JP2010056530A - 半導体ウェハの製造方法 - Google Patents
半導体ウェハの製造方法 Download PDFInfo
- Publication number
- JP2010056530A JP2010056530A JP2009164436A JP2009164436A JP2010056530A JP 2010056530 A JP2010056530 A JP 2010056530A JP 2009164436 A JP2009164436 A JP 2009164436A JP 2009164436 A JP2009164436 A JP 2009164436A JP 2010056530 A JP2010056530 A JP 2010056530A
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- JP
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- Prior art keywords
- semiconductor wafer
- polishing
- thickness
- flatness
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 77
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000005498 polishing Methods 0.000 claims abstract description 49
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 20
- 239000003795 chemical substances by application Substances 0.000 claims description 15
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 10
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 claims description 8
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims description 6
- 229910000027 potassium carbonate Inorganic materials 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 61
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 5
- 238000003754 machining Methods 0.000 description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 230000007717 exclusion Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229940112041 peripherally acting muscle relaxants other quaternary ammonium compound in atc Drugs 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
【解決手段】上定盤と下定盤との間で半導体ウェハをポリシングする半導体ウェハの製造方法において、前記半導体ウェハを、キャリアのカットアウト部中に置き、ポリシング剤を供給して、前記半導体ウェハの中央での前記半導体ウェハの厚さと前記キャリアの厚さとの間の差が負になりかつ全体で10μm〜30μmの材料除去が達成されるまで両面ポリシングし、前記ポリシング剤はSiO2 0.1〜0.4質量%及びアルカリ性成分0.1〜0.9質量%含有する、半導体ウェハの製造方法。
【選択図】なし
Description
直径300mmのシリコンからなる半導体ウェハを単結晶からスライシングし、それぞれ同じ方法で機械加工及びエッチングにより前処理された。引き続き、前記半導体ウェハを両面ポリシング機(Peter Wolters AG社のタイプAC 2000)で、それぞれ−0.9μm(C)又は−3.55μm(E)のアンダーハングが達成されるまでポリシングした。半導体ウェハ(E)の部分は、本発明により、SiO2を0.3質量%の濃度で、及び炭酸カリウム0.2質量%及び水酸化カリウム0.02質量%からなるアルカリ成分を含有するポリシング剤でポリシングした。
Claims (5)
- 上定盤と下定盤との間で半導体ウェハをポリシングする半導体ウェハの製造方法において、前記半導体ウェハを、キャリアのカットアウト部中に置き、ポリシング剤を供給して、前記半導体ウェハの中央での前記半導体ウェハの厚さと前記キャリアの厚さとの間の差が負になりかつ全体で10μm〜30μmの材料除去が達成されるまで両面ポリシングし、前記ポリシング剤はSiO2 0.1〜0.4質量%及びアルカリ性成分0.1〜0.9質量%含有する、半導体ウェハの製造方法。
- 前記半導体ウェハを、前記半導体ウェハの厚さと前記キャリアの厚さとの間の差が−2.5μm〜−3.5μmとなるまで両面ポリシングする、請求項1記載の方法。
- 前記ポリシング剤は、炭酸カリウム又は水酸化テトラメチルアンモニウム又は両方の化合物をアルカリ性成分として含有する、請求項1記載の方法。
- 半導体ウェハの他のDSPポリシングを実施しない、請求項1記載の方法。
- SiO2及びアルカリ性成分を、前記ポリシング剤を使用する直前まで混合しない、請求項1記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008044646A DE102008044646B4 (de) | 2008-08-27 | 2008-08-27 | Verfahren zur Herstellung einer Halbleiterscheibe |
DE102008044646.7 | 2008-08-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010056530A true JP2010056530A (ja) | 2010-03-11 |
JP5167207B2 JP5167207B2 (ja) | 2013-03-21 |
Family
ID=41693610
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009164436A Active JP5167207B2 (ja) | 2008-08-27 | 2009-07-13 | 半導体ウェハの製造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8242020B2 (ja) |
JP (1) | JP5167207B2 (ja) |
KR (1) | KR101062254B1 (ja) |
CN (1) | CN101659027A (ja) |
DE (1) | DE102008044646B4 (ja) |
SG (1) | SG159469A1 (ja) |
TW (1) | TWI399804B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8952496B2 (en) * | 2009-12-24 | 2015-02-10 | Sumco Corporation | Semiconductor wafer and method of producing same |
CN101829946B (zh) * | 2010-05-28 | 2013-01-09 | 江苏南晶红外光学仪器有限公司 | 红外窗口片的双面加工工艺 |
US9588441B2 (en) * | 2012-05-18 | 2017-03-07 | Kla-Tencor Corporation | Method and device for using substrate geometry to determine optimum substrate analysis sampling |
JP6451825B1 (ja) * | 2017-12-25 | 2019-01-16 | 株式会社Sumco | ウェーハの両面研磨方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11347926A (ja) * | 1998-06-10 | 1999-12-21 | Memc Kk | シリコンウエハのラッピング方法 |
JP2005158798A (ja) * | 2003-11-20 | 2005-06-16 | Shin Etsu Handotai Co Ltd | 半導体ウェーハの両面研磨方法、半導体ウェーハ及びキャリアプレート |
JP2005254401A (ja) * | 2004-03-12 | 2005-09-22 | Seiko Epson Corp | 研磨布、研磨布の製造方法、研磨装置及び半導体装置の製造方法 |
JP2007214205A (ja) * | 2006-02-07 | 2007-08-23 | Fujimi Inc | 研磨用組成物 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG54606A1 (en) * | 1996-12-05 | 1998-11-16 | Fujimi Inc | Polishing composition |
JP3810588B2 (ja) * | 1998-06-22 | 2006-08-16 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
DE10007390B4 (de) | 1999-03-13 | 2008-11-13 | Peter Wolters Gmbh | Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern |
US6299514B1 (en) * | 1999-03-13 | 2001-10-09 | Peter Wolters Werkzeugmachinen Gmbh | Double-disk polishing machine, particularly for tooling semiconductor wafers |
DE19938340C1 (de) * | 1999-08-13 | 2001-02-15 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer epitaxierten Halbleiterscheibe |
DE10012840C2 (de) * | 2000-03-16 | 2001-08-02 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer Vielzahl von polierten Halbleiterscheiben |
DE10046933C2 (de) | 2000-09-21 | 2002-08-29 | Wacker Siltronic Halbleitermat | Verfahren zur Politur von Siliciumscheiben |
DE10058305A1 (de) * | 2000-11-24 | 2002-06-06 | Wacker Siltronic Halbleitermat | Verfahren zur Oberflächenpolitur von Siliciumscheiben |
JP4212861B2 (ja) * | 2002-09-30 | 2009-01-21 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いたシリコンウエハの研磨方法、並びにリンス用組成物及びそれを用いたシリコンウエハのリンス方法 |
US7008308B2 (en) * | 2003-05-20 | 2006-03-07 | Memc Electronic Materials, Inc. | Wafer carrier |
KR100511943B1 (ko) * | 2003-05-22 | 2005-09-01 | 한화석유화학 주식회사 | 화학·기계 연마용 산화세륨 초미립자 농축액 및 이의제조방법 |
WO2006031641A2 (en) * | 2004-09-10 | 2006-03-23 | Cree, Inc. | Method of manufacturing carrier wafer and resulting carrier wafer structures |
DE102006044367B4 (de) * | 2006-09-20 | 2011-07-14 | Siltronic AG, 81737 | Verfahren zum Polieren einer Halbleiterscheibe und eine nach dem Verfahren herstellbare polierte Halbleiterscheibe |
JP5060755B2 (ja) * | 2006-09-29 | 2012-10-31 | Sumco Techxiv株式会社 | 半導体ウェハの粗研磨方法、及び半導体ウェハの研磨装置 |
-
2008
- 2008-08-27 DE DE102008044646A patent/DE102008044646B4/de active Active
-
2009
- 2009-07-13 JP JP2009164436A patent/JP5167207B2/ja active Active
- 2009-07-30 KR KR1020090070077A patent/KR101062254B1/ko active IP Right Grant
- 2009-08-18 SG SG200905511-2A patent/SG159469A1/en unknown
- 2009-08-21 TW TW098128183A patent/TWI399804B/zh active
- 2009-08-26 US US12/547,749 patent/US8242020B2/en active Active
- 2009-08-27 CN CN200910168313A patent/CN101659027A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11347926A (ja) * | 1998-06-10 | 1999-12-21 | Memc Kk | シリコンウエハのラッピング方法 |
JP2005158798A (ja) * | 2003-11-20 | 2005-06-16 | Shin Etsu Handotai Co Ltd | 半導体ウェーハの両面研磨方法、半導体ウェーハ及びキャリアプレート |
JP2005254401A (ja) * | 2004-03-12 | 2005-09-22 | Seiko Epson Corp | 研磨布、研磨布の製造方法、研磨装置及び半導体装置の製造方法 |
JP2007214205A (ja) * | 2006-02-07 | 2007-08-23 | Fujimi Inc | 研磨用組成物 |
Also Published As
Publication number | Publication date |
---|---|
DE102008044646A1 (de) | 2010-03-25 |
KR101062254B1 (ko) | 2011-09-06 |
CN101659027A (zh) | 2010-03-03 |
TWI399804B (zh) | 2013-06-21 |
DE102008044646B4 (de) | 2011-06-22 |
US8242020B2 (en) | 2012-08-14 |
SG159469A1 (en) | 2010-03-30 |
TW201009910A (en) | 2010-03-01 |
KR20100025470A (ko) | 2010-03-09 |
US20100055908A1 (en) | 2010-03-04 |
JP5167207B2 (ja) | 2013-03-21 |
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