JP2009246174A - 半導体モジュール、半導体モジュールの製造方法、ならびに携帯機器 - Google Patents
半導体モジュール、半導体モジュールの製造方法、ならびに携帯機器 Download PDFInfo
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- JP2009246174A JP2009246174A JP2008091644A JP2008091644A JP2009246174A JP 2009246174 A JP2009246174 A JP 2009246174A JP 2008091644 A JP2008091644 A JP 2008091644A JP 2008091644 A JP2008091644 A JP 2008091644A JP 2009246174 A JP2009246174 A JP 2009246174A
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Abstract
【解決手段】半導体モジュールの製造方法は、素子電極12を有する半導体素子10が複数形成された半導体ウエハ1を伸張性を有する第1の絶縁樹脂層20上に接着する工程と、半導体ウエハ1をダイシングする工程と、第1の絶縁樹脂層20を引き伸ばして半導体素子10の間隔を広げる工程と、電極が設けられた金属板と間隔を広げられた状態の複数の半導体素子10とを、第2の絶縁樹脂層を介して圧着し、電極と素子電極12とを電気的に接続する圧着工程と、金属板を選択的に除去して各半導体素子10に対応する配線層を形成し、第1の絶縁樹脂層20と第2の絶縁樹脂層とで連結された複数の半導体モジュールを形成する工程と、第1の絶縁樹脂層20および第2の絶縁樹脂層を切断して半導体モジュールを個別化する工程と、を含む。
【選択図】図2
Description
図1は、実施形態1に係る半導体モジュール100の構成を示す概略断面図である。
半導体モジュール100は、主な構成として半導体素子10、第1の絶縁樹脂層20、配線層30、第2の絶縁樹脂層40、保護層50、絶縁層52、外部接続電極60を備える。
図2(A)〜(C)は、半導体素子10の個別化方法を示す工程断面図である。各図において(i)は平面図、(ii)は(i)におけるA−A線に沿った部分断面図である。なお、各図の(i)では、(ii)に示す素子電極12を省略している。
まず、図3(A)に示すように、少なくとも、電極32の高さと配線層30の厚さとの和より大きい厚さを有する金属板としての銅板33を用意する。
まず、図4(A)に示すように、電極32が第2の絶縁樹脂層40側を向くようにして、銅板33を第2の絶縁樹脂層40の一方の主表面側に配置する。また、第1の絶縁樹脂層20上で間隔を広げられた状態の複数の半導体素子10を第2の絶縁樹脂層40の他方の主表面側に配置する。第2の絶縁樹脂層40の厚さは、電極32の高さ以上の厚さであり、たとえば約20μmである。そして、プレス装置を用いて、銅板33と半導体素子10とを、第2の絶縁樹脂層40を介して圧着する。プレス加工時の圧力および温度は、それぞれ約5MPaおよび200℃である。
以上説明した製造工程により、半導体モジュール100が形成される。
上述した実施形態1では、電極32として突起電極を形成した銅板33と半導体素子10との間に第2の絶縁樹脂層40を挟持し、加圧成形することにより半導体モジュール100を形成したが、以下のようにして半導体モジュール100を形成してもよい。以下、本実施形態について説明する。なお、実施形態1と同一の構成については同一の符号を付し、その説明は適宜省略する。
まず、図5(A)に示すように、金属板としての銅板35と、第1の絶縁樹脂層20上で間隔を広げられた状態の複数の半導体素子10とを、第2の絶縁樹脂層40を介して圧着する。
以上説明した製造工程により、半導体モジュール100が形成される。
以下、本実施形態に係る半導体モジュール100の製造方法について説明する。なお、実施形態1と同一の構成については同一の符号を付し、その説明は適宜省略する。
次に、図6(C)に示すように、各半導体素子10間の間隔が、スクライブライン2の幅と、各半導体モジュール100の形成領域4における半導体素子10の側方領域B2つ分となるまで、第1の絶縁樹脂層20をその外周方向に等方的に引き伸ばす。
まず、図7(A)に示すように、少なくとも、電極32の高さと配線層30の厚さとの和より大きい厚さを有する金属板としての銅板33を用意する。
次に、図7(B)に示すように、フォトリソグラフィ法により、電極32のパターンに合わせてレジスト71を選択的に形成する。
次に、図7(E)に示すように、第2の絶縁樹脂層40の主表面に、たとえばO2プラズマなどによるアッシング処理を施し、第2の絶縁樹脂層40を所定量だけ除去して電極32の頂部面を露出させ、電極32を第2の絶縁樹脂層40に貫通させる。
以上説明した工程により、電極32が形成されるとともに、電極32の形成された側の主表面に第2の絶縁樹脂層40が積層された銅板33が形成される。
まず、図8(A)に示すように、第2の絶縁樹脂層40が積層された銅板33を、電極32が半導体素子10側を向くようにして配置し、第1の絶縁樹脂層20上で間隔を広げられた状態の複数の半導体素子10と貼り合わせる。これにより、電極32と素子電極12とを電気的に接続する。
次に、図8(C)に示すように、銅板33と一体となった半導体素子10と、一方の主表面に金属層としての銅箔82を有する第3の絶縁樹脂層80とを、第3の絶縁樹脂層80の他方の主表面と半導体素子10とを合わせるようにして、プレス装置を用いて圧着する。第3の絶縁樹脂層80は、たとえば第2の絶縁樹脂層40と同様の絶縁性樹脂であり、たとえばエポキシ系熱硬化型樹脂である。そのため、プレス加工によって第3の絶縁樹脂層80が塑性流動を起こし、半導体素子10が第3の絶縁樹脂層80内に埋没し、第2の絶縁樹脂層40と第3の絶縁樹脂層80とが圧着される。
以上説明した製造工程により、半導体モジュール100が形成される。
上述した実施形態3では、第2の絶縁樹脂層40が積層されるとともに電極32として突起電極が形成された銅板33と半導体素子10とを貼り合わせて、半導体モジュール100を形成したが、以下のようにして半導体モジュール100を形成してもよい。以下、本実施形態について説明する。なお、実施形態1および3と同一の構成については同一の符号を付し、その説明は適宜省略する。
まず、図10(A)に示すように、金属板としての銅板35と、第1の絶縁樹脂層20上で間隔を広げられた状態の複数の半導体素子10とを、第2の絶縁樹脂層40を介して貼り合わせる。
次に、図10(C)に示すように、銅板35と一体となった半導体素子10と、一方の主表面に金属層としての銅箔82を有する第3の絶縁樹脂層80とを、第3の絶縁樹脂層80の他方の主表面と半導体素子10とを合わせるようにして、プレス装置を用いて圧着する。これにより、図10(D)に示すように、銅板35、第2の絶縁樹脂層40、半導体素子10、および第3の絶縁樹脂層80が一体化される。
以上説明した製造工程により、半導体モジュール100が形成される。
次に、本発明の半導体モジュールを備えた携帯機器について説明する。なお、携帯機器として携帯電話に搭載する例を示すが、たとえば、個人用携帯情報端末(PDA)、デジタルビデオカメラ(DVC)、及びデジタルスチルカメラ(DSC)といった電子機器であってもよい。
Claims (11)
- 一方の主表面に素子電極が設けられた半導体素子が複数形成された半導体基板を、伸張性を有する第1の絶縁樹脂層上に接着する工程と、
前記半導体基板をダイシングして複数の前記半導体素子に個別化する工程と、
前記第1の絶縁樹脂層を引き伸ばして、複数の前記半導体素子の間隔を広げる工程と、
各半導体素子に設けられた前記素子電極に対向する突起電極が設けられた金属板と、前記第1の絶縁樹脂層上で間隔を広げられた状態の複数の前記半導体素子とを、第2の絶縁樹脂層を介して圧着し、前記突起電極が前記第2の絶縁樹脂層を貫通することにより、前記突起電極と前記素子電極とを電気的に接続する圧着工程と、
前記金属板を選択的に除去して各半導体素子に対応する配線層を形成し、前記第1の絶縁樹脂層と前記第2の絶縁樹脂層とで連結された複数の半導体モジュールを形成する工程と、
前記第1の絶縁樹脂層および前記第2の絶縁樹脂層を切断して前記半導体モジュールを個別化する工程と、
を含むことを特徴とする半導体モジュールの製造方法。 - 一方の主表面に素子電極が設けられた半導体素子が複数形成された半導体基板を、伸張性を有する第1の絶縁樹脂層上に接着する工程と、
前記半導体基板をダイシングして複数の前記半導体素子に個別化する工程と、
前記第1の絶縁樹脂層を引き伸ばして、複数の前記半導体素子の間隔を広げる工程と、
前記第1の絶縁樹脂層上で間隔を広げられた状態の複数の前記半導体素子と金属板とを第2の絶縁樹脂層を介して圧着する工程と、
前記金属板と前記第2の絶縁樹脂層とを選択的に除去して複数のビアホールを形成し、前記素子電極と電気的に接続するように前記ビアホール内にビア電極を形成する工程と、
前記金属板を選択的に除去して各半導体素子に対応する配線層を形成し、前記第1の絶縁樹脂層と前記第2の絶縁樹脂層とで連結された複数の半導体モジュールを形成する工程と、
前記第1の絶縁樹脂層および前記第2の絶縁樹脂層を切断して前記半導体モジュールを個別化する工程と、
を含むことを特徴とする半導体モジュールの製造方法。 - 一方の主表面に素子電極が設けられた半導体素子が複数形成された半導体基板を、伸張性を有する第1の絶縁樹脂層上に接着する工程と、
前記半導体基板をダイシングして複数の前記半導体素子に個別化する工程と、
前記第1の絶縁樹脂層を引き伸ばして、複数の前記半導体素子の間隔を広げる工程と、
各半導体素子に設けられた前記素子電極に対向する突起電極が設けられた金属板に第2の絶縁樹脂層を積層して、前記突起電極を前記第2の絶縁樹脂層に貫通させ、前記第1の絶縁樹脂層上で間隔を広げられた状態の複数の前記半導体素子と前記金属板とを貼り合わせて前記突起電極と前記素子電極とを電気的に接続する工程と、
前記第1の絶縁樹脂層を除去し、一方の主表面に金属層を有する第3の絶縁樹脂層を、前記第3の絶縁樹脂層の他方の主表面と前記半導体素子の他方の主表面とを合わせるようにして、前記半導体素子と圧着する工程と、
前記金属板を選択的に除去して各半導体素子に対応する配線層を形成し、前記第2の絶縁樹脂層と前記第3の絶縁樹脂層とで連結された複数の半導体モジュールを形成する工程と、
前記第2の絶縁樹脂層および前記第3の絶縁樹脂層を切断して前記半導体モジュールを個別化する工程と、
を含むことを特徴とする半導体モジュールの製造方法。 - 一方の主表面に素子電極が設けられた半導体素子が複数形成された半導体基板を、伸張性を有する第1の絶縁樹脂層上に接着する工程と、
前記半導体基板をダイシングして複数の前記半導体素子に個別化する工程と、
前記第1の絶縁樹脂層を引き伸ばして、複数の前記半導体素子の間隔を広げる工程と、
前記第1の絶縁樹脂層上で間隔を広げられた状態の複数の前記半導体素子と金属板とを第2の絶縁樹脂層を介して貼り合わせる工程と、
前記第1の絶縁樹脂層を除去し、一方の主表面に金属層を有する第3の絶縁樹脂層を、前記第3の絶縁樹脂層の他方の主表面と前記半導体素子の他方の主表面とを合わせるようにして、前記半導体素子と圧着する工程と、
前記金属板と前記第2の絶縁樹脂層とを選択的に除去して複数のビアホールを形成し、前記素子電極と電気的に接続するように前記ビアホール内にビア電極を形成する工程と、
前記金属板を選択的に除去して各半導体素子に対応する配線層を形成し、前記第2の絶縁樹脂層と前記第3の絶縁樹脂層とで連結された複数の半導体モジュールを形成する工程と、
前記第2の絶縁樹脂層および前記第3の絶縁樹脂層を切断して前記半導体モジュールを個別化する工程と、
を含むことを特徴とする半導体モジュールの製造方法。 - 前記配線層を形成する際に、前記配線層の形成領域に合わせて前記金属層を選択的に除去することを特徴とする請求項3または4に記載の半導体モジュールの製造方法。
- 前記配線層を形成する際に、前記金属層を全面的に除去することを特徴とする請求項3または4に記載の半導体モジュールの製造方法。
- 一方の主表面に素子電極が設けられた半導体素子と、
前記半導体素子の他方の主表面に設けられた第1の絶縁樹脂層と、
前記素子電極に対向する電極が設けられた配線層と、
前記配線層と前記半導体素子との間に設けられた第2の絶縁樹脂層と、
を備え、前記電極が前記第2の絶縁樹脂層を貫通し、前記電極と前記素子電極とが電気的に接続され、
前記第1の絶縁樹脂層と前記第2の絶縁樹脂層とが前記半導体素子の側方において接するとともに、前記半導体素子の側面が前記第1の絶縁樹脂層と前記第2の絶縁樹脂層とによって被覆されており、
前記半導体素子の側方における前記第1の絶縁樹脂層の膜厚が、外側に近づくほど薄いことを特徴とする半導体モジュール。 - 前記半導体素子の側方における前記第1の絶縁樹脂層の硬さが、前記半導体素子の他方の主表面上における前記第1の絶縁樹脂層の硬さよりも硬いことを特徴とする請求項7に記載の半導体モジュール。
- 前記電極は、前記配線層と一体化された突起電極であることを特徴とする請求項7または8に記載の半導体モジュール。
- 前記電極は、ビア電極であることを特徴とする請求項7または8に記載の半導体モジュール。
- 請求項7ないし10のいずれか1項に記載の半導体モジュールを搭載したことを特徴とする携帯機器。
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US (1) | US8476776B2 (ja) |
JP (1) | JP4753960B2 (ja) |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011090164A1 (ja) * | 2010-01-22 | 2011-07-28 | 三洋電機株式会社 | 半導体モジュールの製造方法 |
JP2014078764A (ja) * | 2014-02-05 | 2014-05-01 | Lapis Semiconductor Co Ltd | 半導体装置およびその半導体装置の製造方法 |
WO2023042450A1 (ja) * | 2021-09-14 | 2023-03-23 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置の製造方法、半導体装置、及び半導体装置用の配線基板 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2011077108A (ja) * | 2009-09-29 | 2011-04-14 | Elpida Memory Inc | 半導体装置 |
KR101678052B1 (ko) * | 2010-02-25 | 2016-11-22 | 삼성전자 주식회사 | 단층 배선 패턴을 포함한 인쇄회로기판(pcb), pcb를 포함한 반도체 패키지, 반도체 패키지를 포함한 전기전자장치, pcb제조방법, 및 반도체 패키지 제조방법 |
US9748154B1 (en) * | 2010-11-04 | 2017-08-29 | Amkor Technology, Inc. | Wafer level fan out semiconductor device and manufacturing method thereof |
CN105097758B (zh) | 2014-05-05 | 2018-10-26 | 日月光半导体制造股份有限公司 | 衬底、其半导体封装及其制造方法 |
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- 2009-03-18 CN CN2009801172074A patent/CN102027591B/zh not_active Expired - Fee Related
- 2009-03-18 US US12/935,854 patent/US8476776B2/en not_active Expired - Fee Related
- 2009-03-18 WO PCT/JP2009/055307 patent/WO2009122911A1/ja active Application Filing
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JP2001176898A (ja) * | 1999-12-20 | 2001-06-29 | Mitsui High Tec Inc | 半導体パッケージの製造方法 |
JP2007157879A (ja) * | 2005-12-02 | 2007-06-21 | Sony Corp | 半導体装置及びその製造方法、並びに半導体ウェーハ |
JP2007220869A (ja) * | 2006-02-16 | 2007-08-30 | Casio Comput Co Ltd | 半導体装置の製造方法 |
JP2008053693A (ja) * | 2006-07-28 | 2008-03-06 | Sanyo Electric Co Ltd | 半導体モジュール、携帯機器、および半導体モジュールの製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2011090164A1 (ja) * | 2010-01-22 | 2011-07-28 | 三洋電機株式会社 | 半導体モジュールの製造方法 |
JP2011151231A (ja) * | 2010-01-22 | 2011-08-04 | Sanyo Electric Co Ltd | 半導体モジュールの製造方法 |
US8592257B2 (en) | 2010-01-22 | 2013-11-26 | Sanyo Electric Co., Ltd. | Method for manufacturing semiconductor modules |
JP2014078764A (ja) * | 2014-02-05 | 2014-05-01 | Lapis Semiconductor Co Ltd | 半導体装置およびその半導体装置の製造方法 |
WO2023042450A1 (ja) * | 2021-09-14 | 2023-03-23 | ソニーセミコンダクタソリューションズ株式会社 | 半導体装置の製造方法、半導体装置、及び半導体装置用の配線基板 |
Also Published As
Publication number | Publication date |
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CN102027591B (zh) | 2013-02-20 |
US8476776B2 (en) | 2013-07-02 |
CN102027591A (zh) | 2011-04-20 |
WO2009122911A1 (ja) | 2009-10-08 |
JP4753960B2 (ja) | 2011-08-24 |
US20110193222A1 (en) | 2011-08-11 |
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