JP2009512197A - 改良された薄膜ソーラーセル相互接続を形成するシステム及び方法 - Google Patents

改良された薄膜ソーラーセル相互接続を形成するシステム及び方法 Download PDF

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JP2009512197A
JP2009512197A JP2008534728A JP2008534728A JP2009512197A JP 2009512197 A JP2009512197 A JP 2009512197A JP 2008534728 A JP2008534728 A JP 2008534728A JP 2008534728 A JP2008534728 A JP 2008534728A JP 2009512197 A JP2009512197 A JP 2009512197A
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insulator
layer
cut
interconnect
forming
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JP2009512197A5 (enExample
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ピーター, ジー. ボーデン,
デイヴィッド イーグルスハム,
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Applied Materials Inc
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Applied Materials Inc
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H10F19/33Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H10F19/35Structures for the connecting of adjacent photovoltaic cells, e.g. interconnections or insulating spacers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
JP2008534728A 2005-10-07 2006-10-06 改良された薄膜ソーラーセル相互接続を形成するシステム及び方法 Pending JP2009512197A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/245,620 US20070079866A1 (en) 2005-10-07 2005-10-07 System and method for making an improved thin film solar cell interconnect
PCT/US2006/039212 WO2007044555A2 (en) 2005-10-07 2006-10-06 System and method for making an improved thin film solar cell interconnect

Publications (2)

Publication Number Publication Date
JP2009512197A true JP2009512197A (ja) 2009-03-19
JP2009512197A5 JP2009512197A5 (enExample) 2009-11-19

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JP2008534728A Pending JP2009512197A (ja) 2005-10-07 2006-10-06 改良された薄膜ソーラーセル相互接続を形成するシステム及び方法

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US (3) US20070079866A1 (enExample)
EP (1) EP1946434A2 (enExample)
JP (1) JP2009512197A (enExample)
KR (1) KR20080069597A (enExample)
CN (1) CN101496273A (enExample)
AU (1) AU2006302366A1 (enExample)
WO (1) WO2007044555A2 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113880A1 (ja) * 2009-03-31 2010-10-07 芝浦メカトロニクス株式会社 太陽電池の製造方法、太陽電池の製造装置及び太陽電池
JP2013026339A (ja) * 2011-07-19 2013-02-04 Fujifilm Corp 薄膜太陽電池およびその製造方法
WO2013069267A1 (ja) * 2011-11-09 2013-05-16 富士フイルム株式会社 集積化太陽電池の製造方法
JP2015513230A (ja) * 2012-04-12 2015-04-30 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh 光起電力による薄膜ソーラモジュールならびに該薄膜ソーラモジュールの製造方法
JP2015516110A (ja) * 2012-05-03 2015-06-04 ネクシスNexcis 光電池セルの接続のための薄層スタックのレーザエッチング
KR101934434B1 (ko) 2012-10-11 2019-01-02 엘지이노텍 주식회사 태양전지 및 이의 제조 방법

Families Citing this family (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4730740B2 (ja) * 2006-01-30 2011-07-20 本田技研工業株式会社 太陽電池およびその製造方法
US8716591B2 (en) * 2007-06-20 2014-05-06 Ascent Solar Technologies, Inc. Array of monolithically integrated thin film photovoltaic cells and associated methods
DE102007032283A1 (de) * 2007-07-11 2009-01-15 Stein, Wilhelm, Dr. Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung
US20090159111A1 (en) * 2007-12-21 2009-06-25 The Woodside Group Pte. Ltd Photovoltaic device having a textured metal silicide layer
BRPI0907078A2 (pt) * 2008-03-26 2015-07-07 Du Pont "artigo laminado"
WO2009146115A2 (en) * 2008-04-04 2009-12-03 E. I. Du Pont De Nemours And Company Solar cell modules comprising high melt flow poly(vinyl butyral) encapsulants
GB2459274A (en) * 2008-04-15 2009-10-21 Renewable Energy Corp Asa Wafer based solar panels
US20090288701A1 (en) * 2008-05-23 2009-11-26 E.I.Du Pont De Nemours And Company Solar cell laminates having colored multi-layer encapsulant sheets
JP2011522442A (ja) 2008-06-02 2011-07-28 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 低ヘーズの封止層を有する太陽電池モジュール
KR20110020276A (ko) * 2008-06-04 2011-03-02 솔렉슨트 코포레이션 모노리식 집적 및 백사이드 컨택을 갖는 박막 태양 전지
US20100236607A1 (en) * 2008-06-12 2010-09-23 General Electric Company Monolithically integrated solar modules and methods of manufacture
US20110120553A1 (en) * 2008-07-04 2011-05-26 Ulvac, Inc. Solar cell and method for manufacturing the same
US20100031997A1 (en) * 2008-08-11 2010-02-11 Basol Bulent M Flexible thin film photovoltaic modules and manufacturing the same
US20100047955A1 (en) * 2008-08-19 2010-02-25 Xunlight Corporation Interconnection system for photovoltaic modules
KR101144808B1 (ko) * 2008-09-01 2012-05-11 엘지전자 주식회사 박막형 태양전지 제조방법 및 이를 이용한 박막형 태양전지
US7994418B2 (en) * 2008-09-18 2011-08-09 General Electric Company Monolithically connected photovoltaic devices on flexible substrates
US8921967B2 (en) * 2008-09-29 2014-12-30 Sol Chip Ltd. Integrated circuit combination of a target integrated circuit and a plurality of photovoltaic cells connected thereto using the top conductive layer
US8952473B2 (en) * 2008-09-29 2015-02-10 Sol Chip Ltd. Integrated circuit combination of a target integrated circuit and a plurality of cells connected thereto using the top conductive layer
US9379265B2 (en) 2008-09-29 2016-06-28 Sol Chip Ltd. Integrated circuit combination of a target integrated circuit, photovoltaic cells and light sensitive diodes connected to enable a self-sufficient light detector device
US20100101647A1 (en) * 2008-10-24 2010-04-29 E.I. Du Pont De Nemours And Company Non-autoclave lamination process for manufacturing solar cell modules
EP2342209A1 (en) 2008-10-31 2011-07-13 E. I. du Pont de Nemours and Company Solar cells modules comprising low haze encapsulants
US8080727B2 (en) 2008-11-24 2011-12-20 E. I. Du Pont De Nemours And Company Solar cell modules comprising an encapsulant sheet of a blend of ethylene copolymers
US8084129B2 (en) * 2008-11-24 2011-12-27 E. I. Du Pont De Nemours And Company Laminated articles comprising a sheet of a blend of ethylene copolymers
US20100154867A1 (en) * 2008-12-19 2010-06-24 E. I. Du Pont De Nemours And Company Mechanically reliable solar cell modules
JP2010149146A (ja) * 2008-12-25 2010-07-08 Hitachi High-Technologies Corp レーザ加工装置
US8399081B2 (en) * 2008-12-31 2013-03-19 E I Du Pont De Nemours And Company Solar cell modules comprising encapsulant sheets with low haze and high moisture resistance
JP2012516061A (ja) * 2009-01-22 2012-07-12 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 太陽電池モジュール用のキレート剤を含むポリ(ビニルブチラール)封止材
JP4773543B2 (ja) * 2009-04-17 2011-09-14 昭和シェル石油株式会社 エッジスペースを備えた太陽電池モジュール
EP2427913A4 (en) 2009-05-04 2014-04-30 Microlink Devices Inc METHOD OF ASSEMBLING SOLAR CELL ARRAYS AND SOLAR CELLS SHAPED THEREIN
DE102009020482A1 (de) 2009-05-08 2010-11-11 Forschungszentrum Jülich GmbH Verfahren zur Herstellung und Serienverschaltung von photovoltaischen Elementen zu einem Solarmodul und Solarmodul
DE102009023125A1 (de) 2009-05-20 2010-11-25 Universität Stuttgart Verfahren zur Herstellung seriell verschalteter Solarzellen sowie Vorrichtung zur Durchführung des Verfahrens
CN102859863A (zh) * 2009-07-31 2013-01-02 纳幕尔杜邦公司 用于光伏电池的可交联包封材料
EP2284892A1 (en) * 2009-08-12 2011-02-16 Applied Materials, Inc. Method of manufacturing a semiconductor device module, semiconductor device connecting device, semiconductor device module manufacturing device, semiconductor device module
DE102009041905B4 (de) * 2009-09-20 2013-08-22 Solarion Ag Photovoltaik Verfahren zur seriellen Verschaltung von Dünnschichtsolarzellen
DE202010018454U1 (de) 2009-09-29 2016-10-20 Kyocera Corporation Photoelektrische Umwandlungsvorrichtung
KR101090780B1 (ko) * 2009-09-30 2011-12-08 주식회사 티지솔라 태양전지 및 그 제조방법
GB2474665B (en) 2009-10-22 2011-10-12 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
US8865569B2 (en) 2009-10-22 2014-10-21 M-Solv Ltd. Method and apparatus for dividing thin film device into separate cells
KR101047170B1 (ko) * 2009-11-30 2011-07-07 주식회사 티지솔라 태양전지 및 그 제조방법
US20110132755A1 (en) * 2009-12-04 2011-06-09 Kim Woosam In-line system for manufacturing solar cell
KR101072531B1 (ko) * 2010-01-27 2011-10-11 주식회사 티지솔라 태양전지 및 그 제조방법
KR101037124B1 (ko) 2010-01-29 2011-05-26 주식회사 티지솔라 태양전지 및 그 제조방법
KR101210168B1 (ko) 2010-03-24 2012-12-07 엘지이노텍 주식회사 태양광 발전장치 및 이의 제조방법
KR101039149B1 (ko) 2010-03-31 2011-06-07 주식회사 티지솔라 태양전지 및 그 제조방법
KR101112081B1 (ko) 2010-05-04 2012-02-22 주식회사 티지솔라 태양전지 및 그 제조방법
US20110303272A1 (en) * 2010-06-09 2011-12-15 Semiconductor Energy Laboratory Co., Ltd. Photoelectric Conversion Device and Manufacturing Method Thereof
US8642448B2 (en) * 2010-06-22 2014-02-04 Applied Materials, Inc. Wafer dicing using femtosecond-based laser and plasma etch
US8609980B2 (en) 2010-07-30 2013-12-17 E I Du Pont De Nemours And Company Cross-linkable ionomeric encapsulants for photovoltaic cells
CN101937948B (zh) * 2010-09-16 2012-02-01 普尼太阳能(杭州)有限公司 一种用于制备聚光薄膜电池的接收器的掩模板
GB2483922B (en) * 2010-09-25 2013-11-20 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
EP2442361A3 (de) * 2010-10-15 2017-05-03 Wilhelm Stein Verfahren zur Herstellung von Verbindungen in einem Dünnschichtfotovoltaikmodul und Dünnschichtfotovoltaikmodul
US8557683B2 (en) * 2011-06-15 2013-10-15 Applied Materials, Inc. Multi-step and asymmetrically shaped laser beam scribing
US8507363B2 (en) * 2011-06-15 2013-08-13 Applied Materials, Inc. Laser and plasma etch wafer dicing using water-soluble die attach film
US8598016B2 (en) * 2011-06-15 2013-12-03 Applied Materials, Inc. In-situ deposited mask layer for device singulation by laser scribing and plasma etch
US8759197B2 (en) * 2011-06-15 2014-06-24 Applied Materials, Inc. Multi-step and asymmetrically shaped laser beam scribing
US8703581B2 (en) * 2011-06-15 2014-04-22 Applied Materials, Inc. Water soluble mask for substrate dicing by laser and plasma etch
US8557682B2 (en) * 2011-06-15 2013-10-15 Applied Materials, Inc. Multi-layer mask for substrate dicing by laser and plasma etch
GB2492971B (en) 2011-07-15 2013-09-18 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
US8530263B2 (en) * 2011-08-10 2013-09-10 Taiwan Semiconductor Manufacturing Co., Ltd. Superstrate solar cell
TW201314921A (zh) * 2011-09-16 2013-04-01 Axuntek Solar Energy 太陽能電池模組及其製造方法
TW201316537A (zh) * 2011-10-04 2013-04-16 Axuntek Solar Energy 用來製造穿透式太陽能電池模組的方法
KR101219972B1 (ko) * 2011-11-02 2013-01-21 엘지이노텍 주식회사 태양전지 및 이의 제조방법
US20130133732A1 (en) * 2011-11-30 2013-05-30 Taiwan Semiconductor Manufacturing Co., Ltd. Method for forming interconnect in solar cell
CN104011877A (zh) * 2011-12-21 2014-08-27 陶氏环球技术有限责任公司 产生两个或更多个薄膜基互连光伏电池的改进方法
US8845854B2 (en) * 2012-07-13 2014-09-30 Applied Materials, Inc. Laser, plasma etch, and backside grind process for wafer dicing
KR101382880B1 (ko) * 2012-07-31 2014-04-09 엘지이노텍 주식회사 태양광 발전장치 및 이의 제조방법
EP2934882B1 (en) 2012-12-19 2018-08-01 E. I. du Pont de Nemours and Company Safety laminates comprising a cross-linked acid copolymer composition
WO2014152556A1 (en) * 2013-03-15 2014-09-25 First Solar, Inc. Photovoltaic device interconnection and method of manufacturing
CN103618030B (zh) * 2013-11-28 2016-03-09 上海空间电源研究所 柔性pi衬底cigs薄膜电池激光刻蚀单体集成组件的方法
EP3117466A4 (en) * 2014-03-14 2018-03-21 First Solar, Inc Photovoltaic device interconnection and method of manufacturing
WO2015171575A1 (en) 2014-05-09 2015-11-12 E. I. Du Pont De Nemours And Company Encapsulant composition comprising a copolymer of ethylene, vinyl acetate and a third comonomer
DE102014111649A1 (de) * 2014-08-14 2016-02-18 Thyssenkrupp Ag Unterwasserfahrzeug, Verfahren zum Aufnehmen einer Last vom Meeresgrund und ein Verfahren zum Absetzen einer Last am Meeresgrund
NL2014040B1 (en) * 2014-12-23 2016-10-12 Stichting Energieonderzoek Centrum Nederland Method of making a curent collecting grid for solar cells.
CN104766907A (zh) * 2015-04-09 2015-07-08 山东禹城汉能薄膜太阳能有限公司 柔性cigs薄膜太阳能电池的连接方法
NL2016708B1 (en) * 2016-04-29 2017-11-16 Stichting Energieonderzoek Centrum Nederland A method for manufacturing interconnected solar cells and such interconnected solar cells.
ES2943469T3 (es) 2018-03-08 2023-06-13 Dow Global Technologies Llc Módulo fotovoltaico y composición encapsulante que tienen resistencia mejorada a la degradación inducida por potencial
GB2575792B (en) 2018-07-20 2021-11-03 Dyson Technology Ltd Stack for an energy storage device
GB2575790B (en) 2018-07-20 2021-11-24 Dyson Technology Ltd Energy storage device
CN111490107A (zh) * 2019-01-25 2020-08-04 神华(北京)光伏科技研发有限公司 薄膜太阳电池及薄膜太阳电池的制备方法
CN112786737A (zh) * 2021-01-26 2021-05-11 凯盛光伏材料有限公司 Cigs薄膜太阳能电池组件及其刻划方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284569A (ja) * 1985-10-08 1987-04-18 Sanyo Electric Co Ltd 光起電力装置の製造方法
US4879251A (en) * 1987-08-20 1989-11-07 Siemens Aktiengesellschaft Method of making series-connected, thin-film solar module formed of crystalline silicon
JPH03250771A (ja) * 1990-02-28 1991-11-08 Sanyo Electric Co Ltd 光起電力装置の製造方法
JPH04116986A (ja) * 1990-09-07 1992-04-17 Canon Inc 集積化太陽電池
JPH08139351A (ja) * 1994-11-08 1996-05-31 Matsushita Electric Ind Co Ltd 太陽電池モジュールの作製方法及びその作製装置
US6690041B2 (en) * 2002-05-14 2004-02-10 Global Solar Energy, Inc. Monolithically integrated diodes in thin-film photovoltaic devices

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4312114A (en) * 1977-02-24 1982-01-26 The United States Of America As Represented By The Secretary Of The Navy Method of preparing a thin-film, single-crystal photovoltaic detector
US4262411A (en) * 1977-09-08 1981-04-21 Photon Power, Inc. Method of making a solar cell array
US4278473A (en) * 1979-08-24 1981-07-14 Varian Associates, Inc. Monolithic series-connected solar cell
US4377723A (en) * 1980-05-02 1983-03-22 The University Of Delaware High efficiency thin-film multiple-gap photovoltaic device
US4383130A (en) * 1981-05-04 1983-05-10 Alpha Solarco Inc. Solar energy cell and method of manufacture
US4604791A (en) * 1982-09-24 1986-08-12 Todorof William J Method for producing multi-layer, thin-film, flexible silicon alloy photovoltaic cells
US4479027A (en) * 1982-09-24 1984-10-23 Todorof William J Multi-layer thin-film, flexible silicon alloy photovoltaic cell
US4595791A (en) * 1985-01-29 1986-06-17 The Standard Oil Company Thin-film photovoltaic devices incorporating current collector grid and method of making
US4754544A (en) * 1985-01-30 1988-07-05 Energy Conversion Devices, Inc. Extremely lightweight, flexible semiconductor device arrays
US4667058A (en) * 1985-07-01 1987-05-19 Solarex Corporation Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
US4695674A (en) * 1985-08-30 1987-09-22 The Standard Oil Company Preformed, thin-film front contact current collector grid for photovoltaic cells
US4781766A (en) * 1985-10-30 1988-11-01 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell and method
US4677250A (en) * 1985-10-30 1987-06-30 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell
US4772564A (en) * 1985-10-30 1988-09-20 Astrosystems, Inc. Fault tolerant thin-film photovoltaic cell fabrication process
US5501744A (en) * 1992-01-13 1996-03-26 Photon Energy, Inc. Photovoltaic cell having a p-type polycrystalline layer with large crystals
DE4324320B4 (de) * 1992-07-24 2006-08-31 Fuji Electric Co., Ltd., Kawasaki Verfahren und Vorrichtung zur Herstellung einer als dünne Schicht ausgebildeten fotovoltaischen Umwandlungsvorrichtung
DE4241045C1 (de) * 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
US5306646A (en) * 1992-12-23 1994-04-26 Martin Marietta Energy Systems, Inc. Method for producing textured substrates for thin-film photovoltaic cells
US5730852A (en) * 1995-09-25 1998-03-24 Davis, Joseph & Negley Preparation of cuxinygazsen (X=0-2, Y=0-2, Z=0-2, N=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells
DE19736370C2 (de) * 1997-08-21 2001-12-06 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silizium
JP4168413B2 (ja) * 1998-07-27 2008-10-22 シチズンホールディングス株式会社 太陽電池の製造方法
EP1061589A3 (en) * 1999-06-14 2008-08-06 Kaneka Corporation Method of fabricating thin-film photovoltaic module
AU777360B2 (en) * 1999-10-27 2004-10-14 Kaneka Corporation Method of producing a thin-film photovoltaic device
US6372538B1 (en) * 2000-03-16 2002-04-16 University Of Delaware Fabrication of thin-film, flexible photovoltaic module
US6310281B1 (en) * 2000-03-16 2001-10-30 Global Solar Energy, Inc. Thin-film, flexible photovoltaic module
US6423565B1 (en) * 2000-05-30 2002-07-23 Kurt L. Barth Apparatus and processes for the massproduction of photovotaic modules
JP4006994B2 (ja) * 2001-12-18 2007-11-14 株式会社リコー 立体構造体の加工方法、立体形状品の製造方法及び立体構造体
US7259321B2 (en) * 2002-01-07 2007-08-21 Bp Corporation North America Inc. Method of manufacturing thin film photovoltaic modules
JP4465429B2 (ja) * 2002-02-21 2010-05-19 株式会社リコー レーザ加工方法
JP2006013403A (ja) * 2004-06-29 2006-01-12 Sanyo Electric Co Ltd 太陽電池、太陽電池モジュール、その製造方法およびその修復方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6284569A (ja) * 1985-10-08 1987-04-18 Sanyo Electric Co Ltd 光起電力装置の製造方法
US4879251A (en) * 1987-08-20 1989-11-07 Siemens Aktiengesellschaft Method of making series-connected, thin-film solar module formed of crystalline silicon
JPH03250771A (ja) * 1990-02-28 1991-11-08 Sanyo Electric Co Ltd 光起電力装置の製造方法
JPH04116986A (ja) * 1990-09-07 1992-04-17 Canon Inc 集積化太陽電池
JPH08139351A (ja) * 1994-11-08 1996-05-31 Matsushita Electric Ind Co Ltd 太陽電池モジュールの作製方法及びその作製装置
US6690041B2 (en) * 2002-05-14 2004-02-10 Global Solar Energy, Inc. Monolithically integrated diodes in thin-film photovoltaic devices

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113880A1 (ja) * 2009-03-31 2010-10-07 芝浦メカトロニクス株式会社 太陽電池の製造方法、太陽電池の製造装置及び太陽電池
JP2013026339A (ja) * 2011-07-19 2013-02-04 Fujifilm Corp 薄膜太陽電池およびその製造方法
WO2013069267A1 (ja) * 2011-11-09 2013-05-16 富士フイルム株式会社 集積化太陽電池の製造方法
JP2015513230A (ja) * 2012-04-12 2015-04-30 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh 光起電力による薄膜ソーラモジュールならびに該薄膜ソーラモジュールの製造方法
JP2015516110A (ja) * 2012-05-03 2015-06-04 ネクシスNexcis 光電池セルの接続のための薄層スタックのレーザエッチング
KR101934434B1 (ko) 2012-10-11 2019-01-02 엘지이노텍 주식회사 태양전지 및 이의 제조 방법

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CN101496273A (zh) 2009-07-29
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