JP2012119368A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2012119368A JP2012119368A JP2010265247A JP2010265247A JP2012119368A JP 2012119368 A JP2012119368 A JP 2012119368A JP 2010265247 A JP2010265247 A JP 2010265247A JP 2010265247 A JP2010265247 A JP 2010265247A JP 2012119368 A JP2012119368 A JP 2012119368A
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Abstract
【解決手段】
半導体装置の製造方法は、一定のピッチで配列したバンプ電極14から構成されるバンプ電極群12であって、第2の方向T2に沿ったバンプ電極の数より第1の方向T1に沿ったバンプ電極の数の方が少ないバンプ電極群12を備えた第1の基板10と、第2の基板と、を準備する工程と、第1の基板10と第2の基板との間に隙間が形成されるように第1の基板10と第2の基板とをバンプ電極14を介して接合する工程と、第1の基板10と第2の基板との間の隙間に、バンプ電極群12の第2の方向T2に沿って封止樹脂34を流動させて、封止樹脂34で当該隙間を充填する工程と、を有する。
【選択図】図4
Description
12 バンプ電極群
14 バンプ電極
16 貫通電極
20 吸着ステージ
21 凹部
22 吸着孔
23 ボンディングツール
25 隙間
28 チップ積層体
30 ステージ
31 塗布用シート
32 ディスペンサ
34 封止樹脂(アンダーフィル材)
36 複合チップ積層体
40 配線基板
41 製品形成部
42 ランド
43 接続パッド
44 ワイヤバンプ
45 接着部材
46 ディスペンサ
47 ボンディングツール
50 封止樹脂層
51 金属ボール
52 マウントツール
53 ダイシングテープ
54 ダイシングブレード
T1 行方向
T2 列方向
Claims (7)
- 一定のピッチで配列したバンプ電極から構成されるバンプ電極群であって、第1の方向に沿ったバンプ電極の数より、前記第1の方向に直交する第2の方向に沿ったバンプ電極の数の方が少ないバンプ電極群を備えた第1の基板と、第2の基板と、を準備する工程と、
前記第1の基板と前記第2の基板との間に隙間が形成されるように、前記第1の基板と前記第2の基板とを前記バンプ電極を介して接合する工程と、
前記第1の基板と前記第2の基板との間の前記隙間に、前記バンプ電極群の前記第2の方向に沿って封止樹脂を流動させて、前記封止樹脂で前記隙間を充填する工程と、を有する半導体装置の製造方法。 - 前記第1の基板は長方形状であり、前記第1の基板の長辺が前記バンプ電極群の前記第1の方向と平行に配置されている、請求項1に記載の半導体装置の製造方法。
- 前記第1の基板と前記第2の基板は半導体チップである、請求項1または2に記載の半導体装置の製造方法。
- 前記第1の基板は半導体チップであり、前記第2の基板は配線基板である、請求項1または2に記載の半導体装置の製造方法。
- 前記第1の基板は前記バンプ電極群を複数有し、各々の前記バンプ電極群を構成するバンプ電極の配列数が多い方向が揃えられている、請求項1から4のいずれか1項に記載の半導体装置の製造方法。
- 前記複数のバンプ電極群は前記第1の方向に沿って並んでおり、前記バンプ電極群の間の間隔は、前記バンプ電極群を構成する前記バンプ電極の前記ピッチより大きく、且つ700μm以下である、請求項5に記載の半導体装置の製造方法。
- 前記複数のバンプ電極群は前記第2の方向に沿って並んでおり、前記バンプ電極群の間の間隔が200μm以上である、請求項5に記載の半導体装置の製造方法。
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US13/297,668 US8889483B2 (en) | 2010-11-29 | 2011-11-16 | Method of manufacturing semiconductor device including filling gap between substrates with mold resin |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2014027535A1 (ja) * | 2012-08-13 | 2014-02-20 | ソニー株式会社 | 半導体装置及び電子機器 |
WO2014142178A1 (ja) * | 2013-03-14 | 2014-09-18 | ピーエスフォー ルクスコ エスエイアールエル | 半導体チップ及び半導体チップを有する半導体装置 |
JP2014239116A (ja) * | 2013-06-06 | 2014-12-18 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2014239118A (ja) * | 2013-06-06 | 2014-12-18 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
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US9355928B2 (en) * | 2013-03-12 | 2016-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Package-on-package structure |
US11728327B2 (en) | 2021-02-12 | 2023-08-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit package and method |
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