JP2011080042A5 - - Google Patents
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- Publication number
- JP2011080042A5 JP2011080042A5 JP2010194140A JP2010194140A JP2011080042A5 JP 2011080042 A5 JP2011080042 A5 JP 2011080042A5 JP 2010194140 A JP2010194140 A JP 2010194140A JP 2010194140 A JP2010194140 A JP 2010194140A JP 2011080042 A5 JP2011080042 A5 JP 2011080042A5
- Authority
- JP
- Japan
- Prior art keywords
- hydroxyquinoline
- amino
- group
- alkanolamine
- formulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US23826809P | 2009-08-31 | 2009-08-31 | |
| US61/238,268 | 2009-08-31 | ||
| US12/859,624 | 2010-08-19 | ||
| US12/859,624 US8518865B2 (en) | 2009-08-31 | 2010-08-19 | Water-rich stripping and cleaning formulation and method for using same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011080042A JP2011080042A (ja) | 2011-04-21 |
| JP2011080042A5 true JP2011080042A5 (https=) | 2012-05-24 |
| JP5385231B2 JP5385231B2 (ja) | 2014-01-08 |
Family
ID=43066059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010194140A Expired - Fee Related JP5385231B2 (ja) | 2009-08-31 | 2010-08-31 | 水系ストリッピング及び洗浄配合物、並びにその使用方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US8518865B2 (https=) |
| EP (1) | EP2290046B1 (https=) |
| JP (1) | JP5385231B2 (https=) |
| KR (1) | KR101277129B1 (https=) |
| CN (1) | CN102004399B (https=) |
| TW (1) | TWI433930B (https=) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8263539B2 (en) | 2005-10-28 | 2012-09-11 | Dynaloy, Llc | Dynamic multi-purpose composition for the removal of photoresists and methods for its use |
| US9329486B2 (en) | 2005-10-28 | 2016-05-03 | Dynaloy, Llc | Dynamic multi-purpose composition for the removal of photoresists and method for its use |
| US7632796B2 (en) | 2005-10-28 | 2009-12-15 | Dynaloy, Llc | Dynamic multi-purpose composition for the removal of photoresists and method for its use |
| US8889609B2 (en) * | 2011-03-16 | 2014-11-18 | Air Products And Chemicals, Inc. | Cleaning formulations and method of using the cleaning formulations |
| CN112553017A (zh) | 2011-05-20 | 2021-03-26 | 艺康美国股份有限公司 | 非腐蚀性炉具除脂剂浓缩物 |
| CN103182384B (zh) * | 2011-12-31 | 2015-07-08 | 中芯国际集成电路制造(上海)有限公司 | 一种对焊盘表面进行清洗的方法 |
| US9158202B2 (en) | 2012-11-21 | 2015-10-13 | Dynaloy, Llc | Process and composition for removing substances from substrates |
| JP6198384B2 (ja) | 2012-11-28 | 2017-09-20 | 富士フイルム株式会社 | 半導体基板のエッチング方法及び半導体素子の製造方法 |
| CN103308654B (zh) * | 2013-06-13 | 2016-08-10 | 深圳市华星光电技术有限公司 | 用于测试光阻剥离液中水分含量的方法 |
| KR20230129193A (ko) | 2013-12-06 | 2023-09-06 | 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. | 표면 잔류물 제거용 세정 제형 |
| US20150219996A1 (en) * | 2014-02-06 | 2015-08-06 | Dynaloy, Llc | Composition for removing substances from substrates |
| KR20160094640A (ko) | 2015-02-02 | 2016-08-10 | 동우 화인켐 주식회사 | 티타늄막 식각액 조성물 |
| CN106919011B (zh) * | 2015-12-25 | 2021-12-17 | 安集微电子科技（上海）股份有限公司 | 一种富含水的羟胺剥离清洗液 |
| KR101697336B1 (ko) * | 2016-03-03 | 2017-01-17 | 주식회사 엘지화학 | 액정 배향막의 제조방법 |
| TWI608311B (zh) * | 2016-03-25 | 2017-12-11 | 達興材料股份有限公司 | 一種光阻脫除組成物及一種利用該光阻脫除組成物進行微影製程的電子元件的製造方法 |
| US11035044B2 (en) | 2017-01-23 | 2021-06-15 | Versum Materials Us, Llc | Etching solution for tungsten and GST films |
| US11136536B2 (en) | 2017-12-01 | 2021-10-05 | Ecolab Usa Inc. | Cleaning compositions and methods for removing baked on grease from fryers and other hot surfaces |
| CN111902379B (zh) | 2018-03-28 | 2023-02-17 | 富士胶片电子材料美国有限公司 | 清洗组合物 |
| US11149235B2 (en) | 2018-07-20 | 2021-10-19 | Entegris, Inc. | Cleaning composition with corrosion inhibitor |
| JP6858209B2 (ja) * | 2019-02-20 | 2021-04-14 | 東京応化工業株式会社 | リソグラフィー用洗浄液、及び基板の洗浄方法 |
| TWI719648B (zh) * | 2019-09-23 | 2021-02-21 | 達興材料股份有限公司 | 一種樹脂清洗劑 |
| KR20220075230A (ko) | 2019-09-27 | 2022-06-07 | 버슘머트리얼즈 유에스, 엘엘씨 | 에칭 잔류물을 제거하기 위한 조성물, 사용 방법 및 이의 용도 |
| JP7668790B2 (ja) * | 2019-09-30 | 2025-04-25 | バーサム マテリアルズ ユーエス，リミティド ライアビリティ カンパニー | フォトレジスト除去剤 |
| KR102334425B1 (ko) * | 2019-11-21 | 2021-12-01 | 엘티씨 (주) | 디스플레이 제조용 포토레지스트 박리액 조성물 |
| KR20230078750A (ko) | 2020-10-02 | 2023-06-02 | 엔테그리스, 아이엔씨. | 아민으로부터 금속 종을 제거하기 위한 막 |
| US12247185B2 (en) | 2020-11-25 | 2025-03-11 | Ecolab Usa Inc. | Multipurpose alkaline compositions and methods of use |
| US12460157B2 (en) | 2021-03-12 | 2025-11-04 | Ecolab Usa Inc. | Multipurpose acidic compositions and methods of use |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4428871A (en) | 1981-09-23 | 1984-01-31 | J. T. Baker Chemical Company | Stripping compositions and methods of stripping resists |
| US4395479A (en) | 1981-09-23 | 1983-07-26 | J. T. Baker Chemical Company | Stripping compositions and methods of stripping resists |
| US4401748A (en) | 1982-09-07 | 1983-08-30 | J. T. Baker Chemical Company | Stripping compositions and methods of stripping resists |
| US6110881A (en) * | 1990-11-05 | 2000-08-29 | Ekc Technology, Inc. | Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials |
| US5981454A (en) * | 1993-06-21 | 1999-11-09 | Ekc Technology, Inc. | Post clean treatment composition comprising an organic acid and hydroxylamine |
| US7205265B2 (en) * | 1990-11-05 | 2007-04-17 | Ekc Technology, Inc. | Cleaning compositions and methods of use thereof |
| US5279771A (en) * | 1990-11-05 | 1994-01-18 | Ekc Technology, Inc. | Stripping compositions comprising hydroxylamine and alkanolamine |
| US5496491A (en) * | 1991-01-25 | 1996-03-05 | Ashland Oil Company | Organic stripping composition |
| US5556482A (en) * | 1991-01-25 | 1996-09-17 | Ashland, Inc. | Method of stripping photoresist with composition containing inhibitor |
| EP0578507B1 (en) | 1992-07-09 | 2005-09-28 | Ekc Technology, Inc. | Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials |
| US5308745A (en) | 1992-11-06 | 1994-05-03 | J. T. Baker Inc. | Alkaline-containing photoresist stripping compositions producing reduced metal corrosion with cross-linked or hardened resist resins |
| US7144849B2 (en) * | 1993-06-21 | 2006-12-05 | Ekc Technology, Inc. | Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials |
| US20040134873A1 (en) * | 1996-07-25 | 2004-07-15 | Li Yao | Abrasive-free chemical mechanical polishing composition and polishing process containing same |
| US6030932A (en) | 1996-09-06 | 2000-02-29 | Olin Microelectronic Chemicals | Cleaning composition and method for removing residues |
| US5798323A (en) * | 1997-05-05 | 1998-08-25 | Olin Microelectronic Chemicals, Inc. | Non-corrosive stripping and cleaning composition |
| JP3773227B2 (ja) | 1997-10-16 | 2006-05-10 | 東京応化工業株式会社 | レジスト用剥離液組成物およびこれを用いたレジスト剥離方法 |
| DE69941088D1 (de) * | 1998-05-18 | 2009-08-20 | Mallinckrodt Baker Inc | Alkalische, silikat enthaltende reinigungslösungen für mikroelektronische substrate |
| US6328943B1 (en) * | 1998-07-09 | 2001-12-11 | Betzdearborn Inc. | Inhibition of pyrophoric iron sulfide activity |
| JP2000056480A (ja) | 1998-08-10 | 2000-02-25 | Tokyo Ohka Kogyo Co Ltd | レジスト用剥離液組成物およびこれを用いたレジスト剥離方法 |
| JP2000199971A (ja) | 1999-01-07 | 2000-07-18 | Tokyo Ohka Kogyo Co Ltd | ホトレジスト用剥離液組成物およびこれを用いたホトレジスト剥離方法 |
| JP4224651B2 (ja) | 1999-02-25 | 2009-02-18 | 三菱瓦斯化学株式会社 | レジスト剥離剤およびそれを用いた半導体素子の製造方法 |
| US6475966B1 (en) * | 2000-02-25 | 2002-11-05 | Shipley Company, L.L.C. | Plasma etching residue removal |
| US6599370B2 (en) * | 2000-10-16 | 2003-07-29 | Mallinckrodt Inc. | Stabilized alkaline compositions for cleaning microelectronic substrates |
| MY143399A (en) * | 2001-07-09 | 2011-05-13 | Avantor Performance Mat Inc | Microelectronic cleaning compositons containing ammonia-free fluoride salts for selective photoresist stripping and plasma ash residue cleaning |
| MY131912A (en) * | 2001-07-09 | 2007-09-28 | Avantor Performance Mat Inc | Ammonia-free alkaline microelectronic cleaning compositions with improved substrate compatibility |
| US7393819B2 (en) * | 2002-07-08 | 2008-07-01 | Mallinckrodt Baker, Inc. | Ammonia-free alkaline microelectronic cleaning compositions with improved substrate compatibility |
| TWI315030B (en) * | 2003-06-26 | 2009-09-21 | Dongwoo Fine Chem Co Ltd | Photoresist stripper composition, and exfoliation method of a photoresist using it |
| CA2544198C (en) | 2003-10-29 | 2011-07-26 | Mallinckrodt Baker, Inc. | Alkaline, post plasma etch/ash residue removers and photoresist stripping compositions containing metal-halide corrosion inhibitors |
| US8338087B2 (en) | 2004-03-03 | 2012-12-25 | Advanced Technology Materials, Inc | Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate |
| KR20050110955A (ko) * | 2004-05-20 | 2005-11-24 | 금호석유화학 주식회사 | 포토레지스트용 스트리퍼 조성물 및 이를 포토레지스트박리에 사용하는 방법 |
| KR101088568B1 (ko) * | 2005-04-19 | 2011-12-05 | 아반토르 퍼포먼스 머티리얼스, 인크. | 갈바닉 부식을 억제하는 비수성 포토레지스트 스트립퍼 |
| US7727420B2 (en) * | 2005-05-17 | 2010-06-01 | Ppt Research | Corrosion inhibiting compositions |
| US7879782B2 (en) * | 2005-10-13 | 2011-02-01 | Air Products And Chemicals, Inc. | Aqueous cleaning composition and method for using same |
| US20070179072A1 (en) * | 2006-01-30 | 2007-08-02 | Rao Madhukar B | Cleaning formulations |
| US7879783B2 (en) * | 2007-01-11 | 2011-02-01 | Air Products And Chemicals, Inc. | Cleaning composition for semiconductor substrates |
| TW200946448A (en) * | 2007-10-29 | 2009-11-16 | Ekc Technology Inc | Stabilization of hydroxylamine containing solutions and method for their preparation |
| WO2009064745A1 (en) * | 2007-11-13 | 2009-05-22 | Sachem, Inc. | High negative zeta potential polyhedral silsesquioxane composition and method for damage free semiconductor wet clean |
-
2010
- 2010-08-19 US US12/859,624 patent/US8518865B2/en active Active
- 2010-08-25 TW TW099128531A patent/TWI433930B/zh not_active IP Right Cessation
- 2010-08-27 EP EP10174406.8A patent/EP2290046B1/en not_active Not-in-force
- 2010-08-30 KR KR1020100084270A patent/KR101277129B1/ko not_active Expired - Fee Related
- 2010-08-31 CN CN201010269271.9A patent/CN102004399B/zh not_active Expired - Fee Related
- 2010-08-31 JP JP2010194140A patent/JP5385231B2/ja not_active Expired - Fee Related
-
2013
- 2013-07-08 US US13/936,656 patent/US9201308B2/en active Active
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