JP2006121411A5 - - Google Patents

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Publication number
JP2006121411A5
JP2006121411A5 JP2004306887A JP2004306887A JP2006121411A5 JP 2006121411 A5 JP2006121411 A5 JP 2006121411A5 JP 2004306887 A JP2004306887 A JP 2004306887A JP 2004306887 A JP2004306887 A JP 2004306887A JP 2006121411 A5 JP2006121411 A5 JP 2006121411A5
Authority
JP
Japan
Prior art keywords
vibrating piece
piezoelectric
piezoelectric vibrating
long groove
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004306887A
Other languages
English (en)
Japanese (ja)
Other versions
JP4591035B2 (ja
JP2006121411A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004306887A priority Critical patent/JP4591035B2/ja
Priority claimed from JP2004306887A external-priority patent/JP4591035B2/ja
Publication of JP2006121411A publication Critical patent/JP2006121411A/ja
Publication of JP2006121411A5 publication Critical patent/JP2006121411A5/ja
Application granted granted Critical
Publication of JP4591035B2 publication Critical patent/JP4591035B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004306887A 2004-10-21 2004-10-21 圧電振動片ならびに圧電デバイスの製造方法 Expired - Fee Related JP4591035B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004306887A JP4591035B2 (ja) 2004-10-21 2004-10-21 圧電振動片ならびに圧電デバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004306887A JP4591035B2 (ja) 2004-10-21 2004-10-21 圧電振動片ならびに圧電デバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2006121411A JP2006121411A (ja) 2006-05-11
JP2006121411A5 true JP2006121411A5 (https=) 2007-11-22
JP4591035B2 JP4591035B2 (ja) 2010-12-01

Family

ID=36538882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004306887A Expired - Fee Related JP4591035B2 (ja) 2004-10-21 2004-10-21 圧電振動片ならびに圧電デバイスの製造方法

Country Status (1)

Country Link
JP (1) JP4591035B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4525623B2 (ja) 2006-03-23 2010-08-18 エプソントヨコム株式会社 圧電振動片の製造方法
JP4863901B2 (ja) * 2007-02-17 2012-01-25 セイコーインスツル株式会社 圧電振動片の製造方法
JP5045892B2 (ja) * 2007-03-20 2012-10-10 セイコーエプソン株式会社 圧電振動片及びその製造方法
JP2010193133A (ja) 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP5499852B2 (ja) 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP6488709B2 (ja) 2015-01-13 2019-03-27 セイコーエプソン株式会社 振動素子の製造方法、振動素子、電子デバイス、電子機器、および移動体
JP7026444B2 (ja) * 2017-03-06 2022-02-28 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法
JP7060073B2 (ja) * 2020-12-23 2022-04-26 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08242134A (ja) * 1995-03-06 1996-09-17 Meidensha Corp 水晶振動子の製造方法
JPH1140514A (ja) * 1997-07-23 1999-02-12 Sanyo Electric Co Ltd 半導体装置の製造方法
JP2002246866A (ja) * 2001-02-20 2002-08-30 Citizen Watch Co Ltd 表面実装型圧電デバイスとその製造方法
JP3767425B2 (ja) * 2001-06-13 2006-04-19 セイコーエプソン株式会社 圧電振動片及び圧電デバイス
JP3731540B2 (ja) * 2002-01-08 2006-01-05 セイコーエプソン株式会社 圧電振動片の製造方法
JP4492048B2 (ja) * 2003-06-23 2010-06-30 セイコーエプソン株式会社 振動片の製造方法、振動子、ジャイロセンサおよび電子機器

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