JP2009512197A5 - - Google Patents

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JP2009512197A5
JP2009512197A5 JP2008534728A JP2008534728A JP2009512197A5 JP 2009512197 A5 JP2009512197 A5 JP 2009512197A5 JP 2008534728 A JP2008534728 A JP 2008534728A JP 2008534728 A JP2008534728 A JP 2008534728A JP 2009512197 A5 JP2009512197 A5 JP 2009512197A5
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insulator
cut
stack
depositing
forming
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JP2009512197A (ja
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Priority claimed from US11/245,620 external-priority patent/US20070079866A1/en
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JP2008534728A 2005-10-07 2006-10-06 改良された薄膜ソーラーセル相互接続を形成するシステム及び方法 Pending JP2009512197A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/245,620 US20070079866A1 (en) 2005-10-07 2005-10-07 System and method for making an improved thin film solar cell interconnect
PCT/US2006/039212 WO2007044555A2 (en) 2005-10-07 2006-10-06 System and method for making an improved thin film solar cell interconnect

Publications (2)

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JP2009512197A JP2009512197A (ja) 2009-03-19
JP2009512197A5 true JP2009512197A5 (enExample) 2009-11-19

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JP2008534728A Pending JP2009512197A (ja) 2005-10-07 2006-10-06 改良された薄膜ソーラーセル相互接続を形成するシステム及び方法

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US (3) US20070079866A1 (enExample)
EP (1) EP1946434A2 (enExample)
JP (1) JP2009512197A (enExample)
KR (1) KR20080069597A (enExample)
CN (1) CN101496273A (enExample)
AU (1) AU2006302366A1 (enExample)
WO (1) WO2007044555A2 (enExample)

Families Citing this family (86)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4730740B2 (ja) * 2006-01-30 2011-07-20 本田技研工業株式会社 太陽電池およびその製造方法
US8716591B2 (en) * 2007-06-20 2014-05-06 Ascent Solar Technologies, Inc. Array of monolithically integrated thin film photovoltaic cells and associated methods
DE102007032283A1 (de) * 2007-07-11 2009-01-15 Stein, Wilhelm, Dr. Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung
US20090159111A1 (en) * 2007-12-21 2009-06-25 The Woodside Group Pte. Ltd Photovoltaic device having a textured metal silicide layer
WO2009120824A1 (en) * 2008-03-26 2009-10-01 E. I. Du Pont De Nemours And Company High performance anti-spall laminate article
US20090250100A1 (en) * 2008-04-04 2009-10-08 E.I. Du Pont De Nemours And Company Solar cell modules comprising high melt flow poly(vinyl butyral) encapsulants
GB2459274A (en) * 2008-04-15 2009-10-21 Renewable Energy Corp Asa Wafer based solar panels
US20090288701A1 (en) * 2008-05-23 2009-11-26 E.I.Du Pont De Nemours And Company Solar cell laminates having colored multi-layer encapsulant sheets
WO2009149000A2 (en) 2008-06-02 2009-12-10 E. I. Du Pont De Nemours And Company Solar cell module having a low haze encapsulant layer
WO2009148562A1 (en) * 2008-06-04 2009-12-10 Solexant Corp. Thin film solar cells with monolithic integration and backside contact
US20100236607A1 (en) * 2008-06-12 2010-09-23 General Electric Company Monolithically integrated solar modules and methods of manufacture
JP5470248B2 (ja) * 2008-07-04 2014-04-16 株式会社アルバック 太陽電池セルの製造方法及び太陽電池セル
US20100031997A1 (en) * 2008-08-11 2010-02-11 Basol Bulent M Flexible thin film photovoltaic modules and manufacturing the same
US20100047955A1 (en) * 2008-08-19 2010-02-25 Xunlight Corporation Interconnection system for photovoltaic modules
KR101144808B1 (ko) * 2008-09-01 2012-05-11 엘지전자 주식회사 박막형 태양전지 제조방법 및 이를 이용한 박막형 태양전지
US7994418B2 (en) * 2008-09-18 2011-08-09 General Electric Company Monolithically connected photovoltaic devices on flexible substrates
US9379265B2 (en) 2008-09-29 2016-06-28 Sol Chip Ltd. Integrated circuit combination of a target integrated circuit, photovoltaic cells and light sensitive diodes connected to enable a self-sufficient light detector device
US8952473B2 (en) * 2008-09-29 2015-02-10 Sol Chip Ltd. Integrated circuit combination of a target integrated circuit and a plurality of cells connected thereto using the top conductive layer
US8921967B2 (en) * 2008-09-29 2014-12-30 Sol Chip Ltd. Integrated circuit combination of a target integrated circuit and a plurality of photovoltaic cells connected thereto using the top conductive layer
US20100101647A1 (en) * 2008-10-24 2010-04-29 E.I. Du Pont De Nemours And Company Non-autoclave lamination process for manufacturing solar cell modules
EP2342209A1 (en) 2008-10-31 2011-07-13 E. I. du Pont de Nemours and Company Solar cells modules comprising low haze encapsulants
US8084129B2 (en) * 2008-11-24 2011-12-27 E. I. Du Pont De Nemours And Company Laminated articles comprising a sheet of a blend of ethylene copolymers
US8080727B2 (en) 2008-11-24 2011-12-20 E. I. Du Pont De Nemours And Company Solar cell modules comprising an encapsulant sheet of a blend of ethylene copolymers
US20100154867A1 (en) * 2008-12-19 2010-06-24 E. I. Du Pont De Nemours And Company Mechanically reliable solar cell modules
JP2010149146A (ja) * 2008-12-25 2010-07-08 Hitachi High-Technologies Corp レーザ加工装置
US8399081B2 (en) * 2008-12-31 2013-03-19 E I Du Pont De Nemours And Company Solar cell modules comprising encapsulant sheets with low haze and high moisture resistance
WO2010085644A1 (en) * 2009-01-22 2010-07-29 E. I. Du Pont De Nemours And Company Poly(vinyl butyral) encapsulant comprising chelating agents for solar cell modules
JP2012119343A (ja) * 2009-03-31 2012-06-21 Shibaura Mechatronics Corp 太陽電池の製造方法、太陽電池の製造装置及び太陽電池
JP4773543B2 (ja) * 2009-04-17 2011-09-14 昭和シェル石油株式会社 エッジスペースを備えた太陽電池モジュール
EP2427913A4 (en) 2009-05-04 2014-04-30 Microlink Devices Inc METHOD OF ASSEMBLING SOLAR CELL ARRAYS AND SOLAR CELLS SHAPED THEREIN
DE102009020482A1 (de) * 2009-05-08 2010-11-11 Forschungszentrum Jülich GmbH Verfahren zur Herstellung und Serienverschaltung von photovoltaischen Elementen zu einem Solarmodul und Solarmodul
DE102009023125A1 (de) 2009-05-20 2010-11-25 Universität Stuttgart Verfahren zur Herstellung seriell verschalteter Solarzellen sowie Vorrichtung zur Durchführung des Verfahrens
KR20120052360A (ko) * 2009-07-31 2012-05-23 이 아이 듀폰 디 네모아 앤드 캄파니 광전지용 가교결합성 봉지제
EP2284892A1 (en) * 2009-08-12 2011-02-16 Applied Materials, Inc. Method of manufacturing a semiconductor device module, semiconductor device connecting device, semiconductor device module manufacturing device, semiconductor device module
DE102009041905B4 (de) * 2009-09-20 2013-08-22 Solarion Ag Photovoltaik Verfahren zur seriellen Verschaltung von Dünnschichtsolarzellen
EP2485266B2 (en) 2009-09-29 2017-10-04 Kyocera Corporation Photoelectric conversion device and manufacturing method for same
KR101090780B1 (ko) * 2009-09-30 2011-12-08 주식회사 티지솔라 태양전지 및 그 제조방법
US8865569B2 (en) 2009-10-22 2014-10-21 M-Solv Ltd. Method and apparatus for dividing thin film device into separate cells
GB2474665B (en) 2009-10-22 2011-10-12 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
KR101047170B1 (ko) * 2009-11-30 2011-07-07 주식회사 티지솔라 태양전지 및 그 제조방법
US20110132755A1 (en) * 2009-12-04 2011-06-09 Kim Woosam In-line system for manufacturing solar cell
KR101072531B1 (ko) * 2010-01-27 2011-10-11 주식회사 티지솔라 태양전지 및 그 제조방법
KR101037124B1 (ko) 2010-01-29 2011-05-26 주식회사 티지솔라 태양전지 및 그 제조방법
KR101210168B1 (ko) 2010-03-24 2012-12-07 엘지이노텍 주식회사 태양광 발전장치 및 이의 제조방법
KR101039149B1 (ko) 2010-03-31 2011-06-07 주식회사 티지솔라 태양전지 및 그 제조방법
KR101112081B1 (ko) 2010-05-04 2012-02-22 주식회사 티지솔라 태양전지 및 그 제조방법
US20110303272A1 (en) * 2010-06-09 2011-12-15 Semiconductor Energy Laboratory Co., Ltd. Photoelectric Conversion Device and Manufacturing Method Thereof
US8642448B2 (en) * 2010-06-22 2014-02-04 Applied Materials, Inc. Wafer dicing using femtosecond-based laser and plasma etch
US8609980B2 (en) 2010-07-30 2013-12-17 E I Du Pont De Nemours And Company Cross-linkable ionomeric encapsulants for photovoltaic cells
CN101937948B (zh) * 2010-09-16 2012-02-01 普尼太阳能(杭州)有限公司 一种用于制备聚光薄膜电池的接收器的掩模板
GB2483922B (en) * 2010-09-25 2013-11-20 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
DE202011110968U1 (de) * 2010-10-15 2017-11-16 Wilhelm Stein Dünnschichtfotovoltaikmodul
US8507363B2 (en) * 2011-06-15 2013-08-13 Applied Materials, Inc. Laser and plasma etch wafer dicing using water-soluble die attach film
US8557683B2 (en) * 2011-06-15 2013-10-15 Applied Materials, Inc. Multi-step and asymmetrically shaped laser beam scribing
US8557682B2 (en) * 2011-06-15 2013-10-15 Applied Materials, Inc. Multi-layer mask for substrate dicing by laser and plasma etch
US8759197B2 (en) * 2011-06-15 2014-06-24 Applied Materials, Inc. Multi-step and asymmetrically shaped laser beam scribing
US8703581B2 (en) * 2011-06-15 2014-04-22 Applied Materials, Inc. Water soluble mask for substrate dicing by laser and plasma etch
US8598016B2 (en) * 2011-06-15 2013-12-03 Applied Materials, Inc. In-situ deposited mask layer for device singulation by laser scribing and plasma etch
GB2492971B (en) 2011-07-15 2013-09-18 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
JP2013026339A (ja) * 2011-07-19 2013-02-04 Fujifilm Corp 薄膜太陽電池およびその製造方法
US8530263B2 (en) * 2011-08-10 2013-09-10 Taiwan Semiconductor Manufacturing Co., Ltd. Superstrate solar cell
TW201314921A (zh) * 2011-09-16 2013-04-01 Axuntek Solar Energy 太陽能電池模組及其製造方法
TW201316537A (zh) * 2011-10-04 2013-04-16 Axuntek Solar Energy 用來製造穿透式太陽能電池模組的方法
KR101219972B1 (ko) * 2011-11-02 2013-01-21 엘지이노텍 주식회사 태양전지 및 이의 제조방법
JP2013102070A (ja) * 2011-11-09 2013-05-23 Fujifilm Corp 集積化太陽電池の製造方法
US20130133732A1 (en) * 2011-11-30 2013-05-30 Taiwan Semiconductor Manufacturing Co., Ltd. Method for forming interconnect in solar cell
MX336866B (es) * 2011-12-21 2016-02-04 Dow Global Technologies Llc Metodo mejorado para producir dos o mas celdas fotovaltaicas interconectadas basadas en pelicula delgada.
DE102012205978A1 (de) * 2012-04-12 2013-10-17 Robert Bosch Gmbh Photovoltaische Dünnschichtsolarmodule sowie Verfahren zur Herstellung solcher Dünnschichtsolarmodule
EP2845227B1 (fr) * 2012-05-03 2016-09-14 Nexcis Gravure par laser d'un empilement de couches minces pour une connexion de cellule photovoltaïque
US8845854B2 (en) * 2012-07-13 2014-09-30 Applied Materials, Inc. Laser, plasma etch, and backside grind process for wafer dicing
KR101382880B1 (ko) * 2012-07-31 2014-04-09 엘지이노텍 주식회사 태양광 발전장치 및 이의 제조방법
KR101934434B1 (ko) 2012-10-11 2019-01-02 엘지이노텍 주식회사 태양전지 및 이의 제조 방법
CN104870186B (zh) 2012-12-19 2018-04-27 纳幕尔杜邦公司 可交联酸共聚物组合物以及其在玻璃层压板中的用途
WO2014152556A1 (en) * 2013-03-15 2014-09-25 First Solar, Inc. Photovoltaic device interconnection and method of manufacturing
CN103618030B (zh) * 2013-11-28 2016-03-09 上海空间电源研究所 柔性pi衬底cigs薄膜电池激光刻蚀单体集成组件的方法
EP3117466A4 (en) * 2014-03-14 2018-03-21 First Solar, Inc Photovoltaic device interconnection and method of manufacturing
US20150325729A1 (en) 2014-05-09 2015-11-12 E. I. Du Pont De Nemours And Company Encapsulant composition comprising a copolymer of ethylene, vinyl acetate and a third comonomer
DE102014111649A1 (de) * 2014-08-14 2016-02-18 Thyssenkrupp Ag Unterwasserfahrzeug, Verfahren zum Aufnehmen einer Last vom Meeresgrund und ein Verfahren zum Absetzen einer Last am Meeresgrund
NL2014040B1 (en) * 2014-12-23 2016-10-12 Stichting Energieonderzoek Centrum Nederland Method of making a curent collecting grid for solar cells.
CN104766907A (zh) * 2015-04-09 2015-07-08 山东禹城汉能薄膜太阳能有限公司 柔性cigs薄膜太阳能电池的连接方法
NL2016708B1 (en) * 2016-04-29 2017-11-16 Stichting Energieonderzoek Centrum Nederland A method for manufacturing interconnected solar cells and such interconnected solar cells.
JP7447007B2 (ja) 2018-03-08 2024-03-11 ダウ グローバル テクノロジーズ エルエルシー 電圧誘起出力低下耐性が改善された太陽光発電モジュールおよび封止材組成物
GB2575792B (en) 2018-07-20 2021-11-03 Dyson Technology Ltd Stack for an energy storage device
GB2575790B (en) 2018-07-20 2021-11-24 Dyson Technology Ltd Energy storage device
CN111490107A (zh) * 2019-01-25 2020-08-04 神华（北京）光伏科技研发有限公司 薄膜太阳电池及薄膜太阳电池的制备方法
CN112786737A (zh) * 2021-01-26 2021-05-11 凯盛光伏材料有限公司 Cigs薄膜太阳能电池组件及其刻划方法

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4312114A (en) * 1977-02-24 1982-01-26 The United States Of America As Represented By The Secretary Of The Navy Method of preparing a thin-film, single-crystal photovoltaic detector
US4262411A (en) * 1977-09-08 1981-04-21 Photon Power, Inc. Method of making a solar cell array
US4278473A (en) * 1979-08-24 1981-07-14 Varian Associates, Inc. Monolithic series-connected solar cell
US4377723A (en) * 1980-05-02 1983-03-22 The University Of Delaware High efficiency thin-film multiple-gap photovoltaic device
US4383130A (en) * 1981-05-04 1983-05-10 Alpha Solarco Inc. Solar energy cell and method of manufacture
US4479027A (en) * 1982-09-24 1984-10-23 Todorof William J Multi-layer thin-film, flexible silicon alloy photovoltaic cell
US4604791A (en) * 1982-09-24 1986-08-12 Todorof William J Method for producing multi-layer, thin-film, flexible silicon alloy photovoltaic cells
US4595791A (en) * 1985-01-29 1986-06-17 The Standard Oil Company Thin-film photovoltaic devices incorporating current collector grid and method of making
US4754544A (en) * 1985-01-30 1988-07-05 Energy Conversion Devices, Inc. Extremely lightweight, flexible semiconductor device arrays
US4667058A (en) * 1985-07-01 1987-05-19 Solarex Corporation Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
US4695674A (en) * 1985-08-30 1987-09-22 The Standard Oil Company Preformed, thin-film front contact current collector grid for photovoltaic cells
JPS6284569A (ja) * 1985-10-08 1987-04-18 Sanyo Electric Co Ltd 光起電力装置の製造方法
US4772564A (en) * 1985-10-30 1988-09-20 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell fabrication process
US4677250A (en) * 1985-10-30 1987-06-30 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell
US4781766A (en) * 1985-10-30 1988-11-01 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell and method
DE3727826A1 (de) * 1987-08-20 1989-03-02 Siemens Ag Serienverschaltetes duennschicht-solarmodul aus kristallinem silizium
JP2798772B2 (ja) * 1990-02-28 1998-09-17 三洋電機株式会社 光起電力装置の製造方法
JP2986875B2 (ja) * 1990-09-07 1999-12-06 キヤノン株式会社 集積化太陽電池
US5501744A (en) * 1992-01-13 1996-03-26 Photon Energy, Inc. Photovoltaic cell having a p-type polycrystalline layer with large crystals
DE4324320B4 (de) * 1992-07-24 2006-08-31 Fuji Electric Co., Ltd., Kawasaki Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung
DE4241045C1 (de) * 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
US5306646A (en) * 1992-12-23 1994-04-26 Martin Marietta Energy Systems, Inc. Method for producing textured substrates for thin-film photovoltaic cells
JP3537196B2 (ja) * 1994-11-08 2004-06-14 松下電器産業株式会社 太陽電池モジュールの作製方法
US5730852A (en) * 1995-09-25 1998-03-24 Davis, Joseph & Negley Preparation of cuxinygazsen (X=0-2, Y=0-2, Z=0-2, N=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells
DE19736370C2 (de) * 1997-08-21 2001-12-06 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silizium
JP4168413B2 (ja) * 1998-07-27 2008-10-22 シチズンホールディングス株式会社 太陽電池の製造方法
AU766727B2 (en) * 1999-06-14 2003-10-23 Kaneka Corporation Method of fabricating thin-film photovoltaic module
EP1096577B9 (en) * 1999-10-27 2016-06-01 Kaneka Corporation Method of producing a thin-film photovoltaic device
US6310281B1 (en) * 2000-03-16 2001-10-30 Global Solar Energy, Inc. Thin-film, flexible photovoltaic module
US6372538B1 (en) * 2000-03-16 2002-04-16 University Of Delaware Fabrication of thin-film, flexible photovoltaic module
US6423565B1 (en) * 2000-05-30 2002-07-23 Kurt L. Barth Apparatus and processes for the massproduction of photovotaic modules
JP4006994B2 (ja) * 2001-12-18 2007-11-14 株式会社リコー 立体構造体の加工方法、立体形状品の製造方法及び立体構造体
US7259321B2 (en) * 2002-01-07 2007-08-21 Bp Corporation North America Inc. Method of manufacturing thin film photovoltaic modules
JP4465429B2 (ja) * 2002-02-21 2010-05-19 株式会社リコー レーザ加工方法
US6690041B2 (en) * 2002-05-14 2004-02-10 Global Solar Energy, Inc. Monolithically integrated diodes in thin-film photovoltaic devices
JP2006013403A (ja) * 2004-06-29 2006-01-12 Sanyo Electric Co Ltd 太陽電池、太陽電池モジュール、その製造方法およびその修復方法

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