JP2009239294A5 - - Google Patents
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- Publication number
- JP2009239294A5 JP2009239294A5 JP2009125100A JP2009125100A JP2009239294A5 JP 2009239294 A5 JP2009239294 A5 JP 2009239294A5 JP 2009125100 A JP2009125100 A JP 2009125100A JP 2009125100 A JP2009125100 A JP 2009125100A JP 2009239294 A5 JP2009239294 A5 JP 2009239294A5
- Authority
- JP
- Japan
- Prior art keywords
- emitting diode
- light emitting
- light
- contact
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000010410 layer Substances 0.000 claims 38
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 24
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 12
- 239000010931 gold Substances 0.000 claims 12
- 229910002601 GaN Inorganic materials 0.000 claims 11
- 150000004767 nitrides Chemical class 0.000 claims 9
- 229910052697 platinum Inorganic materials 0.000 claims 9
- 229910001020 Au alloy Inorganic materials 0.000 claims 8
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 7
- 238000002161 passivation Methods 0.000 claims 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims 6
- 229910001069 Ti alloy Inorganic materials 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 229910001260 Pt alloy Inorganic materials 0.000 claims 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 5
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims 4
- 229910052737 gold Inorganic materials 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims 4
- 230000005540 biological transmission Effects 0.000 claims 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 3
- 229910052763 palladium Inorganic materials 0.000 claims 3
- 238000001429 visible spectrum Methods 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US92040997A | 1997-08-29 | 1997-08-29 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000508147A Division JP4597363B2 (ja) | 1997-08-29 | 1998-08-28 | 標準パッケージで使用される信頼性が高い強固な第iii族発光ダイオード |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009239294A JP2009239294A (ja) | 2009-10-15 |
| JP2009239294A5 true JP2009239294A5 (enExample) | 2011-02-24 |
Family
ID=25443701
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000508147A Expired - Lifetime JP4597363B2 (ja) | 1997-08-29 | 1998-08-28 | 標準パッケージで使用される信頼性が高い強固な第iii族発光ダイオード |
| JP2009125100A Ceased JP2009239294A (ja) | 1997-08-29 | 2009-05-25 | 標準パッケージで使用される信頼性が高い強固な第iii族発光ダイオード |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000508147A Expired - Lifetime JP4597363B2 (ja) | 1997-08-29 | 1998-08-28 | 標準パッケージで使用される信頼性が高い強固な第iii族発光ダイオード |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US6946682B2 (enExample) |
| EP (1) | EP1018169B1 (enExample) |
| JP (2) | JP4597363B2 (enExample) |
| KR (1) | KR100651145B1 (enExample) |
| CN (1) | CN1129192C (enExample) |
| AT (1) | ATE279789T1 (enExample) |
| AU (1) | AU9295098A (enExample) |
| CA (1) | CA2299379C (enExample) |
| DE (1) | DE69827025T2 (enExample) |
| ES (1) | ES2226169T3 (enExample) |
| WO (1) | WO1999010936A2 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69835216T2 (de) | 1997-07-25 | 2007-05-31 | Nichia Corp., Anan | Halbleitervorrichtung aus einer nitridverbindung |
| US6825501B2 (en) | 1997-08-29 | 2004-11-30 | Cree, Inc. | Robust Group III light emitting diode for high reliability in standard packaging applications |
| CA2299379C (en) * | 1997-08-29 | 2006-05-30 | Cree, Inc. | Robust group iii nitride light emitting diode for high reliability in standard applications |
| JP3770014B2 (ja) | 1999-02-09 | 2006-04-26 | 日亜化学工業株式会社 | 窒化物半導体素子 |
| DE60043536D1 (de) | 1999-03-04 | 2010-01-28 | Nichia Corp | Nitridhalbleiterlaserelement |
| US6926435B2 (en) * | 2001-08-23 | 2005-08-09 | Wavien, Inc. | Led illumination engine using a reflector |
| US6683327B2 (en) | 2001-11-13 | 2004-01-27 | Lumileds Lighting U.S., Llc | Nucleation layer for improved light extraction from light emitting devices |
| US6900067B2 (en) | 2002-12-11 | 2005-05-31 | Lumileds Lighting U.S., Llc | Growth of III-nitride films on mismatched substrates without conventional low temperature nucleation layers |
| AU2003301057A1 (en) * | 2002-12-20 | 2004-07-22 | Cree, Inc. | Methods of forming semiconductor mesa structures including self-aligned contact layers and related devices |
| US20070241352A1 (en) * | 2004-06-18 | 2007-10-18 | Showa Denko K. K. | Group III Nitride Semiconductor Light Emitting Device |
| US7432536B2 (en) * | 2004-11-04 | 2008-10-07 | Cree, Inc. | LED with self aligned bond pad |
| US7772604B2 (en) | 2006-01-05 | 2010-08-10 | Illumitex | Separate optical device for directing light from an LED |
| US8101961B2 (en) * | 2006-01-25 | 2012-01-24 | Cree, Inc. | Transparent ohmic contacts on light emitting diodes with growth substrates |
| US7646024B2 (en) * | 2006-08-18 | 2010-01-12 | Cree, Inc. | Structure and method for reducing forward voltage across a silicon carbide-group III nitride interface |
| US8087960B2 (en) | 2006-10-02 | 2012-01-03 | Illumitex, Inc. | LED system and method |
| US9484499B2 (en) | 2007-04-20 | 2016-11-01 | Cree, Inc. | Transparent ohmic contacts on light emitting diodes with carrier substrates |
| KR20100122485A (ko) | 2008-02-08 | 2010-11-22 | 일루미텍스, 인크. | 발광체층 쉐이핑을 위한 시스템 및 방법 |
| TWI362769B (en) | 2008-05-09 | 2012-04-21 | Univ Nat Chiao Tung | Light emitting device and fabrication method therefor |
| TW201034256A (en) | 2008-12-11 | 2010-09-16 | Illumitex Inc | Systems and methods for packaging light-emitting diode devices |
| US8449128B2 (en) | 2009-08-20 | 2013-05-28 | Illumitex, Inc. | System and method for a lens and phosphor layer |
| US8585253B2 (en) | 2009-08-20 | 2013-11-19 | Illumitex, Inc. | System and method for color mixing lens array |
| US8969198B2 (en) | 2012-06-04 | 2015-03-03 | Sensor Electronic Technology, Inc. | Ohmic contact to semiconductor layer |
| US9660043B2 (en) | 2012-06-04 | 2017-05-23 | Sensor Electronic Technology, Inc. | Ohmic contact to semiconductor layer |
| WO2014011964A1 (en) * | 2012-07-12 | 2014-01-16 | Sensor Electronic Technology, Inc. | Metallic contact for optoelectronic semiconductor device |
| US9793439B2 (en) | 2012-07-12 | 2017-10-17 | Sensor Electronic Technology, Inc. | Metallic contact for optoelectronic semiconductor device |
| US9923118B2 (en) * | 2013-02-25 | 2018-03-20 | Sensor Electronic Technology, Inc. | Semiconductor structure with inhomogeneous regions |
| US9412902B2 (en) | 2014-02-22 | 2016-08-09 | Sensor Electronic Technology, Inc. | Semiconductor structure with stress-reducing buffer structure |
| US10199535B2 (en) | 2014-02-22 | 2019-02-05 | Sensor Electronic Technology, Inc. | Semiconductor structure with stress-reducing buffer structure |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4860069A (en) * | 1983-09-24 | 1989-08-22 | Semiconductor Energy Laboratory Co., Ltd. | Non-single-cry stal semiconductor light emitting device |
| US4866005A (en) * | 1987-10-26 | 1989-09-12 | North Carolina State University | Sublimation of silicon carbide to produce large, device quality single crystals of silicon carbide |
| JPH0268968A (ja) * | 1988-09-02 | 1990-03-08 | Sharp Corp | 化合物半導体発光素子 |
| JP2953468B2 (ja) * | 1989-06-21 | 1999-09-27 | 三菱化学株式会社 | 化合物半導体装置及びその表面処理加工方法 |
| JPH04264781A (ja) | 1991-02-20 | 1992-09-21 | Eastman Kodak Japan Kk | 発光ダイオードアレイ |
| JPH04365382A (ja) * | 1991-06-13 | 1992-12-17 | Toshiba Corp | 半導体発光装置及びその駆動方法 |
| JP2560963B2 (ja) * | 1993-03-05 | 1996-12-04 | 日亜化学工業株式会社 | 窒化ガリウム系化合物半導体発光素子 |
| JP2770717B2 (ja) * | 1993-09-21 | 1998-07-02 | 日亜化学工業株式会社 | 窒化ガリウム系化合物半導体発光素子 |
| GB2277405A (en) * | 1993-04-22 | 1994-10-26 | Sharp Kk | Semiconductor colour display or detector array |
| DE69425186T3 (de) * | 1993-04-28 | 2005-04-14 | Nichia Corp., Anan | Halbleitervorrichtung aus einer galliumnitridartigen III-V-Halbleiterverbindung und Verfahren zu ihrer Herstellung |
| US5416342A (en) * | 1993-06-23 | 1995-05-16 | Cree Research, Inc. | Blue light-emitting diode with high external quantum efficiency |
| US5404282A (en) * | 1993-09-17 | 1995-04-04 | Hewlett-Packard Company | Multiple light emitting diode module |
| US5393993A (en) * | 1993-12-13 | 1995-02-28 | Cree Research, Inc. | Buffer structure between silicon carbide and gallium nitride and resulting semiconductor devices |
| JPH07326823A (ja) * | 1994-05-30 | 1995-12-12 | Canon Inc | 光半導体素子及びその製造方法 |
| US5523589A (en) * | 1994-09-20 | 1996-06-04 | Cree Research, Inc. | Vertical geometry light emitting diode with group III nitride active layer and extended lifetime |
| US5592501A (en) * | 1994-09-20 | 1997-01-07 | Cree Research, Inc. | Low-strain laser structures with group III nitride active layers |
| US5661074A (en) * | 1995-02-03 | 1997-08-26 | Advanced Technology Materials, Inc. | High brightness electroluminescent device emitting in the green to ultraviolet spectrum and method of making the same |
| US5585648A (en) * | 1995-02-03 | 1996-12-17 | Tischler; Michael A. | High brightness electroluminescent device, emitting in the green to ultraviolet spectrum, and method of making the same |
| US5739554A (en) * | 1995-05-08 | 1998-04-14 | Cree Research, Inc. | Double heterojunction light emitting diode with gallium nitride active layer |
| JP2877063B2 (ja) * | 1995-11-06 | 1999-03-31 | 松下電器産業株式会社 | 半導体発光素子 |
| US5708280A (en) * | 1996-06-21 | 1998-01-13 | Motorola | Integrated electro-optical package and method of fabrication |
| US5813752A (en) * | 1997-05-27 | 1998-09-29 | Philips Electronics North America Corporation | UV/blue LED-phosphor device with short wave pass, long wave pass band pass and peroit filters |
| CA2299379C (en) * | 1997-08-29 | 2006-05-30 | Cree, Inc. | Robust group iii nitride light emitting diode for high reliability in standard applications |
-
1998
- 1998-08-28 CA CA002299379A patent/CA2299379C/en not_active Expired - Fee Related
- 1998-08-28 JP JP2000508147A patent/JP4597363B2/ja not_active Expired - Lifetime
- 1998-08-28 CN CN98808738A patent/CN1129192C/zh not_active Expired - Lifetime
- 1998-08-28 EP EP98945787A patent/EP1018169B1/en not_active Expired - Lifetime
- 1998-08-28 AU AU92950/98A patent/AU9295098A/en not_active Abandoned
- 1998-08-28 ES ES98945787T patent/ES2226169T3/es not_active Expired - Lifetime
- 1998-08-28 KR KR1020007002138A patent/KR100651145B1/ko not_active Expired - Lifetime
- 1998-08-28 WO PCT/US1998/017849 patent/WO1999010936A2/en not_active Ceased
- 1998-08-28 AT AT98945787T patent/ATE279789T1/de not_active IP Right Cessation
- 1998-08-28 DE DE69827025T patent/DE69827025T2/de not_active Expired - Lifetime
-
2003
- 2003-03-21 US US10/393,598 patent/US6946682B2/en not_active Expired - Lifetime
-
2009
- 2009-05-25 JP JP2009125100A patent/JP2009239294A/ja not_active Ceased
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