JP2009302347A5 - - Google Patents

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Publication number
JP2009302347A5
JP2009302347A5 JP2008156019A JP2008156019A JP2009302347A5 JP 2009302347 A5 JP2009302347 A5 JP 2009302347A5 JP 2008156019 A JP2008156019 A JP 2008156019A JP 2008156019 A JP2008156019 A JP 2008156019A JP 2009302347 A5 JP2009302347 A5 JP 2009302347A5
Authority
JP
Japan
Prior art keywords
electrostatic chuck
electrostatic
base plate
substrate
placement unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008156019A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009302347A (ja
JP5025576B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008156019A priority Critical patent/JP5025576B2/ja
Priority claimed from JP2008156019A external-priority patent/JP5025576B2/ja
Priority to US12/482,901 priority patent/US8068326B2/en
Publication of JP2009302347A publication Critical patent/JP2009302347A/ja
Publication of JP2009302347A5 publication Critical patent/JP2009302347A5/ja
Application granted granted Critical
Publication of JP5025576B2 publication Critical patent/JP5025576B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008156019A 2008-06-13 2008-06-13 静電チャック及び基板温調固定装置 Active JP5025576B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008156019A JP5025576B2 (ja) 2008-06-13 2008-06-13 静電チャック及び基板温調固定装置
US12/482,901 US8068326B2 (en) 2008-06-13 2009-06-11 Electrostatic chuck and substrate temperature control fixing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008156019A JP5025576B2 (ja) 2008-06-13 2008-06-13 静電チャック及び基板温調固定装置

Publications (3)

Publication Number Publication Date
JP2009302347A JP2009302347A (ja) 2009-12-24
JP2009302347A5 true JP2009302347A5 (enExample) 2011-03-24
JP5025576B2 JP5025576B2 (ja) 2012-09-12

Family

ID=41414543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008156019A Active JP5025576B2 (ja) 2008-06-13 2008-06-13 静電チャック及び基板温調固定装置

Country Status (2)

Country Link
US (1) US8068326B2 (enExample)
JP (1) JP5025576B2 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6003011B2 (ja) * 2011-03-31 2016-10-05 東京エレクトロン株式会社 基板処理装置
EP2525389A1 (en) * 2011-05-18 2012-11-21 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Electrostatic clamp and method of making said electrostatic clamp
US9543184B2 (en) 2012-01-26 2017-01-10 Kyocera Corporation Electrostatic chuck
US9685356B2 (en) * 2012-12-11 2017-06-20 Applied Materials, Inc. Substrate support assembly having metal bonded protective layer
US20150062772A1 (en) * 2013-08-27 2015-03-05 Varian Semiconductor Equipment Associates, Inc Barrier Layer For Electrostatic Chucks
KR101583767B1 (ko) * 2014-05-09 2016-01-08 코리아세미텍(주) 히터가 장착된 캡형 정전척 및 그 제조방법
DE102014008029B4 (de) 2014-05-28 2023-05-17 Asml Netherlands B.V. Elektrostatische Haltevorrichtung mit einer Elektroden-Trägerscheibe und Verfahren zur Herstellung der Haltevorrichtung
DE102014008031B4 (de) 2014-05-28 2020-06-25 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co. Elektrostatische Haltevorrichtung mit einer Keramik-Elektrode und Verfahren zur Herstellung einer solchen Haltevorrichtung
DE102014008030A1 (de) * 2014-05-28 2015-12-03 Berliner Glas Kgaa Herbert Kubatz Gmbh & Co Verfahren zur Herstellung einer elektrostatischen Haltevorrichtung
DE102014007903B4 (de) 2014-05-28 2025-04-03 ASML Netherlands B.V. Elektrostatische Haltevorrichtung mit Noppen-Elektroden und Verfahren zu deren Herstellung
JP6279149B2 (ja) * 2015-04-02 2018-02-14 株式会社アルバック 吸着装置及び真空処理装置
JP6312926B2 (ja) * 2015-04-02 2018-04-18 株式会社アルバック 吸着方法及び真空処理方法
JP6124156B2 (ja) 2015-04-21 2017-05-10 Toto株式会社 静電チャックおよびウェーハ処理装置
KR101758344B1 (ko) * 2015-06-25 2017-07-18 주식회사 엘케이엔지니어링 정전 척 및 리페어 방법
US10256131B2 (en) * 2015-08-27 2019-04-09 Sumitomo Osaka Cement Co., Ltd. Electrostatic chuck device
US10020218B2 (en) 2015-11-17 2018-07-10 Applied Materials, Inc. Substrate support assembly with deposited surface features
KR101758347B1 (ko) * 2016-08-01 2017-07-18 주식회사 엘케이엔지니어링 정전 척 및 리페어 방법
JP6858035B2 (ja) * 2017-02-27 2021-04-14 新光電気工業株式会社 基板固定具及び基板固定装置
US11887877B2 (en) * 2017-09-29 2024-01-30 Sumitomo Osaka Cement Co., Ltd. Electrostatic chuck device
GB201815258D0 (en) * 2018-09-19 2018-10-31 Spts Technologies Ltd A support
CN111199902B (zh) * 2018-11-19 2023-02-24 拓荆科技股份有限公司 热隔离之晶圆支撑装置及其制造方法
CN110246745B (zh) * 2019-05-17 2021-12-21 苏州珂玛材料科技股份有限公司 一种等离子体处理装置及静电卡盘与静电卡盘的制造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3238925B2 (ja) * 1990-11-17 2001-12-17 株式会社東芝 静電チャック
JPH0774234A (ja) * 1993-06-28 1995-03-17 Tokyo Electron Ltd 静電チャックの電極構造、この組み立て方法、この組み立て治具及び処理装置
JP3596127B2 (ja) * 1995-12-04 2004-12-02 ソニー株式会社 静電チャック、薄板保持装置、半導体製造装置、搬送方法及び半導体の製造方法
US5810933A (en) * 1996-02-16 1998-09-22 Novellus Systems, Inc. Wafer cooling device
JP2000317761A (ja) 1999-03-01 2000-11-21 Toto Ltd 静電チャックおよび吸着方法
JP3805134B2 (ja) 1999-05-25 2006-08-02 東陶機器株式会社 絶縁性基板吸着用静電チャック
US6373679B1 (en) * 1999-07-02 2002-04-16 Cypress Semiconductor Corp. Electrostatic or mechanical chuck assembly conferring improved temperature uniformity onto workpieces held thereby, workpiece processing technology and/or apparatus containing the same, and method(s) for holding and/or processing a workpiece with the same
JP2001338912A (ja) * 2000-05-29 2001-12-07 Tokyo Electron Ltd プラズマ処理装置および処理方法
JP2003060019A (ja) * 2001-08-13 2003-02-28 Hitachi Ltd ウエハステージ
KR100511854B1 (ko) * 2002-06-18 2005-09-02 아네르바 가부시키가이샤 정전 흡착 장치
JP2005276886A (ja) * 2004-03-23 2005-10-06 Nikon Corp 静電チャックおよび露光装置
JP4386360B2 (ja) * 2004-12-06 2009-12-16 信越化学工業株式会社 静電チャック
JP4994121B2 (ja) * 2006-08-10 2012-08-08 東京エレクトロン株式会社 静電吸着電極、基板処理装置および静電吸着電極の製造方法
US7701693B2 (en) * 2006-09-13 2010-04-20 Ngk Insulators, Ltd. Electrostatic chuck with heater and manufacturing method thereof

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