JP2010519771A5 - - Google Patents

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JP2010519771A5
JP2010519771A5 JP2009551052A JP2009551052A JP2010519771A5 JP 2010519771 A5 JP2010519771 A5 JP 2010519771A5 JP 2009551052 A JP2009551052 A JP 2009551052A JP 2009551052 A JP2009551052 A JP 2009551052A JP 2010519771 A5 JP2010519771 A5 JP 2010519771A5
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spectrum
spectra
difference
rotation
squares
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JP2009551052A
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JP2010519771A (ja
JP5654753B2 (ja
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Priority claimed from PCT/US2008/054807 external-priority patent/WO2008103964A2/en
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JP2009551052A 2007-02-23 2008-02-22 スペクトルを使用した研磨終了点の決定 Active JP5654753B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US89148707P 2007-02-23 2007-02-23
US60/891,487 2007-02-23
PCT/US2008/054807 WO2008103964A2 (en) 2007-02-23 2008-02-22 Using spectra to determine polishing endpoints

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JP2013127106A Division JP5774059B2 (ja) 2007-02-23 2013-06-18 スペクトルを使用した研磨終了点の決定

Publications (3)

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JP2010519771A JP2010519771A (ja) 2010-06-03
JP2010519771A5 true JP2010519771A5 (enExample) 2014-05-29
JP5654753B2 JP5654753B2 (ja) 2015-01-14

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JP2009551052A Active JP5654753B2 (ja) 2007-02-23 2008-02-22 スペクトルを使用した研磨終了点の決定
JP2013127106A Active JP5774059B2 (ja) 2007-02-23 2013-06-18 スペクトルを使用した研磨終了点の決定

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US (2) US8569174B2 (enExample)
EP (1) EP2125291A4 (enExample)
JP (2) JP5654753B2 (enExample)
KR (3) KR101504508B1 (enExample)
TW (1) TWI445098B (enExample)
WO (1) WO2008103964A2 (enExample)

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