JP2010010210A5 - - Google Patents

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Publication number
JP2010010210A5
JP2010010210A5 JP2008164692A JP2008164692A JP2010010210A5 JP 2010010210 A5 JP2010010210 A5 JP 2010010210A5 JP 2008164692 A JP2008164692 A JP 2008164692A JP 2008164692 A JP2008164692 A JP 2008164692A JP 2010010210 A5 JP2010010210 A5 JP 2010010210A5
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JP
Japan
Prior art keywords
wafer
heating
wafers
holder
heating surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2008164692A
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English (en)
Japanese (ja)
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JP2010010210A (ja
JP5214347B2 (ja
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Application filed filed Critical
Priority to JP2008164692A priority Critical patent/JP5214347B2/ja
Priority claimed from JP2008164692A external-priority patent/JP5214347B2/ja
Priority to US12/490,753 priority patent/US7897524B2/en
Publication of JP2010010210A publication Critical patent/JP2010010210A/ja
Priority to US12/929,364 priority patent/US8420555B2/en
Publication of JP2010010210A5 publication Critical patent/JP2010010210A5/ja
Application granted granted Critical
Publication of JP5214347B2 publication Critical patent/JP5214347B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008164692A 2008-06-24 2008-06-24 半導体装置の製造方法および半導体装置の製造装置 Expired - Fee Related JP5214347B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008164692A JP5214347B2 (ja) 2008-06-24 2008-06-24 半導体装置の製造方法および半導体装置の製造装置
US12/490,753 US7897524B2 (en) 2008-06-24 2009-06-24 Manufacturing method for semiconductor device and manufacturing apparatus for semiconductor device
US12/929,364 US8420555B2 (en) 2008-06-24 2011-01-19 Manufacturing method for semiconductor device and manufacturing apparatus for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008164692A JP5214347B2 (ja) 2008-06-24 2008-06-24 半導体装置の製造方法および半導体装置の製造装置

Publications (3)

Publication Number Publication Date
JP2010010210A JP2010010210A (ja) 2010-01-14
JP2010010210A5 true JP2010010210A5 (enExample) 2012-08-09
JP5214347B2 JP5214347B2 (ja) 2013-06-19

Family

ID=41447944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008164692A Expired - Fee Related JP5214347B2 (ja) 2008-06-24 2008-06-24 半導体装置の製造方法および半導体装置の製造装置

Country Status (2)

Country Link
US (2) US7897524B2 (enExample)
JP (1) JP5214347B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2571529B2 (ja) 1993-11-11 1997-01-16 有限会社トーワ マットの製造方法
US8563121B2 (en) 2000-03-15 2013-10-22 C-Eng Co., Ltd. Three-dimensional netted structure having four molded surfaces
US20150090295A1 (en) * 2013-09-28 2015-04-02 Applied Materials, Inc. Apparatus and methods for a mask inverter
KR20160004601A (ko) * 2014-07-03 2016-01-13 삼성전자주식회사 반도체 패키지의 제조 시스템 및 이의 제조 방법
GB2560299B (en) 2017-02-01 2021-07-07 Nicoventures Trading Ltd Heating element and method of analysing
GB201701633D0 (en) 2017-02-01 2017-03-15 Nicoventures Holdings Ltd Heating element selection method
JP7325350B2 (ja) * 2020-02-03 2023-08-14 東京エレクトロン株式会社 成膜装置

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US4804633A (en) * 1988-02-18 1989-02-14 Northern Telecom Limited Silicon-on-insulator substrates annealed in polysilicon tube
JPH0513355A (ja) * 1991-07-05 1993-01-22 Hitachi Ltd ランプアニール装置
US5445675A (en) 1992-07-09 1995-08-29 Tel-Varian Limited Semiconductor processing apparatus
US5830277A (en) * 1995-05-26 1998-11-03 Mattson Technology, Inc. Thermal processing system with supplemental resistive heater and shielded optical pyrometry
US6332835B1 (en) * 1997-11-20 2001-12-25 Canon Kabushiki Kaisha Polishing apparatus with transfer arm for moving polished object without drying it
JPH11340157A (ja) * 1998-05-29 1999-12-10 Sony Corp 光照射熱処理装置および光照射熱処理方法
JP2000286200A (ja) * 1999-03-31 2000-10-13 Kokusai Electric Co Ltd 熱処理方法および熱処理装置
JP3327289B2 (ja) * 2000-03-29 2002-09-24 株式会社ニコン 工程終了点測定装置及び測定方法及び研磨装置及び半導体デバイス製造方法及び信号処理プログラムを記録した記録媒体
TW550635B (en) * 2001-03-09 2003-09-01 Toshiba Corp Manufacturing system of electronic devices
JP3755814B2 (ja) * 2001-08-07 2006-03-15 東京エレクトロン株式会社 熱処理方法及び熱処理装置
JP2003077974A (ja) * 2001-08-31 2003-03-14 Hitachi Kokusai Electric Inc 基板処理装置および半導体装置の製造方法
JP4663184B2 (ja) * 2001-09-26 2011-03-30 パナソニック株式会社 半導体装置の製造方法
US6849831B2 (en) 2002-03-29 2005-02-01 Mattson Technology, Inc. Pulsed processing semiconductor heating methods using combinations of heating sources
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JP2004186495A (ja) * 2002-12-04 2004-07-02 Toshiba Corp 半導体装置の製造装置、半導体装置の製造方法、および半導体装置
US8658945B2 (en) * 2004-02-27 2014-02-25 Applied Materials, Inc. Backside rapid thermal processing of patterned wafers
US7283734B2 (en) 2004-08-24 2007-10-16 Fujitsu Limited Rapid thermal processing apparatus and method of manufacture of semiconductor device
JP4786925B2 (ja) 2005-04-04 2011-10-05 東京エレクトロン株式会社 基板処理方法および基板処理装置
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WO2007091638A1 (ja) * 2006-02-09 2007-08-16 Sumco Techxiv Corporation サセプタおよびエピタキシャルウェハの製造装置
JP2007258286A (ja) * 2006-03-22 2007-10-04 Tokyo Electron Ltd 熱処理装置、熱処理方法及び記憶媒体
TWI395272B (zh) 2008-05-02 2013-05-01 Applied Materials Inc 用於旋轉基板之非徑向溫度控制系統
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