-16
US8779652B2 (en) 2014-07-15
US20120169182A1 (en) 2012-07-05

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Application publication date: 20120718