JP2008541989A5 - - Google Patents

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Publication number
JP2008541989A5
JP2008541989A5 JP2008515792A JP2008515792A JP2008541989A5 JP 2008541989 A5 JP2008541989 A5 JP 2008541989A5 JP 2008515792 A JP2008515792 A JP 2008515792A JP 2008515792 A JP2008515792 A JP 2008515792A JP 2008541989 A5 JP2008541989 A5 JP 2008541989A5
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JP
Japan
Prior art keywords
inspecting
analyzing
light reflected
object based
generating light
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JP2008515792A
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English (en)
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JP5020945B2 (ja
JP2008541989A (ja
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Priority claimed from PCT/US2006/021629 external-priority patent/WO2006133030A2/en
Publication of JP2008541989A publication Critical patent/JP2008541989A/ja
Publication of JP2008541989A5 publication Critical patent/JP2008541989A5/ja
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Publication of JP5020945B2 publication Critical patent/JP5020945B2/ja
Expired - Fee Related legal-status Critical Current
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Claims (8)

  1. 対象物を検査する装置であって、
    光を生成する手段と、
    偏光、空間、位置又は角度に基づいて対象物から反射した光を分析する手段とを具えた装置。
  2. 対象物を検査する装置であって、
    光を生成する手段と、
    偏光に基づいて対象物から反射した光を分析する手段とを具えた装置。
  3. 対象物を検査する装置であって、
    光を生成する手段と、
    空間に基づいて対象物から反射した光を分析する手段とを具えた装置。
  4. 対象物を検査する装置であって、
    光を生成する手段と、
    角度に基づいて対象物から反射した光を分析する手段とを具えた装置。
  5. 対象物を検査する方法であって、
    光を生成する手段を具え、
    偏光、空間、位置又は角度に基づいて対象物から反射した光を分析する工程を有する方法。
  6. 対象物を検査する方法であって、
    光を生成する手段を具え、
    偏光に基づいて対象物から反射した光を分析する工程を有する方法。
  7. 対象物を検査する方法であって、
    光を生成する手段を具え、
    空間に基づいて対象物から反射した光を分析する工程を有する方法。
  8. 対象物を検査する方法であって、
    光を生成する手段を具え、
    角度に基づいて対象物から反射した光を分析する工程を有する方法。
JP2008515792A 2005-06-06 2006-06-05 スペクトル的に分解した帯域幅を用いるｏｃｔ Expired - Fee Related JP5020945B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US68793005P 2005-06-06 2005-06-06
US60/687,930 2005-06-06
PCT/US2006/021629 WO2006133030A2 (en) 2005-06-06 2006-06-05 Oct using spectrally resolved bandwidth

Publications (3)

Publication Number Publication Date
JP2008541989A JP2008541989A (ja) 2008-11-27
JP2008541989A5 true JP2008541989A5 (ja) 2009-07-23
JP5020945B2 JP5020945B2 (ja) 2012-09-05

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JP2008515792A Expired - Fee Related JP5020945B2 (ja) 2005-06-06 2006-06-05 スペクトル的に分解した帯域幅を用いるｏｃｔ

Country Status (8)

Country Link
US (3) US7783337B2 (ja)
EP (1) EP1887946A2 (ja)
JP (1) JP5020945B2 (ja)
KR (1) KR20080043735A (ja)
CN (1) CN101247753A (ja)
CA (1) CA2610086A1 (ja)
IL (1) IL187251A0 (ja)
WO (1) WO2006133030A2 (ja)

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