JP2010114106A5 - - Google Patents
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- JP2010114106A5 JP2010114106A5 JP2008282681A JP2008282681A JP2010114106A5 JP 2010114106 A5 JP2010114106 A5 JP 2010114106A5 JP 2008282681 A JP2008282681 A JP 2008282681A JP 2008282681 A JP2008282681 A JP 2008282681A JP 2010114106 A5 JP2010114106 A5 JP 2010114106A5
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- JP
- Japan
- Prior art keywords
- substrate
- functional region
- functional
- region
- separation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims 51
- 238000000926 separation method Methods 0.000 claims 24
- 238000000034 method Methods 0.000 claims 18
- 150000001875 compounds Chemical class 0.000 claims 13
- 239000004065 semiconductor Substances 0.000 claims 13
- 238000005530 etching Methods 0.000 claims 4
- 238000000354 decomposition reaction Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 239000002131 composite material Substances 0.000 claims 1
- 230000007423 decrease Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
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Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008282681A JP2010114106A (ja) | 2008-11-04 | 2008-11-04 | 機能性領域の移設方法、ledアレイ、ledプリンタヘッド、及びledプリンタ |
| EP09013629A EP2182554A2 (en) | 2008-11-04 | 2009-10-29 | Transfer method of functional region, led array, led printer head, and led printer |
| KR1020090104803A KR101168881B1 (ko) | 2008-11-04 | 2009-11-02 | 기능성 영역의 이설방법, led 어레이, led 프린터 헤드, 및 led 프린터 |
| US12/611,761 US7943488B2 (en) | 2008-11-04 | 2009-11-03 | Transfer method of functional region, LED array, LED printer head, and LED printer |
| CN2009102115367A CN101740494B (zh) | 2008-11-04 | 2009-11-04 | 功能区域的转移方法及led阵列、打印机头和打印机 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008282681A JP2010114106A (ja) | 2008-11-04 | 2008-11-04 | 機能性領域の移設方法、ledアレイ、ledプリンタヘッド、及びledプリンタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010114106A JP2010114106A (ja) | 2010-05-20 |
| JP2010114106A5 true JP2010114106A5 (enExample) | 2011-12-22 |
Family
ID=41655511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008282681A Pending JP2010114106A (ja) | 2008-11-04 | 2008-11-04 | 機能性領域の移設方法、ledアレイ、ledプリンタヘッド、及びledプリンタ |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7943488B2 (enExample) |
| EP (1) | EP2182554A2 (enExample) |
| JP (1) | JP2010114106A (enExample) |
| KR (1) | KR101168881B1 (enExample) |
| CN (1) | CN101740494B (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5590837B2 (ja) * | 2009-09-15 | 2014-09-17 | キヤノン株式会社 | 機能性領域の移設方法 |
| JP2012043946A (ja) * | 2010-08-18 | 2012-03-01 | Toyohashi Univ Of Technology | 光電子半導体装置及びその製造方法 |
| CN102956757A (zh) * | 2011-08-19 | 2013-03-06 | 展晶科技(深圳)有限公司 | 发光二极管封装结构的制造方法 |
| WO2013036561A2 (en) * | 2011-09-07 | 2013-03-14 | Cooledge Lighting, Inc. | Broad-area lighting systems |
| CN102496667B (zh) * | 2011-12-20 | 2014-05-07 | 中国科学院半导体研究所 | GaN基薄膜芯片的制造方法 |
| WO2013112435A1 (en) | 2012-01-24 | 2013-08-01 | Cooledge Lighting Inc. | Light - emitting devices having discrete phosphor chips and fabrication methods |
| US8907362B2 (en) | 2012-01-24 | 2014-12-09 | Cooledge Lighting Inc. | Light-emitting dies incorporating wavelength-conversion materials and related methods |
| US8896010B2 (en) | 2012-01-24 | 2014-11-25 | Cooledge Lighting Inc. | Wafer-level flip chip device packages and related methods |
| CN103811593B (zh) | 2012-11-12 | 2018-06-19 | 晶元光电股份有限公司 | 半导体光电元件的制作方法 |
| CN105324857B (zh) * | 2013-07-05 | 2019-01-11 | 晶元光电股份有限公司 | 发光元件的制造方法 |
| WO2015119858A1 (en) | 2014-02-05 | 2015-08-13 | Cooledge Lighting Inc. | Light-emitting dies incorporating wavelength-conversion materials and related methods |
| CN107112403A (zh) * | 2014-10-22 | 2017-08-29 | 安相贞 | 半导体元件用支承基板、包括该基板的半导体装置及其制造方法 |
| JP2019071323A (ja) * | 2017-10-06 | 2019-05-09 | 鼎元光電科技股▲ふん▼有限公司 | 基板がない発光ダイオード及びその製造方法 |
| CN108962789A (zh) * | 2018-06-25 | 2018-12-07 | 开发晶照明(厦门)有限公司 | 微器件转移方法和微器件转移设备 |
| US11217471B2 (en) * | 2019-03-06 | 2022-01-04 | Rohinni, LLC | Multi-axis movement for transfer of semiconductor devices |
| CN110337237A (zh) * | 2019-04-23 | 2019-10-15 | 深圳市丰泰工业科技有限公司 | 用紫外激光器让uv胶失去粘性的方法 |
| CN113994484A (zh) * | 2019-05-08 | 2022-01-28 | 日亚化学工业株式会社 | 图像显示装置的制造方法以及图像显示装置 |
| JP2024081307A (ja) * | 2022-12-06 | 2024-06-18 | キヤノン株式会社 | 積層基板、液体吐出ヘッドおよび積層基板の製造方法 |
| CN116387226A (zh) * | 2023-03-29 | 2023-07-04 | 香港科技大学(广州) | 转移基板及其制备方法、显示装置及发光元件的转移方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1655633A3 (en) * | 1996-08-27 | 2006-06-21 | Seiko Epson Corporation | Exfoliating method, transferring method of thin film device, thin film integrated circuit device, and liquid crystal display device |
| JP3116085B2 (ja) * | 1997-09-16 | 2000-12-11 | 東京農工大学長 | 半導体素子形成法 |
| JP2003174041A (ja) | 2001-12-06 | 2003-06-20 | Seiko Epson Corp | 素子の実装方法、電子機器、フラットパネルディスプレイ、システムインパッケージ型icおよびオプティカルエレクトリカルic |
| US8049947B2 (en) * | 2002-06-10 | 2011-11-01 | E Ink Corporation | Components and methods for use in electro-optic displays |
| TWI328837B (en) * | 2003-02-28 | 2010-08-11 | Semiconductor Energy Lab | Semiconductor device and method of manufacturing the same |
| JP4370796B2 (ja) | 2003-04-08 | 2009-11-25 | セイコーエプソン株式会社 | 半導体装置、半導体装置の製造方法及び電子機器 |
| JP4315742B2 (ja) | 2003-06-20 | 2009-08-19 | 株式会社沖データ | 半導体薄膜の製造方法及び半導体装置の製造方法 |
| US6913985B2 (en) | 2003-06-20 | 2005-07-05 | Oki Data Corporation | Method of manufacturing a semiconductor device |
| JP4554180B2 (ja) * | 2003-09-17 | 2010-09-29 | ソニー株式会社 | 薄膜半導体デバイスの製造方法 |
| JP2005108943A (ja) * | 2003-09-29 | 2005-04-21 | Oki Data Corp | 半導体ウェハ及びこれを用いた半導体装置の製造方法 |
| JP4672329B2 (ja) * | 2003-10-22 | 2011-04-20 | 株式会社沖データ | 半導体装置、及び、それを用いたledプリントヘッド、画像形成装置、半導体装置の製造方法 |
| US7282380B2 (en) * | 2004-03-25 | 2007-10-16 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
| JP4468107B2 (ja) | 2004-08-09 | 2010-05-26 | シャープ株式会社 | 半導体装置の製造方法、半導体装置及び半導体回路基板 |
| US7523701B2 (en) * | 2005-03-07 | 2009-04-28 | Asml Netherlands B.V. | Imprint lithography method and apparatus |
| JP5171016B2 (ja) * | 2006-10-27 | 2013-03-27 | キヤノン株式会社 | 半導体部材、半導体物品の製造方法、その製造方法を用いたledアレイ |
-
2008
- 2008-11-04 JP JP2008282681A patent/JP2010114106A/ja active Pending
-
2009
- 2009-10-29 EP EP09013629A patent/EP2182554A2/en not_active Withdrawn
- 2009-11-02 KR KR1020090104803A patent/KR101168881B1/ko not_active Expired - Fee Related
- 2009-11-03 US US12/611,761 patent/US7943488B2/en not_active Expired - Fee Related
- 2009-11-04 CN CN2009102115367A patent/CN101740494B/zh not_active Expired - Fee Related
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