JP2011253994A - 半導体装置 - Google Patents
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Abstract
【解決手段】複数のパッド電極4が上面に設けられた半導体基板と、パッド電極に接続されたコンタクト配線が設けられ、半導体基板上に絶縁膜を介して配置された再配線層3と、再配線層上に設けられた複数のボール電極2と、を備え、複数の第1のパッド電極4a、4bが、半導体基板の基板面に平行な半導体基板の第1の辺101に沿うように、半導体基板の外周上に並んで配置され、複数の第1のボール電極2a、2bが、第1の辺に沿うように再配線層の外周上に並んで配置され、複数の第1のボール電極2bの何れかは、複数の第1のパッド電極のうち下方に位置する第1のパッド電極4bとコンタクト配線を介して接続され、且つ、第1の辺の端部に一番近い第1のボール電極2aの下方には、第1のパッド電極が配置されていない。
【選択図】図2
Description
以上のように、WCSPのボール電極2bの下方にパッド電極4bを配置し、ボール電極2a、2b間にその他のボール電極2a、2cに接続するパッド電極を配置する。これにより、外周に配置されたボール電極2bの再配線を削減できる。したがって、WCSPの再配線層形成の際に、配線層の数を増加させることなく、再配線を配線することができる。
1a 半導体基板
1b 絶縁膜
2a、2b、2c ボール電極
3 再配線層
3a、3b ポリイミド膜(樹脂膜)
4a、4b、4c パッド電極
5 接続電極
7 コンタクト配線
100 半導体装置
101a〜101d 第1〜第4の辺
Claims (10)
- 複数のパッド電極が上面に設けられた略矩形の半導体基板と、
前記複数のパッド電極に接続された複数のコンタクト配線が設けられ、前記半導体基板上に絶縁膜を介して配置された略矩形の再配線層と、
前記再配線層上に設けられた複数のボール電極と、を備え、
前記複数のパッド電極のうちの複数の第1のパッド電極が、前記半導体基板の基板面に平行な前記半導体基板の第1の辺に沿うように、前記半導体基板の外周上に並んで配置され、
前記複数のボール電極のうちの複数の第1のボール電極が、前記第1の辺に沿うように前記再配線層の外周上に並んで配置され、
前記複数の第1のボール電極の何れかは、前記複数の第1のパッド電極のうち下方に位置する前記第1のパッド電極と前記コンタクト配線を介して接続され、且つ、前記第1の辺の端部に一番近い前記第1のボール電極の下方には、前記第1のパッド電極が配置されていない
ことを特徴とする半導体装置。 - 前記複数のボール電極のうち前記再配線層上の中央側に位置し第1の電圧が印加される第2のボール電極と、前記複数の第1のパッド電極のうち前記第1の電圧が供給されるべき何れかと、を接続し、前記再配線層に設けられた第1の再配線と、
前記複数のボール電極のうち前記再配線層上の中央側に位置し前記第1の電圧とは異なる第2の電圧が印加される第3のボール電極と、前記複数の第1のパッド電極のうち前記第2の電圧が供給されるべき何れかと、を接続し、前記再配線層に設けられた第2の再配線と、
前記第1のパッド電極の上方の前記再配線層の領域よりも前記再配線層の外側に位置するように前記第1の辺に沿って前記再配線層の外周に配置され、前記第2の再配線に接続された外周配線と、をさらに備える
ことを特徴とする請求項1に記載の半導体装置。 - 前記外周配線は、前記第2の電圧が供給されるべき前記第1のパッド電極を介して、前記第2の再配線に接続されている
ことを特徴とする請求項2に記載の半導体装置。 - 前記外周配線は、前記第1の辺に沿う領域以外で両端を有することを特徴とする請求項2または3に記載の半導体装置。
- 前記第2のボール電極は、下方に位置し前記第1の電圧が供給されるべき前記パッド電極と前記コンタクト配線を介して接続されている
ことを特徴とする請求項2ないし4のいずれか一項に記載の半導体装置。 - 前記第3のボール電極は、下方に位置し前記第2の電圧が供給されるべき前記パッド電極と前記コンタクト配線を介して接続されている
ことを特徴とする請求項2ないし4のいずれか一項に記載の半導体装置。 - 前記第1の電圧は、電源電圧または接地電圧の何れか一方であり、
前記第2の電圧は、前記電源電圧または前記接地電圧の残りの他方であることを特徴とする請求項2ないし6のいずれか一項に記載の半導体装置。 - 前記第1のボール電極と前記コンタクト配線との間に配置され、前記第1のボール電極と前記コンタクト配線とを接続する接続電極をさらに備え、
前記接続電極の下面の面積は、前記第1のパッド電極の上面の面積よりも、大きいことを特徴とする請求項1に記載の半導体装置。 - 前記第1のボール電極と前記コンタクト配線との間に配置され、前記第1のボール電極と前記コンタクト配線とを接続する接続電極をさらに備え、
前記接続電極の下面の面積は、前記接続電極の下面に接続される前記コンタクト配線の上面の面積よりも、大きい
ことを特徴とする請求項1に記載の半導体装置。 - 複数のパッド電極が上面に設けられた略矩形の半導体基板と、
前記複数のパッド電極に接続された複数のコンタクト配線が設けられ、前記半導体基板上に絶縁膜を介して配置された略矩形の再配線層と、
前記再配線層上に設けられた複数のボール電極と、を備え、
前記複数のパッド電極のうちの複数の第1のパッド電極が、前記半導体基板の基板面に平行な前記半導体基板の第1の辺に沿うように、前記半導体基板の外周上に並んで配置され、
前記再配線層には、
前記複数のボール電極のうち前記再配線層上の中央側に位置し第1の電圧が印加される第1のボール電極と、前記複数の第1のパッド電極のうち前記第1の電圧が供給されるべき何れかと、を接続する第1の再配線が設けられ、
前記複数のボール電極のうち前記再配線層上の中央側に位置し前記第1の電圧とは異なる第2の電圧が印加される第2のボール電極と、前記複数の第1のパッド電極のうち前記第2の電圧が供給されるべき何れかと、を接続する第2の再配線が設けられ、
前記第1のパッド電極の上方の前記再配線層の領域よりも前記再配線層の外側に位置するように前記第1の辺に沿って前記再配線層の外周に配置され、前記第1の再配線に接続された外周配線が設けられている
ことを特徴とする半導体装置。
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JP2010127947A JP5355499B2 (ja) | 2010-06-03 | 2010-06-03 | 半導体装置 |
US13/047,042 US8450855B2 (en) | 2010-06-03 | 2011-03-14 | Semiconductor device |
TW100109012A TWI431745B (zh) | 2010-06-03 | 2011-03-16 | 半導體裝置 |
KR1020110024822A KR101192511B1 (ko) | 2010-06-03 | 2011-03-21 | 반도체 장치 |
CN201110070496.6A CN102270611B (zh) | 2010-06-03 | 2011-03-21 | 半导体装置 |
US13/864,923 US8878371B2 (en) | 2010-06-03 | 2013-04-17 | Semiconductor device |
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US9589946B2 (en) | 2015-04-28 | 2017-03-07 | Kabushiki Kaisha Toshiba | Chip with a bump connected to a plurality of wirings |
CN110289275A (zh) * | 2012-07-18 | 2019-09-27 | 索尼公司 | 固态成像装置和电子设备 |
CN112582276A (zh) * | 2019-09-28 | 2021-03-30 | 台湾积体电路制造股份有限公司 | 半导体结构及其制造方法 |
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JP5355499B2 (ja) | 2010-06-03 | 2013-11-27 | 株式会社東芝 | 半導体装置 |
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JP5752657B2 (ja) * | 2012-09-10 | 2015-07-22 | 株式会社東芝 | 半導体装置 |
KR102456667B1 (ko) | 2015-09-17 | 2022-10-20 | 삼성전자주식회사 | 재배선 패드를 갖는 반도체 소자 |
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CN102270611B (zh) | 2014-07-02 |
US20110298127A1 (en) | 2011-12-08 |
KR20110132966A (ko) | 2011-12-09 |
US8878371B2 (en) | 2014-11-04 |
CN102270611A (zh) | 2011-12-07 |
US20130256886A1 (en) | 2013-10-03 |
US8450855B2 (en) | 2013-05-28 |
KR101192511B1 (ko) | 2012-10-17 |
TWI431745B (zh) | 2014-03-21 |
JP5355499B2 (ja) | 2013-11-27 |
TW201214644A (en) | 2012-04-01 |
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