WO2009122636A1 - 物理量検出回路、物理量センサ装置、物理量検出方法 - Google Patents

物理量検出回路、物理量センサ装置、物理量検出方法 Download PDF

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Publication number
WO2009122636A1
WO2009122636A1 PCT/JP2009/000304 JP2009000304W WO2009122636A1 WO 2009122636 A1 WO2009122636 A1 WO 2009122636A1 JP 2009000304 W JP2009000304 W JP 2009000304W WO 2009122636 A1 WO2009122636 A1 WO 2009122636A1
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Prior art keywords
physical quantity
signal
circuit
detection
digital
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Ceased
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PCT/JP2009/000304
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English (en)
French (fr)
Japanese (ja)
Inventor
犬飼文人
室屋清一
貝野陽一
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Panasonic Corp
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Panasonic Corp
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Publication of WO2009122636A1 publication Critical patent/WO2009122636A1/ja
Priority to US12/621,837 priority Critical patent/US8013647B2/en
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Definitions

  • the present invention relates to a physical quantity detection circuit used in a physical quantity sensor for detecting a physical quantity given from the outside and a physical quantity sensor device including the physical quantity detection circuit, and more particularly to a technique for adjusting a phase relationship between a sensor signal and a detection signal.
  • a physical quantity sensor device uses a physical quantity sensor that outputs a sensor signal according to a physical quantity given from the outside and a physical quantity signal from the sensor signal using a detection signal (a signal having a frequency corresponding to the frequency of the sensor signal).
  • a physical quantity detection circuit for detecting (a signal corresponding to the physical quantity).
  • an unintended phase shift between the sensor signal and the detection signal is caused by manufacturing variations (such as resistance and capacitor diffusion variations) and changes in the surrounding environment (for example, temperature changes). May occur. Therefore, it is important to adjust the phase relationship between the sensor signal and the detection signal so that the sensor signal and the detection signal are synchronized.
  • Patent Document 1 discloses a vibration gyro that includes a phase correction circuit including a temperature sensitive element (an element having a predetermined temperature characteristic) to correct a phase shift caused by a temperature change.
  • JP-A-8-14916 JP-A-8-14916
  • phase correction circuit since the temperature characteristics of the phase correction circuit do not always become the desired temperature characteristics due to manufacturing variations, it is difficult to precisely set the phase correction amount in the phase adjustment circuit. Thus, conventionally, since the phase relationship between the sensor signal and the detection signal cannot be precisely adjusted, it has been difficult to improve the detection accuracy.
  • an object of the present invention is to precisely adjust the phase relationship between the sensor signal and the detection signal.
  • the physical quantity detection circuit is a physical quantity detection circuit used in a physical quantity sensor that outputs a sensor signal according to a physical quantity given from the outside, and has a frequency corresponding to the frequency of the sensor signal.
  • a reference clock having a frequency higher than the frequency of the reference clock is operated in synchronization with a first operation clock having a frequency higher than the frequency of the reference clock, and a transition edge of the reference clock is set to a predetermined number of pulses of the first operation clock.
  • the phase of the transition edge of the reference clock (that is, the phase of the detection signal) can be set using the period of the first operation clock as a unit. Further, the higher the frequency of the first operation clock, the more precisely the phase of the transition edge of the reference clock can be set. As a result, the phase relationship between the sensor signal and the detection signal can be adjusted more precisely than before, and the detection accuracy can be improved.
  • the first phase adjustment circuit includes a shift register that generates a plurality of delay clocks by sequentially shifting the reference clock in synchronization with the first operation clock, and a plurality of delay clocks generated by the shift register. And a selector that selects any one of them.
  • the detection circuit may detect the physical quantity signal from the sensor signal with reference to a transition edge of a delay clock selected by the selector. With this configuration, the transition edge of the reference clock can be delayed by a predetermined number of pulses of the first operation clock.
  • the detection circuit generates an analog / digital conversion circuit that converts the sensor signal into a digital sensor signal and a digital detection signal corresponding to a sine wave signal in response to a transition edge of the delay signal selected by the selector.
  • the first phase adjustment circuit starts counting the number of generated pulses of the first operation clock in response to the transition edge of the reference clock, and generates a timing signal when the number of generated pulses reaches a predetermined value.
  • the phase adjustment counter to perform may be included.
  • the detection circuit may detect the physical quantity signal from the sensor signal with reference to a transition edge of the timing signal generated by the phase adjustment counter. With this configuration, the transition edge of the reference clock can be delayed by a predetermined number of pulses of the first operation clock.
  • the detection circuit generates an analog / digital conversion circuit that converts the sensor signal into a digital sensor signal and a digital detection signal corresponding to the sine wave signal in response to a transition edge of the timing signal generated by the phase adjustment counter.
  • a detection signal generation circuit that performs detection, and a multiplication circuit that detects the physical quantity signal by multiplying the digital sensor signal obtained by the analog / digital conversion circuit by the digital detection signal generated by the detection signal generation circuit. May be.
  • the physical quantity detection circuit operates in synchronization with a second operation clock having a frequency higher than the frequency of the reference clock while being supplied with the digital sensor signal obtained by the analog / digital conversion circuit.
  • the digital sensor signal further includes a second phase adjustment circuit for delaying the digital sensor signal by a predetermined number of pulses of the second operation clock.
  • the multiplication circuit multiplies the digital sensor signal delayed by the second phase adjustment circuit by the digital detection signal.
  • the frequency of the first operation clock is lower than the frequency of the second operation clock.
  • the accuracy of the phase adjustment of the first phase adjustment circuit is lower than the accuracy of the phase adjustment of the second phase adjustment circuit.
  • the physical quantity detection circuit is a physical quantity detection circuit used in a physical quantity sensor that outputs a sensor signal according to a physical quantity given from the outside, and converts the sensor signal into a digital sensor signal.
  • An analog / digital conversion circuit, a detection signal generation circuit that generates a digital detection signal corresponding to a sine wave signal in response to a transition edge of a reference clock having a frequency corresponding to the frequency of the sensor signal, and the analog / digital conversion A phase adjustment circuit that is supplied with a digital sensor signal obtained by a circuit and operates in synchronization with a clock having a frequency higher than the frequency of the reference clock, and delays the digital sensor signal by a predetermined number of pulses of the clock And the digital sensor signal delayed by the phase adjustment circuit And a multiplier circuit for detecting a physical quantity signal corresponding to the physical quantity by multiplying the digital detection signal generated by the wave signal generating circuit.
  • the phase of the sensor signal (digital sensor signal) can be set in units of a clock cycle having a frequency higher than the frequency of the reference clock. Also, the higher the frequency of the clock, the more precisely the phase of the digital sensor signal can be set. As a result, the phase relationship between the sensor signal and the detection signal can be adjusted more precisely than before, and the detection accuracy can be improved.
  • a physical quantity detection method is a method of detecting a physical quantity signal corresponding to the physical quantity from a sensor signal of a physical quantity sensor that detects a physical quantity given from the outside, and the frequency of the sensor signal.
  • the sensor signal and the detection signal corresponding to the sensor signal are delayed by a predetermined number of pulses of an operation clock having a higher frequency than the sensor signal and the detection signal is delayed by at least one of the sensor signal and the detection signal.
  • the physical quantity signal is detected.
  • the phase relationship between the sensor signal and the detection signal can be adjusted with the period of a signal having a frequency higher than the frequency of the reference clock as a unit.
  • the phase relationship between the sensor signal and the detection signal can be precisely adjusted.
  • FIG. 1 is a diagram illustrating a configuration example of a physical quantity sensor device according to the first embodiment.
  • FIG. 2 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG.
  • FIG. 3 is a diagram showing a modification of the physical quantity detection circuit shown in FIG. 4A is a diagram illustrating a configuration example of the detection signal generator illustrated in FIG. 3.
  • 4B is a diagram illustrating an example of a correspondence relationship between count values and sine wave data in the detection signal generator of FIG. 4A.
  • FIG. 5 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG. 6A is a diagram illustrating another configuration example of the detection signal generator illustrated in FIG. 3.
  • FIG. 6B is a diagram illustrating an example of a correspondence relationship between count values and sine wave data in the detection signal generator of FIG. 6A.
  • FIG. 7 is a diagram illustrating a configuration example of the physical quantity sensor device according to the second embodiment.
  • FIG. 8 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG.
  • FIG. 9 is a diagram illustrating a first modification of the physical quantity detection circuit illustrated in FIG. 7.
  • FIG. 10 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG.
  • FIG. 11 is a diagram illustrating a second modification of the physical quantity detection circuit illustrated in FIG. 7.
  • FIG. 12 is a diagram illustrating a configuration example of the physical quantity sensor device according to the third embodiment.
  • FIG. 13 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG.
  • FIG. 14 is a diagram illustrating a first modification of the physical quantity detection circuit illustrated in FIG. 12.
  • FIG. 15 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG.
  • FIG. 16 is a diagram of a second modification of the physical quantity detection circuit depicted in FIG.
  • FIG. 17 is a diagram of a third modification of the physical quantity detection circuit depicted in FIG.
  • FIG. 18 is a timing chart for explaining the operation of the physical quantity detection circuit shown in FIG.
  • FIG. 19 is a diagram of a fourth modification of the physical quantity detection circuit depicted in FIG.
  • FIG. 20 is a diagram for explaining a modification of the physical quantity sensor.
  • FIG. 1 shows a configuration example of a physical quantity sensor device according to Embodiment 1 of the present invention.
  • the physical quantity sensor device includes a physical quantity sensor 10, a drive circuit 11, and a physical quantity detection circuit 12.
  • the physical quantity sensor 10 is supplied with a drive signal Sdrv having a predetermined frequency from the drive circuit 11 and outputs a sensor signal S10 according to a physical quantity (for example, angular velocity, acceleration, etc.) given from the outside.
  • the frequency of the sensor signal S10 corresponds to the frequency of the drive signal Sdrv.
  • the center frequency (carrier frequency) of the sensor signal S10 corresponds to the frequency of the drive signal Sdrv.
  • the physical quantity sensor 10 is a tuning fork type angular velocity sensor.
  • the physical quantity sensor 10 includes a tuning fork main body 10a, a driving piezoelectric element Pdrv, a vibration detecting piezoelectric element Posc, and angular velocity detecting piezoelectric elements PDa and PDb.
  • the tuning fork main body 10a has a pair of tuning fork pieces that are twisted at right angles at the center, a connecting part that connects each end of the tuning fork piece, and a support pin that is provided on the connecting part so as to be a rotating shaft.
  • the drive piezoelectric element Pdrv vibrates one tuning fork piece according to the frequency and amplitude of the drive signal Sdrv from the drive circuit 11. As a result, the two tuning fork pieces resonate with each other.
  • the drive circuit 11 supplies a drive signal Sdrv to the physical quantity sensor 10.
  • the drive circuit 11 adjusts the frequency and amplitude of the drive signal Sdrv according to the vibration signal Sosc from the physical quantity sensor 10.
  • the monitor amplifier 11a converts the vibration signal Sosc from the physical quantity sensor 10 into a voltage
  • the automatic gain control amplifier (AGC) 11b amplifies or attenuates the output of the monitor amplifier 11a.
  • the self amplification gain is changed so that the voltage supplied to 11c becomes a constant value.
  • the drive amplifier 11c controls the frequency and amplitude of the drive signal Sdrv according to the output of the automatic gain control amplifier 11b.
  • the maximum vibration amplitude and vibration frequency of the physical quantity sensor 10 are kept constant by adjusting the drive signal Sdrv according to the vibration signal Sosc.
  • the physical quantity detection circuit 12 detects a physical quantity based on the sensor signal S10 from the physical quantity sensor 10.
  • the physical quantity detection circuit 12 includes a waveform shaping circuit 101, a multiplication circuit 102, a phase adjustment circuit 100, an input amplifier 103, a synchronous detection circuit 104, a low-pass filter 105, and an output amplifier 106.
  • the waveform shaping circuit 101 converts the drive signal Sdrv into a square wave and outputs it as a reference clock CKref.
  • the waveform shaping circuit 101 includes a comparator and an inverter.
  • the frequency of the reference clock CKref is substantially the same as the frequency of the drive signal Sdrv (that is, the frequency of the sensor signal S10).
  • the multiplier circuit 102 multiplies the reference clock CKref and generates an operation clock CKa having a frequency higher than that of the reference clock CKref.
  • the multiplier circuit 102 is configured by a PLL (Phase Locked Loop).
  • the phase adjustment circuit 100 includes a shift register 100R and a selector 100S.
  • the shift register 100R sequentially shifts the reference clock CKref from the waveform shaping circuit 101 in synchronization with the operation clock CKa from the multiplication circuit 102, thereby shifting the phase by n by a predetermined amount (n is an integer of 2 or more).
  • Delay clocks CK1, CK2,... CKn For example, the shift register 100R includes a plurality of cascaded flip-flops.
  • the selector 100S selects any one of the delay clocks CK1, CK2,..., CKn according to the set value SET set by external control, and outputs the selected delay clock as the selected clock SSS.
  • the set value SET is a value for setting the delay time of the phase adjustment circuit 100, and indicates the number of pulses of the operation clock CKa. For example, when the set value SET is set to “3”, the selector 100S selects the third delay clock CK3. Thereby, the delay time of the phase adjustment circuit 100 is set to a time corresponding to three pulses of the operation clock CKa.
  • the input amplifier 103 converts the sensor signal S10 from the physical quantity sensor 10 into a voltage and outputs it as an analog sensor signal Ssnc.
  • the synchronous detection circuit 104 detects a physical quantity signal (a signal corresponding to the physical quantity detected by the physical quantity sensor 10) from the analog sensor signal Ssnc obtained by the input amplifier 103 using the selected clock SSS from the phase adjustment circuit 100.
  • the low-pass filter 105 passes only the low frequency component of the physical quantity signal detected by the synchronous detection circuit 104 for noise removal or the like.
  • the output amplifier 106 amplifies the physical quantity signal processed by the low-pass filter 105 and outputs it as an analog detection signal Sphy.
  • the waveform shaping circuit 101 converts the drive signal Sdrv into the reference clock CKref, the multiplication circuit 102 generates the operation clock CKa based on the reference clock CKref, and the shift register 100R includes a plurality of delay clocks CK1, CK2,. ., CKn (five in FIG. 2) are generated.
  • the selector 100S selects the third delay clock CK3 as the selection clock SSS.
  • the phase of the selected clock SSS can be matched with the phase of the analog sensor signal Ssnc.
  • the synchronous detection circuit 104 multiplies the analog sensor signal Ssnc by the selected clock SSS from the phase adjustment circuit 100 as it is, and a physical quantity signal (analog value). Is detected.
  • the synchronous detection circuit 104 starts detection of the physical quantity signal with reference to the transition edge (here, the rising edge) of the selected clock SSS.
  • the transition edge of the selected clock SSS is delayed by “3t” from the transition edge of the reference clock CKref. That is, the phase adjustment circuit 100 delays the transition edge of the reference clock CKref by a time corresponding to three pulses of the operation clock CKa.
  • the phase of the detection signal (selected clock SSS) can be set in units of the cycle of the operation clock CKa. Further, the higher the frequency of the operation clock CKa, the more precisely the phase of the selected clock SSS can be set. As a result, the phase relationship between the sensor signal and the detection signal can be adjusted more precisely than before, and the detection accuracy can be improved.
  • phase adjustment circuit 100 by configuring the phase adjustment circuit 100 with a digital circuit, it is possible to enhance resistance to manufacturing variations and changes in the surrounding environment (for example, power supply voltage fluctuations and temperature changes). That is, it is possible to reduce errors in delay time (delay time of the phase adjustment circuit 100) due to manufacturing variations and changes in the surrounding environment.
  • the phase adjustment circuit 100 can also be applied to a digitized physical quantity detection circuit.
  • the physical quantity detection circuit 12a illustrated in FIG. 3 includes an input amplifier 111, an analog / digital converter (A / D) 112, a detection signal generator 113, a multiplier 114, a digital filter 115, and the configuration illustrated in FIG. Waveform shaping circuit 101, multiplication circuit 102, and phase adjustment circuit 100.
  • the input amplifier 111 converts the sensor signal S10 from the physical quantity sensor 10 into a voltage and outputs it as an analog sensor signal Ssnc.
  • the analog / digital converter 112 samples the analog sensor signal Ssnc in synchronization with the operation clock CKa, and converts the sampled analog value (amplitude value) into a digital value. Thereby, the analog sensor signal Ssnc is converted into a digital sensor signal Dsnc constituted by a plurality of digital values.
  • the detection signal generator 113 generates a digital detection signal Ddet corresponding to the sine wave signal in response to a transition edge (in this case, a rising edge) of the selected clock SSS from the phase adjustment circuit 100.
  • the digital detection signal Ddet is composed of a plurality of sine wave data.
  • Each of the plurality of sine wave data is a plurality of analog values (amplitude values) obtained by sampling a sine wave signal (for example, drive signal Sdrv) having a predetermined frequency in synchronization with a predetermined clock (for example, operation clock CKa). (See FIG. 4B).
  • the plurality of sine wave data indicate ideal amplitude values expressed by a sine function.
  • the multiplier 114 multiplies the digital signal Dsnc obtained by the analog / digital converter 112 by the digital detection signal Ddet generated by the detection signal generator 113. Thereby, the physical quantity signal (digital value) is detected.
  • the digital filter 115 operates in synchronization with the operation clock CKa, and passes only the low frequency component of the physical quantity signal detected by the multiplier 114 for noise removal or the like as the digital detection signal Dphy.
  • the detection signal generator 113 includes a ring counter 121, a data storage unit 122, and a data reading unit 123.
  • the ring counter 121 and the data reading unit 123 operate in synchronization with the operation clock CKa.
  • the ring counter 121 starts incrementing the count value CNT in response to the transition edge of the selected clock SSS, and resets the count value CNT to “0” when the count value CNT reaches a predetermined maximum value.
  • the data storage unit 122 stores a plurality of sine wave data DATA that is a source of the digital detection signal Ddet.
  • the data reading unit 123 reads and outputs the sine wave data DATA corresponding to the count value CNT of the ring counter 121 based on the correspondence relationship (FIG. 4B) between the preset count value CNT and the sine wave data DATA. In this manner, the digital detection signal Ddet corresponding to the sine wave signal is generated by sequentially outputting the sine wave data D0, D1, D2,..., D15.
  • the analog / digital converter 112 converts the analog sensor signal Ssnc into digital values P0, P1, P2,... In synchronization with the operation clock CKa.
  • the phase adjustment circuit 100 delays the reference clock CKref by a time “3t” corresponding to three pulses of the operation clock CKa, and outputs it as the selected clock SSS.
  • the detection signal generator 113 sequentially outputs the sine wave data D0, D1, D2,... In response to the transition edge of the selected clock SSS from the phase adjustment circuit 100. Thereby, the phase of the digital detection signal Ddet can be matched with the phase of the analog sensor signal Ssnc.
  • the multiplier 114 multiplies the digital values P0, P1, P2,...
  • the phase of the digital detection signal Ddet is defined by the transition edge of the selected clock SSS. That is, the multiplier 114 starts detecting the physical quantity signal with reference to the transition edge of the selected clock SSS.
  • phase adjustment circuit 100 can also be applied to a digitized physical quantity detection circuit.
  • digitizing the physical quantity detection circuit it is possible to enhance resistance to manufacturing variations and changes in the surrounding environment, and detection accuracy can be further improved.
  • the ring counter 121 may be configured to start incrementing the count value CNT in response to the transition edge of the reference clock CKref.
  • the correspondence between the count value CNT and the sine wave data DATA in the data reading unit 123 can be set by the external control CTRL.
  • the data reading unit 123 starts reading the sine wave data DATA corresponding to the count value CNT.
  • the detection signal generator 113 can sequentially output the sine wave data D0, D1, D2,... In response to the transition edge of the selected clock SSS.
  • FIG. 7 shows a configuration example of a physical quantity sensor device according to Embodiment 2 of the present invention.
  • This physical quantity sensor device includes a physical quantity detection circuit 22 instead of the physical quantity detection circuit 12 shown in FIG.
  • the physical quantity detection circuit 22 includes a phase adjustment circuit 200 instead of the phase adjustment circuit 100 shown in FIG.
  • Other configurations are the same as those in FIG.
  • the phase adjustment circuit 200 includes a phase adjustment counter 201 and a frequency dividing circuit 202.
  • the phase adjustment counter 201 starts counting the number of generated pulses of the operation clock CKa in response to the transition edge (here, the rising edge) of the reference clock CKref, and the count value is set to the set value SET set by the external control. When it arrives, it outputs a timing signal TTT.
  • the phase adjustment counter 201 includes a plurality of flip-flops and logic operation elements.
  • the frequency dividing circuit 202 starts frequency dividing processing in response to the transition edge of the timing signal TTT from the phase adjustment counter 201 (for example, the output of the frequency dividing circuit 202 is reset to the initial state).
  • the frequency dividing circuit 202 divides the operation clock CKa and generates an analog detection signal Sdet having the same frequency as that of the reference clock CKref. For example, when the frequency of the operation clock CKa is 16 times the frequency of the reference clock CKref, the frequency dividing circuit 202 divides the frequency to 1/16 of the frequency of the operation clock CKa.
  • the phase of the analog sensor signal Ssnc is assumed to be delayed by “3t” from the phase of the reference clock CKref.
  • the frequency dividing circuit 202 is constituted by a 5-bit counter, and an output corresponding to the MSB (Most Significant Bit) among the five outputs of the 5-bit counter. Assume that the analog detection signal Sdet is supplied.
  • the phase adjustment counter 201 starts counting the number of generated pulses of the operation clock CKa in response to the transition edge of the reference clock CKref.
  • the phase adjustment counter 201 outputs a timing signal TTT when the count value reaches “3”.
  • the frequency dividing circuit 202 starts counting from a preset initial value (here, 8), and the count value is the maximum value (here, When reaching 15), the count value is reset to “0”.
  • the MSB output of the frequency dividing circuit 202 is “1” when the count value of the frequency dividing circuit 202 is any of 8 to 15, and the count value of the frequency dividing circuit 202 is any of 0 to 7.
  • the phase of the analog detection signal Sdet can be matched with the phase of the analog sensor signal Ssnc.
  • the phase of the analog detection signal Sdet is defined by the transition edge of the timing signal TTT. That is, the synchronous detection circuit 104 starts detection of the physical quantity signal with reference to the transition edge of the timing signal TTT.
  • the phase of the analog detection signal Sdet can be set with the period of the operation clock CKa as a unit. Further, the higher the frequency of the operation clock CKa, the more precisely the phase of the analog detection signal Sdet can be set. As a result, the phase relationship between the sensor signal S10 and the detection signal can be adjusted more precisely than before, and the detection accuracy can be improved.
  • phase adjustment circuit 200 by configuring the phase adjustment circuit 200 with a digital circuit, it is possible to enhance the tolerance to manufacturing variations and changes in the surrounding environment as compared with the prior art.
  • the frequency dividing circuit 202 may divide another operation clock having a frequency higher than the frequency of the reference clock CKref (a clock having a frequency different from that of the operation clock CKa) to generate the analog detection signal Sdet. .
  • the phase adjustment counter 201 can also be applied to a digitized physical quantity detection circuit.
  • the physical quantity detection circuit 22a illustrated in FIG. 9 includes the phase adjustment counter 201 illustrated in FIG. 7 instead of the phase adjustment circuit 100 illustrated in FIG.
  • the detection signal generator 113 starts generating the digital detection signal Ddet in response to the transition edge of the timing signal TTT from the phase adjustment counter 201.
  • Other configurations are the same as those in FIG.
  • the phase adjustment counter 201 detects the timing signal after elapse of time “3t” corresponding to three pulses of the operation clock CKa from the transition edge of the reference clock CKref. Output TTT.
  • the detection signal generator 113 In response to the transition edge of the timing signal TTT from the phase adjustment counter 201, the detection signal generator 113 sequentially outputs the sine wave data D0, D1, D2,. Thereby, the phase of the digital detection signal Ddet can be matched with the phase of the analog sensor signal Ssnc.
  • phase adjustment counter 201 may operate in synchronization with another operation clock having a frequency higher than that of the reference clock CKref (a clock having a frequency different from that of the operation clock CKa).
  • the physical quantity detection circuit 22b illustrated in FIG. 11 includes a frequency dividing circuit 202p (clock generation circuit) and a decimation filter 116 in addition to the configuration illustrated in FIG.
  • the frequency dividing circuit 202p starts frequency division processing in response to the transition edge of the timing signal TTT from the phase adjustment counter 201, divides the operation clock CKa, and has an operation clock having a frequency lower than the frequency of the operation clock CKa. CKp is generated. Thereby, the phase of the operation clock CKp can be matched with the analog sensor signal Ssnc.
  • the analog / digital converter 112, the decimation filter 116, and the phase adjustment counter 201 operate in synchronization with the operation clock CKa from the multiplication circuit 102, while the detection signal generator 113 and the digital filter 115 are supplied from the frequency dividing circuit 202p. Operates in synchronization with the operation clock CKp.
  • the operating frequency differs before and after the decimation filter 116.
  • the decimation filter 116 performs a decimation process (sampling frequency conversion, digital value thinning, etc.) on the digital sensor signal Dsnc, thereby converting the digital sensor signal Dsnc corresponding to the operation clock CKa to the digital sensor signal corresponding to the operation clock CKp. Convert to Ddc.
  • the phase of the digital detection signal Ddet can be adjusted in units of the cycle of the operation clock CKa. .
  • FIG. 12 shows a configuration example of a physical quantity sensor device according to Embodiment 3 of the present invention.
  • the physical quantity sensor device includes a physical quantity detection circuit 32 instead of the physical quantity detection circuit 12a shown in FIG.
  • the physical quantity detection circuit 32 includes a phase adjustment circuit 300 for adjusting the phase of the digital sensor signal Dsnc instead of the phase adjustment circuit 100 shown in FIG.
  • Other configurations are the same as those in FIG.
  • the phase adjustment circuit 300 includes a shift register 300R and a selector 300S.
  • the shift register 300R sequentially shifts the digital sensor signal Dsnc in synchronization with the operation clock CKa from the multiplier circuit 102, so that m delay signals D1, whose phases are shifted by a predetermined amount (m is an integer of 2 or more). D2,..., Dm are generated.
  • the shift register 300R includes a plurality of cascaded flip-flops.
  • the selector 300S selects any one of the delay signals D1, D2,..., Dm according to the set value SET1 set by the external control, and outputs the selected delay signal as the delayed digital sensor signal DDsnc.
  • the set value SET1 is a value for setting the delay time of the phase adjustment circuit 300, and indicates the number of pulses of the operation clock CKa.
  • the detection signal generator 113 starts generating the digital detection signal Ddet in response to the transition edge of the reference clock CKref.
  • Multiplier 114 multiplies delayed digital sensor signal DDsnc from phase adjustment circuit 300 by digital detection signal Ddet from detection signal generator 113.
  • the analog / digital converter 112 converts the analog sensor signal Ssnc into a digital sensor signal Dsnc.
  • the shift register 300R selects the third delayed signal D3 as the delayed digital sensor signal DDsnc. That is, the phase adjustment circuit 300 delays the digital sensor signal Dsnc by a time “3t” corresponding to three pulses of the operation clock CKa. Thereby, the phase of the delayed digital sensor signal DDsnc can be matched with the phase of the reference clock CKref (that is, the phase of the digital detection signal Ddet).
  • the phase of the sensor signal (delayed digital sensor signal DDsnc) can be set in units of the cycle of the operation clock CKa. Further, the higher the frequency of the operation clock CKa, the more precisely the phase of the delayed digital sensor signal DDsnc can be set. As a result, the phase relationship between the sensor signal and the detection signal can be adjusted more precisely than before, so that the detection accuracy can be improved.
  • phase adjustment circuit 300 by configuring the phase adjustment circuit 300 with a digital circuit, it is possible to enhance resistance to manufacturing variations and fluctuations in the surrounding environment as compared with the related art.
  • phase adjustment circuit 300 may operate in synchronization with another clock having a higher frequency than the reference clock CKref (a clock having a frequency different from the operation clock CKa).
  • the phase of the sensor signal (digital sensor signal DDsnc) and the phase of the detection signal (digital detection signal Ddet) may be adjusted using two phase adjustment circuits.
  • the physical quantity detection circuit 32a illustrated in FIG. 14 includes a frequency dividing circuit 311b, a decimation filter 116, and the phase adjustment circuit 100 illustrated in FIG. 3 in addition to the configuration illustrated in FIG.
  • the frequency dividing circuit 311b divides the operation clock CKa from the multiplication circuit 102 and generates an operation clock CKb having a frequency lower than the frequency of the operation clock CKa.
  • the analog / digital converter 112, the phase adjustment circuit 300, and the decimation filter 116 operate in synchronization with the operation clock CKa from the multiplication circuit 102, while the phase adjustment circuit 100, the detection signal generator 113, and the digital filter 115 It operates in synchronization with the operation clock CKb from the peripheral circuit 311b.
  • the operating frequency differs before and after the decimation filter 116.
  • the decimation filter 116 converts the delayed digital sensor signal DDsnc corresponding to the operation clock CKa into a digital sensor signal Ddc corresponding to the operation clock CKb.
  • the phase adjustment circuit 300 delays the digital sensor signal Dsnc by a time “t” corresponding to one pulse of the operation clock CKa. As a result, the phase difference between the reference clock CKref and the delayed digital sensor signal DDsnc becomes “6t”. The phase difference between the reference clock CKref and the digital sensor signal Ddc obtained by the decimation filter 116 is also “6t”.
  • the set value SET of the phase adjustment circuit 100 is set to “3”
  • the phase adjustment circuit 100 delays the reference clock CKref by a time “6t” corresponding to three pulses of the operation clock CKb to select the selected clock. Output as SSS.
  • the phase difference between the reference clock CKref and the digital detection signal Ddet becomes “6t”, so that the phase of the digital sensor signal Ddc and the phase of the digital detection signal Ddet can be matched with each other.
  • the phase adjustment accuracy of the phase adjustment circuit 100 is lower than the phase adjustment accuracy of the phase adjustment circuit 300.
  • the circuit scale and power consumption required for the phase adjustment processing can be reduced. For example, when the maximum delay time can be set to “16t” with the period “t” of the operation clock CKa as a unit, the physical quantity detection circuit 12a shown in FIG. Although it is necessary to provide four flip-flops in the phase adjustment circuits 100 and 300 in the physical quantity detection circuit 32a shown in FIG.
  • phase adjustment circuit 100 shown in FIG. 14 may be replaced with the phase adjustment counter 201 shown in FIG.
  • the phase adjustment counter 201 operates in synchronization with the operation clock CKb whose frequency is lower than that of the operation clock CKa. Even in such a configuration, the same effect as in the case of FIG. 14 can be obtained.
  • the physical quantity detection circuit 32c illustrated in FIG. 17 includes a frequency dividing circuit 311a and a phase adjustment circuit 100a in addition to the configuration illustrated in FIG.
  • the multiplier circuit 102 multiplies the reference clock CKref to generate a multiplied clock CKx.
  • the frequency dividing circuit 311a divides the frequency-multiplied clock CKx from the frequency-multiplier circuit 102, and generates an operation clock CKa having the same frequency as the sampling frequency required for the analog / digital converter 112.
  • the frequency divider 311b divides the operation clock CKa from the frequency divider 311a to generate the operation clock CKb.
  • the phase adjustment circuit 100a has the same configuration as the phase adjustment circuit 100.
  • the shift register of the phase adjustment circuit 100a generates a plurality of delay clocks whose phases are shifted by a predetermined amount by sequentially shifting the operation clock CKa in synchronization with the multiplied clock CKx.
  • the selector of the phase adjustment circuit 100a selects one of a plurality of delay clocks generated by the shift register in accordance with the set value SET2 set by external control, and outputs the selected delay clock as the sampling clock CKsp.
  • the set value SET2 is a value for setting the delay time of the phase adjustment circuit 100a, and indicates the number of pulses of the multiplied clock CKx.
  • the transition edge of the operation clock CKa (sampling clock before phase adjustment) is obtained at desired sampling points SP0, SP1, SP2,... Of the analog sensor signal Ssnc (for example, sine wave data D0, D1, D2,. ⁇
  • the point corresponding to ⁇ does not match.
  • the phase adjustment circuit 100a delays the operation clock CKa by a time “3t” corresponding to three pulses of the multiplied clock CKx, thereby sampling clocks. Output as CKsp.
  • the transition edge of the sampling clock CKsp can be matched with the desired sampling points SP1, SP2,.
  • the phase adjustment circuit 300 delays the digital sensor signal Dsnc by a time “4t” corresponding to one pulse of the operation clock CKa, and the delayed digital sensor signal. Output as DDsnc.
  • the phase difference between the reference clock CKref and the digital sensor signal Ddc from the decimation filter 105 is also “16t”.
  • the phase adjustment circuit 100 delays the reference clock CKref by a time “16t” corresponding to two pulses of the operation clock CKb and outputs it as the selection clock SSS. To do. As a result, the phase difference between the reference clock CKref and the digital detection signal Ddet becomes “16t”.
  • the phase of the sampling clock CKsp of the analog / digital converter 112 can be set using the period of the multiplied clock CKx as a unit. Further, by adjusting the phase of the sampling clock CKsp, the sampling point (position of the transition edge of the sampling clock CKsp) can be moved, and as a result, the phase of the digital sensor signal Dsnc can be changed. Thereby, the accuracy of the phase adjustment can be improved while suppressing an increase in the sampling frequency of the analog / digital converter 112. Further, since the transition edge of the sampling clock can be made coincident with (or close to) the desired sampling points SP0, SP1, SP2,..., The accuracy of analog / digital conversion can be improved.
  • the frequency dividing circuit 311b may divide the sampling clock CKsp from the phase adjusting circuit 100a to generate the operation clock CKb.
  • phase adjustment counter 201a starts counting the number of generated pulses of the multiplied clock CKx in response to the transition edge of the reference clock CKref, and outputs a timing signal STR when the count value reaches a set value SET2 set by external control. To do.
  • the frequency dividing circuit 202a starts frequency dividing processing in response to the transition edge of the timing signal STR from the phase adjustment counter 201a, divides the frequency-multiplied clock CKx from the frequency multiplier 102, and has a predetermined sampling frequency. CKsp is generated. Further, when the phase adjustment circuit 100 shown in FIGS. 17 and 19 is replaced with the phase adjustment counter 201 shown in FIG. 9, the same effect as in the case of FIG. 17 can be obtained.
  • the physical sensor 10 in each of the above embodiments is not limited to the tuning fork type, but may be a cylindrical type, a regular triangular prism type, a regular quadrangular prism type, a ring type, or other shapes.
  • the physical quantity sensor 10 may be a capacitive acceleration sensor.
  • the physical quantity sensor 10 includes a fixed portion 10b, a movable portion 10c, movable electrodes Pma and Pmb, detection electrodes Pfa and Pfb, and a differential amplifier 10d.
  • the movable part 10c is connected to the fixed part 10b so as to be displaced according to the acceleration.
  • the movable electrodes Pma and Pmb are disposed on the movable portion 10c.
  • the detection electrodes Pfa and Pfb are disposed on the fixed portion 10b so as to face the movable electrodes Pma and Pmb, respectively. That is, the capacitive element Ca is configured by the movable electrode Pma and the detection electrode Pfa, and the capacitive element Cb is configured by the movable electrode Pmb and the detection electrode Pfb. Further, the drive signals Sdrv from the oscillation circuit 11d are supplied to the capacitive elements Ca and Cb, respectively.
  • the differential amplifier 10d outputs a sensor signal S10 corresponding to the difference in the amount of charge generated at each of the detection electrodes Pfa and Pfb.
  • the setting values SET, SET1, and SET2 have been described as changeable values.
  • the setting values SET, SET1, and SET2 may be fixed values.
  • the phase relationship between the sensor signal and the detection signal can be precisely adjusted, so that a physical quantity sensor (for example, a tuning fork type angular velocity sensor or a capacitance type acceleration used in a mobile body, a mobile phone, a digital camera, a game machine, etc.) Suitable for sensors, etc.).
  • a physical quantity sensor for example, a tuning fork type angular velocity sensor or a capacitance type acceleration used in a mobile body, a mobile phone, a digital camera, a game machine, etc.

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PCT/JP2009/000304 2008-04-04 2009-01-27 物理量検出回路、物理量センサ装置、物理量検出方法 Ceased WO2009122636A1 (ja)

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JP2010169532A (ja) * 2009-01-22 2010-08-05 Panasonic Corp 駆動回路、物理量センサ装置
JP5550330B2 (ja) * 2009-12-25 2014-07-16 キヤノン株式会社 容量検出型の機械電気変換素子の製造方法
JP5548531B2 (ja) * 2010-06-17 2014-07-16 アズビル株式会社 デュアル物理量センサ
US9658122B2 (en) * 2012-05-18 2017-05-23 Mts Systems Corporation Transducer acceleration compensation using a delay to match phase characteristics
CN103995019A (zh) * 2014-05-30 2014-08-20 浙江海洋学院 一种模拟海上油船晃动的试验装置
JP6455174B2 (ja) 2015-01-22 2019-01-23 セイコーエプソン株式会社 回路装置、電子機器、移動体及び物理量検出装置の製造方法
JP6589333B2 (ja) * 2015-03-30 2019-10-16 セイコーエプソン株式会社 回路装置、電子機器及び移動体
JP7062302B2 (ja) * 2017-03-09 2022-05-06 裕幸 三田村 フィルタリング装置及びフィルタリング方法
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