JP2009524237A5 - - Google Patents

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Publication number
JP2009524237A5
JP2009524237A5 JP2008551251A JP2008551251A JP2009524237A5 JP 2009524237 A5 JP2009524237 A5 JP 2009524237A5 JP 2008551251 A JP2008551251 A JP 2008551251A JP 2008551251 A JP2008551251 A JP 2008551251A JP 2009524237 A5 JP2009524237 A5 JP 2009524237A5
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JP
Japan
Prior art keywords
component
actuation force
coupled
control system
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008551251A
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English (en)
Japanese (ja)
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JP2009524237A (ja
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Publication date
Priority claimed from US11/335,081 external-priority patent/US7352198B2/en
Application filed filed Critical
Publication of JP2009524237A publication Critical patent/JP2009524237A/ja
Publication of JP2009524237A5 publication Critical patent/JP2009524237A5/ja
Pending legal-status Critical Current

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JP2008551251A 2006-01-18 2006-10-30 プロービング・システムにおける改良した安定のための方法及び装置 Pending JP2009524237A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/335,081 US7352198B2 (en) 2006-01-18 2006-01-18 Methods and apparatuses for improved stabilization in a probing system
PCT/US2006/042343 WO2007084205A1 (en) 2006-01-18 2006-10-30 Methods and apparatuses for improved stabilization in a probing system

Publications (2)

Publication Number Publication Date
JP2009524237A JP2009524237A (ja) 2009-06-25
JP2009524237A5 true JP2009524237A5 (enExample) 2010-01-14

Family

ID=37875700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008551251A Pending JP2009524237A (ja) 2006-01-18 2006-10-30 プロービング・システムにおける改良した安定のための方法及び装置

Country Status (6)

Country Link
US (3) US7352198B2 (enExample)
JP (1) JP2009524237A (enExample)
KR (1) KR101297262B1 (enExample)
CN (1) CN101297205A (enExample)
TW (1) TWI442067B (enExample)
WO (1) WO2007084205A1 (enExample)

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