JP2010267830A5 - - Google Patents
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- Publication number
- JP2010267830A5 JP2010267830A5 JP2009118201A JP2009118201A JP2010267830A5 JP 2010267830 A5 JP2010267830 A5 JP 2010267830A5 JP 2009118201 A JP2009118201 A JP 2009118201A JP 2009118201 A JP2009118201 A JP 2009118201A JP 2010267830 A5 JP2010267830 A5 JP 2010267830A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- semiconductor
- electrode
- semiconductor device
- semiconductor package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 17
- 239000000758 substrate Substances 0.000 claims 8
- 230000000149 penetrating effect Effects 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009118201A JP5578808B2 (ja) | 2009-05-15 | 2009-05-15 | 半導体パッケージ |
| US12/778,182 US8299623B2 (en) | 2009-05-15 | 2010-05-12 | Semiconductor package |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009118201A JP5578808B2 (ja) | 2009-05-15 | 2009-05-15 | 半導体パッケージ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010267830A JP2010267830A (ja) | 2010-11-25 |
| JP2010267830A5 true JP2010267830A5 (enExample) | 2012-04-26 |
| JP5578808B2 JP5578808B2 (ja) | 2014-08-27 |
Family
ID=43067845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009118201A Expired - Fee Related JP5578808B2 (ja) | 2009-05-15 | 2009-05-15 | 半導体パッケージ |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8299623B2 (enExample) |
| JP (1) | JP5578808B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2463896B1 (en) * | 2010-12-07 | 2020-04-15 | IMEC vzw | Method for forming through-substrate vias surrounded by isolation trenches with an airgap and corresponding device |
| EP2584598B1 (en) * | 2011-10-20 | 2018-12-05 | ams AG | Method of producing a semiconductor device comprising a through-substrate via and a capping layer and corresponding semiconductor device |
| DE102013204337A1 (de) * | 2013-03-13 | 2014-09-18 | Siemens Aktiengesellschaft | Trägerbauteil mit einem Halbleiter-Substrat für elektronische Bauelemente und Verfahren zu dessen Herstellung |
| CN104966709B (zh) * | 2015-07-29 | 2017-11-03 | 恒劲科技股份有限公司 | 封装基板及其制作方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63104453A (ja) * | 1986-10-22 | 1988-05-09 | Hitachi Ltd | 半導体装置およびその製造方法 |
| JP3226183B2 (ja) * | 1991-11-27 | 2001-11-05 | 新光電気工業株式会社 | 高周波素子用パッケージの同軸線路 |
| JPH1154854A (ja) * | 1997-08-07 | 1999-02-26 | Cmk Corp | プリント配線板 |
| US6050832A (en) * | 1998-08-07 | 2000-04-18 | Fujitsu Limited | Chip and board stress relief interposer |
| JP3813418B2 (ja) * | 2000-07-21 | 2006-08-23 | アルプス電気株式会社 | フレキシブル多層配線基板 |
| JP2008153340A (ja) | 2006-12-15 | 2008-07-03 | Citizen Holdings Co Ltd | 半導体装置およびその製造方法 |
| JP4970979B2 (ja) * | 2007-02-20 | 2012-07-11 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP5302522B2 (ja) | 2007-07-02 | 2013-10-02 | スパンション エルエルシー | 半導体装置及びその製造方法 |
| JP5237607B2 (ja) * | 2007-10-25 | 2013-07-17 | 新光電気工業株式会社 | 基板の製造方法 |
| JP5395412B2 (ja) * | 2008-11-25 | 2014-01-22 | パナソニック株式会社 | インタポーザ |
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2009
- 2009-05-15 JP JP2009118201A patent/JP5578808B2/ja not_active Expired - Fee Related
-
2010
- 2010-05-12 US US12/778,182 patent/US8299623B2/en not_active Expired - Fee Related