JP2009232376A5 - - Google Patents

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Publication number
JP2009232376A5
JP2009232376A5 JP2008077995A JP2008077995A JP2009232376A5 JP 2009232376 A5 JP2009232376 A5 JP 2009232376A5 JP 2008077995 A JP2008077995 A JP 2008077995A JP 2008077995 A JP2008077995 A JP 2008077995A JP 2009232376 A5 JP2009232376 A5 JP 2009232376A5
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JP
Japan
Prior art keywords
manufacturing
metal film
piezoelectric vibrator
piezoelectric
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2008077995A
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English (en)
Japanese (ja)
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JP2009232376A (ja
JP5170405B2 (ja
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Priority to JP2008077995A priority Critical patent/JP5170405B2/ja
Priority claimed from JP2008077995A external-priority patent/JP5170405B2/ja
Publication of JP2009232376A publication Critical patent/JP2009232376A/ja
Publication of JP2009232376A5 publication Critical patent/JP2009232376A5/ja
Application granted granted Critical
Publication of JP5170405B2 publication Critical patent/JP5170405B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008077995A 2008-03-25 2008-03-25 圧電振動子の製造方法 Expired - Fee Related JP5170405B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008077995A JP5170405B2 (ja) 2008-03-25 2008-03-25 圧電振動子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008077995A JP5170405B2 (ja) 2008-03-25 2008-03-25 圧電振動子の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012285331A Division JP5494994B2 (ja) 2012-12-27 2012-12-27 振動子の製造方法

Publications (3)

Publication Number Publication Date
JP2009232376A JP2009232376A (ja) 2009-10-08
JP2009232376A5 true JP2009232376A5 (https=) 2011-05-06
JP5170405B2 JP5170405B2 (ja) 2013-03-27

Family

ID=41247222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008077995A Expired - Fee Related JP5170405B2 (ja) 2008-03-25 2008-03-25 圧電振動子の製造方法

Country Status (1)

Country Link
JP (1) JP5170405B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018079181A1 (ja) * 2016-10-31 2018-05-03 株式会社大真空 圧電振動デバイスの周波数調整方法
US11563413B2 (en) 2016-12-22 2023-01-24 Daishinku Corporation Tuning fork-type vibrating reed, tuning fork-type vibrator and manufacturing method therefor
JP7452039B2 (ja) 2020-01-30 2024-03-19 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03262310A (ja) * 1990-03-13 1991-11-22 Seiko Epson Corp 圧電振動子の周波数調整方法
JP3541682B2 (ja) * 1997-07-29 2004-07-14 セイコーエプソン株式会社 圧電振動子
JP3937722B2 (ja) * 2000-12-04 2007-06-27 セイコーエプソン株式会社 圧電デバイス
JP2002353766A (ja) * 2001-03-19 2002-12-06 Seiko Epson Corp 圧電デバイス
JP4039230B2 (ja) * 2002-12-19 2008-01-30 株式会社大真空 音叉型振動子の発振周波数調整方法、及びその方法によって発振周波数が調整された音叉型振動子
JP4812014B2 (ja) * 2006-07-12 2011-11-09 セイコーインスツル株式会社 圧電振動片及び圧電振動片の製造方法、圧電振動子、並びに、圧電振動子を備える発振器、電子機器、及び電波時計

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