JP2012134440A - 薄膜太陽電池 - Google Patents
薄膜太陽電池 Download PDFInfo
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- JP2012134440A JP2012134440A JP2011110478A JP2011110478A JP2012134440A JP 2012134440 A JP2012134440 A JP 2012134440A JP 2011110478 A JP2011110478 A JP 2011110478A JP 2011110478 A JP2011110478 A JP 2011110478A JP 2012134440 A JP2012134440 A JP 2012134440A
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- 239000000463 material Substances 0.000 claims description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 27
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 21
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 20
- 229910004205 SiNX Inorganic materials 0.000 claims description 18
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- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 14
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
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- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910005191 Ga 2 O 3 Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- -1 SnO 2 ) Chemical compound 0.000 description 1
- NPNMHHNXCILFEF-UHFFFAOYSA-N [F].[Sn]=O Chemical compound [F].[Sn]=O NPNMHHNXCILFEF-UHFFFAOYSA-N 0.000 description 1
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- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/056—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means the light-reflecting means being of the back surface reflector [BSR] type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
- H01L31/076—Multiple junction or tandem solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
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Abstract
【解決手段】本発明の一側面による薄膜太陽電池は基板(110)と、基板の上に位置し、光吸収用第1真性層(132)を含む第1光電変換部(130)と、第1光電変換部を透過した光を前記第1光電変換部に反射する後面反射層(160)を含み、後面反射層はn型不純物またはp型不純物がドーピングされた第1後面反射膜(161)を備え、第1後面反射膜は第1光電変換部の第1真性層と直接接触することを特徴とする。
【選択図】図1
Description
Claims (20)
- 基板と、
前記基板の上に位置し、光吸収用第1真性層を含む第1光電変換部と、
前記第1光電変換部を透過した光を前記第1光電変換部に反射する後面反射層
を含み、
前記後面反射層はn型不純物またはp型不純物がドーピングされた第1後面反射膜を備え、前記第1後面反射膜は前記第1光電変換部の第1真性層と直接接触する薄膜太陽電池。 - 前記第1後面反射膜は700nm以上の波長を有する太陽光成分に対して400cm-1以下の光吸収係数を有する物質からなる請求項1記載の薄膜太陽電池。
- 前記第1後面反射膜は800nmの波長で1.5乃至2.5の屈折率を有する物質からなる請求項1記載の薄膜太陽電池。
- 前記第1真性層は800nmの波長で3乃至5の屈折率を有する物質からなる請求項3記載の薄膜太陽電池。
- 前記第1真性層は水素化された非晶質シリコン(a−Si:H)または水素化された微結晶シリコン(μc−Si:H)を含む請求項4記載の薄膜太陽電池。
- 前記第1後面反射膜はn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化物(μc−SiOx:H)、n型不純物またはp型不純物がドーピングされた微結晶シリコン窒化物(μc−SiNx:H)及びn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化窒化物(μc−SiOxNy:H)の中の一つからなる請求項1記載の薄膜太陽電池。
- 前記後面反射層は700nm以上の波長を有する太陽光成分に対して400cm-1以上の光吸収係数を有する物質からなる第2後面反射膜をさらに含む請求項6記載の薄膜太陽電池。
- 前記第2後面反射膜は前記第1後面反射膜に比べて電気伝導度が高い請求項7記載の薄膜太陽電池。
- 前記第2後面反射膜はAZOまたはBZOからなる請求項8記載の薄膜太陽電池。
- 前記第2後面反射膜は前記第1後面反射膜の後面に位置する請求項9記載の薄膜太陽電池。
- 前記光電変換部は前記第1光電変換部と前記基板の間に位置する第2光電変換部をさらに含み、前記第2光電変換部は第2真性層を含む請求項6記載の薄膜太陽電池。
- 前記第1光電変換部と前記第2光電変換部の間に中間反射層が位置する請求項11記載の薄膜太陽電池。
- 前記中間反射層は前記第1真性層と直接接触する第1中間反射膜を含み、前記第1中間反射膜はn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化物(μc−SiOx:H)、n型不純物またはp型不純物がドーピングされた微結晶シリコン窒化物(μc−SiNx: H)及びn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化窒化物(μc−SiOxNy: H)の中の一つからなる請求項12記載の薄膜太陽電池。
- 前記中間反射層は前記第1中間反射膜及び前記第2真性層とそれぞれ接触する第2中間反射膜をさらに含み、前記第2中間反射膜はn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化物(μc−SiOx: H)、n型不純物またはp型不純物がドーピングされた微結晶シリコン窒化物(μc-SiNx: H) 及びn型不純物または p型不純物がドーピングされた微結晶シリコン酸化窒化物(μc−SiOxNy: H)の中の一つからなる請求項13記載の薄膜太陽電池。
- 前記第1光電変換部はp型ドーピング層をさらに含み、前記中間反射層は前記第1光電変換部のp型ドーピング層と直接接触する第1中間反射膜を含み、前記第1中間反射膜はAZOまたはBZOからなる請求項12記載の薄膜太陽電池。
- 前記中間反射層は前記第1中間反射膜及び前記第2真性層とそれぞれ接触する第2中間反射膜をさらに含み、前記第2中間反射膜はn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化物(μc−SiOx: H)、n型不純物またはp型不純物がドーピングされた微結晶シリコン窒化物(μc−SiNx: H)及びn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化窒化物(μc−SiOxNy: H)の中の一つからなる請求項15記載の薄膜太陽電池。
- 前記光電変換部は前記第2光電変換部と前記基板の間に位置する第3光電変換部をさらに含む請求項11記載の薄膜太陽電池。
- 前記第1光電変換部と前記第3光電変換部の間には少なくとも一つの中間反射層が位置する請求項17記載の薄膜太陽電池。
- 前記少なくとも一つの中間反射層はn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化物(μc−SiOx: H)、n型不純物またはp型不純物がドーピングされた微結晶シリコン窒化物(μc−SiNx: H)及びn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化窒化物(μc−SiOxNy: H)の中の一つからなるか、AZOまたはBZOからなる第1中間反射膜を含む請求項18記載の薄膜太陽電池。
- 前記少なくとも一つの中間反射層はn型不純物またはp型不純物がドーピングされた微結晶シリコン酸化物(μc−SiOx:H)、n型不純物またはp型不純物がドーピングされた微結晶シリコン窒化物(μc−SiNx:H)及びn型不純物または p型不純物がドーピングされた微結晶シリコン酸化窒化物(μc−SiOxNy:H)の中の一つからなる第2中間反射膜をさらに含む請求項19記載の薄膜太陽電池。
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KR1020100131821A KR101292061B1 (ko) | 2010-12-21 | 2010-12-21 | 박막 태양전지 |
KR10-2010-0131821 | 2010-12-21 |
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JP2012134440A true JP2012134440A (ja) | 2012-07-12 |
JP5795492B2 JP5795492B2 (ja) | 2015-10-14 |
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US (1) | US20110180128A1 (ja) |
EP (1) | EP2469609B1 (ja) |
JP (1) | JP5795492B2 (ja) |
KR (1) | KR101292061B1 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8637340B2 (en) | 2004-11-30 | 2014-01-28 | Solexel, Inc. | Patterning of silicon oxide layers using pulsed laser ablation |
US9455362B2 (en) | 2007-10-06 | 2016-09-27 | Solexel, Inc. | Laser irradiation aluminum doping for monocrystalline silicon substrates |
DE102011081655A1 (de) * | 2011-08-26 | 2013-02-28 | Robert Bosch Gmbh | Dünnschicht-Solarzelle |
CN103022208A (zh) * | 2011-09-26 | 2013-04-03 | 吉富新能源科技(上海)有限公司 | 利用二氧化硅中间层制作高效率双结硅薄膜太阳能电池 |
CN103022172A (zh) * | 2011-09-26 | 2013-04-03 | 吉富新能源科技(上海)有限公司 | 利用二氧化硅制作背反射层之高效率薄膜太阳能电池 |
KR102101408B1 (ko) * | 2011-12-21 | 2020-04-17 | 선파워 코포레이션 | 하이브리드 폴리실리콘 이종접합 배면 접점 전지 |
US8597970B2 (en) | 2011-12-21 | 2013-12-03 | Sunpower Corporation | Hybrid polysilicon heterojunction back contact cell |
US8679889B2 (en) | 2011-12-21 | 2014-03-25 | Sunpower Corporation | Hybrid polysilicon heterojunction back contact cell |
AU2012362505B2 (en) | 2011-12-26 | 2015-08-20 | Solexel, Inc. | Systems and methods for enhanced light trapping in solar cells |
CN102694049A (zh) * | 2012-06-07 | 2012-09-26 | 保定天威薄膜光伏有限公司 | 一种具备新型中间层结构的硅薄膜太阳能电池 |
CN103579403A (zh) * | 2012-08-07 | 2014-02-12 | 江苏武进汉能光伏有限公司 | 硅薄膜三叠层太阳电池 |
CN103618010A (zh) * | 2013-10-21 | 2014-03-05 | 福建铂阳精工设备有限公司 | 硅基薄膜太阳能电池背电极及制造方法、硅基薄膜太阳能电池 |
CN103579400B (zh) * | 2013-11-06 | 2016-08-24 | 湖南共创光伏科技有限公司 | 一种电池用复合中间反射层以及多结多叠层硅基薄膜电池 |
JP2015220339A (ja) * | 2014-05-16 | 2015-12-07 | 株式会社東芝 | 固体撮像装置 |
CN104966757B (zh) * | 2015-06-15 | 2017-03-29 | 广东汉能薄膜太阳能有限公司 | 一种高转化效率的纳米硅薄膜太阳电池及其制备方法 |
CN105514181A (zh) * | 2015-12-14 | 2016-04-20 | 山东新华联新能源科技有限公司 | 绒面结构的tco薄膜、其制备方法及薄膜太阳能电池 |
US11233162B2 (en) | 2017-03-31 | 2022-01-25 | The Boeing Company | Method of processing inconsistencies in solar cell devices and devices formed thereby |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308354A (ja) * | 2000-04-24 | 2001-11-02 | Sharp Corp | 積層型太陽電池 |
WO2005093856A1 (ja) * | 2004-03-26 | 2005-10-06 | Kaneka Corporation | 薄膜光電変換装置の製造方法 |
JP2006319068A (ja) * | 2005-05-11 | 2006-11-24 | Kaneka Corp | 多接合型シリコン系薄膜光電変換装置、及びその製造方法 |
JP2007243142A (ja) * | 2006-03-08 | 2007-09-20 | National Science & Technology Development Agency | 薄膜太陽電池とその加工処理 |
US20090293936A1 (en) * | 2008-05-27 | 2009-12-03 | Seung-Yeop Myong | Tandem thin-film silicon solar cell and method for manufacturing the same |
US20100224243A1 (en) * | 2009-03-05 | 2010-09-09 | Applied Materials, Inc. | Adhesion between azo and ag for the back contact in tandem junction cell by metal alloy |
JP2010251424A (ja) * | 2009-04-13 | 2010-11-04 | Mitsubishi Heavy Ind Ltd | 光電変換装置 |
WO2010144459A2 (en) * | 2009-06-10 | 2010-12-16 | Thinsilicon Corporation | Photovoltaic modules and methods for manufacturing photovoltaic modules having tandem semiconductor layer stacks |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2102948C (en) * | 1992-11-16 | 1998-10-27 | Keishi Saito | Photoelectric conversion element and power generation system using the same |
JP2984537B2 (ja) * | 1994-03-25 | 1999-11-29 | キヤノン株式会社 | 光起電力素子 |
US6951689B1 (en) * | 1998-01-21 | 2005-10-04 | Canon Kabushiki Kaisha | Substrate with transparent conductive layer, and photovoltaic element |
JP4193962B2 (ja) | 2000-10-31 | 2008-12-10 | 独立行政法人産業技術総合研究所 | 太陽電池用基板および薄膜太陽電池 |
JP2004289091A (ja) | 2003-03-25 | 2004-10-14 | Canon Inc | 光起電力素子 |
KR100880946B1 (ko) * | 2006-07-03 | 2009-02-04 | 엘지전자 주식회사 | 태양전지 및 그 제조방법 |
KR100974226B1 (ko) * | 2007-03-23 | 2010-08-06 | 엘지전자 주식회사 | 유전체를 이용한 태양전지의 후면 반사막 및 패시베이션층형성 |
JP2009094198A (ja) * | 2007-10-05 | 2009-04-30 | Kaneka Corp | ハイブリッド薄膜太陽電池の製造方法 |
JP5291633B2 (ja) * | 2007-11-30 | 2013-09-18 | 株式会社カネカ | シリコン系薄膜光電変換装置およびその製造方法 |
US20100313945A1 (en) * | 2008-08-21 | 2010-12-16 | Applied Materials, Inc. | Solar Cell Substrate and Methods of Manufacture |
JP2011199235A (ja) * | 2010-02-26 | 2011-10-06 | Sanyo Electric Co Ltd | 太陽電池 |
-
2010
- 2010-12-21 KR KR1020100131821A patent/KR101292061B1/ko not_active IP Right Cessation
-
2011
- 2011-03-30 US US13/076,095 patent/US20110180128A1/en not_active Abandoned
- 2011-04-08 EP EP11002981.6A patent/EP2469609B1/en not_active Not-in-force
- 2011-05-17 JP JP2011110478A patent/JP5795492B2/ja not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308354A (ja) * | 2000-04-24 | 2001-11-02 | Sharp Corp | 積層型太陽電池 |
WO2005093856A1 (ja) * | 2004-03-26 | 2005-10-06 | Kaneka Corporation | 薄膜光電変換装置の製造方法 |
JP2006319068A (ja) * | 2005-05-11 | 2006-11-24 | Kaneka Corp | 多接合型シリコン系薄膜光電変換装置、及びその製造方法 |
JP2007243142A (ja) * | 2006-03-08 | 2007-09-20 | National Science & Technology Development Agency | 薄膜太陽電池とその加工処理 |
US20090293936A1 (en) * | 2008-05-27 | 2009-12-03 | Seung-Yeop Myong | Tandem thin-film silicon solar cell and method for manufacturing the same |
US20100224243A1 (en) * | 2009-03-05 | 2010-09-09 | Applied Materials, Inc. | Adhesion between azo and ag for the back contact in tandem junction cell by metal alloy |
JP2010251424A (ja) * | 2009-04-13 | 2010-11-04 | Mitsubishi Heavy Ind Ltd | 光電変換装置 |
WO2010144459A2 (en) * | 2009-06-10 | 2010-12-16 | Thinsilicon Corporation | Photovoltaic modules and methods for manufacturing photovoltaic modules having tandem semiconductor layer stacks |
WO2010144421A2 (en) * | 2009-06-10 | 2010-12-16 | Thinsilicon Corporation | Photovoltaic modules and methods of manufacturing photovoltaic modules having multiple semiconductor layer stacks |
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KR101292061B1 (ko) | 2013-08-01 |
US20110180128A1 (en) | 2011-07-28 |
JP5795492B2 (ja) | 2015-10-14 |
EP2469609B1 (en) | 2013-06-05 |
EP2469609A1 (en) | 2012-06-27 |
KR20120070312A (ko) | 2012-06-29 |
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