JP2008532284A - 複数の注入口を有する化学気相成長リアクタ - Google Patents
複数の注入口を有する化学気相成長リアクタ Download PDFInfo
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- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 64
- 239000012495 reaction gas Substances 0.000 claims abstract description 60
- 239000007789 gas Substances 0.000 claims description 148
- 238000000034 method Methods 0.000 claims description 36
- 239000000376 reactant Substances 0.000 claims description 35
- 230000006735 deficit Effects 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 156
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 46
- 229910021529 ammonia Inorganic materials 0.000 description 23
- 238000006243 chemical reaction Methods 0.000 description 21
- 230000008569 process Effects 0.000 description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 125000000217 alkyl group Chemical group 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 150000004767 nitrides Chemical class 0.000 description 7
- 239000012159 carrier gas Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 238000013461 design Methods 0.000 description 5
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- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 229910003465 moissanite Inorganic materials 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000007792 addition Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
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- 230000007812 deficiency Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000007726 management method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 235000008730 Ficus carica Nutrition 0.000 description 1
- 244000025361 Ficus carica Species 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
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- 239000007795 chemical reaction product Substances 0.000 description 1
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- 150000002431 hydrogen Chemical class 0.000 description 1
- -1 hydrogen compound Chemical class 0.000 description 1
- 150000002483 hydrogen compounds Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
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- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
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- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
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- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/45589—Movable means, e.g. fans
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
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Abstract
Description
Claims (23)
- 化学気相成長リアクタであって、
前記リアクタのチャンバ内において反応ガスを層流にするのを促進するように、前記チャンバと協働するウエハキャリヤと、
前記チャンバの中央部分の近傍に配置された注入口と、
減損を減少させるように構成された複数のインジェクタと、
を備えるリアクタ。 - 前記インジェクタは、III族用インジェクタを含む請求項1に記載の化学気相成長リアクタ。
- 前記インジェクタは、III族用インジェクタを含み、さらにIII族用インジェクタの中央部分の近傍に配置されたV族用注入口を含む、請求項1に記載の化学気相成長リアクタ。
- 前記インジェクタは、複数のゾーンを画定し、各ゾーンの前記インジェクタは、専用の流量制御装置を有する、請求項1に記載の化学気相成長リアクタ。
- 前記インジェクタは、3つのゾーンを画定し、各ゾーンの前記インジェクタは、専用の流量制御装置を有する、請求項1に記載の化学気相成長リアクタ。
- 各ゾーンを通る流れは、別々に制御可能である、請求項1に記載の化学気相成長リアクタ。
- 各インジェクタを通る流れは、別々に制御可能である、請求項1に記載の化学気相成長リアクタ。
- 各ゾーンを通る反応物質の濃度は、別々に制御可能である、請求項1に記載の化学気相成長リアクタ。
- 各インジェクタを通る反応物質の濃度は、別々に制御可能である、請求項1に記載の化学気相成長リアクタ。
- 前記排気管は、前記ウエハキャリヤより上方にある、請求項1に記載の化学気相成長リアクタ。
- 化学気相成長法であって、
リアクタのチャンバ内において、前記チャンバ内の反応ガスを層流にするのを促進するように前記チャンバと協働するウエハキャリヤを回転させるステップと、
前記チャンバの中央部分の近傍に配置された注入口を介してガスを前記チャンバに追加するステップと、
減損を減少させるように構成された複数のインジェクタを介して前記チャンバ内にガス反応物質を噴射するステップと、
を含む化学気相成長法。 - 前記インジェクタを介して前記チャンバ内に噴射されるガスは、III族の反応物質を含む、請求項11に記載の化学気相成長法。
- 前記インジェクタを介して前記チャンバ内に噴射されるガスは、III族の反応物質を含み、前記注入口を介して前記チャンバに追加されるガスは、V族の反応物質を含む、請求項11に記載の化学気相成長法。
- 前記インジェクタのグループを通るガスの流れを制御するステップをさらに含み、当該流れは、前記インジェクタが配置される複数のゾーンの1つに基づいて制御される、請求項11に記載の化学気相成長法。
- 前記インジェクタは、3つのゾーンを画定し、各ゾーンの前記インジェクタは、専用の流量制御装置を有する、請求項11に記載の化学気相成長法。
- 前記各ゾーンを通る流れは、別々に制御可能である、請求項11に記載の化学気相成長法。
- 前記各インジェクタを通る流れは、別々に制御可能である、請求項11に記載の化学気相成長法。
- 前記各ゾーンを通る反応物質の濃度は、別々に制御可能である、請求項11に記載の化学気相成長法。
- 前記各インジェクタを通る反応物質の濃度は、別々に制御可能である、請求項11に記載の化学気相成長法。
- 前記ウエハキャリヤは、約10rpmと約1500rpmとの間の回転数で回転する、請求項11に記載の化学気相成長法。
- 前記リアクタ内の圧力は、約760トルよりも低いかまたはそれと等しい、請求項11に記載の化学気相成長法。
- 中央のガス注入口を囲む複数のインジェクタを備える、化学気相成長リアクタ用のふた。
- 12個を超えるインジェクタを備える、請求項22に記載のふた。
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US11/064,984 | 2005-02-23 | ||
US11/064,984 US20050178336A1 (en) | 2003-07-15 | 2005-02-23 | Chemical vapor deposition reactor having multiple inlets |
PCT/US2006/005330 WO2006091448A2 (en) | 2005-02-23 | 2006-02-15 | Chemical vapor deposition reactor having multiple inlets |
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JP4958798B2 JP4958798B2 (ja) | 2012-06-20 |
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US (7) | US20050178336A1 (ja) |
JP (1) | JP4958798B2 (ja) |
KR (1) | KR20070107782A (ja) |
CN (1) | CN101495675B (ja) |
DE (1) | DE112006000464T5 (ja) |
GB (1) | GB2437693B (ja) |
HK (1) | HK1131643A1 (ja) |
TW (1) | TW200630504A (ja) |
WO (1) | WO2006091448A2 (ja) |
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2006
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2007
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2008
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2009
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- 2010-02-03 US US12/699,693 patent/US20100236483A1/en not_active Abandoned
- 2010-09-30 US US12/895,136 patent/US20110097876A1/en not_active Abandoned
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Cited By (2)
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JP2022166859A (ja) * | 2012-12-31 | 2022-11-02 | グローバルウェーハズ カンパニー リミテッド | 半導体基板に応力を加える装置 |
JP2018037456A (ja) * | 2016-08-29 | 2018-03-08 | 株式会社ニューフレアテクノロジー | 気相成長方法 |
Also Published As
Publication number | Publication date |
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KR20070107782A (ko) | 2007-11-07 |
JP4958798B2 (ja) | 2012-06-20 |
US20070209589A1 (en) | 2007-09-13 |
US20100236483A1 (en) | 2010-09-23 |
WO2006091448A3 (en) | 2009-04-09 |
GB2437693B (en) | 2011-02-09 |
US20080057197A1 (en) | 2008-03-06 |
CN101495675B (zh) | 2012-11-07 |
CN101495675A (zh) | 2009-07-29 |
US20100068381A1 (en) | 2010-03-18 |
DE112006000464T5 (de) | 2008-04-10 |
TW200630504A (en) | 2006-09-01 |
US8216375B2 (en) | 2012-07-10 |
GB0716537D0 (en) | 2007-10-03 |
US7641939B2 (en) | 2010-01-05 |
US20050178336A1 (en) | 2005-08-18 |
WO2006091448A2 (en) | 2006-08-31 |
GB2437693A (en) | 2007-10-31 |
US20110097876A1 (en) | 2011-04-28 |
US20090126631A1 (en) | 2009-05-21 |
HK1131643A1 (en) | 2010-01-29 |
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