JP2009536786A - 半導体バッファ構造 - Google Patents
半導体バッファ構造 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 16
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims abstract description 200
- 230000008021 deposition Effects 0.000 claims abstract description 117
- 229910052732 germanium Inorganic materials 0.000 claims abstract description 94
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract description 86
- 239000002243 precursor Substances 0.000 claims abstract description 60
- 239000012686 silicon precursor Substances 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 238000000151 deposition Methods 0.000 claims description 130
- 238000000034 method Methods 0.000 claims description 80
- 239000012071 phase Substances 0.000 claims description 76
- 229910052710 silicon Inorganic materials 0.000 claims description 51
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 47
- 239000010703 silicon Substances 0.000 claims description 47
- 238000005137 deposition process Methods 0.000 claims description 26
- 238000005229 chemical vapour deposition Methods 0.000 claims description 19
- 239000012808 vapor phase Substances 0.000 claims description 15
- 229910000078 germane Inorganic materials 0.000 claims description 13
- 230000007547 defect Effects 0.000 claims description 12
- 150000003377 silicon compounds Chemical class 0.000 claims description 10
- 150000002291 germanium compounds Chemical class 0.000 claims description 9
- 239000012159 carrier gas Substances 0.000 claims description 8
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 5
- 229910000077 silane Inorganic materials 0.000 claims description 5
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 claims description 4
- VXGHASBVNMHGDI-UHFFFAOYSA-N digermane Chemical compound [Ge][Ge] VXGHASBVNMHGDI-UHFFFAOYSA-N 0.000 claims description 3
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 3
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical group Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 claims description 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 3
- 239000005052 trichlorosilane Substances 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 claims description 2
- RFBSXFWTSAJAEJ-UHFFFAOYSA-N silane dihydrochloride Chemical compound [SiH4].Cl.Cl RFBSXFWTSAJAEJ-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 8
- 230000001737 promoting effect Effects 0.000 abstract 1
- 230000008569 process Effects 0.000 description 32
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 23
- 239000000463 material Substances 0.000 description 9
- 238000013459 approach Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000000038 ultrahigh vacuum chemical vapour deposition Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000001289 rapid thermal chemical vapour deposition Methods 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000001534 heteroepitaxy Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
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Abstract
【選択図】図2
Description
基板は反応チャンバに入れられ、そして、好ましくは約900℃の堆積温度に加熱される。第1の線形SiGe堆積段階に、DCSとゲルマンは約1分間反応チャンバへ流される。好ましくは、この線形堆積段階において、DCSのフローは、約20sccmであり、ゲルマンのフローは、約10sccmから約25sccmまで増加する。第1の中断段階では、DCSのフローは止められ、また、ゲルマンのフローは25sccmで約3秒間維持される。
2回の中断を含むSiGeバッファ層は、表1に示しているプロセスに従って、大気圧及び1050℃の温度の等温プロセスでDCS及びGeCl4より堆積された。中断はステップ3及びステップ7で提供された。
実施例3
3回の中断を含むSiGeバッファ層は、表2に示すプロセスに従って、減圧及び1050℃の温度の等温プロセスでDCS及びGeCl4より堆積された。中断はステップ4、8、及びステップ12において提供された。
実施例4
2回の中断を含むSiGeバッファ層は、表3に示すプロセスに従って、減圧、且つ、可変温度のプロセスでDCS及びGeH4より堆積された。温度は堆積プロセスの間に約900℃から約800℃へ下げられた。中断はステップ4及び8において提供された。
Claims (34)
- 反応チャンバ内で半導体基板上に歪みが緩和されたSiGeバッファ層を形成する化学気相成長法(CVD)であって、
第1のSiGe堆積段階で、SiGeを堆積させるために、前記反応チャンバ内へシリコン前駆体及びゲルマニウム前駆体を流すステップと、
第1の中断段階で、前記反応チャンバ内へ前記ゲルマニウム前駆体を流し続ける一方で、前記反応チャンバ内への前記シリコン前駆体のフローを中断するステップと、
第2のSiGe堆積段階で、SiGeを堆積させるために、前記反応チャンバ内へ前記ゲルマニウム前駆体を流し続けながら、前記反応チャンバ内への前記シリコン前駆体のフローを再開するステップと、を含む歪み緩和SiGeバッファ層の形成方法。 - 境界層が、前記中断段階において、前記SiGeバッファ層内に形成される請求項1に記載の方法。
- 前記境界層が、約100Å未満の厚さを有する請求項2に記載の方法。
- 前記境界層が、約50Å未満の厚さを有する請求項2に記載の方法。
- 前記境界層が、前記SiGeバッファ層とは異な組成を有する請求項2に記載の方法。
- 前記中断するステップが、約10秒未満の間前記反応空間への前記シリコン前駆体のフローを止めるステップを含む請求項1に記載の方法。
- 前記中断するステップが、約5秒未満の間前記反応空間への前記シリコン前駆体のフローを止めるステップを含む請求項6に記載の方法。
- 温度が、堆積プロセスの全体にわたって一定に維持される請求項1に記載の方法。
- 前記温度が、約700〜1100℃の間にある請求項8に記載の方法。
- 前記温度が、前記堆積プロセスの間に変更される請求項1に記載の方法。
- 前記シリコン前駆体が、シラン、ジシラン、トリシラン、二塩化シラン、トリクロロシラン、及びテトラクロロシランからなるグループより選択される請求項1に記載の方法。
- 前記ゲルマニウム前駆体が、GeCl4、GeH4、及びジゲルマンからなるグループより選択される請求項1に記載の方法。
- 前記シリコン前駆体が、二塩化シランであり、
前記ゲルマニウム前駆体が、ゲルマニウム・テトラクロリドである請求項1に記載の方法。 - 前記シリコン前駆体が、DCSであり、
前記ゲルマニウム前駆体が、ゲルマンである請求項1に記載の方法。 - 前記第1のSiGe堆積段階において堆積した前記SiGeが、増大するゲルマニウムの濃度を有する請求項1に記載の方法。
- 前記第2のSiGe堆積段階において堆積した前記SiGeが、増大するゲルマニウムの濃度を有する請求項1に記載の方法。
- 反応チャンバ内へゲルマニウム前駆体を連続的に流しつつ、前記反応チャンバ内へシリコン前駆体を断続的に流すステップを含む
反応チャンバ内で基板上に低減された欠陥を有するSiGeバッファ層を堆積する方法。 - 前記基板が、バルクシリコン層を含む請求項17に記載の方法。
- 前記基板が、エピタキシー堆積したシリコン層を含む請求項17に記載の方法。
- 前記SiGeバッファ層が、基板と接する下方境界面から、重なる層と接する上方境界面へ濃度が増大するゲルマニウムを含む請求項17に記載の方法。
- 前記重なる層が、歪みシリコン層である請求項20に記載の方法。
- 前記反応チャンバへ前記シリコン前駆体を流す間に、前記ゲルマニウム前駆体対前記シリコン前駆体の比率が、増大する請求項17に記載の方法。
- 反応チャンバ内で基板上にSiGe層を堆積する方法であって、
前記反応チャンバ内へシリコン前駆体及びゲルマニウム前駆体を同時に流すステップと、
堆積中の1つ以上の期間において、前記反応チャンバ内へ前記ゲルマニウム前駆体を流し続けながら、前記シリコン前駆体のフローを止めるステップと、を含むSiGe層の堆積方法。 - 1つ以上の前記期間が、各々約10秒未満である請求項23に記載の方法。
- 前記シリコン前駆体のフローが、堆積中に少なくとも2つの期間において止められる請求項23に記載の方法。
- 不活性キャリヤーガスを連続的に流すステップをさらに含む請求項23に記載の方法。
- 前記不活性キャリヤーガスが、H2又はN2である請求項26に記載の方法
- 導体基板上に歪みシリコン層を形成する方法であって、
化学気相成長法(CVD)によって基板上にシリコン・ゲルマニウム・バッファ層を堆積するステップと、
前記SiGeバッファ層上に歪みシリコン層を堆積するステップと、を含み、
前記CVDが、増大するゲルマニウムの濃度を有するSiGeを堆積させるために前記基板を気相シリコン化合物及び気相ゲルマニウム化合物と接触させる少なくとも1つのSiGe堆積段階、及び、前記基板を気相シリコン化合物ではなく気相ゲルマニウム化合物と接触させる少なくとも1つの中断段階を含む歪みシリコン層の形成方法。 - 前記SiGe堆積段階において、前記気相ゲルマニウム化合物の濃度が、増大する請求項28に記載の方法。
- 前記SiGe堆積段階において、前記気相シリコン化合物の濃度が、減少する請求項28に記載の方法。
- 前記SiGe堆積段階において、温度が、傾斜されることを特徴とする請求項28の方法。
- 前記SiGe堆積段階において、前記温度が、下がる請求項31に記載の方法。
- 前記CVD法が、一定組成のSiGeを堆積させるために、前記基板を気相シリコン化合物及びゲルマニウム化合物と接触させる少なくとも1つの一定組成SiGe堆積段階をさらに含む請求項28に記載の方法。
- 前記一定組成SiGe堆積段階において、前記シリコン前駆体及びゲルマニウム前駆体の濃度が、一定のままである請求項33に記載の方法。
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US11/431,336 | 2006-05-09 | ||
US11/431,336 US7785995B2 (en) | 2006-05-09 | 2006-05-09 | Semiconductor buffer structures |
PCT/US2007/008879 WO2007133358A2 (en) | 2006-05-09 | 2007-04-09 | Semiconductor buffer structures |
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JP2009536786A true JP2009536786A (ja) | 2009-10-15 |
JP5576114B2 JP5576114B2 (ja) | 2014-08-20 |
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US (1) | US7785995B2 (ja) |
EP (1) | EP2016205B1 (ja) |
JP (1) | JP5576114B2 (ja) |
KR (1) | KR101387099B1 (ja) |
WO (1) | WO2007133358A2 (ja) |
Cited By (2)
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WO2014192870A1 (ja) * | 2013-05-31 | 2014-12-04 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法および基板処理方法 |
WO2021021265A1 (en) * | 2019-07-26 | 2021-02-04 | Applied Materials, Inc. | Anisotropic epitaxial growth |
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US7785995B2 (en) | 2010-08-31 |
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