JP2009250775A5 - - Google Patents

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Publication number
JP2009250775A5
JP2009250775A5 JP2008098697A JP2008098697A JP2009250775A5 JP 2009250775 A5 JP2009250775 A5 JP 2009250775A5 JP 2008098697 A JP2008098697 A JP 2008098697A JP 2008098697 A JP2008098697 A JP 2008098697A JP 2009250775 A5 JP2009250775 A5 JP 2009250775A5
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JP
Japan
Prior art keywords
physical quantity
circuit
signal
digital
frequency
Prior art date
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Granted
Application number
JP2008098697A
Other languages
English (en)
Japanese (ja)
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JP2009250775A (ja
JP4794596B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008098697A priority Critical patent/JP4794596B2/ja
Priority claimed from JP2008098697A external-priority patent/JP4794596B2/ja
Priority to PCT/JP2009/000304 priority patent/WO2009122636A1/ja
Publication of JP2009250775A publication Critical patent/JP2009250775A/ja
Priority to US12/621,837 priority patent/US8013647B2/en
Publication of JP2009250775A5 publication Critical patent/JP2009250775A5/ja
Application granted granted Critical
Publication of JP4794596B2 publication Critical patent/JP4794596B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008098697A 2008-04-04 2008-04-04 物理量検出回路、物理量センサ装置 Expired - Fee Related JP4794596B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008098697A JP4794596B2 (ja) 2008-04-04 2008-04-04 物理量検出回路、物理量センサ装置
PCT/JP2009/000304 WO2009122636A1 (ja) 2008-04-04 2009-01-27 物理量検出回路、物理量センサ装置、物理量検出方法
US12/621,837 US8013647B2 (en) 2008-04-04 2009-11-19 Physical quantity detection circuit and physical quantity sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008098697A JP4794596B2 (ja) 2008-04-04 2008-04-04 物理量検出回路、物理量センサ装置

Publications (3)

Publication Number Publication Date
JP2009250775A JP2009250775A (ja) 2009-10-29
JP2009250775A5 true JP2009250775A5 (enExample) 2011-02-03
JP4794596B2 JP4794596B2 (ja) 2011-10-19

Family

ID=41135046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008098697A Expired - Fee Related JP4794596B2 (ja) 2008-04-04 2008-04-04 物理量検出回路、物理量センサ装置

Country Status (3)

Country Link
US (1) US8013647B2 (enExample)
JP (1) JP4794596B2 (enExample)
WO (1) WO2009122636A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4836985B2 (ja) * 2008-04-04 2011-12-14 パナソニック株式会社 物理量検出回路
JP2010169532A (ja) * 2009-01-22 2010-08-05 Panasonic Corp 駆動回路、物理量センサ装置
JP5550330B2 (ja) * 2009-12-25 2014-07-16 キヤノン株式会社 容量検出型の機械電気変換素子の製造方法
JP5548531B2 (ja) * 2010-06-17 2014-07-16 アズビル株式会社 デュアル物理量センサ
US9658122B2 (en) * 2012-05-18 2017-05-23 Mts Systems Corporation Transducer acceleration compensation using a delay to match phase characteristics
CN103995019A (zh) * 2014-05-30 2014-08-20 浙江海洋学院 一种模拟海上油船晃动的试验装置
JP6455174B2 (ja) 2015-01-22 2019-01-23 セイコーエプソン株式会社 回路装置、電子機器、移動体及び物理量検出装置の製造方法
JP6589333B2 (ja) * 2015-03-30 2019-10-16 セイコーエプソン株式会社 回路装置、電子機器及び移動体
JP7062302B2 (ja) * 2017-03-09 2022-05-06 裕幸 三田村 フィルタリング装置及びフィルタリング方法
KR102876773B1 (ko) 2018-11-04 2025-10-29 엠티에스 시스템즈 코포레이숀 복합 압전 액츄에이터 및 센서
JP7024983B1 (ja) * 2021-10-28 2022-02-24 竜太 綿貫 フィルタリング装置及びフィルタリング方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264914A (en) * 1990-03-02 1993-11-23 Hitachi Ltd Interference sensor and method utilizing extracted alliasing frequency components
JPH07146151A (ja) * 1993-11-25 1995-06-06 Hitachi Ltd ロックイン検出装置
JPH07198394A (ja) 1993-12-29 1995-08-01 Murata Mfg Co Ltd 位相補正回路
JP3453721B2 (ja) * 1994-06-09 2003-10-06 アイシン精機株式会社 振動子駆動回路
JP2975262B2 (ja) * 1994-07-04 1999-11-10 本田技研工業株式会社 振動ジャイロ検出回路
JP3322067B2 (ja) 1995-04-24 2002-09-09 株式会社デンソー 物理量検出装置
DE19653021A1 (de) 1996-12-19 1998-06-25 Bosch Gmbh Robert Vorrichtung zur Ermittlung einer Drehrate
US5983718A (en) 1997-07-14 1999-11-16 Litton Systems, Inc. Signal processing system for inertial sensor
JP2004212111A (ja) * 2002-12-27 2004-07-29 Kyocera Kinseki Corp 角速度センサ
TWI263408B (en) * 2005-01-18 2006-10-01 Sunext Technology Co Ltd Digital frequency/phase recovery circuit
JP2008014932A (ja) * 2006-06-07 2008-01-24 Seiko Epson Corp 検出装置、ジャイロセンサ及び電子機器

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