JP4794596B2 - 物理量検出回路、物理量センサ装置 - Google Patents

物理量検出回路、物理量センサ装置 Download PDF

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Publication number
JP4794596B2
JP4794596B2 JP2008098697A JP2008098697A JP4794596B2 JP 4794596 B2 JP4794596 B2 JP 4794596B2 JP 2008098697 A JP2008098697 A JP 2008098697A JP 2008098697 A JP2008098697 A JP 2008098697A JP 4794596 B2 JP4794596 B2 JP 4794596B2
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JP
Japan
Prior art keywords
physical quantity
circuit
signal
frequency
digital
Prior art date
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Expired - Fee Related
Application number
JP2008098697A
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English (en)
Japanese (ja)
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JP2009250775A (ja
JP2009250775A5 (enExample
Inventor
文人 犬飼
清一 室屋
陽一 貝野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008098697A priority Critical patent/JP4794596B2/ja
Priority to PCT/JP2009/000304 priority patent/WO2009122636A1/ja
Publication of JP2009250775A publication Critical patent/JP2009250775A/ja
Priority to US12/621,837 priority patent/US8013647B2/en
Publication of JP2009250775A5 publication Critical patent/JP2009250775A5/ja
Application granted granted Critical
Publication of JP4794596B2 publication Critical patent/JP4794596B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2008098697A 2008-04-04 2008-04-04 物理量検出回路、物理量センサ装置 Expired - Fee Related JP4794596B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008098697A JP4794596B2 (ja) 2008-04-04 2008-04-04 物理量検出回路、物理量センサ装置
PCT/JP2009/000304 WO2009122636A1 (ja) 2008-04-04 2009-01-27 物理量検出回路、物理量センサ装置、物理量検出方法
US12/621,837 US8013647B2 (en) 2008-04-04 2009-11-19 Physical quantity detection circuit and physical quantity sensor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008098697A JP4794596B2 (ja) 2008-04-04 2008-04-04 物理量検出回路、物理量センサ装置

Publications (3)

Publication Number Publication Date
JP2009250775A JP2009250775A (ja) 2009-10-29
JP2009250775A5 JP2009250775A5 (enExample) 2011-02-03
JP4794596B2 true JP4794596B2 (ja) 2011-10-19

Family

ID=41135046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008098697A Expired - Fee Related JP4794596B2 (ja) 2008-04-04 2008-04-04 物理量検出回路、物理量センサ装置

Country Status (3)

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US (1) US8013647B2 (enExample)
JP (1) JP4794596B2 (enExample)
WO (1) WO2009122636A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4836985B2 (ja) * 2008-04-04 2011-12-14 パナソニック株式会社 物理量検出回路
JP2010169532A (ja) * 2009-01-22 2010-08-05 Panasonic Corp 駆動回路、物理量センサ装置
JP5550330B2 (ja) * 2009-12-25 2014-07-16 キヤノン株式会社 容量検出型の機械電気変換素子の製造方法
JP5548531B2 (ja) * 2010-06-17 2014-07-16 アズビル株式会社 デュアル物理量センサ
US9658122B2 (en) * 2012-05-18 2017-05-23 Mts Systems Corporation Transducer acceleration compensation using a delay to match phase characteristics
CN103995019A (zh) * 2014-05-30 2014-08-20 浙江海洋学院 一种模拟海上油船晃动的试验装置
JP6455174B2 (ja) 2015-01-22 2019-01-23 セイコーエプソン株式会社 回路装置、電子機器、移動体及び物理量検出装置の製造方法
JP6589333B2 (ja) * 2015-03-30 2019-10-16 セイコーエプソン株式会社 回路装置、電子機器及び移動体
JP7062302B2 (ja) * 2017-03-09 2022-05-06 裕幸 三田村 フィルタリング装置及びフィルタリング方法
KR102876773B1 (ko) 2018-11-04 2025-10-29 엠티에스 시스템즈 코포레이숀 복합 압전 액츄에이터 및 센서
JP7024983B1 (ja) * 2021-10-28 2022-02-24 竜太 綿貫 フィルタリング装置及びフィルタリング方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5264914A (en) * 1990-03-02 1993-11-23 Hitachi Ltd Interference sensor and method utilizing extracted alliasing frequency components
JPH07146151A (ja) * 1993-11-25 1995-06-06 Hitachi Ltd ロックイン検出装置
JPH07198394A (ja) 1993-12-29 1995-08-01 Murata Mfg Co Ltd 位相補正回路
JP3453721B2 (ja) * 1994-06-09 2003-10-06 アイシン精機株式会社 振動子駆動回路
JP2975262B2 (ja) * 1994-07-04 1999-11-10 本田技研工業株式会社 振動ジャイロ検出回路
JP3322067B2 (ja) 1995-04-24 2002-09-09 株式会社デンソー 物理量検出装置
DE19653021A1 (de) 1996-12-19 1998-06-25 Bosch Gmbh Robert Vorrichtung zur Ermittlung einer Drehrate
US5983718A (en) 1997-07-14 1999-11-16 Litton Systems, Inc. Signal processing system for inertial sensor
JP2004212111A (ja) * 2002-12-27 2004-07-29 Kyocera Kinseki Corp 角速度センサ
TWI263408B (en) * 2005-01-18 2006-10-01 Sunext Technology Co Ltd Digital frequency/phase recovery circuit
JP2008014932A (ja) * 2006-06-07 2008-01-24 Seiko Epson Corp 検出装置、ジャイロセンサ及び電子機器

Also Published As

Publication number Publication date
US8013647B2 (en) 2011-09-06
JP2009250775A (ja) 2009-10-29
US20100066423A1 (en) 2010-03-18
WO2009122636A1 (ja) 2009-10-08

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