JP2011511459A5 - - Google Patents

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Publication number
JP2011511459A5
JP2011511459A5 JP2010545050A JP2010545050A JP2011511459A5 JP 2011511459 A5 JP2011511459 A5 JP 2011511459A5 JP 2010545050 A JP2010545050 A JP 2010545050A JP 2010545050 A JP2010545050 A JP 2010545050A JP 2011511459 A5 JP2011511459 A5 JP 2011511459A5
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JP
Japan
Prior art keywords
substrates
susceptor
substrate processing
heating source
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010545050A
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English (en)
Japanese (ja)
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JP2011511459A (ja
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Publication date
Priority claimed from US12/023,520 external-priority patent/US20090194024A1/en
Application filed filed Critical
Publication of JP2011511459A publication Critical patent/JP2011511459A/ja
Publication of JP2011511459A5 publication Critical patent/JP2011511459A5/ja
Pending legal-status Critical Current

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JP2010545050A 2008-01-31 2009-01-13 Ｃｖｄ装置 Pending JP2011511459A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/023,520 US20090194024A1 (en) 2008-01-31 2008-01-31 Cvd apparatus
PCT/US2009/030858 WO2009099720A1 (en) 2008-01-31 2009-01-13 Cvd apparatus

Publications (2)

Publication Number Publication Date
JP2011511459A JP2011511459A (ja) 2011-04-07
JP2011511459A5 true JP2011511459A5 (enExample) 2012-03-01

Family

ID=40930407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010545050A Pending JP2011511459A (ja) 2008-01-31 2009-01-13 Ｃｖｄ装置

Country Status (6)

Country Link
US (1) US20090194024A1 (enExample)
JP (1) JP2011511459A (enExample)
KR (1) KR101296317B1 (enExample)
CN (1) CN101925980B (enExample)
TW (1) TWI513852B (enExample)
WO (1) WO2009099720A1 (enExample)

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