JP2011161521A5 - - Google Patents

Download PDF

Info

Publication number
JP2011161521A5
JP2011161521A5 JP2010023502A JP2010023502A JP2011161521A5 JP 2011161521 A5 JP2011161521 A5 JP 2011161521A5 JP 2010023502 A JP2010023502 A JP 2010023502A JP 2010023502 A JP2010023502 A JP 2010023502A JP 2011161521 A5 JP2011161521 A5 JP 2011161521A5
Authority
JP
Japan
Prior art keywords
substrate
strain
holding
amount
posture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010023502A
Other languages
English (en)
Japanese (ja)
Other versions
JP5083339B2 (ja
JP2011161521A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2010023502A external-priority patent/JP5083339B2/ja
Priority to JP2010023502A priority Critical patent/JP5083339B2/ja
Priority to TW099142821A priority patent/TW201133687A/zh
Priority to KR1020100125400A priority patent/KR20110090753A/ko
Priority to US13/014,143 priority patent/US20110190927A1/en
Priority to CN201110035364XA priority patent/CN102163571A/zh
Publication of JP2011161521A publication Critical patent/JP2011161521A/ja
Publication of JP2011161521A5 publication Critical patent/JP2011161521A5/ja
Publication of JP5083339B2 publication Critical patent/JP5083339B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010023502A 2010-02-04 2010-02-04 基板搬送装置及び基板搬送方法並びに記憶媒体 Expired - Fee Related JP5083339B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010023502A JP5083339B2 (ja) 2010-02-04 2010-02-04 基板搬送装置及び基板搬送方法並びに記憶媒体
TW099142821A TW201133687A (en) 2010-02-04 2010-12-08 Substrate transfer apparatus, substrate transfer method and storage medium
KR1020100125400A KR20110090753A (ko) 2010-02-04 2010-12-09 기판 반송 장치 및 기판 반송 방법과 기억 매체
US13/014,143 US20110190927A1 (en) 2010-02-04 2011-01-26 Substrate carrying device, substrate carrying method and storage medium
CN201110035364XA CN102163571A (zh) 2010-02-04 2011-01-31 基板输送装置和基板输送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010023502A JP5083339B2 (ja) 2010-02-04 2010-02-04 基板搬送装置及び基板搬送方法並びに記憶媒体

Publications (3)

Publication Number Publication Date
JP2011161521A JP2011161521A (ja) 2011-08-25
JP2011161521A5 true JP2011161521A5 (enExample) 2012-03-08
JP5083339B2 JP5083339B2 (ja) 2012-11-28

Family

ID=44342330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010023502A Expired - Fee Related JP5083339B2 (ja) 2010-02-04 2010-02-04 基板搬送装置及び基板搬送方法並びに記憶媒体

Country Status (5)

Country Link
US (1) US20110190927A1 (enExample)
JP (1) JP5083339B2 (enExample)
KR (1) KR20110090753A (enExample)
CN (1) CN102163571A (enExample)
TW (1) TW201133687A (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5566669B2 (ja) * 2009-11-19 2014-08-06 昭和電工株式会社 インライン式成膜装置及び磁気記録媒体の製造方法
JP5609856B2 (ja) * 2011-12-20 2014-10-22 株式会社安川電機 搬送ロボット
CN102569142B (zh) * 2012-02-03 2017-04-26 上海华虹宏力半导体制造有限公司 硅片转移装置、转移托环、半导体工艺反应设备
JP5884624B2 (ja) * 2012-05-02 2016-03-15 東京エレクトロン株式会社 基板処理装置、調整方法及び記憶媒体
KR102098596B1 (ko) * 2013-01-11 2020-04-09 삼성디스플레이 주식회사 기판 이송 장치 및 그 구동 방법
US9349643B2 (en) * 2013-04-01 2016-05-24 Brewer Science Inc. Apparatus and method for thin wafer transfer
JP6190692B2 (ja) * 2013-10-22 2017-08-30 日本電産サンキョー株式会社 産業用ロボット
WO2016129102A1 (ja) * 2015-02-13 2016-08-18 川崎重工業株式会社 基板搬送ロボットおよびその運転方法
CA2981800C (en) * 2015-04-13 2023-09-26 Henrik Falk A lifting jig for lifting elements along the facade of a building
WO2017116709A1 (en) * 2015-12-30 2017-07-06 Mattson Technology, Inc. Substrate support in a millisecond anneal system
JP6671993B2 (ja) 2016-02-01 2020-03-25 東京エレクトロン株式会社 基板受け渡し位置の教示方法及び基板処理システム
KR102105580B1 (ko) * 2016-03-04 2020-04-29 카와사키 주코교 카부시키 카이샤 기판 반송 장치 및 기판 반송 로봇의 교시 방법
JP2017183665A (ja) * 2016-03-31 2017-10-05 芝浦メカトロニクス株式会社 基板搬送装置、基板処理装置及び基板処理方法
US10115687B2 (en) * 2017-02-03 2018-10-30 Applied Materials, Inc. Method of pattern placement correction
JP6440757B2 (ja) * 2017-03-16 2018-12-19 キヤノン株式会社 基板搬送システム、リソグラフィ装置、および物品の製造方法
CN106826927B (zh) * 2017-03-28 2019-09-13 芯导精密(北京)设备有限公司 一种半导体机械手机架
JP6789384B2 (ja) * 2017-04-06 2020-11-25 東京エレクトロン株式会社 基板処理装置および基板搬送方法
TWI622777B (zh) * 2017-07-07 2018-05-01 Electronic component picking test classification equipment
CN109273391B (zh) * 2017-07-17 2021-10-26 台湾积体电路制造股份有限公司 晶圆传递模块及传递晶圆的方法
JP7064885B2 (ja) * 2018-01-05 2022-05-11 東京エレクトロン株式会社 基板把持機構、基板搬送装置及び基板処理システム
WO2020117201A1 (en) * 2018-12-03 2020-06-11 Lam Research Corporation Pin-lifter test substrate
CN114446843B (zh) * 2020-11-02 2025-05-27 上海华力集成电路制造有限公司 晶圆传送模块及其传送预传送的晶圆的方法
JP7607395B2 (ja) * 2020-12-09 2024-12-27 川崎重工業株式会社 基板搬送ロボット
KR102721980B1 (ko) 2022-02-24 2024-10-25 삼성전자주식회사 기판 정렬 장치 및 이를 이용한 기판 정렬 방법
KR102767876B1 (ko) * 2022-10-27 2025-02-19 세메스 주식회사 티칭 방법, 티칭 방법을 실행하는 매체에 저장된 프로그램 및 반송 시스템

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153788U (ja) * 1984-03-21 1985-10-14 シャープ株式会社 位置検知センサ付ロボツトハンド
JP2920454B2 (ja) * 1993-06-10 1999-07-19 東京エレクトロン株式会社 処理装置
US6330052B1 (en) * 1997-06-13 2001-12-11 Canon Kabushiki Kaisha Exposure apparatus and its control method, stage apparatus, and device manufacturing method
TW432580B (en) * 1998-09-29 2001-05-01 Applied Materials Inc Piezoelectric method and apparatus for semiconductor wafer detection
US6546307B1 (en) * 1999-08-20 2003-04-08 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for detecting proper orientation of a semiconductor wafer in a wafer transfer system
US6753498B2 (en) * 2000-07-20 2004-06-22 Tokyo Electron Limited Automated electrode replacement apparatus for a plasma processing system
JP4055200B2 (ja) * 2002-03-15 2008-03-05 株式会社安川電機 基板搬送用フォーク
KR101015778B1 (ko) * 2003-06-03 2011-02-22 도쿄엘렉트론가부시키가이샤 기판 처리장치 및 기판 수수 위치의 조정 방법
JP4403841B2 (ja) * 2004-03-19 2010-01-27 株式会社安川電機 ウェハ有無検出装置およびこれを用いた搬送ロボット装置
JP4809594B2 (ja) * 2004-08-02 2011-11-09 東京エレクトロン株式会社 検査装置
US7680559B2 (en) * 2005-02-08 2010-03-16 Lam Research Corporation Wafer movement control macros
JP4535499B2 (ja) * 2005-04-19 2010-09-01 東京エレクトロン株式会社 加熱装置、塗布、現像装置及び加熱方法
US7766566B2 (en) * 2005-08-03 2010-08-03 Tokyo Electron Limited Developing treatment apparatus and developing treatment method
JP4684805B2 (ja) * 2005-08-25 2011-05-18 東京エレクトロン株式会社 プローブ装置及び被検査体とプローブとの接触圧の調整方法
US8057153B2 (en) * 2006-09-05 2011-11-15 Tokyo Electron Limited Substrate transfer device, substrate processing apparatus and substrate transfer method
JP5003315B2 (ja) * 2007-07-03 2012-08-15 東京エレクトロン株式会社 基板処理装置及び基板処理方法並びに記憶媒体

Similar Documents

Publication Publication Date Title
JP2011161521A5 (enExample)
JP2012089809A5 (enExample)
EP2586577A4 (en) ROBOT CONTROL DEVICE
WO2009069224A1 (ja) 移載装置
EP2436620A3 (en) Automated case unit storage system with autonomous transport vehicle
WO2012151126A3 (en) Adaptable container handling robot with boundary sensing subsystem
WO2011108944A3 (en) Method and apparatus for sensing object load engagement, transportation and disengagement by automated vehicles
EP3056321A3 (en) Loading/unloading robot
JP2013030747A5 (ja) 基板処理装置、及び基板処理装置のデータ解析方法並びにプログラム
JP2011146663A5 (enExample)
RU2017118173A (ru) Транспортирующее устройство для подъема/опускания контейнера, предназначенного для транспортировки изделий
JP2012245570A5 (ja) ロボット制御装置及びロボット装置の制御方法、コンピューター・プログラム、プログラム記憶媒体、並びにロボット装置
EP2863284A3 (en) Method and apparatus for using unique landmarks to locate industrial vehicles at start-up
JP2016523793A5 (enExample)
WO2009072199A1 (ja) 基板搬送装置及び基板搬送装置の制御方法
EP4234443A3 (en) Method for determining a loction of an autonomous vehicle
CA2652114A1 (en) Method and system for transporting inventory items
EP2031535A3 (en) Association of support surfaces and beds
WO2011119296A3 (en) Robotic automated storage and retrieval system mixed pallet build system
JP2010032515A5 (enExample)
WO2012054175A3 (en) Transport apparatus
JP2009168860A5 (enExample)
EP2544121A4 (en) A CONTROL DEVICE EMBEDDED IN A RECORDING MEDIUM DEVICE, A RECORDING MEDIUM DEVICE, A RECORDING MEDIUM DEVICE MANUFACTURING SYSTEM AND A RECORDING MEDIUM DEVICE MANUFACTURING METHOD
WO2011119167A3 (en) Associated file
JP2011060924A5 (ja) 基板処理装置、基板処理方法および半導体装置の製造方法