JP5170405B2 - 圧電振動子の製造方法 - Google Patents
圧電振動子の製造方法 Download PDFInfo
- Publication number
- JP5170405B2 JP5170405B2 JP2008077995A JP2008077995A JP5170405B2 JP 5170405 B2 JP5170405 B2 JP 5170405B2 JP 2008077995 A JP2008077995 A JP 2008077995A JP 2008077995 A JP2008077995 A JP 2008077995A JP 5170405 B2 JP5170405 B2 JP 5170405B2
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- package
- piezoelectric
- piezoelectric vibrator
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 238000000034 method Methods 0.000 title claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 50
- 239000002184 metal Substances 0.000 claims description 50
- 230000005284 excitation Effects 0.000 claims description 31
- 238000010884 ion-beam technique Methods 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 13
- 238000000605 extraction Methods 0.000 description 5
- 239000007769 metal material Substances 0.000 description 4
- 238000005219 brazing Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 244000273256 Phragmites communis Species 0.000 description 2
- 235000014676 Phragmites communis Nutrition 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- -1 Argon ions Chemical class 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008077995A JP5170405B2 (ja) | 2008-03-25 | 2008-03-25 | 圧電振動子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008077995A JP5170405B2 (ja) | 2008-03-25 | 2008-03-25 | 圧電振動子の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012285331A Division JP5494994B2 (ja) | 2012-12-27 | 2012-12-27 | 振動子の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009232376A JP2009232376A (ja) | 2009-10-08 |
| JP2009232376A5 JP2009232376A5 (https=) | 2011-05-06 |
| JP5170405B2 true JP5170405B2 (ja) | 2013-03-27 |
Family
ID=41247222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008077995A Expired - Fee Related JP5170405B2 (ja) | 2008-03-25 | 2008-03-25 | 圧電振動子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5170405B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018079181A1 (ja) * | 2016-10-31 | 2018-05-03 | 株式会社大真空 | 圧電振動デバイスの周波数調整方法 |
| US11563413B2 (en) | 2016-12-22 | 2023-01-24 | Daishinku Corporation | Tuning fork-type vibrating reed, tuning fork-type vibrator and manufacturing method therefor |
| JP7452039B2 (ja) | 2020-01-30 | 2024-03-19 | セイコーエプソン株式会社 | 振動素子、振動デバイス、電子機器および移動体 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03262310A (ja) * | 1990-03-13 | 1991-11-22 | Seiko Epson Corp | 圧電振動子の周波数調整方法 |
| JP3541682B2 (ja) * | 1997-07-29 | 2004-07-14 | セイコーエプソン株式会社 | 圧電振動子 |
| JP3937722B2 (ja) * | 2000-12-04 | 2007-06-27 | セイコーエプソン株式会社 | 圧電デバイス |
| JP2002353766A (ja) * | 2001-03-19 | 2002-12-06 | Seiko Epson Corp | 圧電デバイス |
| JP4039230B2 (ja) * | 2002-12-19 | 2008-01-30 | 株式会社大真空 | 音叉型振動子の発振周波数調整方法、及びその方法によって発振周波数が調整された音叉型振動子 |
| JP4812014B2 (ja) * | 2006-07-12 | 2011-11-09 | セイコーインスツル株式会社 | 圧電振動片及び圧電振動片の製造方法、圧電振動子、並びに、圧電振動子を備える発振器、電子機器、及び電波時計 |
-
2008
- 2008-03-25 JP JP2008077995A patent/JP5170405B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009232376A (ja) | 2009-10-08 |
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