TWM318195U - Structure of electrode of light-emitting diode - Google Patents

Structure of electrode of light-emitting diode Download PDF

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Publication number
TWM318195U
TWM318195U TW96202018U TW96202018U TWM318195U TW M318195 U TWM318195 U TW M318195U TW 96202018 U TW96202018 U TW 96202018U TW 96202018 U TW96202018 U TW 96202018U TW M318195 U TWM318195 U TW M318195U
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Taiwan
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electrode
light
layer
electrical
semiconductor layer
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TW96202018U
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Chinese (zh)
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Pei-Jih Wang
Jau-Yi Fang
Yu-Ru Wu
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Arima Optoelectronics Corp
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Priority to TW96202018U priority Critical patent/TWM318195U/en
Publication of TWM318195U publication Critical patent/TWM318195U/en

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M318195 AOC-06-23-TW 八、新型說明: 【新型所屬之技術領域】 本創作係有關一種發光二極體,尤指一種η型電極具有導 電延伸線’且其材質係與ρ型電極透明導電層相同之構成者。 【先前技術】 才女近年來’許多的焦點集中在以氮化物為主的半導體所 形成的發光70件,例如氮化鎵(GaΝ)、氮化鱗(A 1 GaN)、 氣化麵錄(InGaN)、以及氮化鋁銦鎵(A1 InGaN)等。 此類的發光元件半導體大多成長於不導電之藍寶石(Sapph i r e)基板上,而與其他發光元件採用可導電的基板不同。由 於藍寶石基板為一絕緣體,因此不能直接製作電極於基板上, 故電極的製作通常必須直接與p型的半導體層以及η型的半 導體層做各別地接觸,才能完成此類發光元件的製作。 請參照第一、二圖所示,其中第一圖係繪示一種習用發光 二極體晶粒之俯視圖,第二圖係第一圖中2 — 2剖面線之剖示 圖,其主要構成包含由藍寶石形成之一絕緣基層(1 〇 )、形 成於絕緣基層(1 〇 )上之一氮化鎵長晶層(1 1 )、形成於 氮化鎵長晶層(1 1 )上之一氮化鎵緩衝層(1 2 )、形成於 緩衝層(1 2 )上之一 η型氮化鎵接觸層(1 3 )、形成於^ 型氮化鎵接觸層(1 3)上之一 η型氮化鋁鎵束缚層(1 4 )、 形成於η塑氮化鋁鎵束缚層(14)上之一氮化銦鎵多重量子 井發光層(1 5 )、形成於發光層(1 5 )上之一 ρ型氮化鋁 鎵束缚層(1 6 )、形成於Ρ型氮化鋁鎵束缚層(1 6 )上之 一 ρ型氮化鎵接觸層(1 7 )、形成於ρ型氮化鎵接觸層(1 -5 -M318195 AOC-06-23-TW VIII. New description: [New technical field] This creation is about a kind of light-emitting diode, especially an n-type electrode with conductive extension line 'and its material is transparent with p-type electrode The same composition of the conductive layer. [Prior Art] In recent years, many talented women have focused on 70 kinds of light-emitting materials formed by nitride-based semiconductors, such as gallium nitride (GaΝ), nitride scale (A 1 GaN), gasification recording (InGaN). ), and aluminum indium gallium nitride (A1 InGaN) and the like. Most of such light-emitting element semiconductors are grown on a non-conductive sapphire substrate, and are different from other light-emitting elements in that a conductive substrate is used. Since the sapphire substrate is an insulator, the electrode cannot be directly formed on the substrate. Therefore, the electrode must be directly contacted with the p-type semiconductor layer and the n-type semiconductor layer to complete the fabrication of such a light-emitting device. Please refer to the first and second figures. The first figure shows a top view of a conventional light-emitting diode die, and the second figure is a cross-sectional view of the 2 - 2 hatching in the first figure. An insulating base layer (1 〇) formed of sapphire, a gallium nitride growth layer (1 1 ) formed on the insulating base layer (1 〇), and a nitrogen formed on the gallium nitride growth layer (1 1 ) a gallium buffer layer (12), an n-type gallium nitride contact layer (13) formed on the buffer layer (12), and an n-type formed on the gallium nitride contact layer (13) An aluminum gallium nitride tie layer (14), an indium gallium nitride multiple quantum well light-emitting layer (15) formed on the η plastic aluminum nitride gallium tie layer (14), formed on the light-emitting layer (15) a p-type aluminum nitride gallium bond layer (16), a p-type gallium nitride contact layer (17) formed on the germanium-type aluminum gallium nitride tie layer (16), formed in p-type nitride Gallium contact layer (1 -5 -

M318195 AOC-06-23-TW 7)、上之一氧化銦錫透明導電層(i 8),其中一部份以蝕刻 方^除去,俾露出部分p型氮化鎵接觸層(1 7 ),形成於p 型氮化鎵接觸層(1 7)之該露出部分上的-P型Ti/Al、M318195 AOC-06-23-TW 7), a transparent indium tin oxide conductive layer (i 8), one of which is removed by etching, and a portion of the p-type gallium nitride contact layer (17) is exposed. a -P type Ti/Al formed on the exposed portion of the p-type gallium nitride contact layer (17),

Ti/Au或Cr/Au p電極(2 〇 ),並使p電極(2⑹與透 月導電層(1 8)接觸,又由於藍寶石不導電,故須將發光二 極體適當地軸彳至11魏化鎵接觸層(1 3),然後在η型氮 化鎵接觸層(13)上形成1型Ti/Akn電極(19), 並在此η錢化鎵接觸層(丄3 )上配置㈣上環繞其四周延 二且::η電極(1 9〕電連接之—導電延伸線(2 2 >。此類 2術見諸於公告第4 i 5 i i 8號等專利案;其主要係利用 §人伸線(2 2 )與η型氮化鎵層(1 3 )形成歐姆接觸, 電極(1 9 )送出之電流更均勻分佈於整個發光二極體 准一在先則技術中,該導電延伸線(2 2)所選用之材 ;Ί、該η型電極(1 9 )為同一類,係為即丁士/八丄等金屬 =合金之材料所構成。如此-來,金屬電極的高反射性致使 易產生遮光與光導效應而影響其外部出光效率;再者,此種由 ,屬所構成之導電延伸線(22),易產生瞬間放電之缺失; 疋故,仍有改善空間。 【新型内容】 緣是,本創作之主要目的,係在提供一種發光二極體之電 =、、·》構’其η電極之延伸導線為非金屬所構成,可減少η型暴 露區域之光導(Waveguide)效果,以增部發光效率、; 且對大面積(Power Γh 1 n^ a Γ Uhlp)具有電流擴散效果,再者, 可增進表面彼覆效果,改善產品可靠度。 -6-Ti/Au or Cr/Au p electrode (2 〇), and the p electrode (2 (6) is in contact with the moon-transparent conductive layer (18), and since the sapphire is not conductive, the light-emitting diode must be properly shafted to 11 Wei a gallium contact layer (13), and then a type 1 Ti/Akn electrode (19) is formed on the n-type gallium nitride contact layer (13), and is disposed on the argon gallium contact layer (丄3). Extending around the circumference of the :: η electrode (1 9) electrically connected - conductive extension line (2 2 >. This type of 2 is found in the publication of the 4th 5 ii 8 patents; its main use § The human wire (2 2 ) forms an ohmic contact with the n-type gallium nitride layer (13), and the current sent by the electrode (19) is more evenly distributed in the entire light-emitting diode prior art, the conductive The extension line (2 2) is selected for the material; the η-type electrode (1 9 ) is of the same type and is composed of a metal such as a metal such as Dings/Bagua; the alloy is so high. The reflective property is easy to produce light-shielding and light-conducting effects and affects the external light-emitting efficiency; furthermore, such a conductive extension line (22) consisting of genus is prone to the loss of instantaneous discharge; Therefore, there is still room for improvement. [New content] The main purpose of this creation is to provide a kind of light-emitting diode. The electric wire of the light-emitting diode is composed of non-metal. Reduce the light guide effect of the n-type exposed area to increase the luminous efficiency, and have a current spreading effect on a large area (Power Γh 1 n^ a Γ Uhlp), and further improve the surface adhesion effect and improve the product. Reliability. -6-

M318195 AOCO6-23-TW 本創作之又一目的,則在提供一種發光二極體之電極結 構’其η電極導電性較金屬材料低,具有不易產生瞬間放電之 功效增進。 為達上述目的,本創作所採用之技術手段包含: 一絕緣基板; 一第一電性半導體層,係位於該絕緣基板上; 一發光層’係位於該第一電性半導體層上並暴露出另一部 分之第一電性半導體層;M318195 AOCO6-23-TW Another object of the present invention is to provide an electrode structure of a light-emitting diode whose 'n electrode conductivity is lower than that of a metal material, and has an effect of being less prone to instantaneous discharge. In order to achieve the above object, the technical means adopted by the present invention comprises: an insulating substrate; a first electrical semiconductor layer on the insulating substrate; a light emitting layer 'on the first electrical semiconductor layer and exposed Another portion of the first electrical semiconductor layer;

一第二電性半導體層,係位於該發光層上; 透明導電層’係位於該第二電性半導體層上; 、 第一電性電極,係設置在該第一電性半導體層之暴露區 域的表面上;以及 第-電性電極,係言免置在該透明導電層# 一部分並凸露 在表面上,並與該第二電性半導體層電性連接;a second electrical semiconductor layer is disposed on the light emitting layer; a transparent conductive layer is disposed on the second electrical semiconductor layer; and a first electrical electrode is disposed on the exposed region of the first electrical semiconductor layer And a first-electrode electrode, which is not disposed on a portion of the transparent conductive layer # and is exposed on the surface, and is electrically connected to the second electrical semiconductor layer;

其中該第-電性電極具備_延伸於該第二電性半導體層 周圍1繞部分,且該圍繞部分係以氧化錮錫(ΙΤ⑴及透明 導電氧化物(TCQ)所構朗料群組巾的—種材料所構成。 【實施方式】 :先,請參照第三圖與第四圖,其中第三圖係揭示本創作 實施例之俯視圖,第四圖係沿第三圖之4—4剖面線所形 成之剖面示意圖,本創作大體上包含有· 選自包含於藍寶石(s apph 3所構成材料群組中的一種材 而構成—半導體疊層(s t a c 一絶緣基板(3 0 ),其可 ire)、LiGa〇3 及 LiAl〇 料;藉以供磊晶結構依序堆疊, k) ’其至少包括:Wherein the first electrical electrode has a portion extending around the second electrical semiconductor layer, and the surrounding portion is made of lanthanum tin oxide (ΙΤ1) and transparent conductive oxide (TCQ). [Embodiment]: First, please refer to the third and fourth figures, wherein the third figure reveals the top view of the present embodiment, and the fourth figure is along the 4th to 4th line of the third figure. The cross-sectional schematic view formed by the present invention generally comprises: a semiconductor laminate (sac-insulating substrate (30), which is included in a material composed of sapphire (sapph 3). ), LiGa〇3 and LiAl materials; for stacking the epitaxial structures in sequence, k) 'which at least includes:

M318195 AOC-06-23-TW 一第一電性半導體層(3 1 ),係位於該絕緣基板(3 ο ) 上’其可包含選自於GaN、A 1 GaN及I nGaN等所構成材料 群組中的一種材料,其具備一第一電性接觸層及束缚層,另可 包括但不限定具備一長晶層及緩衝層。 一發光層(3 2 ),係位於該第一電性半導體層(31 ) 上並暴露出另一部分之第一電性半導體層(3 i ),該暴露區 域(3 6)之表面上係設置一第一電性電極(4 2 ),本實施 例中為η電極,但不限定於此。 一第二電性半導體層(3 3 ),係位於該發光層(3 2 ) 上’其具備一第二電性束缚層及接觸層;其可包含選自於Ga N與A1 I a GaN所構成材料群組中的一種材料; 一透明導電層(34),係位於該第二電性半導體層(3 3 )上,其包含選自於氧化銦錫(I τ〇)及透明導電氧化物 (Transparent Conductive 〇xide,TC〇)所構 成材料群組中的一種材料; 一第二電性電極(4 1 ),本實施中為p電極,係設置 在該透明導電層(3 4)的一部分並凸露在其表面(3 5) 上,其與該第二電性半導體層(3 3)電性連接,形成一蕭基 (Scho t tky)接觸,因該第二電性電極(4丄)之正下方 實質上不產生電流,而自p電極(41)送出之電流經該透明 導電層(3 4 ),流至發光層(1 5 ),產生發光作用。 本創作之主要特徵係該第一電性電極(4 2 )具備一延伸 於該第二電性半導體層(3 3 )周圍之圍繞部分(4〇),本 實施例中其係呈一部分具有開口之u型體,且該圍繞部分(4 0 )之材料係可由諸如··氧化銦錫(I 丁〇)及透明導電氧化物 -8-M318195 AOC-06-23-TW A first electrical semiconductor layer (3 1 ) is located on the insulating substrate (3 ο ), which may include a material group selected from the group consisting of GaN, A 1 GaN, and I nGaN. A material of the group having a first electrical contact layer and a tie layer, and may include, but not limited to, a crystal growth layer and a buffer layer. An illuminating layer (32) is disposed on the first electrical semiconductor layer (31) and exposes another portion of the first electrical semiconductor layer (3 i ), and the exposed region (36) is disposed on the surface A first electrical electrode (42) is an η electrode in this embodiment, but is not limited thereto. a second electrically conductive semiconductor layer (3 3 ) is disposed on the luminescent layer ( 3 2 ) and has a second electrically binding layer and a contact layer; and the second electrically conductive layer ( 3 3 ) may be selected from the group consisting of Ga N and A1 I a GaN a material constituting a group of materials; a transparent conductive layer (34) on the second electrical semiconductor layer (3 3 ), comprising a layer selected from indium tin oxide (I τ 〇) and a transparent conductive oxide (Transparent Conductive 〇xide, TC〇) a material in a group of materials; a second electrical electrode (4 1 ), in this embodiment a p-electrode, is disposed in a portion of the transparent conductive layer (34) And being exposed on the surface (35), which is electrically connected to the second electrical semiconductor layer (33) to form a Schottky contact due to the second electrical electrode (4丄) There is substantially no current generated directly under the ), and the current sent from the p-electrode (41) flows through the transparent conductive layer (3 4 ) to the light-emitting layer (15) to generate a light-emitting effect. The main feature of the present invention is that the first electrical electrode (42) has a surrounding portion (4〇) extending around the second electrical semiconductor layer (3 3 ). In this embodiment, the portion has an opening. The u-shaped body, and the material surrounding the portion (40) can be made of, for example, indium tin oxide (I-butyl) and transparent conductive oxide-8-

M318195 AOC-06-23-TW (T C Ο)所構成材料群組中的一種材料;而非習用與η電極 相同之金屬材料。如此一來,本創作作為延伸導線之圍繞部分 (4 0 )可減少η型暴露區域之光導(Wavegu i de)效果, 以增強外部發光效率;且對大面積(Power Chip)具有 電流擴散效果,再者,可增進表面彼覆效果,改善產品可靠度; 再者此延伸導線導電性較金屬材料低,具有不易產生瞬間放 電,改善晶粒(Chip)耐靜電能力。藉此,得以改善習用發 光二極體之缺失。 請續參照第五圖本創作第二實施例所示,其大致與第一實 施例相同,其差異僅在該圍繞部分(4 Q )為_沒有開口之圈 狀體。第六圖所示之第三實施例,係該第一電極(4 2)與第 -電極(41)⑤置於晶粒之對角線上。故其無論以何種型態 呈現,該圍繞部分(4〇)皆具有前揭相同之功效增進。 綜上所述,本創作所揭示之構造,為昔所無,且曰確能達到 預期之功效,並具可供產制用性,完全符合㈣專利要件, 祈叫貝審查委員核賜專利,以勵創新,無任德咸。 惟,上述所揭露之圖式、說明,僅為本創作之 大凡熟悉此項技藝人士,依本案精神範疇所作之、實施例 化,仍應包括在本案申請專利範_。 ^或等效變 9-M318195 AOC-06-23-TW (T C Ο) is a material in the group of materials; it is not the same metal material as the η electrode. In this way, the present invention as a surrounding portion (40) of the extended wire can reduce the light guide effect of the n-type exposed area to enhance the external light-emitting efficiency; and has a current spreading effect on the large-area (Power Chip). Furthermore, the surface effect can be improved and the reliability of the product can be improved. Moreover, the conductive wire of the extended wire is lower than that of the metal material, and is less prone to instantaneous discharge and improves the electrostatic resistance of the chip. Thereby, the lack of conventional light-emitting diodes can be improved. Referring to the fifth embodiment, the second embodiment of the present invention is substantially the same as the first embodiment, and the difference is only that the surrounding portion (4 Q ) is a ring body having no opening. In the third embodiment shown in the sixth figure, the first electrode (42) and the first electrode (41) 5 are placed on the diagonal of the crystal grains. Therefore, regardless of the type of presentation, the surrounding part (4〇) has the same effect enhancement as before. In summary, the structure revealed by this creation is nothing but the past, and it can achieve the expected effect, and has the ability to be used for production. It is in full compliance with (4) patent requirements, and the praying committee will grant a patent. Inspire innovation, no morality and salty. However, the above-mentioned drawings and descriptions are only for those who are familiar with this art, and the implementation of the case according to the spirit of the case should still be included in the patent application. ^ or equivalent change 9-

M318195 AOCO6-23-TW 【圖式簡單說明】 第一圖係習用發光二極體之俯視圖。 第二圖係第一圖中2—2斷面剖示圖。 第三圖係本創作第一實施例之俯視圖。 第四圖係第三圖中4 — 4斷面剖示圖。 第五圖係本創作第二實施例之俯視圖。 第六圖係本創作第三實施例之俯視圖。 【主要元件符號說明】 (3 0)絕緣基板 (31)第一電性半導體層 (3 2)發光層 (3 3)第二電性半導體層 (3 4)透明導電層 (3 5)表面 (3 6)暴露區域 (4 0)圍繞部分 (41)第二電性電極 (4 2)第一電性電極 10-M318195 AOCO6-23-TW [Simple description of the diagram] The first picture is a top view of the conventional light-emitting diode. The second figure is a cross-sectional view of section 2-1 in the first figure. The third drawing is a plan view of the first embodiment of the present creation. The fourth figure is a sectional view of section 4-4 in the third figure. The fifth drawing is a plan view of the second embodiment of the present creation. The sixth drawing is a plan view of the third embodiment of the present creation. [Description of main component symbols] (30) Insulating substrate (31) First electrical semiconductor layer (32) Light-emitting layer (33) Second electrical semiconductor layer (34) Transparent conductive layer (3 5) surface ( 3 6) exposed area (40) surrounding part (41) second electrical electrode (42) first electrical electrode 10-

Claims (1)

M318195 AOC-06-23-TW 九、申請專利範圍: 1 · 一種發光二極體之電極結構,包含: 一絕緣基板; 一第一電性半導體層,係位於該絕緣基板上; 一發光層,係位於該第一電性半導體層上並暴露出另 一部分之第一電性半導體層; 一第二電性半導體層,係位於該發光層上; 一透明導電層,係位於該第二電性半導體層上; 一第一電性電極,係設置在該第一電性半導體層之暴 露區域的表面上;以及 一第二電性電極,係設置在該透明導電層的一部分並 凸露在其表面上,並與該第二電性半導體層電性連接; 其中該第一電性電極具備一延伸於該第二電性半導體 層周圍之圍繞部分,且該圍繞部分係以氧化銦錫(I TO)及 透明導電氧化物(TCO)所構成材料群組中的一種材料所構成。 2 ·如申請專利範圍第1項所述之發光二極體之電極 結構,其中,該透明導電層包含選自於氧化銦錫(I TO)及 透明導電氧4匕物(Transparent Conductive Oxide, TC〇)其中任一材料所構成。 3·如申請專利範圍第1項所述之發光二極體之電極 結構,其中,該第一電性電極之圍繞部分包括為一部分具 有開口之U型體。 11 M318195 AOC-06-23-TW 4 ·如申請專利範圍第1項所述之發光二極體之電極 結構,复由 “ f ’該第一電性電極之圍繞部分包括為一沒有開 口之圈狀體。 5 ·如申請專利範圍第1項所述之發光二極體之電極 、、'構’其中,該第一電極與第二電極包括設置於晶粒之對 角線上。 -12·M318195 AOC-06-23-TW IX. Patent application scope: 1 · An electrode structure of a light-emitting diode, comprising: an insulating substrate; a first electrical semiconductor layer on the insulating substrate; a light-emitting layer, a first electrical semiconductor layer on the first electrical semiconductor layer and exposing another portion; a second electrical semiconductor layer on the light-emitting layer; a transparent conductive layer located in the second electrical a first electrical electrode disposed on a surface of the exposed region of the first electrical semiconductor layer; and a second electrical electrode disposed on a portion of the transparent conductive layer and exposed And electrically connected to the second electrical semiconductor layer; wherein the first electrical electrode has a surrounding portion extending around the second electrical semiconductor layer, and the surrounding portion is made of indium tin oxide (I) TO) and a material of a group of materials consisting of transparent conductive oxide (TCO). The electrode structure of the light-emitting diode according to claim 1, wherein the transparent conductive layer comprises a layer selected from indium tin oxide (I TO) and transparent conductive oxygen (Transparent Conductive Oxide, TC) 〇) Any of these materials. 3. The electrode structure of the light-emitting diode according to claim 1, wherein the surrounding portion of the first electrical electrode comprises a U-shaped body having a portion having an opening. 11 M318195 AOC-06-23-TW 4 The electrode structure of the light-emitting diode according to claim 1, wherein the surrounding portion of the first electrical electrode includes a circle without an opening. 5. The electrode of the light-emitting diode according to claim 1, wherein the first electrode and the second electrode are disposed on a diagonal line of the crystal grain.
TW96202018U 2007-02-02 2007-02-02 Structure of electrode of light-emitting diode TWM318195U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI447940B (en) * 2008-07-15 2014-08-01 Lextar Electronics Corp Light emitting diode chip and fabricating method thereof
US8823038B2 (en) 2011-05-20 2014-09-02 Huga Optotech Inc. Semiconductor light-emitting structure
TWI474504B (en) * 2012-06-21 2015-02-21 Lextar Electronics Corp Light emitting diode structure and manufacturing method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI447940B (en) * 2008-07-15 2014-08-01 Lextar Electronics Corp Light emitting diode chip and fabricating method thereof
US8823038B2 (en) 2011-05-20 2014-09-02 Huga Optotech Inc. Semiconductor light-emitting structure
TWI453968B (en) * 2011-05-20 2014-09-21 Huga Optotech Inc Semiconductor light-emitting structure
TWI474504B (en) * 2012-06-21 2015-02-21 Lextar Electronics Corp Light emitting diode structure and manufacturing method thereof

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