JP2010514226A - 検査レシピ作成システムおよびその方法 - Google Patents
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Abstract
【解決手段】検査レシピを作成するためのシステムおよび方法が提供される。検査レシピを作成するコンピュータ実装方法には、第1設計およびこの第1設計が製造プロセスを使用してプリントされるウェーハの検査システムの1つ以上の出力特性の獲得が含まれる。本方法には、さらに、第1設計および第1設計がプリントされるウェーハについて獲得した出力の1つ以上の出力特性を使用する第2設計の検査レシピの作成が含まれる。第1および第2設計は異なる。この検査レシピは、製造プロセスを使用して第2設計がウェーハにプリントされた後、ウェーハの検査に使用されるだろう。
【選択図】図1
Description
コンテキストのクリティカリィティ値が比較的遠く離れて存在する場合、コンテキストはマージされない、
コンテキストのグレーレベル分布が本質的に異なる場合、コンテキストはマージされない、
コンテキストの差異ヒストグラムが本質的に異なっているように見える場合には、たとえグレーレベル分布が類似しても、コンテキストはマージされない、
1つのコンテキストがウェーハ全体にわたって比較的高い流動性を持っており、他のコンテキストが持っていない場合、たとえ両方のコンテキストが平均的に同様のグレーレベル分布および差異分布を示しても、コンテキストはマージされない、
与えられた設計コンテキストの画像コンテキストベクトルが画像特性に比較的広い変動幅を持っている場合、設計コンテキストは、対応する画像コンテキストのサブグループへのクラスタ分けに基づいてサブコンテキストへ分割して、あるサブグループ内のセルが互いに似ていると同時に、他のサブグループのものと異なるようにできる、
か、あるいはこれらのいくつかの組合せである。
D[k,i]=W1*Uk[i]+W2*PEDMk[i,i]
但し、W1、W2は重みである。したがって、D[k、i]は、モードiによって捕捉された唯一のイベント、およびモードiによって捕捉されたイベントの総数の重みの合計である。
OCMk[i,j]=PEDMk[i,j]/{PEDMk[i,i]* PEDMk[i,j]}1/2
この測度は、欠陥捕捉に関する限り2つのモード間の共通性を捕捉する。
Score[i]=SUMall k{Ck*Ak*[W1*Uk[i]+W2* PEDMk[i,i]]}
Score[i,j]=SUMall k{Ck* Ak* W2*PEDMk[i,j]}
Score[i]=Sumallk{Ck* Ak*[Wl*Sumall k(Vl*Ulk[i])
+W2*Sumall l(Vl*PEDMlk[i,i] )]}
上記の方程式では、Ulk[i]は、コンテキストkに属するモードi中で捕捉されたタイプlの唯一欠陥の数を表示するとともに、PEDMlk[i,i]は、コンテキストkに属するモードi中で捕捉されたタイプlの欠陥の総数を表示する。
Claims (23)
- 検査レシピ作成のためのコンピュータ実装方法であって、
第1設計および前記第1設計がプリントされるウェーハの検査システムの出力の1つ以上の特性の獲得、および
前記第1設計および前記第1設計がプリントされるウェーハについて得られた出力の1つ以上の特性を使用した第2設計の検査レシピの作成が含まれ、前記第1および前記第2設計が異なり、前記検査レシピが、前記製造プロセスを使用して前記第2設計が前記ウェーハ上にプリントされた後に前記ウェーハの検査に使用されるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計、前記第1設計がプリントされる前記ウェーハについて獲得した1つ以上の前記出力特性、および前記第2設計がプリントされるウェーハの検査システムの1つ以上の出力特性、ならびに前記第2設計がプリントされた検査システムの1つ以上の前記出力特性、を使用する前記検査レシピの作成が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計および前記第1設計がプリントされる前記ウェーハについて得られた1つ以上の前記出力特性の異なる部分を写像する分類子の作成、前記第2設計がプリントされる前記ウェーハについての検査システムの出力の獲得、前記第2設計がプリントされる前記ウェーハについて獲得される1つ以上の出力特性の決定、ならびに前記第2設計がプリントされる前記ウェーハについて獲得される1つ以上の前記出力特性および前記第1設計を使用して構築された前記分類子を使用する前記第2設計と異なる部分へのコンテキスト同一性の割当てが含まれるコンピュータ実装方法。 - 請求項3記載のコンピュータ実装方法であって、
前記第2設計のコンテキスト分類の結果がコンテキストマップに格納され、その後の検査済ウェーハの分類子の使用を必要とせずに、後の当該設計の検査に使用されるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計および1つ以上の前記出力特性を使用する前記第2設計のコンテキストマップの作成ならびに前記コンテキストマップを使用する前記検査レシピの作成が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計および1つ以上の前記出力特性を使用する前記第2設計のコンテキストマップの作成ならびに検査が前記コンテキストマップを使用して実施されるよう前記検査レシピに前記コンテキストマップの格納が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計および1つ以上の前記出力特性を使用する前記第2設計のコンテキストマップの作成が含まれるとともに、前記方法に、さらに、前記第2設計の欠陥レビューレシピ作成のための前記コンテキストマップの使用が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、ダイを前記第2設計のセルの階層、構造あるいはその組合せに基づいた異なる区域タイプに分けることによる、コンテキストマップの作成が含まれるコンピュータ実装方法。 - 1つ以上の前記出力特性に、前記出力の1つ以上のノイズ特性が含まれることを特徴とする請求項1に記載のコンピュータ実装方法。
- 請求項1記載のコンピュータ実装方法であって、
少なくとも1つの前記出力特性を使用する前記第1設計の異なるコンテキストタイプのマルチダイ統計の決定、ならびに少なくとも1つの異なるコンテキストの、前記出力の外観およびノイズレベルに基づいたコンテキストサブタイプへの分割がさらに含まれ、前記作成に、前記第1設計、1つ以上の前記出力特性および前記コンテキストサブタイプを使用する前記検査レシピの作成が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計および1つ以上の前記出力特性を使用する前記第2設計のコンテキストマップの作成、および前記コンテキストマップを使用する前記検査レシピの作成が含まれ、前記コンテキストマップに前記第2設計の異なるコンテキストタイプが含まれることを特徴とし、さらに前記コンテキストマップの作成に、同様の1つ以上の出力特性および同様のノイズ出力特性を有する異なるコンテキストタイプのマージングが含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計および1つ以上の前記出力特性を使用する前記第2設計のコンテキストマップの作成、ならびに、前記第2設計の少なくとも2つの異なるコンテキストについて得られる出力に欠陥検出の様々な感度閾値が適用されるよう前記コンテキストマップを使用する前記検査レシピの作成が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計および1つ以上の前記出力特性を使用する前記第2設計のコンテキストマップの作成、ならびに、前記第2設計がプリントされる前記ウェーハの検査により検出される欠陥が前記コンテキストマップに基づいて分類されるよう前記コンテキストマップを使用する前記検査レシピの作成が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計および1つ以上の前記出力特性を使用する、前記第2設計のコンテキストマップの作成、ならびに、前記第2設計がプリントされる前記ウェーハの検査により検出される欠陥が前記コンテキストマップに基づいてグループ化されるように前記コンテキストを使用する前記検査レシピの作成が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計およびその1つ以上の前記出力特性を使用する前記第2設計のコンテキストマップの作成、ならびに前記第2設計のシステマティック欠陥機構が、前記第2設計がプリントされる前記ウェーハの検査結果および前記コンテキストマップを使用して検出されるように前記コンテキストマップを使用する前記検査レシピの作成が含まれるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
前記作成に、前記第1設計、1つ以上の前記出力特性、および前記第1設計中に存在する異なる設計コンテキストの異なる光学モードにおける欠陥検出可能性に基づいた得点関数を使用する、前記検査レシピの光学モードの選択が含まれるコンピュータ実装方法。 - 前記第2設計が、前記方法の中で使用されない請求項1に記載のコンピュータ実装方法。
- 請求項1記載のコンピュータ実装方法であって、
前記獲得に、前記第1設計および、前記第1設計および1つ以上の前記出力特性が格納される設計コンテキストに基づくレポジトリからの1つ以上の前記出力特性の獲得が含まれるコンピュータ実装方法。 - 前記検査システムが、このために検査レシピが作成されている検査システムである請求項1に記載のコンピュータ実装方法。
- 請求項1記載のコンピュータ実装方法であって、
前記第1設計がプリントされる前記ウェーハの検査システムの出力が、前記レシピがそのために作成されている前記検査システムの光学モードと異なる検査システムの光学モードを使用して得られるコンピュータ実装方法。 - 請求項1記載のコンピュータ実装方法であって、
その出力が、前記第1設計がプリントされる前記ウェーハについて得られる前記検査システムが、前記レシピが作成される検査システムとは異なっているプラットフォームを有するコンピュータ実装方法。 - 検査レシピの作成用にコンピュータ実装方法を実施するためのコンピュータシステム上で実行可能なプログラム命令を記録した記録媒体であって、
前記第1設計、および前記第1設計が製造プロセスを使用してプリントされるウェーハの検査システムの1つ以上の出力特性の獲得、および前記第1設計および前記第1設計がプリントされるウェーハについて得られた1つ以上の前記出力特性を使用する第2設計の検査レシピの作成が含まれ、前記第1および第2設計は異なり、前記検査レシピが前記第2設計が前記製造プロセスを使用して前記ウェーハ上にプリントされた後にウェーハの検査に使用される記録媒体。 - 第1設計が製造プロセスを使用してプリントされるウェーハについて出力を得るように構成された検査システム、ならびに前記第1設計および前記第1設計がプリントされるウェーハについて得られる1つ以上の前記出力特性を使用して、第2設計の検査レシピを作成するように構成されたコンピュータシステムが含まれる検査レシピを作成するように構成されたシステムであって、
前記第1および第2設計は互いに異なり、前記検査レシピが、前記製造プロセスを使用して前記第2設計が前記ウェーハにプリントされた後のウェーハの検査に使用されることを特徴とするシステム。
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US7877722B2 (en) | 2011-01-25 |
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