JP2009137027A - 液体吐出ヘッド - Google Patents
液体吐出ヘッド Download PDFInfo
- Publication number
- JP2009137027A JP2009137027A JP2007312455A JP2007312455A JP2009137027A JP 2009137027 A JP2009137027 A JP 2009137027A JP 2007312455 A JP2007312455 A JP 2007312455A JP 2007312455 A JP2007312455 A JP 2007312455A JP 2009137027 A JP2009137027 A JP 2009137027A
- Authority
- JP
- Japan
- Prior art keywords
- element substrate
- liquid
- ink tank
- discharge head
- liquid discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 229920005989 resin Polymers 0.000 claims abstract description 39
- 239000011347 resin Substances 0.000 claims abstract description 39
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000000853 adhesive Substances 0.000 claims abstract description 20
- 239000012756 surface treatment agent Substances 0.000 claims abstract description 17
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 16
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 16
- 239000002243 precursor Substances 0.000 claims abstract description 15
- 238000004891 communication Methods 0.000 claims abstract description 7
- 238000007599 discharging Methods 0.000 claims abstract description 7
- 230000001070 adhesive effect Effects 0.000 claims description 18
- 229920001709 polysilazane Polymers 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 8
- 229920001955 polyphenylene ether Polymers 0.000 claims description 8
- 239000004793 Polystyrene Substances 0.000 claims description 4
- 229920002223 polystyrene Polymers 0.000 claims description 2
- 238000007639 printing Methods 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009429 electrical wiring Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- DHQJMKJYFOHOSY-UHFFFAOYSA-L disodium 4-amino-3-[[4-[4-[(2,4-diaminophenyl)diazenyl]-3-methylphenyl]-2-methylphenyl]diazenyl]-5-oxido-6-phenyldiazenyl-7-sulfonaphthalene-2-sulfonate Chemical compound [Na+].[Na+].Cc1cc(ccc1N=Nc1ccc(N)cc1N)-c1ccc(N=Nc2c(N)c3c(O)c(N=Nc4ccccc4)c(cc3cc2S([O-])(=O)=O)S([O-])(=O)=O)c(C)c1 DHQJMKJYFOHOSY-UHFFFAOYSA-L 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
【解決手段】本発明に係る液体吐出ヘッドは、液体を吐出する吐出口3、吐出口3から前記液体を吐出させるためのエネルギーを発生するエネルギー発生素子2及び吐出口に液体を供給するための供給口6を少なくとも備えたSi製素子基板1と、供給口6と連通する連通口8を有する樹脂製インクタンク7とを熱硬化型接着剤11により貼り合せて構成される液体吐出ヘッドにおいて、樹脂製インクタンク7の少なくともSi製素子基板を貼り付ける面にシリカ前駆体を含む表面処理剤を塗布して硬化させた無機膜14が形成されていることを特徴とする。
【選択図】図3
Description
液体を吐出する吐出口、該吐出口から前記液体を吐出させるためのエネルギーを発生するエネルギー発生素子及び前記吐出口に前記液体を供給するための供給口を少なくとも備えたSi製素子基板と、前記供給口と連通する連通口を有する樹脂製インクタンクとを熱硬化型接着剤により貼り合せて構成される液体吐出ヘッドにおいて、
前記樹脂製インクタンクの少なくともSi製素子基板を貼り付ける面にシリカ前駆体を含む表面処理剤を塗布し、硬化させてなる膜が形成されていることを特徴とする。
ポリシラザンを表1に記載される所定の膜厚になるように塗布し、前記の製造方法で液体吐出ヘッドを作成して、評価を行った。以下、図面を参照しながら説明する。
実施例1において樹脂製インクタンクの貼り合わせ面にポリシラザンを含む表面処理剤を塗布しなかったこと以外は同様の方法で液体吐出ヘッドを製造した。
実施例1及び比較例1で製造した三種類の液体吐出ヘッドにおけるSi製素子基板の変形量を評価した。その結果を表1に示す。変形量の測定は、顕微鏡による測長によって、図2(a)に示すように、Si製素子基板の端部における長さAと中央部における長さBの差により求めた。
2 エネルギー発生素子
3 吐出口
4 オリフィスプレート
5 流路
6 供給口
7 樹脂製インクタンク
8 連通口
9 周囲封止剤
10 リード封止剤
11 マウント接着剤
12 リード部
13 電気配線部材
14 無機膜
Claims (5)
- 液体を吐出する吐出口、該吐出口から前記液体を吐出させるためのエネルギーを発生するエネルギー発生素子及び前記吐出口に前記液体を供給するための供給口を少なくとも備えたSi製素子基板と、前記供給口と連通する連通口を有する樹脂製インクタンクとを熱硬化型接着剤により貼り合せて構成される液体吐出ヘッドにおいて、
前記樹脂製インクタンクの少なくともSi製素子基板を貼り付ける面にシリカ前駆体を含む表面処理剤を塗布し、硬化させてなる無機膜が形成されていることを特徴とする液体吐出ヘッド。 - 前記シリカ前駆体が、ポリシラザンであることを特徴とする請求項1に記載の液体吐出ヘッド。
- 前記シリカ前駆体を含む表面処理剤の硬化後の膜厚が、0.5μm以上2μm未満であることを特徴とする請求項2に記載の液体吐出ヘッド。
- 前記樹脂製インクタンクの材料が、ポリフェニレンエーテルとポリスチレンとから構成される変性樹脂であることを特徴とする請求項1乃至3のいずれかの請求項に記載の液体吐出ヘッド。
- 前記シリカ前駆体を含む表面処理剤を硬化する温度が、120℃以下であることを特徴とする請求項4に記載の液体吐出ヘッド。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007312455A JP2009137027A (ja) | 2007-12-03 | 2007-12-03 | 液体吐出ヘッド |
US12/325,565 US8246152B2 (en) | 2007-12-03 | 2008-12-01 | Liquid discharge head and its manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007312455A JP2009137027A (ja) | 2007-12-03 | 2007-12-03 | 液体吐出ヘッド |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009137027A true JP2009137027A (ja) | 2009-06-25 |
Family
ID=40675273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007312455A Pending JP2009137027A (ja) | 2007-12-03 | 2007-12-03 | 液体吐出ヘッド |
Country Status (2)
Country | Link |
---|---|
US (1) | US8246152B2 (ja) |
JP (1) | JP2009137027A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7980678B2 (en) * | 2007-12-04 | 2011-07-19 | Canon Kabushiki Kaisha | Ink jet recording head |
JP2010000700A (ja) * | 2008-06-20 | 2010-01-07 | Canon Inc | 記録ヘッドの製造方法および記録ヘッド |
JP5631054B2 (ja) | 2010-05-12 | 2014-11-26 | キヤノン株式会社 | 液体吐出ヘッドおよびその製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04132673A (ja) * | 1990-09-25 | 1992-05-06 | Tonen Corp | 被覆炭素材料 |
JPH09277539A (ja) * | 1996-04-12 | 1997-10-28 | Canon Inc | インクジェットプリントヘッド、その製造方法およびインクジェットプリント装置 |
JP2003059643A (ja) * | 2001-08-22 | 2003-02-28 | Dainippon Printing Co Ltd | エレクトロルミネッセント素子 |
JP2006114656A (ja) * | 2004-10-14 | 2006-04-27 | Seiko Epson Corp | 半導体装置、半導体装置の実装構造、及び半導体装置の実装方法 |
JP2007039681A (ja) * | 2005-07-08 | 2007-02-15 | Canon Inc | サーマルインクジェット用インク及びそれを用いたインクカートリッジ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5013383A (en) * | 1989-07-11 | 1991-05-07 | Hewlett-Packard Company | Epoxy adhesive for use with thermal ink-jet printers |
JP2005132102A (ja) * | 2003-10-09 | 2005-05-26 | Canon Inc | インクジェットヘッドおよび該ヘッドを備えるインクジェットプリント装置 |
JP2007168234A (ja) * | 2005-12-21 | 2007-07-05 | Canon Inc | 液体吐出ヘッド |
US8007069B2 (en) * | 2007-05-25 | 2011-08-30 | Canon Kabushiki Kaisha | Ink jet recording head |
US8087747B2 (en) * | 2007-07-10 | 2012-01-03 | Canon Kabushiki Kaisha | Ink jet recording head unit and production process thereof |
-
2007
- 2007-12-03 JP JP2007312455A patent/JP2009137027A/ja active Pending
-
2008
- 2008-12-01 US US12/325,565 patent/US8246152B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04132673A (ja) * | 1990-09-25 | 1992-05-06 | Tonen Corp | 被覆炭素材料 |
JPH09277539A (ja) * | 1996-04-12 | 1997-10-28 | Canon Inc | インクジェットプリントヘッド、その製造方法およびインクジェットプリント装置 |
JP2003059643A (ja) * | 2001-08-22 | 2003-02-28 | Dainippon Printing Co Ltd | エレクトロルミネッセント素子 |
JP2006114656A (ja) * | 2004-10-14 | 2006-04-27 | Seiko Epson Corp | 半導体装置、半導体装置の実装構造、及び半導体装置の実装方法 |
JP2007039681A (ja) * | 2005-07-08 | 2007-02-15 | Canon Inc | サーマルインクジェット用インク及びそれを用いたインクカートリッジ |
Also Published As
Publication number | Publication date |
---|---|
US20090141085A1 (en) | 2009-06-04 |
US8246152B2 (en) | 2012-08-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4987286B2 (ja) | インクジェットヘッド及びインクジェットヘッドの製造方法 | |
JP6247589B2 (ja) | 高密度印刷ヘッド中の印刷ヘッド構造を製造するための中間部のエポキシ接着剤を結合させるプロセス | |
US20070236542A1 (en) | Adhesive Compositions, Micro-Fluid Ejection Devices, and Methods for Attaching Micro-Fluid Ejection Heads | |
CN104097400A (zh) | 用于高密度压电打印头制造中打印头结构间隙粘结的液体环氧粘合剂的加工和应用 | |
JP2006257350A (ja) | 接着剤組成物、インクジェットヘッド及びインクジェットヘッドの製造方法 | |
JP2009137027A (ja) | 液体吐出ヘッド | |
JP4976739B2 (ja) | 記録ヘッド、およびその製造方法 | |
JP2009143139A (ja) | 液体吐出ヘッド | |
CN104228346B (zh) | 液体排出头 | |
JP5197175B2 (ja) | インクジェット記録ヘッドおよびその製造方法 | |
JP2006229124A (ja) | Icチップの接続方法および接続構造 | |
US20110239462A1 (en) | Method of manufacturing liquid discharging head | |
CN104875496A (zh) | 接合体、接合方法及制造装置、喷墨头单元及其记录装置 | |
JP6275019B2 (ja) | 2種類の接着剤を含む印刷ヘッド | |
JP6222985B2 (ja) | 液体吐出ヘッド、並びに、素子基板および液体吐出ヘッドの製造方法 | |
JP2006289719A (ja) | インクジェットヘッドの製造方法 | |
KR102188813B1 (ko) | 수성 잉크젯용 고밀도 압전 프린트헤드 제조에서 프린트헤드 구조체 사이 결합을 위한 수성 잉크와 상용 가능한 중간-단계 필름 접착제 | |
JP2005153530A (ja) | 流体エジェクタキャリッジ装置内に放熱するための流体エジェクタキャリッジアセンブリ及びその製造方法 | |
JP2005001181A (ja) | インクジェットヘッド及びインクジェットヘッド製造方法 | |
JP4646948B2 (ja) | インクジェット記録ヘッド | |
JP2007261170A (ja) | インクジェットヘッドおよびその製造方法 | |
JP2005186528A (ja) | 液体吐出ヘッドおよびその製造方法 | |
JP2006159831A (ja) | フレキシブル配線基板とその製造方法、およびインクジェット記録ヘッド | |
JP3071859U (ja) | ホットメルトインクジェット式印刷ヘッド | |
JP2011062883A (ja) | 液体吐出ヘッド |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100901 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120313 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120314 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120510 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121120 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130326 |