JP2010248629A5 - - Google Patents

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Publication number
JP2010248629A5
JP2010248629A5 JP2010071754A JP2010071754A JP2010248629A5 JP 2010248629 A5 JP2010248629 A5 JP 2010248629A5 JP 2010071754 A JP2010071754 A JP 2010071754A JP 2010071754 A JP2010071754 A JP 2010071754A JP 2010248629 A5 JP2010248629 A5 JP 2010248629A5
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JP
Japan
Prior art keywords
film
substrate
forming material
forming
evaporation source
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JP2010071754A
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English (en)
Japanese (ja)
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JP5417236B2 (ja
JP2010248629A (ja
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Priority to JP2010071754A priority Critical patent/JP5417236B2/ja
Priority claimed from JP2010071754A external-priority patent/JP5417236B2/ja
Publication of JP2010248629A publication Critical patent/JP2010248629A/ja
Publication of JP2010248629A5 publication Critical patent/JP2010248629A5/ja
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Publication of JP5417236B2 publication Critical patent/JP5417236B2/ja
Expired - Fee Related legal-status Critical Current
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JP2010071754A 2009-03-27 2010-03-26 照明装置の作製方法 Expired - Fee Related JP5417236B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010071754A JP5417236B2 (ja) 2009-03-27 2010-03-26 照明装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009080199 2009-03-27
JP2009080199 2009-03-27
JP2010071754A JP5417236B2 (ja) 2009-03-27 2010-03-26 照明装置の作製方法

Publications (3)

Publication Number Publication Date
JP2010248629A JP2010248629A (ja) 2010-11-04
JP2010248629A5 true JP2010248629A5 (enExample) 2013-02-14
JP5417236B2 JP5417236B2 (ja) 2014-02-12

Family

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Family Applications (1)

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JP2010071754A Expired - Fee Related JP5417236B2 (ja) 2009-03-27 2010-03-26 照明装置の作製方法

Country Status (4)

Country Link
US (1) US20100247747A1 (enExample)
JP (1) JP5417236B2 (enExample)
KR (1) KR20100108283A (enExample)
TW (1) TWI532861B (enExample)

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KR20180002505A (ko) 2016-06-29 2018-01-08 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 소자의 제작 방법
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