JP2011519041A - 圧力センサ - Google Patents
圧力センサ Download PDFInfo
- Publication number
- JP2011519041A JP2011519041A JP2011506652A JP2011506652A JP2011519041A JP 2011519041 A JP2011519041 A JP 2011519041A JP 2011506652 A JP2011506652 A JP 2011506652A JP 2011506652 A JP2011506652 A JP 2011506652A JP 2011519041 A JP2011519041 A JP 2011519041A
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- substrate
- cavity
- sensor according
- signal converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0046—Fluidic connecting means using isolation membranes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008021091.9 | 2008-04-28 | ||
DE102008021091A DE102008021091A1 (de) | 2008-04-28 | 2008-04-28 | Drucksensor |
PCT/EP2009/054656 WO2009132981A1 (de) | 2008-04-28 | 2009-04-20 | Drucksensor |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014085224A Division JP5739039B2 (ja) | 2008-04-28 | 2014-04-17 | 圧力センサ |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2011519041A true JP2011519041A (ja) | 2011-06-30 |
Family
ID=40846118
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011506652A Pending JP2011519041A (ja) | 2008-04-28 | 2009-04-20 | 圧力センサ |
JP2014085224A Active JP5739039B2 (ja) | 2008-04-28 | 2014-04-17 | 圧力センサ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014085224A Active JP5739039B2 (ja) | 2008-04-28 | 2014-04-17 | 圧力センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US8234926B2 (de) |
EP (1) | EP2269020B1 (de) |
JP (2) | JP2011519041A (de) |
DE (1) | DE102008021091A1 (de) |
WO (1) | WO2009132981A1 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8569851B2 (en) * | 2010-06-18 | 2013-10-29 | General Electric Company | Sensor and method for fabricating the same |
DE102014200082A1 (de) * | 2014-01-08 | 2015-07-09 | Robert Bosch Gmbh | Drucksensor zur Erfassung eines Drucks eines fluiden Mediums |
US9648745B2 (en) | 2014-10-22 | 2017-05-09 | Honeywell International Inc. | Systems and methods for mounting the printed wiring assembly to the header assembly of a pressure sensor |
DE102016200263A1 (de) * | 2016-01-13 | 2017-07-13 | Robert Bosch Gmbh | Mikromechanischer Drucksensor |
US10163660B2 (en) | 2017-05-08 | 2018-12-25 | Tt Electronics Plc | Sensor device with media channel between substrates |
US10285275B2 (en) | 2017-05-25 | 2019-05-07 | Tt Electronics Plc | Sensor device having printed circuit board substrate with built-in media channel |
DE102017122607A1 (de) * | 2017-09-28 | 2019-03-28 | Tdk Electronics Ag | Mediengetrennter Drucktransmitter |
US11015994B2 (en) | 2018-08-22 | 2021-05-25 | Rosemount Aerospace Inc. | Differential MEMS pressure sensors with a ceramic header body and methods of making differential MEMS pressure sensors |
CN209326840U (zh) | 2018-12-27 | 2019-08-30 | 热敏碟公司 | 压力传感器及压力变送器 |
DE102019123701B4 (de) * | 2019-09-04 | 2022-08-11 | Technische Universität Ilmenau | Vorrichtung und Verfahren zur Erfassung und Modifikation von Normal- und/oder Scherkräften, sowie deren Verwendung |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08334426A (ja) * | 1995-06-07 | 1996-12-17 | Yamatake Honeywell Co Ltd | 圧力センサ |
JPH11173938A (ja) * | 1997-12-11 | 1999-07-02 | Tokin Corp | 圧力センサ |
JP2000329632A (ja) * | 1999-05-17 | 2000-11-30 | Toshiba Chem Corp | 圧力センサーモジュール及び圧力センサーモジュールの製造方法 |
JP2005257498A (ja) * | 2004-03-12 | 2005-09-22 | Denso Corp | 圧力センサ |
JP2005337970A (ja) * | 2004-05-28 | 2005-12-08 | Toyoda Mach Works Ltd | 半導体圧力センサ |
JP2006090846A (ja) * | 2004-09-24 | 2006-04-06 | Denso Corp | 圧力センサ |
JP2006177919A (ja) * | 2004-11-26 | 2006-07-06 | Kyocera Corp | 圧力センサ |
JP2006220430A (ja) * | 2005-02-08 | 2006-08-24 | Jtekt Corp | 圧力センサ及びその製造方法 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3559488A (en) | 1969-08-20 | 1971-02-02 | Honeywell Inc | Differential pressure measuring apparatus |
US4072058A (en) | 1976-05-03 | 1978-02-07 | Honeywell Inc. | Differential pressure transmitter with pressure sensor protection |
US4218925A (en) | 1979-06-27 | 1980-08-26 | Honeywell Inc. | Differential pressure transmitter with pressure sensor protection |
US4543832A (en) | 1983-09-30 | 1985-10-01 | Transducers, Inc. | Overload protected pressure transducer |
US5119066A (en) * | 1988-06-06 | 1992-06-02 | Jan Ballyns | Pressure sensor system |
JPH073311Y2 (ja) * | 1988-10-27 | 1995-01-30 | 横河電機株式会社 | 半導体差圧測定装置 |
US5071661A (en) * | 1990-09-12 | 1991-12-10 | Miles J. Willard | Process for dehydrating potato products |
US5153710A (en) * | 1991-07-26 | 1992-10-06 | Sgs-Thomson Microelectronics, Inc. | Integrated circuit package with laminated backup cell |
CH687940A5 (de) * | 1993-04-20 | 1997-03-27 | Landis & Gyr Tech Innovat | Kapsel fuer einen Drucksensor und Verfahren zur Einkapselung des Drucksensors. |
JP3198779B2 (ja) * | 1994-03-04 | 2001-08-13 | 株式会社デンソー | 半導体圧力検出器の製造方法 |
JPH10104101A (ja) * | 1996-10-02 | 1998-04-24 | Mitsubishi Electric Corp | 半導体圧力センサ |
DE19709977A1 (de) * | 1997-03-11 | 1998-09-24 | Siemens Ag | Halbleiterschaltungsvorrichtung und Halbleitersensorvorrichtung |
US6311561B1 (en) * | 1997-12-22 | 2001-11-06 | Rosemount Aerospace Inc. | Media compatible pressure sensor |
US7152478B2 (en) * | 2000-07-20 | 2006-12-26 | Entegris, Inc. | Sensor usable in ultra pure and highly corrosive environments |
JP2003315193A (ja) * | 2002-04-24 | 2003-11-06 | Denso Corp | 圧力センサ |
JP3824964B2 (ja) * | 2002-05-17 | 2006-09-20 | 長野計器株式会社 | 絶対圧型圧力センサ |
US6877380B2 (en) * | 2002-10-01 | 2005-04-12 | Honeywell International Inc. | Diaphragm for bonded element sensor |
JP2005037310A (ja) * | 2003-07-18 | 2005-02-10 | Fuji Koki Corp | 圧力センサ |
JP4315833B2 (ja) * | 2004-02-18 | 2009-08-19 | 三洋電機株式会社 | 回路装置 |
JP2007033047A (ja) * | 2005-07-22 | 2007-02-08 | Mitsubishi Electric Corp | 半導体圧力センサ |
DE102005053765B4 (de) * | 2005-11-10 | 2016-04-14 | Epcos Ag | MEMS-Package und Verfahren zur Herstellung |
DE102005054177B4 (de) * | 2005-11-14 | 2011-12-22 | Infineon Technologies Ag | Verfahren zum Herstellen einer Vielzahl von gehäusten Sensormodulen |
EP1795496A2 (de) * | 2005-12-08 | 2007-06-13 | Yamaha Corporation | Halbleitervorrichtung zur Erfassung von Druckfluktuationen |
US7282786B2 (en) * | 2006-01-17 | 2007-10-16 | Advanced Semiconductor Engineering Inc. | Semiconductor package and process for making the same |
US7781852B1 (en) * | 2006-12-05 | 2010-08-24 | Amkor Technology, Inc. | Membrane die attach circuit element package and method therefor |
US7607355B2 (en) * | 2007-02-16 | 2009-10-27 | Yamaha Corporation | Semiconductor device |
US7731433B1 (en) * | 2008-12-05 | 2010-06-08 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Optoelectronic surface-mounted device and method for forming an optoelectronic surface-mounted device |
-
2008
- 2008-04-28 DE DE102008021091A patent/DE102008021091A1/de not_active Ceased
-
2009
- 2009-04-20 EP EP09738025.7A patent/EP2269020B1/de active Active
- 2009-04-20 JP JP2011506652A patent/JP2011519041A/ja active Pending
- 2009-04-20 WO PCT/EP2009/054656 patent/WO2009132981A1/de active Application Filing
-
2010
- 2010-10-14 US US12/904,871 patent/US8234926B2/en not_active Expired - Fee Related
-
2014
- 2014-04-17 JP JP2014085224A patent/JP5739039B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08334426A (ja) * | 1995-06-07 | 1996-12-17 | Yamatake Honeywell Co Ltd | 圧力センサ |
JPH11173938A (ja) * | 1997-12-11 | 1999-07-02 | Tokin Corp | 圧力センサ |
JP2000329632A (ja) * | 1999-05-17 | 2000-11-30 | Toshiba Chem Corp | 圧力センサーモジュール及び圧力センサーモジュールの製造方法 |
JP2005257498A (ja) * | 2004-03-12 | 2005-09-22 | Denso Corp | 圧力センサ |
JP2005337970A (ja) * | 2004-05-28 | 2005-12-08 | Toyoda Mach Works Ltd | 半導体圧力センサ |
JP2006090846A (ja) * | 2004-09-24 | 2006-04-06 | Denso Corp | 圧力センサ |
JP2006177919A (ja) * | 2004-11-26 | 2006-07-06 | Kyocera Corp | 圧力センサ |
JP2006220430A (ja) * | 2005-02-08 | 2006-08-24 | Jtekt Corp | 圧力センサ及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2014160084A (ja) | 2014-09-04 |
JP5739039B2 (ja) | 2015-06-24 |
WO2009132981A1 (de) | 2009-11-05 |
US8234926B2 (en) | 2012-08-07 |
US20110083513A1 (en) | 2011-04-14 |
DE102008021091A1 (de) | 2009-10-29 |
EP2269020A1 (de) | 2011-01-05 |
EP2269020B1 (de) | 2017-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120420 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130510 |
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A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130514 |
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A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130814 |
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A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20131217 |