JP2010507559A5 - - Google Patents
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- Publication number
- JP2010507559A5 JP2010507559A5 JP2009534570A JP2009534570A JP2010507559A5 JP 2010507559 A5 JP2010507559 A5 JP 2010507559A5 JP 2009534570 A JP2009534570 A JP 2009534570A JP 2009534570 A JP2009534570 A JP 2009534570A JP 2010507559 A5 JP2010507559 A5 JP 2010507559A5
- Authority
- JP
- Japan
- Prior art keywords
- neopentasilane
- composition
- trihalosilyl
- silane
- tetrakis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 claims 8
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 4
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 claims 4
- 229910000077 silane Inorganic materials 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- SIPUZPBQZHNSDW-UHFFFAOYSA-N bis(2-methylpropyl)aluminum Chemical compound CC(C)C[Al]CC(C)C SIPUZPBQZHNSDW-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000012970 tertiary amine catalyst Substances 0.000 claims 2
- 239000004215 Carbon black (E152) Substances 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 150000004756 silanes Chemical class 0.000 claims 1
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical group C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US85395806P | 2006-10-24 | 2006-10-24 | |
| US60/853,958 | 2006-10-24 | ||
| PCT/US2007/019165 WO2008051328A1 (en) | 2006-10-24 | 2007-08-29 | Composition comprising neopentasilane and method of preparing same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010507559A JP2010507559A (ja) | 2010-03-11 |
| JP2010507559A5 true JP2010507559A5 (enExample) | 2011-08-25 |
| JP5103480B2 JP5103480B2 (ja) | 2012-12-19 |
Family
ID=38896166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009534570A Active JP5103480B2 (ja) | 2006-10-24 | 2007-08-29 | ネオペンタシランを含む組成物及びその製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8147789B2 (enExample) |
| EP (1) | EP2076558B8 (enExample) |
| JP (1) | JP5103480B2 (enExample) |
| KR (1) | KR101506136B1 (enExample) |
| CN (1) | CN101528813B (enExample) |
| TW (1) | TWI412530B (enExample) |
| WO (1) | WO2008051328A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008025260B4 (de) | 2008-05-27 | 2010-03-18 | Rev Renewable Energy Ventures, Inc. | Halogeniertes Polysilan und thermisches Verfahren zu dessen Herstellung |
| DE102008042934A1 (de) * | 2008-10-17 | 2010-04-22 | Wacker Chemie Ag | Verfahren zur Herstellung von Neopentasilanen |
| DE102009027194A1 (de) * | 2009-06-25 | 2010-12-30 | Wacker Chemie Ag | Verfahren zur Herstellung von Dodecahalogenneopentasilanen |
| DE102009053804B3 (de) * | 2009-11-18 | 2011-03-17 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Hydridosilanen |
| DE102009056731A1 (de) | 2009-12-04 | 2011-06-09 | Rev Renewable Energy Ventures, Inc. | Halogenierte Polysilane und Polygermane |
| KR20130038829A (ko) | 2010-04-06 | 2013-04-18 | 코비오 인코포레이티드 | 에피택셜 구조, 그 제조방법, 및 그것을 포함하는 소자 |
| DE102010062984A1 (de) * | 2010-12-14 | 2012-06-14 | Evonik Degussa Gmbh | Verfahren zur Herstellung höherer Halogen- und Hydridosilane |
| DE102010063823A1 (de) * | 2010-12-22 | 2012-06-28 | Evonik Degussa Gmbh | Verfahren zur Herstellung von Hydridosilanen |
| TW201300459A (zh) * | 2011-03-10 | 2013-01-01 | Dow Corning | 用於抗反射塗層的聚矽烷矽氧烷（ｐｏｌｙｓｉｌａｎｅｓｉｌｏｘａｎｅ）樹脂 |
| DE102011005387A1 (de) | 2011-03-10 | 2012-09-13 | Wacker Chemie Ag | Verfahren zur Reduzierung des Aluminiumgehaltes von Neopentasilan |
| DE102012224202A1 (de) | 2012-12-21 | 2014-07-10 | Evonik Industries Ag | Verfahren zum Hydrieren höherer Halogen-haltiger Silanverbindungen |
| US11091649B2 (en) | 2013-09-05 | 2021-08-17 | Jiangsu Nata Opto-Electronic Materials Co. Ltd. | 2,2,4,4-tetrasilylpentasilane and its compositions, methods and uses |
| TWI634073B (zh) | 2013-09-05 | 2018-09-01 | 道康寧公司 | 2,2,4,4-四矽基五矽烷及其組成物、方法及用途 |
| DE102014018435A1 (de) * | 2014-12-10 | 2016-06-16 | Silicon Products Bitterfeld GmbH&CO.KG | Verfahren zur Gewinnung von Hexachlordisilan aus in Prozessabgasströmen enthaltenen Gemischen von Chlorsilanen |
| US11117807B2 (en) * | 2017-06-23 | 2021-09-14 | Jiangsu Nata Opto-Electronic Materials Co. Ltd. | Method of making aluminum-free neopentasilane |
| JP6944547B2 (ja) * | 2017-06-29 | 2021-10-06 | ナタ セミコンダクター マテリアルズ カンパニー リミテッド | １，１，１−トリクロロジシランの合成 |
| KR20190101001A (ko) | 2018-02-22 | 2019-08-30 | 박계균 | 주열식 가설 흙막이 벽체의 시공방법 |
| EP3587348B1 (en) * | 2018-06-29 | 2021-08-11 | Evonik Operations GmbH | Partially hydrogenated chlorosilanes and methods for preparing same by selective hydrogenation |
| JP7621162B2 (ja) * | 2021-03-31 | 2025-01-24 | 株式会社日本触媒 | 環状水素化シラン化合物の製造方法 |
| JP7580983B2 (ja) * | 2020-09-08 | 2024-11-12 | 株式会社日本触媒 | 環状水素化ポリシラン化合物の製造方法 |
| CN115417413B (zh) * | 2022-08-31 | 2024-01-09 | 南大光电半导体材料有限公司 | 一种新戊硅烷中间体制备方法及其应用 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0760792B2 (ja) | 1984-05-16 | 1995-06-28 | キヤノン株式会社 | 堆積膜の形成方法 |
| JPS6191010A (ja) | 1984-10-09 | 1986-05-09 | Canon Inc | 堆積膜形成法 |
| JP3517934B2 (ja) * | 1994-03-24 | 2004-04-12 | 昭和電工株式会社 | シリコン膜の形成方法 |
| EP0902030B1 (en) * | 1997-08-27 | 2002-10-02 | Dow Corning Corporation | Compounds containing tetradecachlorocyclohexasilane dianion |
| JPH11260729A (ja) * | 1998-01-08 | 1999-09-24 | Showa Denko Kk | 高次シランの製造法 |
| JP4465961B2 (ja) * | 2000-08-02 | 2010-05-26 | 三菱マテリアル株式会社 | 六塩化二珪素の製造方法 |
| KR101050377B1 (ko) | 2001-02-12 | 2011-07-20 | 에이에스엠 아메리카, 인코포레이티드 | 반도체 박막 증착을 위한 개선된 공정 |
| CN100471991C (zh) * | 2002-10-18 | 2009-03-25 | 应用材料有限公司 | 采用硅化合物进行的含硅层沉积 |
| US7540920B2 (en) * | 2002-10-18 | 2009-06-02 | Applied Materials, Inc. | Silicon-containing layer deposition with silicon compounds |
| US20040152287A1 (en) * | 2003-01-31 | 2004-08-05 | Sherrill Adrian B. | Deposition of a silicon film |
-
2007
- 2007-08-29 JP JP2009534570A patent/JP5103480B2/ja active Active
- 2007-08-29 EP EP07811642.3A patent/EP2076558B8/en active Active
- 2007-08-29 US US12/440,299 patent/US8147789B2/en active Active
- 2007-08-29 KR KR1020097008553A patent/KR101506136B1/ko active Active
- 2007-08-29 CN CN200780039179XA patent/CN101528813B/zh active Active
- 2007-08-29 WO PCT/US2007/019165 patent/WO2008051328A1/en not_active Ceased
- 2007-09-12 TW TW096134053A patent/TWI412530B/zh active
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