JP2011524944A - 軸送りを用いて液体供給原料から皮膜を製造する方法および装置 - Google Patents

軸送りを用いて液体供給原料から皮膜を製造する方法および装置 Download PDF

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Publication number
JP2011524944A
JP2011524944A JP2011510794A JP2011510794A JP2011524944A JP 2011524944 A JP2011524944 A JP 2011524944A JP 2011510794 A JP2011510794 A JP 2011510794A JP 2011510794 A JP2011510794 A JP 2011510794A JP 2011524944 A JP2011524944 A JP 2011524944A
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Prior art keywords
liquid
liquid feed
torch
flow
feed material
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JP2011510794A
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Japanese (ja)
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JP2011524944A5 (enExample
Inventor
ウィリアム バージェス、アラン
ハーテル、フィリップ
エス．エム． デイビッドソン、クリストファー
タン、チャオリン
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Northwest Mettech Corp
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Northwest Mettech Corp
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Publication of JP2011524944A publication Critical patent/JP2011524944A/ja
Publication of JP2011524944A5 publication Critical patent/JP2011524944A5/ja
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/42—Plasma torches using an arc with provisions for introducing materials into the plasma, e.g. powder or liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/20—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion
    • B05B7/201—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion downstream of the nozzle
    • B05B7/205—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed by flame or combustion downstream of the nozzle the material to be sprayed being originally a particulate material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/124—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
    • H01M8/1246—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides
    • H01M8/1253—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides the electrolyte containing zirconium oxide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M2008/1293—Fuel cells with solid oxide electrolytes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00—Electrolytes
    • H01M2300/0017—Non-aqueous electrolytes
    • H01M2300/0065—Solid electrolytes
    • H01M2300/0068—Solid electrolytes inorganic
    • H01M2300/0071—Oxides
    • H01M2300/0074—Ion conductive at high temperature
    • H01M2300/0077—Ion conductive at high temperature based on zirconium oxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Nozzles (AREA)
  • Coating By Spraying Or Casting (AREA)
JP2011510794A 2008-05-29 2009-05-29 軸送りを用いて液体供給原料から皮膜を製造する方法および装置 Pending JP2011524944A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5718408P 2008-05-29 2008-05-29
US61/057,184 2008-05-29
PCT/CA2009/000746 WO2009143626A1 (en) 2008-05-29 2009-05-29 Method and system for producing coatings from liquid feedstock using axial feed

Publications (2)

Publication Number Publication Date
JP2011524944A true JP2011524944A (ja) 2011-09-08
JP2011524944A5 JP2011524944A5 (enExample) 2012-07-12

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JP2011510794A Pending JP2011524944A (ja) 2008-05-29 2009-05-29 軸送りを用いて液体供給原料から皮膜を製造する方法および装置

Country Status (6)

Country Link
US (1) US20110237421A1 (enExample)
EP (1) EP2296826A1 (enExample)
JP (1) JP2011524944A (enExample)
CN (1) CN102046303A (enExample)
CA (1) CA2724012A1 (enExample)
WO (1) WO2009143626A1 (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014142017A1 (ja) * 2013-03-13 2014-09-18 株式会社 フジミインコーポレーテッド 溶射用スラリー、溶射皮膜、及び溶射皮膜の形成方法
WO2014142018A1 (ja) * 2013-03-13 2014-09-18 株式会社 フジミインコーポレーテッド 溶射用スラリー、溶射皮膜、及び溶射皮膜の形成方法
WO2014142019A1 (ja) * 2013-03-13 2014-09-18 株式会社 フジミインコーポレーテッド 溶射用粉末、溶射皮膜、及び溶射皮膜の形成方法
JP2014240511A (ja) * 2013-06-11 2014-12-25 株式会社フジミインコーポレーテッド 溶射皮膜の製造方法および溶射用材料
JP2015172243A (ja) * 2014-03-11 2015-10-01 ゼネラル・エレクトリック・カンパニイ 気密性希土類耐環境皮膜を溶射するための組成物及び方法
WO2016035870A1 (ja) * 2014-09-03 2016-03-10 株式会社フジミインコーポレーテッド 溶射用スラリー、溶射皮膜および溶射皮膜の形成方法
JP2018168414A (ja) * 2017-03-29 2018-11-01 株式会社セイワマシン 微粒子含有スラリー溶射装置及び該溶射システム
US10196729B2 (en) 2015-09-25 2019-02-05 Fujimi Incorporated Slurry for thermal spraying, sprayed coating, and method for forming sprayed coating
JP2019021708A (ja) * 2017-07-13 2019-02-07 東京エレクトロン株式会社 プラズマ処理装置用部品の溶射方法及びプラズマ処理装置用部品
JP2023099285A (ja) * 2021-12-30 2023-07-12 チャンフン イ プラズマサスペンションコーティングシステム及び方法

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TWI385272B (zh) * 2009-09-25 2013-02-11 Ind Tech Res Inst 氣體分佈板及其裝置
WO2012082902A1 (en) * 2010-12-15 2012-06-21 Sulzer Metco (Us), Inc. Pressure based liquid feed system for suspension plasma spray coatings
JP5396565B2 (ja) * 2011-07-12 2014-01-22 シンワ工業株式会社 アキシャルフィード型プラズマ溶射装置
CN102951846A (zh) * 2011-08-18 2013-03-06 和舰科技(苏州)有限公司 一种用于旋转涂布玻璃的溶剂喷涂装置
RU2014128556A (ru) * 2011-12-14 2016-02-10 Праксэйр С. Т. Текнолоджи, Инк. Система и способ для использования экранированного плазменного напыления или экранированной инжекции жидкой суспензии в процессах суспензионного плазменного напыления
CN102879380B (zh) * 2012-09-24 2015-05-13 厦门大学 一种拉曼光谱增强粒子施加装置
CN103774082A (zh) * 2014-02-21 2014-05-07 北京矿冶研究总院 热障涂层的制备方法
CN107916389B (zh) * 2017-11-16 2019-11-22 西北工业大学 一种微米级超音速悬浮等离子喷涂装置及喷涂方法
CN110106463B (zh) * 2019-05-20 2021-06-25 内蒙古工业大学 一种具有层间孔隙结构热障涂层的制备方法
CN112090609B (zh) * 2020-09-15 2021-10-29 季华实验室 悬浮液冷气动力喷涂系统及其应用
CN112206937B (zh) * 2020-09-30 2022-02-22 季华实验室 一种用于悬浮液冷喷涂工艺的液料供给系统
CN113637936A (zh) * 2021-08-11 2021-11-12 惠州聚鑫隆金属制品有限公司 一种电子五金外壳用表面智能镀铜设备

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US20050120957A1 (en) * 2002-01-08 2005-06-09 Flame Spray Industries, Inc. Plasma spray method and apparatus for applying a coating utilizing particle kinetics
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Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10377905B2 (en) 2013-03-13 2019-08-13 Fujimi Incorporated Slurry for thermal spraying, thermal sprayed coating, and method for forming thermal sprayed coating
US10196536B2 (en) 2013-03-13 2019-02-05 Fujimi Incorporated Slurry for thermal spraying, thermal spray coating, and method for forming thermal spray coating
WO2014142019A1 (ja) * 2013-03-13 2014-09-18 株式会社 フジミインコーポレーテッド 溶射用粉末、溶射皮膜、及び溶射皮膜の形成方法
WO2014142017A1 (ja) * 2013-03-13 2014-09-18 株式会社 フジミインコーポレーテッド 溶射用スラリー、溶射皮膜、及び溶射皮膜の形成方法
JP2017145513A (ja) * 2013-03-13 2017-08-24 株式会社フジミインコーポレーテッド 溶射用スラリー及び溶射皮膜の形成方法
WO2014142018A1 (ja) * 2013-03-13 2014-09-18 株式会社 フジミインコーポレーテッド 溶射用スラリー、溶射皮膜、及び溶射皮膜の形成方法
JPWO2014142017A1 (ja) * 2013-03-13 2017-02-16 株式会社フジミインコーポレーテッド 溶射用スラリー、溶射皮膜、及び溶射皮膜の形成方法
JPWO2014142019A1 (ja) * 2013-03-13 2017-02-16 株式会社フジミインコーポレーテッド 溶射用粉末、溶射皮膜、及び溶射皮膜の形成方法
US9682892B2 (en) 2013-03-13 2017-06-20 Fujimi Incorporated Powder for thermal spraying, thermal sprayed coating, and method for forming thermal sprayed coating
JP2014240511A (ja) * 2013-06-11 2014-12-25 株式会社フジミインコーポレーテッド 溶射皮膜の製造方法および溶射用材料
JP2015172243A (ja) * 2014-03-11 2015-10-01 ゼネラル・エレクトリック・カンパニイ 気密性希土類耐環境皮膜を溶射するための組成物及び方法
WO2016035870A1 (ja) * 2014-09-03 2016-03-10 株式会社フジミインコーポレーテッド 溶射用スラリー、溶射皮膜および溶射皮膜の形成方法
JPWO2016035870A1 (ja) * 2014-09-03 2017-06-15 株式会社フジミインコーポレーテッド 溶射用スラリー、溶射皮膜および溶射皮膜の形成方法
US11066734B2 (en) 2014-09-03 2021-07-20 Fujimi Incorporated Thermal spray slurry, thermal spray coating and method for forming thermal spray coating
US10196729B2 (en) 2015-09-25 2019-02-05 Fujimi Incorporated Slurry for thermal spraying, sprayed coating, and method for forming sprayed coating
JP2018168414A (ja) * 2017-03-29 2018-11-01 株式会社セイワマシン 微粒子含有スラリー溶射装置及び該溶射システム
JP2019021708A (ja) * 2017-07-13 2019-02-07 東京エレクトロン株式会社 プラズマ処理装置用部品の溶射方法及びプラズマ処理装置用部品
US11328905B2 (en) 2017-07-13 2022-05-10 Tokyo Electron Limited Thermal spraying method of component for plasma processing apparatus and component for plasma processing apparatus
JP7224096B2 (ja) 2017-07-13 2023-02-17 東京エレクトロン株式会社 プラズマ処理装置用部品の溶射方法及びプラズマ処理装置用部品
JP2023099285A (ja) * 2021-12-30 2023-07-12 チャンフン イ プラズマサスペンションコーティングシステム及び方法

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Publication number Publication date
CA2724012A1 (en) 2009-12-03
WO2009143626A1 (en) 2009-12-03
CN102046303A (zh) 2011-05-04
EP2296826A1 (en) 2011-03-23
US20110237421A1 (en) 2011-09-29

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