JP2010528334A5 - - Google Patents

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Publication number
JP2010528334A5
JP2010528334A5 JP2010508923A JP2010508923A JP2010528334A5 JP 2010528334 A5 JP2010528334 A5 JP 2010528334A5 JP 2010508923 A JP2010508923 A JP 2010508923A JP 2010508923 A JP2010508923 A JP 2010508923A JP 2010528334 A5 JP2010528334 A5 JP 2010528334A5
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Japan
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examples
wafer
filtered
film
solution
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JP2010508923A
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English (en)
Japanese (ja)
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JP5327217B2 (ja
JP2010528334A (ja
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Priority claimed from US11/752,040 external-priority patent/US20080292987A1/en
Priority claimed from US11/872,962 external-priority patent/US8017296B2/en
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Publication of JP2010528334A publication Critical patent/JP2010528334A/ja
Publication of JP2010528334A5 publication Critical patent/JP2010528334A5/ja
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Publication of JP5327217B2 publication Critical patent/JP5327217B2/ja
Expired - Fee Related legal-status Critical Current
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JP2010508923A 2007-05-22 2008-05-20 縮合芳香族環を含む反射防止膜組成物 Expired - Fee Related JP5327217B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US11/752,040 US20080292987A1 (en) 2007-05-22 2007-05-22 Antireflective Coating Composition Comprising Fused Aromatic Rings
US11/752,040 2007-05-22
US11/872,962 US8017296B2 (en) 2007-05-22 2007-10-16 Antireflective coating composition comprising fused aromatic rings
US11/872,962 2007-10-16
PCT/IB2008/001284 WO2008142546A2 (en) 2007-05-22 2008-05-20 An antireflective coating composition comprising fused aromatic rings

Publications (3)

Publication Number Publication Date
JP2010528334A JP2010528334A (ja) 2010-08-19
JP2010528334A5 true JP2010528334A5 (https=) 2011-05-26
JP5327217B2 JP5327217B2 (ja) 2013-10-30

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JP2010508923A Expired - Fee Related JP5327217B2 (ja) 2007-05-22 2008-05-20 縮合芳香族環を含む反射防止膜組成物

Country Status (7)

Country Link
US (1) US8017296B2 (https=)
EP (1) EP2158279B1 (https=)
JP (1) JP5327217B2 (https=)
KR (1) KR101532102B1 (https=)
CN (1) CN101679800B (https=)
TW (1) TWI424033B (https=)
WO (1) WO2008142546A2 (https=)

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