JP2009088509A5 - - Google Patents

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Publication number
JP2009088509A5
JP2009088509A5 JP2008240097A JP2008240097A JP2009088509A5 JP 2009088509 A5 JP2009088509 A5 JP 2009088509A5 JP 2008240097 A JP2008240097 A JP 2008240097A JP 2008240097 A JP2008240097 A JP 2008240097A JP 2009088509 A5 JP2009088509 A5 JP 2009088509A5
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JP
Japan
Prior art keywords
lithographic apparatus
substrate table
cleaning fluid
inlet
immersion
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JP2008240097A
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English (en)
Japanese (ja)
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JP2009088509A (ja
JP4939504B2 (ja
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Publication of JP2009088509A publication Critical patent/JP2009088509A/ja
Publication of JP2009088509A5 publication Critical patent/JP2009088509A5/ja
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Publication of JP4939504B2 publication Critical patent/JP4939504B2/ja
Expired - Fee Related legal-status Critical Current
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JP2008240097A 2007-09-27 2008-09-19 リソグラフィ装置およびリソグラフィ装置を清浄する方法 Expired - Fee Related JP4939504B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US96038507P 2007-09-27 2007-09-27
US60/960,385 2007-09-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012038121A Division JP5346100B2 (ja) 2007-09-27 2012-02-24 リソグラフィ装置およびリソグラフィ装置を清浄する方法

Publications (3)

Publication Number Publication Date
JP2009088509A JP2009088509A (ja) 2009-04-23
JP2009088509A5 true JP2009088509A5 (https=) 2010-11-04
JP4939504B2 JP4939504B2 (ja) 2012-05-30

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ID=40517262

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008240097A Expired - Fee Related JP4939504B2 (ja) 2007-09-27 2008-09-19 リソグラフィ装置およびリソグラフィ装置を清浄する方法
JP2012038121A Expired - Fee Related JP5346100B2 (ja) 2007-09-27 2012-02-24 リソグラフィ装置およびリソグラフィ装置を清浄する方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012038121A Expired - Fee Related JP5346100B2 (ja) 2007-09-27 2012-02-24 リソグラフィ装置およびリソグラフィ装置を清浄する方法

Country Status (6)

Country Link
US (1) US8638421B2 (https=)
JP (2) JP4939504B2 (https=)
KR (2) KR101005511B1 (https=)
CN (2) CN101398632B (https=)
NL (1) NL1035942A1 (https=)
TW (1) TWI426961B (https=)

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