JP2011243965A - 浅く幅狭なトレンチ型のfetの製造方法及び関連構造体 - Google Patents
浅く幅狭なトレンチ型のfetの製造方法及び関連構造体 Download PDFInfo
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- 238000000034 method Methods 0.000 claims abstract description 30
- 239000002019 doping agent Substances 0.000 claims description 17
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- 239000007943 implant Substances 0.000 claims description 8
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- 239000000463 material Substances 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 3
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
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- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000021332 multicellular organism growth Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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Abstract
【解決手段】この方法は、側壁及び底部を有するトレンチ310を、第1導電型の半導体基板内に形成するステップを具える。この方法は更に、このトレンチ310内に実質的に均一のゲート誘電体316を形成するステップと、このトレンチ内に且つ前記ゲート誘電体316上にゲート電極318を形成するステップとを具える。又、この方法は、前記トレンチ310を形成した後に、前記半導体基板にドーピングを行って第2導電型のチャネル領域306を形成するドーピングステップを具える。一実施例では、このドーピングステップは、ゲート誘電体316を形成した後で且つゲート電極318を形成した後に実施する。他の実施例では、このドーピングステップは、ゲート誘電体316を形成した後であるが、ゲート電極318を形成する前に実施する。
【選択図】図3
Description
Claims (20)
- 側壁及び底部を有するトレンチを、第1導電型の半導体基板内に形成するステップと、
このトレンチ内に実質的に均一のゲート誘電体を形成するステップと、
前記トレンチ内に且つ前記ゲート誘電体上にゲート電極を形成するステップと、
前記トレンチを形成した後に、前記半導体基板にドーピングを行って第2導電型のチャネル領域を形成するステップと
を具える、浅く幅狭なトレンチ型の電界効果トランジスタ(トレンチ型のFET)を製造する方法。 - 請求項1に記載の方法において、前記ゲート電極を前記トレンチ内に形成した後に、前記チャネル領域を形成する方法。
- 請求項1に記載の方法において、前記ゲート電極を前記トレンチ内に形成した後に、前記チャネル領域を形成する方法。
- 請求項1に記載の方法において、前記半導体基板内にドーパントを注入することにより、前記ドーピングを実行する方法。
- 請求項1に記載の方法において、この方法が更に、前記ゲート誘電体を前記トレンチ内に形成する前に、このトレンチの前記底部を囲むように、前記第1導電型の底部注入領域を形成するステップを具え、この底部注入領域は前記半導体基板のドーパント濃度よりも大きいドーパント濃度を有するようにする方法。
- 請求項1に記載の方法において、前記ゲート電極を、前記半導体基板の頂面に対し同一平面となるように形成する方法。
- 請求項1に記載の方法において、前記ゲート電極を、前記半導体基板の頂面に対し、この頂面を化学機械研磨することにより同一平面となるように形成する方法。
- 請求項1に記載の方法において、この方法が更に、前記第1導電型のソース領域を、前記トレンチに隣接するように前記半導体基板内に形成する方法。
- 第1導電型の半導体基板内に位置し、側壁と底部とを有するトレンチを用いる浅く幅狭なトレンチ型の電界効果トランジスタ(トレンチ型のFET)であって、このトレンチ型のFETは更に、前記トレンチを用いて実行した処理により形成されており、この処理は、実質的に均一のゲート誘電体を前記トレンチ内に形成する処理と、前記トレンチ内で前記ゲート誘電体上にゲート電極を形成する処理と、前記半導体基板にドーピングを行って第2導電型のチャネル領域を形成する処理とを有しているトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、前記ゲート誘電体を前記トレンチ内に形成した後に、前記チャネル領域が形成されたトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、前記ゲート電極を前記トレンチ内に形成した後に、前記チャネル領域が形成されたトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、前記ドーピングは、前記半導体基板へのドーパント注入により実行されたトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、このトレンチ型の電界効果トランジスタは、前記ゲート誘電体を前記トレンチ内に形成する前に、前記第1導電型の底部注入領域であって、前記半導体基板のドーパント濃度よりも大きいドーパント濃度を有する当該底部注入領域を前記トレンチの前記底部を囲むように形成することにより製造されたトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、前記ゲート電極は、前記半導体基板の頂面に対し同一平面となるように形成されたトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、前記ゲート電極は、前記半導体基板の頂面に対し、この頂面を化学機械研磨することにより同一平面となるように形成されたトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、このトレンチ型の電界効果トランジスタは、前記第1導電型のソース領域を、前記トレンチに隣接するように前記半導体基板内に形成することにより製造されたトレンチ型の電界効果トランジスタ。
- 請求項16に記載のトレンチ型の電界効果トランジスタにおいて、前記ソース領域はほぼ0.3ミクロンよりも浅い深さを有しているトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、前記ゲート誘電体の底部の厚さは実質的に側壁の厚さに等しくなっているトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、前記ゲート誘電体はポリシリコンを有しているトレンチ型の電界効果トランジスタ。
- 請求項9に記載のトレンチ型の電界効果トランジスタにおいて、前記トレンチの幅はほぼ0.3ミクロンよりも狭くなっているトレンチ型の電界効果トランジスタ。
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US9123805B2 (en) | 2013-11-14 | 2015-09-01 | Alpha And Omega Semiconductor Incorporated | Method to manufacture short channel trench MOSFET |
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- 2011-03-19 EP EP11002273A patent/EP2388805A1/en not_active Withdrawn
- 2011-04-02 CN CN201110085341.XA patent/CN102254825B/zh active Active
- 2011-04-19 JP JP2011093011A patent/JP5973135B2/ja active Active
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2017
- 2017-04-10 US US15/483,544 patent/US20170213909A1/en not_active Abandoned
Patent Citations (6)
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JPH06224437A (ja) * | 1992-07-24 | 1994-08-12 | Siliconix Inc | 電界効果トランジスタ及びその製造方法 |
JPH07263692A (ja) * | 1994-02-04 | 1995-10-13 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JP2005056912A (ja) * | 2003-08-05 | 2005-03-03 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2005191359A (ja) * | 2003-12-26 | 2005-07-14 | Nec Electronics Corp | 半導体装置及びその製造方法 |
JP2008530800A (ja) * | 2005-02-11 | 2008-08-07 | アルファ アンド オメガ セミコンダクター インコーポレイテッド | パワーmosデバイス |
US20090315104A1 (en) * | 2008-06-20 | 2009-12-24 | Force Mos Technology Co. Ltd. | Trench MOSFET with shallow trench structures |
Also Published As
Publication number | Publication date |
---|---|
EP2388805A1 (en) | 2011-11-23 |
US20170213909A1 (en) | 2017-07-27 |
JP5973135B2 (ja) | 2016-08-23 |
CN102254825B (zh) | 2016-01-20 |
US9653597B2 (en) | 2017-05-16 |
CN102254825A (zh) | 2011-11-23 |
US20110284950A1 (en) | 2011-11-24 |
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