JP4591035B2 - 圧電振動片ならびに圧電デバイスの製造方法 - Google Patents

圧電振動片ならびに圧電デバイスの製造方法 Download PDF

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Publication number
JP4591035B2
JP4591035B2 JP2004306887A JP2004306887A JP4591035B2 JP 4591035 B2 JP4591035 B2 JP 4591035B2 JP 2004306887 A JP2004306887 A JP 2004306887A JP 2004306887 A JP2004306887 A JP 2004306887A JP 4591035 B2 JP4591035 B2 JP 4591035B2
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Prior art keywords
vibrating piece
piezoelectric
piezoelectric vibrating
manufacturing
base
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Expired - Fee Related
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JP2004306887A
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Japanese (ja)
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JP2006121411A5 (https=
JP2006121411A (ja
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正幸 菊島
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Seiko Epson Corp
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Seiko Epson Corp
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2004306887A 2004-10-21 2004-10-21 圧電振動片ならびに圧電デバイスの製造方法 Expired - Fee Related JP4591035B2 (ja)

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JP2004306887A JP4591035B2 (ja) 2004-10-21 2004-10-21 圧電振動片ならびに圧電デバイスの製造方法

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JP2004306887A JP4591035B2 (ja) 2004-10-21 2004-10-21 圧電振動片ならびに圧電デバイスの製造方法

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JP2006121411A JP2006121411A (ja) 2006-05-11
JP2006121411A5 JP2006121411A5 (https=) 2007-11-22
JP4591035B2 true JP4591035B2 (ja) 2010-12-01

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4525623B2 (ja) 2006-03-23 2010-08-18 エプソントヨコム株式会社 圧電振動片の製造方法
JP4863901B2 (ja) * 2007-02-17 2012-01-25 セイコーインスツル株式会社 圧電振動片の製造方法
JP5045892B2 (ja) * 2007-03-20 2012-10-10 セイコーエプソン株式会社 圧電振動片及びその製造方法
JP2010193133A (ja) 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP5499852B2 (ja) 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP6488709B2 (ja) 2015-01-13 2019-03-27 セイコーエプソン株式会社 振動素子の製造方法、振動素子、電子デバイス、電子機器、および移動体
JP7026444B2 (ja) * 2017-03-06 2022-02-28 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片の製造方法
JP7060073B2 (ja) * 2020-12-23 2022-04-26 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08242134A (ja) * 1995-03-06 1996-09-17 Meidensha Corp 水晶振動子の製造方法
JPH1140514A (ja) * 1997-07-23 1999-02-12 Sanyo Electric Co Ltd 半導体装置の製造方法
JP2002246866A (ja) * 2001-02-20 2002-08-30 Citizen Watch Co Ltd 表面実装型圧電デバイスとその製造方法
JP3767425B2 (ja) * 2001-06-13 2006-04-19 セイコーエプソン株式会社 圧電振動片及び圧電デバイス
JP3731540B2 (ja) * 2002-01-08 2006-01-05 セイコーエプソン株式会社 圧電振動片の製造方法
JP4492048B2 (ja) * 2003-06-23 2010-06-30 セイコーエプソン株式会社 振動片の製造方法、振動子、ジャイロセンサおよび電子機器

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