JP2010205813A5 - - Google Patents

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Publication number
JP2010205813A5
JP2010205813A5 JP2009047767A JP2009047767A JP2010205813A5 JP 2010205813 A5 JP2010205813 A5 JP 2010205813A5 JP 2009047767 A JP2009047767 A JP 2009047767A JP 2009047767 A JP2009047767 A JP 2009047767A JP 2010205813 A5 JP2010205813 A5 JP 2010205813A5
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JP
Japan
Prior art keywords
electrostatic chuck
dielectric layer
plate
protrusion
cooling gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009047767A
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English (en)
Japanese (ja)
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JP5470601B2 (ja
JP2010205813A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009047767A priority Critical patent/JP5470601B2/ja
Priority claimed from JP2009047767A external-priority patent/JP5470601B2/ja
Priority to US12/714,654 priority patent/US8023248B2/en
Publication of JP2010205813A publication Critical patent/JP2010205813A/ja
Publication of JP2010205813A5 publication Critical patent/JP2010205813A5/ja
Application granted granted Critical
Publication of JP5470601B2 publication Critical patent/JP5470601B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2009047767A 2009-03-02 2009-03-02 静電チャック Active JP5470601B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009047767A JP5470601B2 (ja) 2009-03-02 2009-03-02 静電チャック
US12/714,654 US8023248B2 (en) 2009-03-02 2010-03-01 Electrostatic chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009047767A JP5470601B2 (ja) 2009-03-02 2009-03-02 静電チャック

Publications (3)

Publication Number Publication Date
JP2010205813A JP2010205813A (ja) 2010-09-16
JP2010205813A5 true JP2010205813A5 (enExample) 2012-01-19
JP5470601B2 JP5470601B2 (ja) 2014-04-16

Family

ID=42666967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009047767A Active JP5470601B2 (ja) 2009-03-02 2009-03-02 静電チャック

Country Status (2)

Country Link
US (1) US8023248B2 (enExample)
JP (1) JP5470601B2 (enExample)

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US9296111B2 (en) 2013-07-22 2016-03-29 LuxVue Technology Corporation Micro pick up array alignment encoder
US9087764B2 (en) 2013-07-26 2015-07-21 LuxVue Technology Corporation Adhesive wafer bonding with controlled thickness variation
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JP6168162B2 (ja) * 2014-09-30 2017-07-26 住友大阪セメント株式会社 静電チャック装置
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