JP2010517279A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010517279A5 JP2010517279A5 JP2009546682A JP2009546682A JP2010517279A5 JP 2010517279 A5 JP2010517279 A5 JP 2010517279A5 JP 2009546682 A JP2009546682 A JP 2009546682A JP 2009546682 A JP2009546682 A JP 2009546682A JP 2010517279 A5 JP2010517279 A5 JP 2010517279A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- thermal
- optical
- optical element
- manipulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 290
- 238000003384 imaging method Methods 0.000 claims description 119
- 230000004075 alteration Effects 0.000 claims description 105
- 230000009471 action Effects 0.000 claims description 77
- 238000000034 method Methods 0.000 claims description 51
- 238000012937 correction Methods 0.000 claims description 32
- 230000008859 change Effects 0.000 claims description 23
- 230000000694 effects Effects 0.000 claims description 13
- 230000002123 temporal effect Effects 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 11
- 230000036961 partial effect Effects 0.000 claims description 10
- 238000001393 microlithography Methods 0.000 claims description 4
- 230000000007 visual effect Effects 0.000 claims 1
- 230000008901 benefit Effects 0.000 description 16
- 238000010438 heat treatment Methods 0.000 description 16
- 239000000758 substrate Substances 0.000 description 13
- 238000005286 illumination Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 230000001419 dependent effect Effects 0.000 description 8
- 230000001960 triggered effect Effects 0.000 description 8
- 238000013459 approach Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 238000005457 optimization Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000007596 consolidation process Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007004723.3 | 2007-01-22 | ||
| DE102007004723 | 2007-01-22 | ||
| PCT/EP2008/000459 WO2008089953A1 (en) | 2007-01-22 | 2008-01-22 | Method for improving imaging properties of an optical system, and optical system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010517279A JP2010517279A (ja) | 2010-05-20 |
| JP2010517279A5 true JP2010517279A5 (enExample) | 2011-03-10 |
| JP5193227B2 JP5193227B2 (ja) | 2013-05-08 |
Family
ID=39496034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009546682A Active JP5193227B2 (ja) | 2007-01-22 | 2008-01-22 | 半導体リソグラフィシステム及びその使用方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US8462315B2 (enExample) |
| EP (1) | EP2126635B1 (enExample) |
| JP (1) | JP5193227B2 (enExample) |
| KR (1) | KR101452534B1 (enExample) |
| CN (1) | CN101589342A (enExample) |
| AT (1) | ATE554427T1 (enExample) |
| WO (1) | WO2008089953A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5193227B2 (ja) | 2007-01-22 | 2013-05-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 半導体リソグラフィシステム及びその使用方法 |
| DE102008042356A1 (de) * | 2008-09-25 | 2010-04-08 | Carl Zeiss Smt Ag | Projektionsbelichtungsanlage mit optimierter Justagemöglichkeit |
| DE102010044969A1 (de) * | 2010-09-10 | 2012-03-15 | Carl Zeiss Smt Gmbh | Verfahren zum Betreiben einer Projektionsbelichtungsanlage sowie Steuervorrichtung |
| KR101529807B1 (ko) | 2011-01-20 | 2015-06-17 | 칼 짜이스 에스엠티 게엠베하 | 투영 노광 도구를 조작하는 방법 |
| DE102011077784A1 (de) * | 2011-06-20 | 2012-12-20 | Carl Zeiss Smt Gmbh | Projektionsanordnung |
| DE102012212758A1 (de) * | 2012-07-20 | 2014-01-23 | Carl Zeiss Smt Gmbh | Systemkorrektur aus langen Zeitskalen |
| KR101668984B1 (ko) * | 2013-09-14 | 2016-10-24 | 칼 짜이스 에스엠티 게엠베하 | 마이크로리소그래피 투영 장치의 동작 방법 |
| KR101398934B1 (ko) * | 2014-01-23 | 2014-05-27 | 국방과학연구소 | 불균일 보정 기능이 제공되는 다 구간 시계 영상 확보 방식 적외선 광각 카메라 |
| DE102015220537A1 (de) * | 2015-10-21 | 2016-10-27 | Carl Zeiss Smt Gmbh | Projektionsbelichtungsanlage mit mindestens einem Manipulator |
| US10282822B2 (en) * | 2016-12-01 | 2019-05-07 | Almalence Inc. | Digital correction of optical system aberrations |
| WO2018233997A1 (de) * | 2017-06-23 | 2018-12-27 | Jenoptik Optical Systems Gmbh | Verfahren zur unterstützung einer justage eines strahlaufweiters, justageunterstützungsvorrichtung und strahlaufweiter |
| CN115494639B (zh) * | 2022-11-04 | 2023-02-17 | 中国航天三江集团有限公司 | 高功率激光光束合成系统内通道热效应仿真方法 |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4540251A (en) * | 1983-12-01 | 1985-09-10 | International Business Machines Corporation | Thermo-mechanical overlay signature tuning for Perkin-Elmer mask aligner |
| JPH05291117A (ja) * | 1992-04-14 | 1993-11-05 | Hitachi Ltd | 投影露光方法およびその装置 |
| JP3291818B2 (ja) * | 1993-03-16 | 2002-06-17 | 株式会社ニコン | 投影露光装置、及び該装置を用いる半導体集積回路製造方法 |
| US5392119A (en) * | 1993-07-13 | 1995-02-21 | Litel Instruments | Plate correction of imaging systems |
| JP3368091B2 (ja) * | 1994-04-22 | 2003-01-20 | キヤノン株式会社 | 投影露光装置及びデバイスの製造方法 |
| JPH08241861A (ja) * | 1996-04-08 | 1996-09-17 | Nikon Corp | Ｌｓｉ素子製造方法、及びｌｓｉ素子製造装置 |
| US5888675A (en) * | 1996-12-04 | 1999-03-30 | Advanced Micro Devices, Inc. | Reticle that compensates for radiation-induced lens error in a photolithographic system |
| US5828455A (en) * | 1997-03-07 | 1998-10-27 | Litel Instruments | Apparatus, method of measurement, and method of data analysis for correction of optical system |
| US5978085A (en) * | 1997-03-07 | 1999-11-02 | Litel Instruments | Apparatus method of measurement and method of data analysis for correction of optical system |
| DE19827602A1 (de) * | 1998-06-20 | 1999-12-23 | Zeiss Carl Fa | Verfahren zur Korrektur nicht-rotationssymmetrischer Bildfehler |
| DE19827603A1 (de) | 1998-06-20 | 1999-12-23 | Zeiss Carl Fa | Optisches System, insbesondere Projektions-Belichtungsanlage der Mikrolithographie |
| DE10000191B8 (de) * | 2000-01-05 | 2005-10-06 | Carl Zeiss Smt Ag | Projektbelichtungsanlage der Mikrolithographie |
| EP1231517A1 (en) | 2001-02-13 | 2002-08-14 | ASML Netherlands B.V. | Lithographic projection apparatus and method of measuring wave front aberrations |
| US20030235682A1 (en) * | 2002-06-21 | 2003-12-25 | Sogard Michael R. | Method and device for controlling thermal distortion in elements of a lithography system |
| WO2005022614A1 (ja) * | 2003-08-28 | 2005-03-10 | Nikon Corporation | 露光方法及び装置、並びにデバイス製造方法 |
| JP4692753B2 (ja) | 2004-02-13 | 2011-06-01 | 株式会社ニコン | 露光方法及び装置、並びにデバイス製造方法 |
| JP2005353968A (ja) * | 2004-06-14 | 2005-12-22 | Canon Inc | 閉ループ制御装置、光学素子駆動装置及び露光装置 |
| US7463367B2 (en) * | 2004-07-13 | 2008-12-09 | Micron Technology, Inc. | Estimating overlay error and optical aberrations |
| US7262831B2 (en) * | 2004-12-01 | 2007-08-28 | Asml Netherlands B.V. | Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus |
| JP2006189570A (ja) * | 2005-01-05 | 2006-07-20 | Canon Inc | 液浸光学系および光学装置 |
| TWI454731B (zh) * | 2005-05-27 | 2014-10-01 | Zeiss Carl Smt Gmbh | 用於改進投影物鏡的成像性質之方法以及該投影物鏡 |
| US20080204682A1 (en) * | 2005-06-28 | 2008-08-28 | Nikon Corporation | Exposure method and exposure apparatus, and device manufacturing method |
| US7671970B2 (en) * | 2005-07-13 | 2010-03-02 | Asml Netherlands B.V. | Stage apparatus with two patterning devices, lithographic apparatus and device manufacturing method skipping an exposure field pitch |
| WO2007017089A1 (en) * | 2005-07-25 | 2007-02-15 | Carl Zeiss Smt Ag | Projection objective of a microlithographic projection exposure apparatus |
| JP5193227B2 (ja) * | 2007-01-22 | 2013-05-08 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 半導体リソグラフィシステム及びその使用方法 |
| JP5114992B2 (ja) * | 2007-03-26 | 2013-01-09 | ヤマハ株式会社 | 電子楽器用の鍵盤装置 |
-
2008
- 2008-01-22 JP JP2009546682A patent/JP5193227B2/ja active Active
- 2008-01-22 EP EP20080707189 patent/EP2126635B1/en not_active Not-in-force
- 2008-01-22 AT AT08707189T patent/ATE554427T1/de active
- 2008-01-22 KR KR1020097014877A patent/KR101452534B1/ko active Active
- 2008-01-22 WO PCT/EP2008/000459 patent/WO2008089953A1/en not_active Ceased
- 2008-01-22 CN CNA2008800028512A patent/CN101589342A/zh active Pending
-
2009
- 2009-04-30 US US12/432,921 patent/US8462315B2/en active Active
-
2013
- 2013-05-13 US US13/893,322 patent/US8947633B2/en active Active
-
2015
- 2015-01-15 US US14/597,497 patent/US9823579B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5193227B2 (ja) | 半導体リソグラフィシステム及びその使用方法 | |
| JP2010517279A5 (enExample) | ||
| US9709770B2 (en) | Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatus | |
| US9671703B2 (en) | Optical arrangement, EUV lithography apparatus and method for configuring an optical arrangement | |
| JP6483626B2 (ja) | 特にマイクロリソグラフィー投影露光装置内のミラーの熱作動用装置 | |
| WO2012013748A1 (en) | Euv exposure apparatus | |
| JP4584224B2 (ja) | 放射で誘発された熱歪みを補償するシステムおよび方法 | |
| US11156922B2 (en) | Method and device for determining the heating state of a mirror in an optical system | |
| JP6530718B2 (ja) | 光学結像装置のモデルベース制御 | |
| US9423696B2 (en) | Projection exposure apparatus with optimized adjustment possibility | |
| JP5732257B2 (ja) | リソグラフィ装置、デバイス製造方法およびコンピュータ読取可能媒体 | |
| US20220373899A1 (en) | Projection exposure apparatus with a thermal manipulator | |
| US20230288260A1 (en) | Method and device for determining the heating state of an optical element in an optical system | |
| US20250102920A1 (en) | Method for heating an optical element, and optical system | |
| WO2012126803A1 (en) | Array of controllable mirrors | |
| JP2024510784A (ja) | リソグラフィ装置および照明均一性補正方法 | |
| CN116783557A (zh) | 用于预测投影系统中的像差的方法和系统 | |
| JP7457678B2 (ja) | 露光装置、露光方法および物品製造方法 |