JP2009182168A - 磁性薄膜および薄膜磁気デバイス - Google Patents
磁性薄膜および薄膜磁気デバイス Download PDFInfo
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- JP2009182168A JP2009182168A JP2008020193A JP2008020193A JP2009182168A JP 2009182168 A JP2009182168 A JP 2009182168A JP 2008020193 A JP2008020193 A JP 2008020193A JP 2008020193 A JP2008020193 A JP 2008020193A JP 2009182168 A JP2009182168 A JP 2009182168A
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- 239000010409 thin film Substances 0.000 title claims abstract description 134
- 239000010408 film Substances 0.000 claims abstract description 441
- 230000005415 magnetization Effects 0.000 claims abstract description 61
- 230000035699 permeability Effects 0.000 claims abstract description 58
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 123
- 239000000758 substrate Substances 0.000 claims description 13
- 229910017052 cobalt Inorganic materials 0.000 claims description 4
- 239000010941 cobalt Substances 0.000 claims description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 13
- 239000000203 mixture Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 230000014509 gene expression Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000007747 plating Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 229910019586 CoZrTa Inorganic materials 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000010949 copper Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910017086 Fe-M Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BDVUYXNQWZQBBN-UHFFFAOYSA-N [Co].[Zr].[Nb] Chemical compound [Co].[Zr].[Nb] BDVUYXNQWZQBBN-UHFFFAOYSA-N 0.000 description 1
- ZGWQKLYPIPNASE-UHFFFAOYSA-N [Co].[Zr].[Ta] Chemical compound [Co].[Zr].[Ta] ZGWQKLYPIPNASE-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/13—Amorphous metallic alloys, e.g. glassy metals
- H01F10/132—Amorphous metallic alloys, e.g. glassy metals containing cobalt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/13—Amorphous metallic alloys, e.g. glassy metals
- H01F10/138—Amorphous metallic alloys, e.g. glassy metals containing nanocrystallites, e.g. obtained by annealing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/14—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/26—Thin magnetic films, e.g. of one-domain structure characterised by the substrate or intermediate layers
- H01F10/265—Magnetic multilayers non exchange-coupled
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/042—Printed circuit coils by thin film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
Abstract
【解決手段】Fe系軟磁性膜122よりも透磁率の高い軟磁性膜であるCo系アモルファス軟磁性膜121上に、Fe系軟磁性膜122を形成する。これにより、Fe系軟磁性膜122における磁化反転が容易となり、磁性薄膜(下部磁性膜12Aや上部磁性膜12B)全体としての透磁率が向上する。また、Co系アモルファス軟磁性膜121とFe系軟磁性膜122との間の膜厚比を、適切な範囲内(0.005以上かつ0.030以下)に設定する。これにより、Co系アモルファス軟磁性膜121からFe系軟磁性膜122への応力の影響が低減し、応力の影響による磁性薄膜全体としての透磁率低下が抑えられる。
【選択図】図3
Description
続いて、図8(C)に示したように、下部絶縁膜13Aおよびコイル14の上に、前述した材料よりなる上部絶縁膜13Bを、図1および図2に示した所定のパターンに形成する。この上部磁性膜13Bの形成は、例えばスパッタ法およびフォトリソグラフィー法を用いて行う。
Claims (6)
- 基板上に積層された第1磁性膜と、
前記第1磁性膜上に積層された第2磁性膜と
を備え、
前記第1磁性膜は、コバルト(Co)系非晶質軟磁性膜により構成され、
前記第2磁性膜は、鉄(Fe)系軟磁性膜により構成され、
前記第1磁性膜と前記第2磁性膜との膜厚比(=第1磁性膜の膜厚/第2磁性膜の膜厚)が、0.005以上かつ0.030以下である
ことを特徴とする磁性薄膜。 - 前記第1磁性膜の保持力(Hc)が、1.1[Oe]以下である
ことを特徴とする請求項1に記載の磁性薄膜。 - 前記第1磁性膜における飽和磁化(Ms)と異方性磁界(Hk)との比(=Ms/Hk)、および前記第2磁性膜におけるMsとHkとの比が、互いに略等しい
ことを特徴とする請求項1または請求項2に記載の磁性薄膜。 - 薄膜コイルと、
前記薄膜コイルの延在面の少なくとも一方側に積層された磁性薄膜と
を備え、
前記磁性薄膜は、
前記薄膜コイルの延在面上に積層された第1磁性膜と、
前記第1磁性膜上に積層された第2磁性膜と
を有し、
前記第1磁性膜は、コバルト(Co)系非晶質軟磁性膜により構成され、
前記第2磁性膜は、鉄(Fe)系軟磁性膜により構成され、
前記第1磁性膜と前記第2磁性膜との膜厚比(=第1磁性膜の膜厚/第2磁性膜の膜厚)が、0.005以上かつ0.030以下である
ことを特徴とする薄膜磁気デバイス。 - 基板上に積層された第1磁性膜と、
前記第1磁性膜上に積層された第2磁性膜と
を備え、
前記第1磁性膜は、前記第2磁性膜よりも透磁率の高い軟磁性膜により構成され、
前記第2磁性膜は、鉄(Fe)系軟磁性膜により構成され、
前記第1磁性膜と前記第2磁性膜との膜厚比(=第1磁性膜の膜厚/第2磁性膜の膜厚)が、0.005以上かつ0.030以下である
ことを特徴とする磁性薄膜。 - 薄膜コイルと、
前記薄膜コイルの延在面の少なくとも一方側に積層された磁性薄膜と
を備え、
前記磁性薄膜は、
前記薄膜コイルの延在面上に積層された第1磁性膜と、
前記第1磁性膜上に積層された第2磁性膜と
を有し、
前記第1磁性膜は、前記第2磁性膜よりも透磁率の高い軟磁性膜により構成され、
前記第2磁性膜は、鉄(Fe)系軟磁性膜により構成され、
前記第1磁性膜と前記第2磁性膜との膜厚比(=第1磁性膜の膜厚/第2磁性膜の膜厚)が、0.005以上かつ0.030以下である
ことを特徴とする薄膜磁気デバイス。
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JP2008020193A JP4998292B2 (ja) | 2008-01-31 | 2008-01-31 | 磁性薄膜および薄膜磁気デバイス |
US12/320,179 US20090197062A1 (en) | 2008-01-31 | 2009-01-21 | Magnetic thin film and thin film magnetic device |
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JP2008020193A JP4998292B2 (ja) | 2008-01-31 | 2008-01-31 | 磁性薄膜および薄膜磁気デバイス |
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JP2009182168A true JP2009182168A (ja) | 2009-08-13 |
JP4998292B2 JP4998292B2 (ja) | 2012-08-15 |
Family
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US (1) | US20090197062A1 (ja) |
JP (1) | JP4998292B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101410840B1 (ko) | 2012-10-30 | 2014-07-01 | 한국전기연구원 | 복합 선재형 자성냉매물질의 제조방법 |
US9035723B2 (en) | 2011-12-19 | 2015-05-19 | Samsung Electro-Mechanics Co., Ltd. | Filter for removing noise |
JP2017048435A (ja) * | 2015-09-03 | 2017-03-09 | ローム株式会社 | 複合メッキ膜およびその製造方法、および磁気デバイス、パワーモジュール |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6122353B2 (ja) * | 2013-06-25 | 2017-04-26 | ルネサスエレクトロニクス株式会社 | 半導体パッケージ |
DE102014218043A1 (de) * | 2014-09-10 | 2016-03-10 | Würth Elektronik eiSos Gmbh & Co. KG | Magnetkern, induktives Bauteil und Verfahren zum Herstellen eines Magnetkerns |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02262308A (ja) * | 1989-03-31 | 1990-10-25 | Toshiba Lighting & Technol Corp | 平面インダクタ |
JPH0344811A (ja) * | 1989-07-12 | 1991-02-26 | Matsushita Electric Ind Co Ltd | 薄膜磁気ヘッド |
JPH0669032A (ja) * | 1992-08-17 | 1994-03-11 | Mitsubishi Electric Corp | 積層磁性薄膜およびそれを用いた磁気ヘッド |
JPH08335308A (ja) * | 1995-06-07 | 1996-12-17 | Sony Corp | 磁気記録媒体 |
JP2001077442A (ja) * | 1994-05-02 | 2001-03-23 | Matsushita Electric Ind Co Ltd | メモリー素子 |
WO2003096359A1 (fr) * | 2002-05-10 | 2003-11-20 | Japan Science And Technology Agency | Materiau magnetique doux a densite eleve de flux magnetique de saturation |
JP2004006619A (ja) * | 2002-01-16 | 2004-01-08 | Tdk Corp | 高周波用磁性薄膜、複合磁性薄膜およびそれを用いた磁気素子 |
JP2007073551A (ja) * | 2005-09-02 | 2007-03-22 | Gunma Univ | 磁性多層膜及びその製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6648990B2 (en) * | 2001-03-01 | 2003-11-18 | Hitachi Metals, Ltd. | Co-based magnetic alloy and magnetic members made of the same |
JP2002309353A (ja) * | 2001-04-13 | 2002-10-23 | Fujitsu Ltd | 軟磁性膜及びこれを用いる記録用の磁気ヘッド |
-
2008
- 2008-01-31 JP JP2008020193A patent/JP4998292B2/ja active Active
-
2009
- 2009-01-21 US US12/320,179 patent/US20090197062A1/en not_active Abandoned
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02262308A (ja) * | 1989-03-31 | 1990-10-25 | Toshiba Lighting & Technol Corp | 平面インダクタ |
JPH0344811A (ja) * | 1989-07-12 | 1991-02-26 | Matsushita Electric Ind Co Ltd | 薄膜磁気ヘッド |
JPH0669032A (ja) * | 1992-08-17 | 1994-03-11 | Mitsubishi Electric Corp | 積層磁性薄膜およびそれを用いた磁気ヘッド |
JP2001077442A (ja) * | 1994-05-02 | 2001-03-23 | Matsushita Electric Ind Co Ltd | メモリー素子 |
JPH08335308A (ja) * | 1995-06-07 | 1996-12-17 | Sony Corp | 磁気記録媒体 |
JP2004006619A (ja) * | 2002-01-16 | 2004-01-08 | Tdk Corp | 高周波用磁性薄膜、複合磁性薄膜およびそれを用いた磁気素子 |
WO2003096359A1 (fr) * | 2002-05-10 | 2003-11-20 | Japan Science And Technology Agency | Materiau magnetique doux a densite eleve de flux magnetique de saturation |
JP2007073551A (ja) * | 2005-09-02 | 2007-03-22 | Gunma Univ | 磁性多層膜及びその製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9035723B2 (en) | 2011-12-19 | 2015-05-19 | Samsung Electro-Mechanics Co., Ltd. | Filter for removing noise |
KR101410840B1 (ko) | 2012-10-30 | 2014-07-01 | 한국전기연구원 | 복합 선재형 자성냉매물질의 제조방법 |
JP2017048435A (ja) * | 2015-09-03 | 2017-03-09 | ローム株式会社 | 複合メッキ膜およびその製造方法、および磁気デバイス、パワーモジュール |
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US20090197062A1 (en) | 2009-08-06 |
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