JP2009004778A5 - - Google Patents

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Publication number
JP2009004778A5
JP2009004778A5 JP2008153992A JP2008153992A JP2009004778A5 JP 2009004778 A5 JP2009004778 A5 JP 2009004778A5 JP 2008153992 A JP2008153992 A JP 2008153992A JP 2008153992 A JP2008153992 A JP 2008153992A JP 2009004778 A5 JP2009004778 A5 JP 2009004778A5
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JP
Japan
Prior art keywords
substrate
directing
particle beam
ion
mask
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JP2008153992A
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English (en)
Japanese (ja)
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JP2009004778A (ja
JP5112181B2 (ja
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Priority claimed from US11/766,680 external-priority patent/US8303833B2/en
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Publication of JP2009004778A publication Critical patent/JP2009004778A/ja
Publication of JP2009004778A5 publication Critical patent/JP2009004778A5/ja
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Publication of JP5112181B2 publication Critical patent/JP5112181B2/ja
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JP2008153992A 2007-06-21 2008-06-12 高解像度プラズマ・エッチング Active JP5112181B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/766,680 2007-06-21
US11/766,680 US8303833B2 (en) 2007-06-21 2007-06-21 High resolution plasma etch

Publications (3)

Publication Number Publication Date
JP2009004778A JP2009004778A (ja) 2009-01-08
JP2009004778A5 true JP2009004778A5 (enExample) 2011-07-21
JP5112181B2 JP5112181B2 (ja) 2013-01-09

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JP2008153992A Active JP5112181B2 (ja) 2007-06-21 2008-06-12 高解像度プラズマ・エッチング

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US (2) US8303833B2 (enExample)
EP (1) EP2006249A3 (enExample)
JP (1) JP5112181B2 (enExample)

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