JP2011512310A - 超クリーンルーム内において弱衝撃性の板を運搬及び回転するための方法及び装置 - Google Patents
超クリーンルーム内において弱衝撃性の板を運搬及び回転するための方法及び装置 Download PDFInfo
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- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
- B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
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Abstract
【選択図】図1
Description
(2) 回転装置の運搬ローラ
(3) ガラス板のための支持部
(4) 回転駆動
(5) 回転フレームのための持ち上げ装置
(6) ガラス板
(7) 角度コンベヤの運搬ローラ
(8) ローラコンベヤの運搬ローラ
(9) ローラコンベヤの運搬部
(10) 回転デッキの運搬部
(11) 角度コンベヤの持ち上げ装置
(12) ローラコンベヤの運搬駆動部
Claims (10)
- 弱衝撃性の薄い結晶板、特にガラス板を汚すことなく、同一平面上を、正確な進路で運搬及び回転するための装置において、
a)運搬ローラ(8)の表面が、らせん様の構造を有し、隣接する運搬部(9)は反対向きのらせん状構造の前記運搬ローラ(8)を有し、高品位の水架橋PURエラストマーが、前記運搬ローラ(8)の材料として使用されているローラコンベヤと、
b)さらに、角度コンベヤとして機能し、関連の領域において、要求された方向に走行し、それらの運搬部で回転可能であり、持ち上げ装置を使って前記ローラコンベヤより高い位置に持ち上げ可能である追加のローラ(7)が、前記ローラ(8)間の空間に備えられる第二のローラコンベヤと、
c)さらに、関連の領域において、中央部を支持され、回転可能な持ち上げ装置を使って前記ローラコンベヤより高い位置に持ち上げ可能である追加のローラ(10)が、走行方向から独立しているガラス板(6)を回転させるために前記ローラ(8)間の空間に備えられる第三のローラコンベヤと、
d)角度コンベヤとして機能する前記第二のローラコンベヤの領域で、前記運搬部(9)の空間を調節するための装置と、
e)レーザ及びセンサ又はその何れか一方を使ってガラス板(6)の位置決めを監視するための装置と、を備えることを特徴とする装置。 - Aclathan原料がPURエラストマーとして使用されることを特徴とする請求項1に記載の装置。
- 前記回転フレーム(1)の支持部(3)はPEEKプラスチックから成ることを特徴とする請求項1又は2のいずれか一項に記載の装置。
- 機械的に動く部分は、排出がないようにカプセル化され、耐摩耗性の物質から成ることを特徴とする請求項1乃至3のいずれか一項に記載の装置。
- 前記運搬ローラ(7)の運搬方向は、前記ローラコンベヤの方向に対して90°の角度となることを特徴とする請求項1乃至4のいずれか一項に記載の装置。
- 前記ローラ(2)は、それぞれ個別のサーボ駆動部を備えることを特徴とする請求項1乃至5のいずれか一項に記載の装置。
- 弱衝撃性の薄い結晶板、特にガラス板を汚すことなく、同一平面上を、正確な進路で運搬及び回転するための方法において、
a)ガラス板(6)が、並んで配置された運搬ローラ(8)が装着されたローラコンベヤの、平行に実装された運搬部(9)上を運搬され、らせん様の構造を有する前記運搬ローラ(8)の表面を有し、隣接する運搬部(9)では反対向きのらせん状構造の前記運搬ローラ(8)を有し、及び高品位の水架橋PURエラストマーが、前記運搬ローラ(8)の材料として使用され、
b)ガラス板(6)の走行方向を調節するため、前記ガラス板(6)は、角度コンベヤとして機能する、さらなる第二のローラコンベヤの関連の領域に運搬され、前記第二のローラコンベヤにおいて、要求された方向を走行し、それらの運搬部に対して回転可能であり、持ち上げ装置を使って前記ローラコンベヤより高い位置に持ち上げ可能である追加のローラ(7)が、前記ローラ(8)間の空間に備えられ、前記各ガラス板(6)を要求された新しい方向へ運び、
c)前記走行方向から独立しているガラス板(6)を回転させるため、前記ガラス板(6)は、さらに第三のローラコンベヤの関連の領域に運搬され、前記第三のローラコンベヤにおいて、中央を支持され回転可能な持ち上げ装置を使って、前記ローラコンベヤより高い位置に持ち上げ可能である追加のローラ(10)が、前記ローラ(8)間の空間に備えられ、前記各ガラス板(6)の高さが下げられてさらに運搬される前に、要求された新しい方向へ回転させ、
d)角度コンベヤとして機能する前記第二のローラコンベヤの領域における前記ローラ(7)の回転は、この領域の前記運搬部(9)の空間を調節する装置で一致して達成され、
e)前記ガラス板(6)を正確な進路で運搬し、回転させる全過程を、レーザ及びセンサ又はその何れか一方を使ってガラス板(6)の位置決めを監視する装置を使って監視することを特徴とする方法。 - 前記運搬ローラ(8)の表面に適用されたらせん様の構造を使って、前記ローラコンベヤ上を運搬されるガラス板(6)が振動することなく、正確な進路にとどまるように制御されることを特徴とする請求項7に記載の方法。
- プログラムをコンピュータによって実行する場合、請求項7又は8のいずれか一項に記載の方法を実行するためのプログラムコードを有することを特徴とするプログラム。
- プログラムをコンピュータによって実行する場合において、請求項7又は8のいずれか一項に記載の方法を実行するためのコンピュータプログラムのプログラムコードを記録することを特徴とするコンピュータ読取可能な記録媒体。
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Application Number | Priority Date | Filing Date | Title |
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DE102008010317.9 | 2008-02-21 | ||
DE102008010317A DE102008010317A1 (de) | 2008-02-21 | 2008-02-21 | Verfahren und Vorrichtung zum Befördern und Drehen stoßempfindlicher Platten in Reinsträumen |
PCT/DE2009/000227 WO2009103277A2 (de) | 2008-02-21 | 2009-02-18 | Verfahren und vorrichtung zum befördern und drehen stossempfindlicher platten in reinsträumen |
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JP2011512310A true JP2011512310A (ja) | 2011-04-21 |
JP5334999B2 JP5334999B2 (ja) | 2013-11-06 |
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JP2010547041A Expired - Fee Related JP5334999B2 (ja) | 2008-02-21 | 2009-02-18 | 超クリーンルーム内において弱衝撃性の板を運搬及び回転するための方法及び装置 |
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US (1) | US8312981B2 (ja) |
JP (1) | JP5334999B2 (ja) |
KR (1) | KR101253829B1 (ja) |
CN (1) | CN101946314B (ja) |
DE (2) | DE102008010317A1 (ja) |
WO (1) | WO2009103277A2 (ja) |
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- 2009-02-18 JP JP2010547041A patent/JP5334999B2/ja not_active Expired - Fee Related
- 2009-02-18 US US12/918,147 patent/US8312981B2/en active Active
- 2009-02-18 CN CN2009801059584A patent/CN101946314B/zh not_active Expired - Fee Related
- 2009-02-18 WO PCT/DE2009/000227 patent/WO2009103277A2/de active Application Filing
- 2009-02-18 KR KR1020107020678A patent/KR101253829B1/ko active IP Right Grant
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KR20140038908A (ko) * | 2012-09-20 | 2014-03-31 | 다르트콘 에스에이지엘 | 롤러 이송 시스템 |
JP2014065610A (ja) * | 2012-09-20 | 2014-04-17 | Artecon Sagi D | ローラ搬送システム |
KR102125581B1 (ko) * | 2012-09-20 | 2020-06-23 | 아반콘 에스아 | 롤러 이송 시스템 |
Also Published As
Publication number | Publication date |
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JP5334999B2 (ja) | 2013-11-06 |
WO2009103277A2 (de) | 2009-08-27 |
KR101253829B1 (ko) | 2013-04-12 |
DE102008010317A1 (de) | 2009-09-03 |
CN101946314B (zh) | 2012-07-18 |
WO2009103277A3 (de) | 2009-12-03 |
US20100326792A1 (en) | 2010-12-30 |
DE112009000937A5 (de) | 2011-01-20 |
CN101946314A (zh) | 2011-01-12 |
US8312981B2 (en) | 2012-11-20 |
KR20100113640A (ko) | 2010-10-21 |
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