JP2009032793A - イオン注入方法および半導体装置の製造方法 - Google Patents

イオン注入方法および半導体装置の製造方法 Download PDF

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Publication number
JP2009032793A
JP2009032793A JP2007193354A JP2007193354A JP2009032793A JP 2009032793 A JP2009032793 A JP 2009032793A JP 2007193354 A JP2007193354 A JP 2007193354A JP 2007193354 A JP2007193354 A JP 2007193354A JP 2009032793 A JP2009032793 A JP 2009032793A
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Japan
Prior art keywords
ion beam
semiconductor substrate
well
straight line
support
Prior art date
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Pending
Application number
JP2007193354A
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English (en)
Japanese (ja)
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JP2009032793A5 (https=
Inventor
Hideki Okai
秀樹 岡井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
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Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Priority to JP2007193354A priority Critical patent/JP2009032793A/ja
Priority to KR1020080069874A priority patent/KR20090012090A/ko
Priority to TW097127578A priority patent/TW200913021A/zh
Priority to US12/180,182 priority patent/US7785994B2/en
Publication of JP2009032793A publication Critical patent/JP2009032793A/ja
Publication of JP2009032793A5 publication Critical patent/JP2009032793A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/222—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping characterised by the angle between the ion beam and the crystal planes or the main crystal surface
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping
    • H10P30/22—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping using masks
    • H10P30/221—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping using masks characterised by the angle between the ion beam and the mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment
    • H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/014—Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations
    • H10W10/0148—Manufacture or treatment of isolation regions comprising dielectric materials using trench refilling with dielectric materials, e.g. shallow trench isolations comprising introducing impurities in side walls or bottom walls of trenches, e.g. for forming channel stoppers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10—Isolation regions comprising dielectric materials
    • H10W10/17—Isolation regions comprising dielectric materials formed using trench refilling with dielectric materials, e.g. shallow trench isolations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20207—Tilt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H01J2237/24514—Beam diagnostics including control of the parameter or property diagnosed
    • H01J2237/24528—Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0188—Manufacturing their isolation regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H10D84/0191—Manufacturing their doped wells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

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  • Element Separation (AREA)
  • Semiconductor Memories (AREA)
  • Physical Vapour Deposition (AREA)
JP2007193354A 2007-07-25 2007-07-25 イオン注入方法および半導体装置の製造方法 Pending JP2009032793A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007193354A JP2009032793A (ja) 2007-07-25 2007-07-25 イオン注入方法および半導体装置の製造方法
KR1020080069874A KR20090012090A (ko) 2007-07-25 2008-07-18 이온 주입 방법 및 반도체 장치 제조 방법
TW097127578A TW200913021A (en) 2007-07-25 2008-07-21 Ion implantation method and semiconductor device manufacturing method
US12/180,182 US7785994B2 (en) 2007-07-25 2008-07-25 Ion implantation method and semiconductor device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007193354A JP2009032793A (ja) 2007-07-25 2007-07-25 イオン注入方法および半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2009032793A true JP2009032793A (ja) 2009-02-12
JP2009032793A5 JP2009032793A5 (https=) 2010-02-18

Family

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JP2007193354A Pending JP2009032793A (ja) 2007-07-25 2007-07-25 イオン注入方法および半導体装置の製造方法

Country Status (4)

Country Link
US (1) US7785994B2 (https=)
JP (1) JP2009032793A (https=)
KR (1) KR20090012090A (https=)
TW (1) TW200913021A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8765583B2 (en) * 2011-02-17 2014-07-01 Varian Semiconductor Equipment Associates, Inc. Angled multi-step masking for patterned implantation
US20120302049A1 (en) * 2011-05-24 2012-11-29 Nanya Technology Corporation Method for implanting wafer
US8697559B2 (en) 2011-07-07 2014-04-15 Varian Semiconductor Equipment Associates, Inc. Use of ion beam tails to manufacture a workpiece
US9584012B2 (en) * 2015-02-14 2017-02-28 Skyworks Solutions, Inc. Quick-start high-voltage boost
US20220406774A1 (en) * 2021-06-18 2022-12-22 Taiwan Semiconductor Manufacturing Co., Ltd. Doped well for semiconductor devices

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0456055A (ja) * 1990-06-21 1992-02-24 Shimadzu Corp イオン注入装置
JP2000223438A (ja) * 1999-02-03 2000-08-11 Seiko Epson Corp 半導体ウエハへのイオン注入方法
JP2002026274A (ja) * 2000-05-01 2002-01-25 Mitsubishi Electric Corp 半導体装置の製造方法
JP2003060073A (ja) * 2001-08-10 2003-02-28 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP2005183458A (ja) * 2003-12-16 2005-07-07 Matsushita Electric Ind Co Ltd 半導体装置の製造方法及びその製造装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278557A (en) * 1991-02-19 1994-01-11 Key Tronic Corporation Cursor movement control key and electronic computer keyboard for computers having a video display
US5355148A (en) * 1993-01-14 1994-10-11 Ast Research, Inc. Fingerpoint mouse
US5790102A (en) * 1996-03-28 1998-08-04 Nassimi; Shary Pressure sensitive computer mouse
US6040208A (en) * 1997-08-29 2000-03-21 Micron Technology, Inc. Angled ion implantation for selective doping
US6335534B1 (en) * 1998-04-17 2002-01-01 Kabushiki Kaisha Toshiba Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes
JP4030198B2 (ja) * 1998-08-11 2008-01-09 株式会社ルネサステクノロジ 半導体集積回路装置の製造方法
US6319762B1 (en) * 2000-06-19 2001-11-20 Tsmc-Acer Semiconductor Manufacturing Corp. Method for fabricating poly-spacers
US7642529B2 (en) * 2006-09-29 2010-01-05 Varian Semiconductor Equipment Associates, Inc. Method of determining angle misalignment in beam line ion implanters

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0456055A (ja) * 1990-06-21 1992-02-24 Shimadzu Corp イオン注入装置
JP2000223438A (ja) * 1999-02-03 2000-08-11 Seiko Epson Corp 半導体ウエハへのイオン注入方法
JP2002026274A (ja) * 2000-05-01 2002-01-25 Mitsubishi Electric Corp 半導体装置の製造方法
JP2003060073A (ja) * 2001-08-10 2003-02-28 Mitsubishi Electric Corp 半導体装置およびその製造方法
JP2005183458A (ja) * 2003-12-16 2005-07-07 Matsushita Electric Ind Co Ltd 半導体装置の製造方法及びその製造装置

Also Published As

Publication number Publication date
TW200913021A (en) 2009-03-16
US20090029535A1 (en) 2009-01-29
US7785994B2 (en) 2010-08-31
KR20090012090A (ko) 2009-02-02

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