JP2012040466A - 物体の複数の側面を撮像するシステムおよび方法 - Google Patents

物体の複数の側面を撮像するシステムおよび方法 Download PDF

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Publication number
JP2012040466A
JP2012040466A JP2010181423A JP2010181423A JP2012040466A JP 2012040466 A JP2012040466 A JP 2012040466A JP 2010181423 A JP2010181423 A JP 2010181423A JP 2010181423 A JP2010181423 A JP 2010181423A JP 2012040466 A JP2012040466 A JP 2012040466A
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JP
Japan
Prior art keywords
tunnel
longitudinal
propagation
access prevention
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010181423A
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English (en)
Japanese (ja)
Inventor
Shy Cohen
コーヘン シャイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Camtek Ltd
Original Assignee
Camtek Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Ltd filed Critical Camtek Ltd
Priority to JP2010181423A priority Critical patent/JP2012040466A/ja
Priority to KR1020100087042A priority patent/KR20120015976A/ko
Priority to CN2010102817945A priority patent/CN102375104A/zh
Publication of JP2012040466A publication Critical patent/JP2012040466A/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15Preventing contamination of the components of the optical system or obstruction of the light path
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2601Apparatus or methods therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15Preventing contamination of the components of the optical system or obstruction of the light path
    • G01N2021/151Gas blown
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N2021/95638Inspecting patterns on the surface of objects for PCB's

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sorting Of Articles (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2010181423A 2010-08-13 2010-08-13 物体の複数の側面を撮像するシステムおよび方法 Pending JP2012040466A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010181423A JP2012040466A (ja) 2010-08-13 2010-08-13 物体の複数の側面を撮像するシステムおよび方法
KR1020100087042A KR20120015976A (ko) 2010-08-13 2010-09-06 검사 대상체의 다수의 측방들을 이미지 촬영하기 위한 시스템 및 방법
CN2010102817945A CN102375104A (zh) 2010-08-13 2010-09-14 用于对对象的多个侧面成像的系统和方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010181423A JP2012040466A (ja) 2010-08-13 2010-08-13 物体の複数の側面を撮像するシステムおよび方法

Publications (1)

Publication Number Publication Date
JP2012040466A true JP2012040466A (ja) 2012-03-01

Family

ID=45793994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010181423A Pending JP2012040466A (ja) 2010-08-13 2010-08-13 物体の複数の側面を撮像するシステムおよび方法

Country Status (3)

Country Link
JP (1) JP2012040466A (ko)
KR (1) KR20120015976A (ko)
CN (1) CN102375104A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105067629A (zh) * 2015-07-24 2015-11-18 北京理工大学 一种色环电阻外观缺陷和阻值集成检测方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101275134B1 (ko) * 2012-04-27 2013-06-17 한미반도체 주식회사 반도체 자재 검사장치 및 반도체 자재 검사방법
TWI448698B (zh) * 2013-01-24 2014-08-11 Utechzone Co Ltd Transmission detection device and method thereof
CN103808732B (zh) * 2014-01-21 2016-09-28 图灵视控(北京)科技有限公司 基于机器视觉的电容检测系统和方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001036289A (ja) * 1999-07-26 2001-02-09 Tdk Corp チップ部品供給装置
JP2002232188A (ja) * 2001-02-01 2002-08-16 Taiyo Yuden Co Ltd 電子部品搬送装置
JP2003063644A (ja) * 2001-08-30 2003-03-05 Murata Mfg Co Ltd 搬送装置
JP2009216698A (ja) * 2008-02-07 2009-09-24 Camtek Ltd 対象物の複数の側面を画像化するための装置および方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6493079B1 (en) * 2000-09-07 2002-12-10 National Instruments Corporation System and method for machine vision analysis of an object using a reduced number of cameras
IL175455A0 (en) * 2006-05-07 2007-08-19 Penta I Ltd A system and a method for imaging, automatic and at once, objects' six-faces

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001036289A (ja) * 1999-07-26 2001-02-09 Tdk Corp チップ部品供給装置
JP2002232188A (ja) * 2001-02-01 2002-08-16 Taiyo Yuden Co Ltd 電子部品搬送装置
JP2003063644A (ja) * 2001-08-30 2003-03-05 Murata Mfg Co Ltd 搬送装置
JP2009216698A (ja) * 2008-02-07 2009-09-24 Camtek Ltd 対象物の複数の側面を画像化するための装置および方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105067629A (zh) * 2015-07-24 2015-11-18 北京理工大学 一种色环电阻外观缺陷和阻值集成检测方法

Also Published As

Publication number Publication date
KR20120015976A (ko) 2012-02-22
CN102375104A (zh) 2012-03-14

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