JP2009188258A - 3次元フォトニック結晶発光素子 - Google Patents
3次元フォトニック結晶発光素子 Download PDFInfo
- Publication number
- JP2009188258A JP2009188258A JP2008027872A JP2008027872A JP2009188258A JP 2009188258 A JP2009188258 A JP 2009188258A JP 2008027872 A JP2008027872 A JP 2008027872A JP 2008027872 A JP2008027872 A JP 2008027872A JP 2009188258 A JP2009188258 A JP 2009188258A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- photonic crystal
- dimensional photonic
- emitting element
- type semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004038 photonic crystal Substances 0.000 title claims abstract description 97
- 239000004065 semiconductor Substances 0.000 claims abstract description 52
- 239000004020 conductor Substances 0.000 claims abstract description 31
- 230000007547 defect Effects 0.000 claims abstract description 25
- 238000005253 cladding Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims description 11
- 238000010030 laminating Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 10
- 238000002347 injection Methods 0.000 abstract description 10
- 239000007924 injection Substances 0.000 abstract description 10
- 230000003287 optical effect Effects 0.000 abstract description 4
- 239000000243 solution Substances 0.000 abstract 1
- 230000004048 modification Effects 0.000 description 14
- 238000012986 modification Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 6
- 230000000737 periodic effect Effects 0.000 description 6
- 229910010413 TiO 2 Inorganic materials 0.000 description 5
- 239000000969 carrier Substances 0.000 description 5
- 230000002269 spontaneous effect Effects 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1225—Basic optical elements, e.g. light-guiding paths comprising photonic band-gap structures or photonic lattices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0083—Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/11—Comprising a photonic bandgap structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
- H01S5/2018—Optical confinement, e.g. absorbing-, reflecting- or waveguide-layers
- H01S5/2027—Reflecting region or layer, parallel to the active layer, e.g. to modify propagation of the mode in the laser or to influence transverse modes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
- H01S5/32341—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Lasers (AREA)
Abstract
【解決手段】3次元フォトニック結晶発光素子100は、3次元フォトニック結晶101中に共振器を形成する欠陥部を有し、該3次元フォトニック結晶において、N型半導体により形成されたNクラッド層103と、共振器の内部に配置された活性層104と、P型半導体により形成されたPクラッド層105と、トンネル接合層106と、第1のN型導電体により形成された第1のN導電層107とがこの順番で配置されている。第1のN型導電体の電気伝導度を、P型半導体の電気伝導度よりも高くする。
【選択図】図1
Description
図4に示す発光素子100Aでは、N導電層107の外側にさらに3次元フォトニック結晶(以下、この3次元フォトニック結晶層を誘電体層112とする)を積層することによって、十分な光閉じ込め作用を実現している。すなわち、発光素子100Aでは、N導電層107に対してトンネル接合層106とは反対側に誘電体層112を有する。
図1に示す発光素子100では、活性層104を点欠陥部にのみ設け、点欠陥部以外のPクラッド層105とNクラッド層103の間には絶縁部109を配置した。しかし、図5に示す発光素子100Bのように、点欠陥部以外の部分も活性層104としてもよい。
図6に示す発光素子100Cのように、絶縁部109をPクラッド層105に設けることで、電流狭窄領域を形成してもよい。P型半導体の方がN型半導体よりもキャリア移動度が低いため、Pクラッド層105に電流狭窄領域を形成する方が効果的である。
図1に示す発光素子100では、活性層104を点欠陥部としたが、必ずしも点欠陥部である必要はなく、図7に示す発光素子100Dのように、線欠陥部であってもよい。
図1に示す発光素子100の説明では、該発光素子(レーザ素子)100に、共振により誘導放出を生じさせてレーザ発振をさせる場合について説明したが、発光素子100を必ずしもレーザ素子とする必要はない。例えば、波長の広がりが小さい高効率な共振器型LEDとして用いてもよい。この場合、図8に示す発光素子100Eのように、共振器(活性層104)で発生した光は、線欠陥導波路113によって外部に取り出すことができる。なお、共振器(活性層104)で発生した光を線欠陥導波路によって外部に取り出す構成は、レーザ素子にも同様に適用することができる。
101,301 3次元フォトニック結晶
102,202 N型電極
103,203 Nクラッド層
104 活性層
105 Pクラッド層
106,306 トンネル接合層
107 N導電層
108 N型電極
109 絶縁部
110 トンネル接合層の一部を形成するP型半導体層
111 トンネル接合層の一部を形成するN型導電体層
112 誘電体層
113 線欠陥導波路
214 N導電層
401 周期構造
402 犠牲層
403 活性層
404 絶縁部
Claims (10)
- 3次元フォトニック結晶を用いた発光素子であって、
該3次元フォトニック結晶中に共振器を形成する欠陥部を有し、
該3次元フォトニック結晶において、N型半導体により形成されたNクラッド層と、前記共振器の内部に配置された活性層と、P型半導体により形成されたPクラッド層と、トンネル接合層と、第1のN型導電体により形成された第1のN導電層とがこの順番で配置されており、
前記第1のN型導電体の電気伝導度が、前記P型半導体の電気伝導度よりも高いことを特徴とする3次元フォトニック結晶発光素子。 - 前記Pクラッド層の厚さが、前記第1のN導電層の厚さよりも小さいことを特徴とする請求項1に記載の3次元フォトニック結晶発光素子。
- 前記3次元フォトニック結晶は、前記第1のN導電層に対して前記トンネル接合層とは反対側に誘電体層を有することを特徴とする請求項1又は2に記載の3次元フォトニック結晶発光素子。
- 前記3次元フォトニック結晶は、前記Nクラッド層に対して前記活性層とは反対側に、前記N型半導体よりも電気伝導度が高い第2のN型導電体により形成される第2のN導電層を有することを特徴とする請求項1から3のいずれか1つに記載の3次元フォトニック結晶発光素子。
- 前記第1のN型導電体と前記第2のN型導電体とが同じ材料であることを特徴とする請求項4に記載の3次元フォトニック結晶発光素子。
- 前記第1のN型導電体の電子親和力が、前記P型半導体の電子親和力よりも大きいことを特徴とする請求項1から5のいずれか1つに記載の3次元フォトニック結晶発光素子。
- 前記3次元フォトニック結晶は、
それぞれ第1の方向に延びる複数の第1の構造体が互いに間隔をあけて、前記第1の方向に直交する第2の方向に周期的に配置された第1層及び第3層と、それぞれ前記第2の方向に延びる複数の第2の構造体が互いに間隔をあけて前記第1の方向に周期的に配置された第2層及び第4層とが、前記各層に平行な面内において第3の構造体が離散的に配置された少なくとも1つの層を含む付加層を間に挟んで前記第1層から前記第4層の順に積層されて構成され、
前記第1層に含まれる前記第1の構造体と前記第3層に含まれる前記第1の構造体とが、前記第2の方向において半周期ずれて配置され、かつ前記第2層に含まれる前記第2の構造体と前記第4層に含まれる前記第2の構造体とが前記第1の方向において半周期ずれて配置されており、
前記第3の構造体は、前記第1の構造体と前記第2の構造体とが立体的に交差する位置に配置されていることを特徴とする請求項1から6のいずれか1つに記載の3次元フォトニック結晶発光素子。 - 前記トンネル接合層が前記付加層に含まれていることを特徴とする請求項7に記載の3次元フォトニック結晶発光素子。
- 前記トンネル接合層における前記第3の構造体の断面積が、前記トンネル接合層以外の前記付加層における前記第3の構造体の断面積よりも大きいことを特徴とする請求項8に記載の3次元フォトニック結晶発光素子。
- 該発光素子は、レーザ素子であることを特徴とする請求項1から9のいずれか1つに記載の3次元フォトニック結晶発光素子。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008027872A JP5322453B2 (ja) | 2008-02-07 | 2008-02-07 | 3次元フォトニック結晶発光素子 |
US12/366,888 US7796660B2 (en) | 2008-02-07 | 2009-02-06 | Three-dimensional photonic crystal light emitting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008027872A JP5322453B2 (ja) | 2008-02-07 | 2008-02-07 | 3次元フォトニック結晶発光素子 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009188258A true JP2009188258A (ja) | 2009-08-20 |
JP2009188258A5 JP2009188258A5 (ja) | 2010-06-03 |
JP5322453B2 JP5322453B2 (ja) | 2013-10-23 |
Family
ID=40938843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008027872A Expired - Fee Related JP5322453B2 (ja) | 2008-02-07 | 2008-02-07 | 3次元フォトニック結晶発光素子 |
Country Status (2)
Country | Link |
---|---|
US (1) | US7796660B2 (ja) |
JP (1) | JP5322453B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023029161A (ja) * | 2021-08-18 | 2023-03-03 | 業成科技(成都)有限公司 | フォトニック結晶面発光レーザ構造 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5188259B2 (ja) * | 2008-05-02 | 2013-04-24 | キヤノン株式会社 | 3次元フォトニック結晶を用いた発光素子 |
US8653500B1 (en) * | 2010-09-13 | 2014-02-18 | Sandia Corporation | Volume-scalable high-brightness three-dimensional visible light source |
WO2012082523A2 (en) * | 2010-12-16 | 2012-06-21 | California Institute Of Technology | Chemically-etched nanostructures and related devices |
JP5858659B2 (ja) | 2011-06-21 | 2016-02-10 | キヤノン株式会社 | フォトニック結晶面発光レーザおよびその製造方法 |
EA026069B1 (ru) * | 2012-06-15 | 2017-02-28 | Частное Научно-Производственное Унитарное Предприятие Цнирт (Частное Предприятие Цнирт) | Способ генерации электромагнитного излучения и объемный лазер на свободных электронах для его осуществления |
US9917228B2 (en) | 2014-07-07 | 2018-03-13 | Sony Corporation | Semiconductor optical device |
KR101696539B1 (ko) * | 2015-03-09 | 2017-01-16 | 한양대학교 산학협력단 | 박막, 그 제조 방법, 및 그 제조 장치 |
US9715158B1 (en) * | 2016-03-31 | 2017-07-25 | International Business Machines Corporation | One-dimensional photonic crystal with pillars having a layer structure |
CN109038219B (zh) * | 2018-09-07 | 2019-12-20 | 中国科学院半导体研究所 | 窄垂直远场发散角的隧道结光子晶体激光器 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001257425A (ja) * | 2000-03-13 | 2001-09-21 | Matsushita Electric Ind Co Ltd | 半導体レーザ素子及びその製造方法 |
JP2003198045A (ja) * | 2001-12-21 | 2003-07-11 | Xerox Corp | 半導体レーザ構造体 |
US20050082545A1 (en) * | 2003-10-21 | 2005-04-21 | Wierer Jonathan J.Jr. | Photonic crystal light emitting device |
JP2005292787A (ja) * | 2004-03-08 | 2005-10-20 | Canon Inc | 3次元周期構造及びそれを有する機能素子および発光素子 |
JP2006065273A (ja) * | 2004-02-23 | 2006-03-09 | Canon Inc | 3次元周期構造及びそれを有する機能素子 |
US20070194330A1 (en) * | 2006-02-23 | 2007-08-23 | Cree, Inc. | High efficiency LEDs with tunnel junctions |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5335240A (en) * | 1992-12-22 | 1994-08-02 | Iowa State University Research Foundation, Inc. | Periodic dielectric structure for production of photonic band gap and devices incorporating the same |
JP4603847B2 (ja) * | 2004-10-15 | 2010-12-22 | キヤノン株式会社 | 共振器および発光素子および波長変換素子 |
JP4677276B2 (ja) * | 2005-05-09 | 2011-04-27 | キヤノン株式会社 | 3次元フォトニック結晶の作製方法 |
-
2008
- 2008-02-07 JP JP2008027872A patent/JP5322453B2/ja not_active Expired - Fee Related
-
2009
- 2009-02-06 US US12/366,888 patent/US7796660B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001257425A (ja) * | 2000-03-13 | 2001-09-21 | Matsushita Electric Ind Co Ltd | 半導体レーザ素子及びその製造方法 |
JP2003198045A (ja) * | 2001-12-21 | 2003-07-11 | Xerox Corp | 半導体レーザ構造体 |
US20050082545A1 (en) * | 2003-10-21 | 2005-04-21 | Wierer Jonathan J.Jr. | Photonic crystal light emitting device |
JP2006065273A (ja) * | 2004-02-23 | 2006-03-09 | Canon Inc | 3次元周期構造及びそれを有する機能素子 |
JP2005292787A (ja) * | 2004-03-08 | 2005-10-20 | Canon Inc | 3次元周期構造及びそれを有する機能素子および発光素子 |
US20070194330A1 (en) * | 2006-02-23 | 2007-08-23 | Cree, Inc. | High efficiency LEDs with tunnel junctions |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023029161A (ja) * | 2021-08-18 | 2023-03-03 | 業成科技(成都)有限公司 | フォトニック結晶面発光レーザ構造 |
JP7258098B2 (ja) | 2021-08-18 | 2023-04-14 | 業成科技(成都)有限公司 | フォトニック結晶面発光レーザ構造 |
Also Published As
Publication number | Publication date |
---|---|
JP5322453B2 (ja) | 2013-10-23 |
US20090201960A1 (en) | 2009-08-13 |
US7796660B2 (en) | 2010-09-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5322453B2 (ja) | 3次元フォトニック結晶発光素子 | |
JP2008503072A5 (ja) | ||
JP2014170825A (ja) | 量子カスケード半導体レーザ | |
JP6926541B2 (ja) | 半導体レーザ | |
JP5288893B2 (ja) | 面発光レーザ | |
JP2010109223A (ja) | 面発光レーザ | |
JP6926542B2 (ja) | 半導体レーザ | |
US20070158662A1 (en) | Two-dimensional photonic crystal LED | |
JP5388469B2 (ja) | 発光素子 | |
JP2014022736A (ja) | 多重量子井戸構造及びそれを有する発光ダイオード | |
JP2007087994A (ja) | 面発光半導体レーザ素子 | |
JP6888338B2 (ja) | 半導体レーザ | |
JP4872096B2 (ja) | フォトニック結晶発光素子及び発光装置 | |
EP2748868B1 (en) | Optoelectronic semiconductor structure and method for transporting charge carriers | |
WO2015092849A1 (ja) | ゲルマニウム発光素子およびその製造方法 | |
JP2011134991A (ja) | フォトニック結晶発光素子 | |
JP7480987B2 (ja) | 量子カスケードレーザー素子 | |
JP2018152371A (ja) | 半導体レーザ | |
JP6603507B2 (ja) | 半導体レーザ素子 | |
JP5839886B2 (ja) | 2次元光素子アレイ | |
JP2008010816A (ja) | 半導体発光素子およびその製造方法 | |
JP2014209609A (ja) | 半導体レーザ | |
JP2011134944A (ja) | フォトニック結晶発光素子 | |
JP2005235830A (ja) | 半導体レーザ | |
JPH10223969A (ja) | 半導体レーザ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100414 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100414 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120120 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121113 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130115 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130409 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130530 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130618 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130716 |
|
LAPS | Cancellation because of no payment of annual fees |