JP2010158759A - ワーク搬送装置 - Google Patents

ワーク搬送装置 Download PDF

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Publication number
JP2010158759A
JP2010158759A JP2009179339A JP2009179339A JP2010158759A JP 2010158759 A JP2010158759 A JP 2010158759A JP 2009179339 A JP2009179339 A JP 2009179339A JP 2009179339 A JP2009179339 A JP 2009179339A JP 2010158759 A JP2010158759 A JP 2010158759A
Authority
JP
Japan
Prior art keywords
pipe
horizontal axis
scissor
joint
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009179339A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010158759A5 (OSRAM
Inventor
Kunio Fukuma
邦夫 福間
Hideki Matsuo
英樹 松尾
Daisuke Sado
大介 佐渡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2009179339A priority Critical patent/JP2010158759A/ja
Priority to US12/633,298 priority patent/US20100209217A1/en
Publication of JP2010158759A publication Critical patent/JP2010158759A/ja
Publication of JP2010158759A5 publication Critical patent/JP2010158759A5/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
JP2009179339A 2008-12-08 2009-07-31 ワーク搬送装置 Pending JP2010158759A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009179339A JP2010158759A (ja) 2008-12-08 2009-07-31 ワーク搬送装置
US12/633,298 US20100209217A1 (en) 2008-12-08 2009-12-08 Work transfer apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008311705 2008-12-08
JP2009179339A JP2010158759A (ja) 2008-12-08 2009-07-31 ワーク搬送装置

Publications (2)

Publication Number Publication Date
JP2010158759A true JP2010158759A (ja) 2010-07-22
JP2010158759A5 JP2010158759A5 (OSRAM) 2012-06-28

Family

ID=42560056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009179339A Pending JP2010158759A (ja) 2008-12-08 2009-07-31 ワーク搬送装置

Country Status (2)

Country Link
US (1) US20100209217A1 (OSRAM)
JP (1) JP2010158759A (OSRAM)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101456337B1 (ko) * 2012-11-09 2014-11-04 (주)에이원엔지니어링 시저리프트가 구비된 과수작업용 차량
CN108946646A (zh) * 2018-07-30 2018-12-07 连云港和昌机械有限公司 一种全自动汽车装车鹤管
CN109335640A (zh) * 2018-11-30 2019-02-15 郑楠楠 一种棒状固体絮凝剂的分模装置
KR20190043368A (ko) * 2017-10-18 2019-04-26 주식회사 포스코 스트립 사행 교정장치를 갖는 수직형 루퍼
CN112357581A (zh) * 2020-12-30 2021-02-12 彩虹（合肥）液晶玻璃有限公司 一种玻璃基板风干及传送装置
WO2021221442A1 (ko) * 2020-04-27 2021-11-04 한국기계연구원 리프트 모듈 및 적층형 모듈 로봇

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108116707A (zh) * 2017-12-22 2018-06-05 广东新兴铸管有限公司 一种球墨铸铁管升降旋转掉头装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007118171A (ja) * 2005-09-30 2007-05-17 Daihen Corp 搬送装置
WO2008120294A1 (ja) * 2007-03-02 2008-10-09 Daihen Corporation 搬送装置
JP2008264923A (ja) * 2007-04-19 2008-11-06 Daihen Corp 搬送装置
JP2010157538A (ja) * 2008-12-26 2010-07-15 Daihen Corp ワーク搬送装置
JP2012505548A (ja) * 2008-10-07 2012-03-01 アプライド マテリアルズ インコーポレイテッド シザーリフト搬送ロボット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11129184A (ja) * 1997-09-01 1999-05-18 Dainippon Screen Mfg Co Ltd 基板処理装置および基板搬入搬出装置
DE10357609A1 (de) * 2003-12-10 2005-07-21 Kuka Roboter Gmbh Handhabungsgerät wie Industrieroboter und Verfahren zum Beeinflussen einer Umgebungsbedingung in einem solchen
DE102007007101B4 (de) * 2007-02-13 2013-07-04 Siemens Aktiengesellschaft Hebevorrichtung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007118171A (ja) * 2005-09-30 2007-05-17 Daihen Corp 搬送装置
WO2008120294A1 (ja) * 2007-03-02 2008-10-09 Daihen Corporation 搬送装置
JP2008264923A (ja) * 2007-04-19 2008-11-06 Daihen Corp 搬送装置
JP2012505548A (ja) * 2008-10-07 2012-03-01 アプライド マテリアルズ インコーポレイテッド シザーリフト搬送ロボット
JP2010157538A (ja) * 2008-12-26 2010-07-15 Daihen Corp ワーク搬送装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101456337B1 (ko) * 2012-11-09 2014-11-04 (주)에이원엔지니어링 시저리프트가 구비된 과수작업용 차량
KR20190043368A (ko) * 2017-10-18 2019-04-26 주식회사 포스코 스트립 사행 교정장치를 갖는 수직형 루퍼
KR101990990B1 (ko) * 2017-10-18 2019-06-20 주식회사 포스코 스트립 사행 교정장치를 갖는 수직형 루퍼
CN108946646A (zh) * 2018-07-30 2018-12-07 连云港和昌机械有限公司 一种全自动汽车装车鹤管
CN108946646B (zh) * 2018-07-30 2023-12-08 连云港和昌机械有限公司 一种全自动汽车装车鹤管
CN109335640A (zh) * 2018-11-30 2019-02-15 郑楠楠 一种棒状固体絮凝剂的分模装置
WO2021221442A1 (ko) * 2020-04-27 2021-11-04 한국기계연구원 리프트 모듈 및 적층형 모듈 로봇
CN112357581A (zh) * 2020-12-30 2021-02-12 彩虹（合肥）液晶玻璃有限公司 一种玻璃基板风干及传送装置

Also Published As

Publication number Publication date
US20100209217A1 (en) 2010-08-19

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